Target profile for a physical vapor deposition chamber target
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Description
The dashed lines in
Claims
The ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.
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Patent History
Patent number: D825504
Type: Grant
Filed: Jul 10, 2017
Date of Patent: Aug 14, 2018
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Fuhong Zhang (San Jose, CA), William Johanson (Gilroy, CA), Yu Liu (Campbell, CA), Adolph Miller Allen (Oakland, CA), Brij Datta (Cupertino, CA), Keith A. Miller (Mountain View, CA)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/610,166
Type: Grant
Filed: Jul 10, 2017
Date of Patent: Aug 14, 2018
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Fuhong Zhang (San Jose, CA), William Johanson (Gilroy, CA), Yu Liu (Campbell, CA), Adolph Miller Allen (Oakland, CA), Brij Datta (Cupertino, CA), Keith A. Miller (Mountain View, CA)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/610,166
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)