Abstract: A plasma processing method allows to suppress the drop of the etching rate of the depoless-process without performing an additional seasoning process right after the dry cleaning process. The method includes a first and a second plasma processing step carried out in a single chamber and a step of dry cleaning an inside of the chamber by using a dummy substrate between the first and the second plasma processing step. Deposits are substantially accumulated in the chamber during the first plasma processing step, while substantially no deposits are accumulated in the chamber during the second plasma processing step. The dry cleaning step is performed by supplying into the chamber a deposit removing gas for removing the deposits produced in the chamber during the first plasma processing step and a dummy substrate etching gas capable of etching the dummy substrate.

Abstract: A method and apparatus for cleaning and disinfecting a milk line system and for determining the extent to which a milk line system is rinsed with a cleaning fluid, whereby in one or more places in the milk line system the electric conductivity if the cleaning fluid is determined. More in particular, according to the invention, the electric conductivity is measured in places which are difficult for the cleaning fluid to reach or at places in the milk line system which are more likely to harbor undesirable microbes. The cleaning solutions may be an alkali, detergent, hydrogen peroxide, or acid including peracetic acid, ozone, an alcohol, an aldehyde including formaldehyde, phenol and ethylene oxide, to the extent that these substances do not adversely affect materials such as the compositions of the teat cups.

Abstract: A reactor for direct utilization of external radiation heat includes a containment can having a longitudinal axis, an external driving mechanism for controllable rotating the containment can and a cavity having a cylindrical shape. The cavity is partially lined with an insulation layer and disposed in the containment can. The cavity has a gas inlet, a gas outlet and an aperture for allowing to insert the external radiation heat into the cavity. A feeder mechanism is moveable along the longitudinal axis into and out of the cavity for supplying the material subject to the thermal or thermo-chemical material process. The gas outlet is formed as a ring channel tube having an inner and an outer surface, wherein the feeder mechanism is at least partially hosted within a tube cavity defined by the inner surface. Cooling means are associated with the inner and/or outer surface.

Abstract: A method and apparatus 30 are provided for cleaning of bottle filling equipment 10 that has a plurality of elevated valves 18, each valve being in flow communication with filling liquid supply means 14. The method includes storing a manifold 32 that has a plurality of cleaning openings 42 in a configuration resembling that of the valves, in a position that allows clear visibility and access to the operation of the valves. The manifold 32 is lowered relative to the valves 18, so that it is below the valves and is positioned underneath the valves, with each cleaning opening 42 in flow communication with a valve. The valves 18 are rinsed with liquid flowing through the filling liquid supply 14, the valves and the manifold 32. Afterwards, the manifold 32 is removed from the valves 18 and returned to its stored position.

Abstract: A cleaning apparatus of organic substances attached to a vapor-deposition mask for low molecular weight organic EL devices comprises a first stage for treating a vapor-deposition mask with a derivative of pyrrolidone, a second stage for rinsing the vapor-deposition mask with water, and a third stage for rinsing the vapor-deposition mask with flowing water. The cleaning apparatus also comprises a fourth stage for treating the vapor-deposition mask with ethanol, a fifth stage for drying the vapor-deposition mask, and a carrying means that carries the vapor-deposition mask to each stage in sequence. It is desirable to adopt N-methyl-2-pyrrolidone as the derivative of pyrrolidone.

Abstract: A cleaning method of a substrate processor that reduces damage to a member in a substrate processing container. The method of cleaning the substrate processing container of the substrate processor that processes a target substrate according to the present invention includes: introducing gas into a remote plasma generating unit of the substrate processor; exciting the gas by the remote plasma generating unit, and generating reactive species; and supplying the reactive species to the processing container from the remote plasma generating unit, and pressurizing the processing container at 1333 Pa or greater.

Abstract: A method for using a film formation apparatus for a semiconductor process includes setting an idling state where a reaction chamber of the film formation apparatus accommodates no product target substrate therein, and then, performing a purging process of removing a contaminant present in an inner surface of the reaction chamber by causing radicals to act on the inner surface of the reaction chamber. The radicals are generated by activating a purging process gas containing oxygen and hydrogen as elements.

Abstract: Interior parts of gasoline engines are readily cleaned by a method comprising the steps of connecting an a cleaning liquid supply pipe having a gas supply port thereon airtightly to a port of an intake pipe of the engine below a throttle valve-attached position of the engine; operating the engine to draw cleaning liquid in the form of liquid drop and simultaneously drawing continuously a gas having an oxygen concentration of less than 20 vol. % into the intake pipe; and exhausting the cleaning liquid having been brought into contact with the internal parts of the engine with an exhaust gas.

Abstract: A method and apparatus for removing solid or semi-solid material from within a container, for example removing an energetic material from the casing of an explosive shell. The method is applicable to the demilitarization of aged or obsolete explosive ordnance, for example mortar rounds, and uses ultrasonic energy rather than heat like previous methods. An item to be demilitarized and cleaned is immersed in a fluid contained within a vessel. An ultrasonic probe or wand is inserted into the submerged item, in proximity with the material to be removed. The fluid is the medium for transmitting sonic energy from the probe to the material to fracture and mobilize the material. Mobilized particulates are expelled from the casing, and settle to the bottom of the fluid vessel for collection. At the conclusion of the process, the emptied container shell, now relatively clean, is retrieved from the vessel and salvaged as desired.

Abstract: Described are methods, systems, and chemistries for cleaning various components of semiconductor process equipment. A method in accordance with one embodiment cleans articles with differently contaminated interior and exterior surfaces by using those articles to separate a cleaning vessel into separate chambers, one chamber for the interior surface and one for the exterior surface. Different chemistries are then applied to the differently contaminated surfaces. This embodiment reduces the required volume of etchant, and consequently saves the cost, treatment, and disposal of toxic chemicals. One embodiment further reduces the requisite etchant volume using one or more volume-displacement elements that displace some of the etchant volume.

Abstract: An apparatus is provided for cleaning a surface within a vessel. A vessel wall separates a vessel exterior from a vessel interior and has a wall aperture. The apparatus comprises an elongate conduit having an upstream first end and a downstream second end. The conduit is positioned to direct a shock wave from the second end into the vessel interior. A source of fuel and oxidizer is coupled to the conduit to deliver the fuel and oxidizer to the conduit. An initiator is positioned to initiate a combustion of the fuel and oxidizer. The conduit comprises a first portion and a second portion downstream of the first portion. The second portion is extensible and contractible relative to the first portion to selectively position the second end at a desired location within the vessel. The conduit downstream end comprises a centerbody positioned to direct the shock wave essentially axisymmetrically.

Abstract: A wash apparatus includes a harness assembly comprising a coupling device a coupling device for connecting one or more fluid supply lines to one or more fluid delivery lines; one or more fluid delivery lines removably attached at one end to the coupling device's first portion and positioned for delivering washing fluid directly into the gas turbine engine core as the engine is cranked; one or more fluid supply lines removably attached to the coupling device's second portion for supplying washing fluid to the harness assembly and remaining in a static position relative to the rotating fluid delivery lines; one or more harness rings attached to the one or more fluid delivery lines for spacing, stabilizing, and positioning the fluid delivery lines relative to the fan blades; and a connector for removably attaching the harness assembly directly onto the fan hub.

Abstract: A first fluid connector is provided for selective interconnection to and fluid transfer with a second fluid connector. The first connector comprises a fluid passageway, an internal member and an outer collar supportably disposed about the internal member for selective advancement and retraction relative thereto. At least a portion of the fluid passageway may extend through the internal member. The outer collar may be selectively retracted to facilitate cleaning of the internal member. In some embodiments, the outer collar and internal member may be disposed so that a distal portion of the internal member is substantially flush with or a distal portion of internal member projects beyond a distal end of the outer collar when the outer collar is in a retracted position relative thereto. To facilitate cleaning, a distal end or distal portion of the internal member may be substantially closed when the first and second connectors are disconnected.

Abstract: The present invention relates to vacuum processing systems in which process gases are introduced in a process chamber and are exhausted through a vacuum processing system exhaust path. Deposits made by the exhausted gases in one or more dry vacuum pumps are removed by introducing hydrofluoric acid upstream of the dry pump while the processing chamber is idle. The hydrofluoric acid is introduced upstream of the dry pump through a nozzle in the foreline or at the inlet to the dry pump.

Abstract: A method for cleaning a reaction chamber having a pedestal and a carrier ring is provided. First, the pedestal and the carrier ring are cleaned with a high pressure gas. Next, the carrier ring is moved to leave the pedestal, and a low pressure gas is provided to clean the pedestal, the carrier ring, and an area lay between the pedestal and the carrier ring. Thereafter, a full flush is performed to clean the pedestal and the carrier ring.

Abstract: A method and system augments shaft output of gas turbine engines that can be used in multiple modes of operation. The system comprises a washing unit capable of injecting atomized water into the gas turbine engine, thereby obtaining a release of fouling material from the at least one compressor blade; and at least one water injection unit capable of injecting atomized water into the air stream of the gas turbine engine's inlet duct or at the gas turbine, under the control of a computational fluid dynamic model, in order to increase a mass flow of said air flow, wherein the power output from said gas turbine engine can be augmented.

Abstract: The invention provides a plasma processing method and plasma processing device for manufacturing semiconductor devices in which the number of foreign particles being adhered to the wafer is reduced greatly and the yield is improved. In a plasma processing device having a plasma source capable of controlling plasma distribution, the shape of a sheath/bulk boundary above the wafer is controlled to a convexed shape when the plasma is turned on and off. By adding a step of applying a low source power and wafer bias power when the plasma is turned on and off in order to realize an out-high plasma distribution, it is possible to form a sheath that is thicker near the center of the wafer and thinner at the outer circumference portion thereof.

Abstract: An object of the present invention is to provide a method of producing a solution of a thermoplastic polymer such as a polyester resin and/or a solution of a depolymerization product of a thermoplastic polymer by efficiently dissolving the thermoplastic polymer and/or the depolymerization product of the thermoplastic polymer. The method of producing a solution of a thermoplastic polymer and/or a solution of a depolymerization product of a thermoplastic polymer, which includes supplying a thermoplastic polymer, in a melted state, from a raw material supply port to an interior of a reactor, discharging the polymer through holes of a perforated plate, and then bringing the polymer into contact with a solvent vapor while flowing down along the surface of a support disposed inside the reactor.

Abstract: A method for cleaning a stationary gas turbine unit during operation, wherein the unit comprises a turbine, a compressor driven by the turbine, the compressor having an inlet, an air inlet duct arranged upstream of the air inlet of the compressor, the inlet duct having a part of the duct adjoining the inlet of the compressor and having decreasing cross section in the flow direction in order to give the air flow a final velocity at the inlet to the compressor. A spray of cleaning fluid is introduced in the inlet duct. The cleaning fluid is forced through a spray nozzle with a pressure drop exceeding 120 bar to form a spray the drops of which have a mean size that is less than 150 ?m. The spray is directed substantially parallel to and in the same direction as the direction of the air flow.

Abstract: A system & Method for Preventing Scaling in a Flue Gas Desulphurization System is provided. The system includes an injector configured to direct a barrier fluid toward a surface that is otherwise susceptible to scaling when it comes in contact with super-saturated alkaline solutions such as slurry used to capture CO2 from a flue gas stream.

Abstract: An in situ cleaning system is disclosed for use with semiconductor processing equipment. In accordance with an important aspect of the invention, the cleaning system provides for dynamic cleaning of the semiconductor processing system by varying the pressure of the cleaning gas over time during a cleaning cycle. In particular, the cleaning gas is applied to the semiconductor processing system in repeated pressure cycles. Each pressure cycle begins with the pressure of the cleaning gas at PMIN. The pressure of the cleaning gas is increased to a maximum pressure PMAX during a fill portion of the pressure cycle and maintained for a dwell time selected to allow the available reactants to generate the desired end products. The pressure in the chamber to be cleaned is then reduced during a vent portion of the pressure cycle to permit venting of the reaction products.

Abstract: There is proposed a washing solution for washing an inkjet printer head which performs printing by feeding an ink comprising at least two kinds of polymerizable compounds each differing in viscosity, a photopolymerization initiator, and pigment. This washing solution is characterized in that it contains not less than 50 parts by weight of a polymerizable compound selected from the polymerizable compounds included in the ink and having a lowest viscosity among the polymerizable compounds, or not less than 50 parts by weight of a polymerizable compound having a viscosity of 30 mPa·sec or less at ordinary temperature.

Abstract: A method for cleaning an oil strainer in an oil pan of an internal combustion engine from which substantially all lubricant has been drained, the method comprising connecting a first conduit to said oil pan; introducing a cleaning fluid into said oil pan; connecting a second conduit to an opening on said engine; creating a circuit by a pressure pump wherein said cleaning fluid moves from said oil pan, through said opening, through said oil strainer and back into said oil pan; and evacuating the cleaning fluid from the engine.

Abstract: A method of removing a sticky substance or a waste liquid containing a sticky substance which comprises, mixing a solid substance having inflammability and liquid-absorptivity into the sticky substance or the waste liquid containing the sticky substance wherein these are mixed to allow a liquid component of the sticky substance or the waste liquid containing the sticky substance to be absorbed into the solid substance and to allow the sticky substance to be entangled with the solid substance, and then removing the sticky substance together with the solid substance.

Abstract: A washout container to which are mounted inclined ramps that allow a transit mixer, concrete pumping truck or other concrete handling vehicle to drive up over a portion of the container for dumping excess concrete and washing out waste concrete. The container cross-section may be rectangular to semi-circular, and is preferably fabricated with a steel structure. A watertight latching door assembly is coupled to the container to prevent leakage of collected liquid concrete waste material while allowing solidified concrete materials to be unloaded at a disposal site. The interior of the container is preferably lined with a material to which concrete will not adhere. The liner may be applied as a coating to the interior of the container or as a solid material retained within the container. In this way, solidified waste concrete can be easily removed from the container at the disposal site and preferably crushed for recycling.

Abstract: A subject for the invention is to provide a method of transferring a polymerizable liquid by which the polymerizable liquid can be stably transferred without arousing any mechanical-seal trouble over long. The method of transferring a polymerizable liquid utilizes a pump which has a mechanical seal having seal faces and has a flushing liquid line for supplying a flushing liquid to a flushing liquid introduction opening of the mechanical seal, wherein the flushing liquid line is equipped with a strainer, a device for adding a polymerization inhibitor, or a flushing liquid cooler.

Abstract: The present invention relates to an apparatus and method for removing a coating material from a predetermined first portion of a container, while retaining the coating on a second portion of the container, or alternatively applying a coating to a predetermined portion of a container or other apparatus.

Abstract: A system (10) for delivery of reagent from a solid source thereof, comprising a structure (16, 22, 24) arranged to retain a solid source material (30) in confinement by at least a portion of the structure, for heating and generation of vapor from the solid source material by volatilization thereof, a heat source (82) arranged to heat the solid source material for such volatilization, and a vapor dispensing assembly (52, 54) arranged to discharge the vapor from the system. A high conductance valve (1510) is also described, suitable for use as a dispensing control valve for a reagent storage and dispensing vessel, e.g., a vessel containing a semiconductor manufacturing reagent that is dispensed at low pressure.

Abstract: A method for cleaning a metal plating tank is provided herein. In accordance with the method, the tank is exposed to a first acid (103), after which the tank is exposed to a second acid in the presence of a first oxidizing agent (107).

Abstract: The present invention relates to a method and apparatus for the prevention of fouling of process streams by the application of electric charge on process components. The electric charge may be attractive or repulsive to the foulants, they may be constant or variable and may be applied to any section of the process stream where convenient and wherein their preventive effects are optimized.

Abstract: An improved method for flushing the residue from internal surfaces of cavities in, for example, turbine blades. In accordance with one aspect of the invention, provision is made for simultaneously flushing the internal cavities of a plurality of turbine blades, with each blade having a plurality of cavities therein.

Abstract: Methods of removing metal contaminants from a component for a plasma processing apparatus are provided. The method includes cleaning a surface of the component with a cleaning liquid that includes at least one acid selected from oxalic acid, formic acid, acetic acid, citric acid, and mixtures thereof.

Abstract: The invention relates to a method of in place cleaning of an automated food product dispenser comprising an interface connection configured to establish a supply of a milk-based fluid from a reservoir (for example, a container or a bag), a mixing device configured to receive the milk-based fluid and prepare a milk based product, a nozzle in fluid association with the mixing device for dispensing the milk based product, a product flowpath configured for directing the milk based product to flow from the interface connection through the mixing device to the nozzle, and a clean-in-place flowpath assembly located in the dispenser and comprising a supply of cleaning or sanitizing fluid and a flowpath which is configured to deliver the cleaning or sanitizing fluid to or through the product flowpath. The invention also relates to a machine readable program for controlling the automated food product dispenser of the invention and for cleaning the same in place.

Abstract: A method for cleaning interior surfaces of a header region of a hemodialyzer includes steps of: introducing an insertion device having an end portion and a shaft through a hemodialyzer plug port so that the end portion of the insertion device is within the header region; rotating the shaft at a speed sufficient to generate mechanical stresses for the removal of contaminants from interior surfaces of the header region; removing the insertion device from the header region; and rinsing and flushing away the removed contaminants from the header region. An apparatus and an insertion device for cleaning a header region of a hemodialyzer are disclosed.

Abstract: A tool for cleaning a culvert comprises a rod having a center longitudinal axis, a housing having a center longitudinal axis and coupled coaxially to the rod, the housing having an interior chamber, the housing has an outside dimension that can be accommodated within the culvert, and at least one paddle operable to rotate about the center longitudinal axis of the rod inside the interior chamber of the housing, the at least one paddle operable to dislodge and loosen debris inside the culvert.

Abstract: The present invention relates to a process for production, shipment, and treatment of a NH4F(HF)x feedstock for local production of fluorine and NF3 for semiconductor chamber cleaning without the need for storage of large quantities of dangerous feeds and intermediate products.

Abstract: A delivery head is provided that includes a delivery arm and a spray diverter constructed to divert a multiple phase treatment composition flowing through the delivery arm and diverted by the spray diverter to provide a target spray pattern. The delivery head includes an open area sufficient to provide the target spray pattern and to provide a back pressure of less than about 10 psig when a multiple phase treatment composition is flowing through the delivery head at a liquid flow rate of about 2 gal/min. to about 20 gal/min., and the volumetric ratio of the gas to liquid is between about 5:1 and about 75,000:1 at atmospheric pressure. A vessel including a delivery head and a method for treating a vessel interior surface are provided.

Abstract: A system for cleaning gas turbine engines is described. More specifically, methods and apparatuses for cleaning stationary gas turbines and on-wing turbofan engines found on aircraft are disclosed that includes a trailer-mounted, automated low-pressure water delivery system, additive and detergent injection system, nozzle and manifold technology, and active waste water effluent collector system. The system will deliver the liquid cleaning medium at a specific pressure, temperature, and flow rate to optimize the atomization that occurs at the nozzles.

Abstract: An inventive recovery cup cleaning method is a method for cleaning a recovery cup having an interior wall partitioning a recovery space into which a chemical agent used for treating a substrate is introduced, the recovery cup being configured such that the chemical agent introduced into the recovery space is further introduced into a predetermined chemical agent recovery passage so as to be recovered.

Abstract: In a cleaning step of a substrate-processing device, vacuum drawing is made for the space between an inner chamber and an outer chamber that receives the inner chamber. Temperature of the inner chamber is set higher than the temperature of the inner chamber during substrate processing and set lower than the temperature of a substrate support member. After that, a cleaning gas containing hexafluoroacetylaceton (Hhfac) is supplied in the inner chamber, and substances to be cleaned off adhering inside the inner chamber are removed.

Abstract: A heat exchanger coil pipe is internally cleaned off dirt deposits by forcing ice and water to pass the pipe. A system for carrying out the cleaning comprises a suction pump, a wastewater collecting tank, a suction hose for connection between the waste and wash water collecting tank and a heat transfer medium inlet or outlet of the pipe and an ice-feeding hose provided at one end with a hopper and connectable at the other end to the heat transfer medium outlet or inlet pipe. In the state of the suction hose being connected to the heat transfer medium inlet or outlet and the suction hose being connected to the heat transfer medium outlet or inlet, ice and water are supplied from the hopper and drawn into the ice by suction from the suction pump to flow in the coil pipe and collected into the wastewater collecting tank.

Abstract: The present invention discloses a method for the removal of a number of molecular contaminants from surfaces within a device. A purge gas containing oxygen and/or water is introduced into the interior of the device, contacting at least a portion of the interior surfaces. A contaminated purge gas is produced by transferring a portion of the contamination from the interior surfaces into the purge gas. The contaminated purge gas is removed from the device and the process is continued until the contaminant concentration in the contaminated purge gas is below a predetermined level.

Abstract: A method and apparatus for substantially cleaning fill from a borehole is described variously including running a coiled tubing assembly into the wellbore, creating a fluid vortex by circulating cleaning fluid through the coiled tubing, and pulling the coiled tubing and coiled tubing assembly out of the hole at a speed sufficient to substantially clean the particulate solids from the wellbore. An apparatus for substantially cleaning fill from a hole, including vertical, horizontal, or deviated wells also is provided.

Abstract: The invention relates to a method of cleaning tubes, in which the tube is at least partially filled with a cleaning medium, wherein a cleaning medium is atomized, in which case the droplets of cleaning medium are accelerated, at least in part, essentially in the direction of a center axis of the tube.

Abstract: Unwanted hillocks arising in copper layers due to formation of overlying barrier layers may be significantly reduced by optimizing various process parameters, alone or in combination. A first set of process parameters may be controlled to pre-condition the processing chamber in which the barrier layer is deposited. A second set of process parameters may be controlled to minimize energy to which a copper layer is exposed during removal of CuO prior to barrier deposition. A third set of process parameters may be controlled to minimize the thermal budget after removal of the copper oxide.

Abstract: A cleaning process using aqueous liquid compositions for cleaning membrane filters used primarily in tubular backpulse liquid filtration systems in Kraft pulp mills for white liquor, green liquor and lime mud filtration and in chlor-alkali processing. The process removes silicate and aluminosilicate materials that reduce filtration efficiency with minimal damage to the membrane filter. The method consists of a first stage first liquid composition flush to remove soluble calcium compounds followed by a second stage second liquid composition flush that dissolves the silicate and aluminosilicate compounds and prevents reprecipitation of dissolved aluminum and silicon compounds in the filter membrane. The filters are then flushed by water.

Abstract: A washout container to which are mounted inclined ramps that allow a transit mixer, concrete pumping truck or other concrete handling vehicle to drive up over a portion of the container for dumping excess concrete and washing out waste concrete. The container cross-section may be rectangular to semi-circular, and is preferably fabricated with a steel structure. A watertight latching door assembly is coupled to the container to prevent leakage of collected liquid concrete waste material while allowing solidified concrete materials to be unloaded at a disposal site. The interior of the container is preferably lined with a material to which concrete will not adhere. The liner may be applied as a coating to the interior of the container or as a solid material retained within the container. In this way, solidified waste concrete can be easily removed from the container at the disposal site and preferably crushed for recycling.

Abstract: The pulsed partial pressure hydrogen cleaning of cobalt-based alloys in turbine components is achieved by disposing the component within a vacuum furnace and heating the component. Upon heating to about 1400° F., a partial pressure hydrogen gas and a vacuum are repetitively cycled within the furnace by supplying in each cycle a fresh supply of hydrogen gas, followed by removal of reaction products between the hydrogen gas and surface contaminants and substantially all residual hydrogen gas from within the furnace. The repetitious cycling renders the surfaces clean, enabling refurbishment thereof by activated diffusion healing repair.

Abstract: A process for the removal of a substance from a substrate for etching and/or cleaning applications is disclosed herein. In one embodiment, there is provided a process for removing a substance having a dielectric constant greater than silicon dioxide from a substrate by reacting the substance with a reactive agent that comprises at least one member from the group consisting a halogen-containing compound, a boron-containing compound, a hydrogen-containing compound, nitrogen-containing compound, a chelating compound, a carbon-containing compound, a chlorosilane, a hydrochlorosilane, or an organochlorosilane to form a volatile product and removing the volatile product from the substrate to thereby remove the substance from the substrate.

Abstract: A method of cleaning a surface which comprises the step of applying an aqueous cleaning solution to the surface wherein the active cleaning ingredient of the aqueous solution consists essentially of a lignosulfonate. It has been found that lignosulfonate can function as a cleaning agent for a variety of cleaning materials.