Insulated Gate Bipolar Mode Transistor (e.g., Igbt; Igt; Comfet) (epo) Patents (Class 257/E29.197)
  • Patent number: 11569373
    Abstract: A semiconductor device includes first and second trenches, and a first layer provided therebetween, in a principal surface of a semiconductor substrate, a second layer in contact with and sandwiching the first trench with the first layer, a third layer provided under the second layer and in contact with the second layer and the first trench, a fourth layer provided under and in contact with the third layer but separated from the first trench, and a fifth layer provided in the principal surface and sandwiching the second trench with the first layer. The second and fourth layers are semiconductors of a first conductivity type, and the first, third, and fifth layers are semiconductors of a second conductivity type. A gate trench electrode is provided inside the first trench via the insulating film, and an emitter trench electrode is provided inside the second trench via the insulating film.
    Type: Grant
    Filed: June 3, 2021
    Date of Patent: January 31, 2023
    Assignee: MITSUMI ELECTRIC CO., LTD.
    Inventors: Masatoshi Yatago, Naohiro Shiraishi, Katsunori Kondo, Noriyoshi Watanabe
  • Patent number: 11404542
    Abstract: A power transistor layout structure is described that includes a planar cell with a planar gate electrode forming an horizontal MOS channel, and a plurality of trench recesses with gate electrodes, which are arranged at various angles to the longitudinal direction of the planar cells. This cell concept can adopt both planar MOS channels, and Trench MOS channels in a single MOS cell structure. As an alternative, the planar cell gate electrode may be grounded. The device is easy to manufacture based on a self-aligned process with minimum number of masks, with the potential of applying additional layers.
    Type: Grant
    Filed: February 12, 2021
    Date of Patent: August 2, 2022
    Assignee: mqSemi AG
    Inventors: Munaf Rahimo, Iulian Nistor
  • Patent number: 11031778
    Abstract: In an embodiment, an apparatus includes: a signal pad; a first diode having a first terminal coupled to the signal pad and a second terminal, the first diode having a first polarity; a second diode having a second terminal coupled to the signal pad and a first terminal, the second diode having a second polarity; a first insulated gate bipolar transistor (IGBT) having a first polarity, the first IGBT coupled between the second terminal of the first diode and a reference voltage node; and a second IGBT having the first polarity, the second IGBT coupled between the first terminal of the second diode and the reference voltage node.
    Type: Grant
    Filed: November 26, 2018
    Date of Patent: June 8, 2021
    Assignee: Silicon Laboratories Inc.
    Inventor: Jeremy C. Smith
  • Patent number: 9018674
    Abstract: A semiconductor includes a drift zone of a first conductivity type arranged between a first side and a second side of a semiconductor body. The semiconductor device further includes a first region of the first conductivity type and a second region of a second conductivity type subsequently arranged along a first direction parallel to the second side. The semiconductor device further includes an electrode at the second side adjoining the first and second regions. The semiconductor device further includes a third region of the second conductivity type arranged between the drift zone and the first region. The third region is spaced apart from the second region and from the second side.
    Type: Grant
    Filed: April 6, 2012
    Date of Patent: April 28, 2015
    Assignee: Infineon Technologies AG
    Inventors: Dorothea Werber, Anton Mauder, Frank Pfirsch, Hans-Joachim Schulze, Franz Hirler, Alexander Philippou
  • Patent number: 9018049
    Abstract: A method for manufacturing an IGBT includes: forming oxide layers on the surfaces of the front and the back of an N-type substrate; forming a buffer layer in the surface of the back of the N-type substrate; forming protection layers on the surfaces of the oxide layers; removing the protection layer and the oxide layer overlying the front of the N-type substrate while reserving the oxide layer and the protection layer on the back of the N-type substrate for protection of the back of the N-type substrate; forming a front IGBT structure and applying a protection film on the surface of the front IGBT structure for protection of the front IGBT structure; removing the protection layer and the oxide layer overlying the back of the N-type substrate; forming a back IGBT structure and a back metal layer; and removing the protection film overlying the surface of the front IGBT structure.
    Type: Grant
    Filed: November 29, 2013
    Date of Patent: April 28, 2015
    Assignees: Peking University Founder Group Co., Ltd., Founder Microelectronics International Co., Ltd.
    Inventor: Guangran Pan
  • Patent number: 9000479
    Abstract: According to one embodiment, a semiconductor device includes a base layer, a second conductivity type semiconductor layer, a first insulating film, and a first electrode. The first insulating film is provided on an inner wall of a plurality of first trenches extending from a surface of the second conductivity type semiconductor layer toward the base layer side, but not reaching the base layer. The first electrode is provided in the first trench via the first insulating film, and provided in contact with a surface of the second conductivity type semiconductor layer. The second conductivity type semiconductor layer includes a first second conductivity type region, and a second second conductivity type region. The first second conductivity type region is provided between the first trenches. The second second conductivity type region is provided between the first second conductivity type region and the base layer, and between a bottom part of the first trench and the base layer.
    Type: Grant
    Filed: March 12, 2014
    Date of Patent: April 7, 2015
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Mitsuhiko Kitagawa
  • Patent number: 9000519
    Abstract: An improved semiconductor is provided whereby n-grade and the p-top layers are defined by a series of discretely placed n-type and p-type diffusion segments. Also provided are methods for fabricating such a semiconductor.
    Type: Grant
    Filed: December 21, 2012
    Date of Patent: April 7, 2015
    Assignee: Macronix International Co., Ltd.
    Inventors: Ching-Lin Chan, Chen-Yuan Lin, Cheng-Chi Lin, Shih-Chin Lien
  • Patent number: 9000478
    Abstract: A semiconductor apparatus includes a substrate having a device region and a peripheral region located around the device region. A first semiconductor region is formed within the device region, is of a first conductivity type, and is exposed at an upper surface of the substrate. Second-fourth semiconductor regions are formed within the peripheral region. The second semiconductor region is of the first conductivity type, has a lower concentration of the first conductivity type of impurities, is exposed at the upper surface, and is consecutive with the first semiconductor region directly or indirectly. The third semiconductor region is of a second conductivity type, is in contact with the second semiconductor region from an underside, and is an epitaxial layer. The fourth semiconductor region is of the second conductivity type, has a lower concentration of the second conductivity type of impurities, and is in contact with the third semiconductor region from an underside.
    Type: Grant
    Filed: May 24, 2012
    Date of Patent: April 7, 2015
    Assignee: Toyota Jidosha Kabushiki Kaisha
    Inventor: Masaru Senoo
  • Patent number: 8987777
    Abstract: According to an exemplary embodiment, a stacked half-bridge power module includes a high side device having a high side power terminal coupled to a high side substrate and a low side device having a low side power terminal coupled to a low side substrate. The high side and low side devices are stacked on opposite sides of a common conductive interface. The common conductive interface electrically, mechanically, and thermally couples a high side output terminal of the high side device to a low side output terminal of the low side device. The high side device and the low side device can each include an insulated-gate bipolar transistor (IGBT) in parallel with a diode.
    Type: Grant
    Filed: July 21, 2011
    Date of Patent: March 24, 2015
    Assignee: International Rectifier Corporation
    Inventor: Henning M. Hauenstein
  • Patent number: 8946861
    Abstract: Disclosed are bipolar devices, which incorporate an entirely monocrystalline link-up region between the intrinsic and extrinsic base layers, and methods of forming the devices. In the methods, a selective epitaxial deposition process grows monocrystalline semiconductor material for the extrinsic base layer on an exposed edge portion of a monocrystalline section of an intrinsic base layer. This deposition process is continued to intentionally overgrow the monocrystalline semiconductor material until it grows laterally and essentially covers a dielectric landing pad on a center portion of that same monocrystalline section of the intrinsic base layer. Subsequently, an opening is formed through the extrinsic base layer to the dielectric landing pad and the dielectric landing pad is selectively removed, thereby exposing monocrystalline surfaces only of the intrinsic and extrinsic base layers.
    Type: Grant
    Filed: June 11, 2013
    Date of Patent: February 3, 2015
    Assignee: International Business Machines Corporation
    Inventors: Renata A. Camillo-Castillo, Vibhor Jain, Vikas K. Kaushal, Marwan H. Khater
  • Patent number: 8896021
    Abstract: An integrated circuit device includes a semiconductor substrate and a first transistor and a second transistor constructed in the semiconductor substrate. The first transistor has a first operating voltage higher than a second operating voltage of a second transistor. The first transistor includes a first drain structure, a first source structure, an isolation structure and a first gate structure. The first source structure includes a high voltage first-polarity well region, a first-polarity body region, a heavily doped first-polarity region, a second-polarity grade region and a heavily doped second-polarity region. The heavily doped second-polarity region is surrounded by the second-polarity grade region. The second-polarity grade region is surrounded by the first-polarity body region. The second transistor includes a second drain structure, a second source structure, a second gate structure and a first-polarity drift region.
    Type: Grant
    Filed: September 14, 2011
    Date of Patent: November 25, 2014
    Assignee: United Microelectronics Corporation
    Inventors: Chung-I Huang, Pao-An Chang, Ming-Tsung Lee
  • Patent number: 8890169
    Abstract: On a front surface of a region where a junction termination extension structure of a semiconductor device using silicon carbide is formed, a structure having an n-type semiconductor region with a concentration relatively higher than a concentration of an n?-type drift layer is formed. An edge of the junction termination extension structure located on a side away from an active region is surrounded from its bottom surface to its front surface by an n-type semiconductor region. By this means, it is possible to provide a device with a low resistance while ensuring a withstand voltage, or by decreasing the resistance of the device, it is possible to provide a device with low power loss.
    Type: Grant
    Filed: November 8, 2010
    Date of Patent: November 18, 2014
    Assignee: Hitachi, Ltd.
    Inventors: Norifumi Kameshiro, Haruka Shimizu
  • Patent number: 8878594
    Abstract: An embodiment of an IGBT device is integrated in a chip of semiconductor material including a substrate of a first type of conductivity, an active layer of a second type of conductivity formed on an inner surface of the substrate, a body region of the first type of conductivity extending within the active layer from a front surface thereof opposite the inner surface, a source region of the second type of conductivity extending within the body region from the front surface, a channel region being defined within the body region between the source region and the active layer, a gate element insulated from the front surface extending over the channel region, a collector terminal contacting the substrate on a rear surface thereof opposite the inner surface, an emitter terminal contacting the source region and the body region on the front surface, and a gate terminal contacting the gate element.
    Type: Grant
    Filed: November 18, 2011
    Date of Patent: November 4, 2014
    Assignee: STMicroelectronics S.r.l.
    Inventor: Davide Giuseppe Patti
  • Patent number: 8866262
    Abstract: A silicon carbide substrate includes: an n type drift layer having a first surface and a second surface opposite to each other; a p type body region provided in the first surface of the n type drift layer; and an n type emitter region provided on the p type body region and separated from the n type drift layer by the p type body region. A gate insulating film is provided on the p type body region so as to connect the n type drift layer and the n type emitter region to each other. A p type Si collector layer is directly provided on the silicon carbide substrate to face the second surface of the n type drift layer.
    Type: Grant
    Filed: November 16, 2012
    Date of Patent: October 21, 2014
    Assignee: Sumitomo Electric Industries, Ltd.
    Inventors: Keiji Wada, Toru Hiyoshi
  • Patent number: 8860132
    Abstract: A semiconductor device includes a source region, a drain region, a body region, and a drift region. The drift region is arranged between the body and the drain and the body is arranged between the source and the drift region in a semiconductor body. A gate electrode is adjacent the body and dielectrically insulated from the body by a gate dielectric. A drift control region is adjacent the drift region and dielectrically insulated from the drift region by a drift control region dielectric. A drain electrode adjoins the drain. The device also includes an injection control region of the same doping type as the drain, but more lowly doped. The injection control region adjoins the drift control region dielectric, extends in a first direction along the drift control region, and adjoins the drain in the first direction and an injection region in a second direction different from the first direction.
    Type: Grant
    Filed: November 30, 2011
    Date of Patent: October 14, 2014
    Assignee: Infineon Technologies Austria AG
    Inventor: Franz Hirler
  • Patent number: 8853737
    Abstract: A semiconductor device includes a semiconductor substrate including a semiconductor layer, a power device formed in the semiconductor substrate, a plurality of concentric guard rings formed in the semiconductor substrate and surrounding the power device, and voltage applying means for applying successively higher voltages respectively to the plurality of concentric guard rings, with the outermost concentric guard ring having the highest voltage applied thereto.
    Type: Grant
    Filed: June 11, 2012
    Date of Patent: October 7, 2014
    Assignee: Mitsubishi Electric Company
    Inventor: Shigeru Kusunoki
  • Patent number: 8854033
    Abstract: A semiconductor device having a lateral semiconductor element includes a semiconductor substrate, a first electrode on the substrate, a second electrode on the substrate, and an isolation structure located in the substrate to divide the substrate into a first island and a second island electrically insulated from the first island. The lateral semiconductor element includes a main cell located in the first island and a sense cell located in the second island. The main cell causes a first current to flow between the first electrode and the second electrode so that the first current flows in a lateral direction along the surface of the substrate. The first current is detected by detecting a second current flowing though the sense cell.
    Type: Grant
    Filed: June 1, 2011
    Date of Patent: October 7, 2014
    Assignee: DENSO CORPORATION
    Inventors: Satoshi Shiraki, Norihito Tokura, Shigeki Takahashi, Masahiro Yamamoto, Akira Yamada, Hiroyasu Kudo, Youichi Ashida, Akio Nakagawa
  • Patent number: 8847328
    Abstract: A power semiconductor module has four power terminals. An IGBT has a collector connected to the first power terminal and an emitter coupled to the third power terminal. An anti-parallel diode is coupled in parallel with the IGBT. A DC-link is connected between the second and fourth power terminals. The DC-link may involve two diodes and two IGBTs, where the IGBTs are connected in a common collector configuration. The first and second power terminals are disposed in a first line along one side of the module, and the third and fourth power terminals are disposed in a second line along the opposite side of the module. Two identical instances of the module can be interconnected together to form a three-level NPC phase leg having low stray inductances, where the phase leg has two parallel DC-links.
    Type: Grant
    Filed: March 8, 2013
    Date of Patent: September 30, 2014
    Assignee: IXYS Corporation
    Inventor: Andreas Laschek-Enders
  • Patent number: 8809911
    Abstract: Plural gate trenches are formed in the surface of an n-type drift region. A gate electrode is formed across a gate oxide film on the inner walls of the gate trenches. P-type base regions are selectively formed so as to neighbor each other in the gate trench longitudinal direction between neighboring gate trenches. An n-type emitter region is formed in contact with the gate trench in a surface layer of the p-type base regions. Also, a p-type contact region with a concentration higher than that of the p-type base region is formed in the surface layer of the p-type base region so as to be in contact with the gate trench side of the n-type emitter region. An edge portion on the gate trench side of the n-type emitter region terminates inside the p-type contact region.
    Type: Grant
    Filed: October 19, 2011
    Date of Patent: August 19, 2014
    Assignee: Fuji Electric Co., Ltd.
    Inventor: Koh Yoshikawa
  • Patent number: 8803160
    Abstract: A semiconductor device including a drift zone of a first conductivity type serving as a substrate layer having a front side and a back side. A first contact electrode is arranged at the front side of the drift zone. A control region is arranged at the front side and controls an injection of carriers of at least the first conductivity type into the drift zone. A second contact electrode is arranged at the backside of the drift zone. The drift zone is arranged to carry a carrier flow between the first and the second contact electrode. The drift zone includes a silicon carbide wafer with a net carrier concentration less than 1015 cm?3 and a carrier lifetime of at least 50 ns.
    Type: Grant
    Filed: December 29, 2011
    Date of Patent: August 12, 2014
    Assignees: Siced Electronics Development GmbH & Co. KG, Norstel AB
    Inventors: Alexandre Ellison, Björn Magnusson, Asko Vehanen, Dietrich Stephani, Heinz Mitlehner, Peter Friedrichs
  • Patent number: 8791690
    Abstract: A semiconductor device having a lateral semiconductor element includes a semiconductor substrate, a first electrode on the substrate, a second electrode on the substrate, and an isolation structure located in the substrate to divide the substrate into a first island and a second island electrically insulated from the first island. The lateral semiconductor element includes a main cell located in the first island and a sense cell located in the second island. The main cell causes a first current to flow between the first electrode and the second electrode so that the first current flows in a lateral direction along the surface of the substrate. The first current is detected by detecting a second current flowing though the sense cell.
    Type: Grant
    Filed: June 1, 2011
    Date of Patent: July 29, 2014
    Assignee: DENSO CORPORATION
    Inventors: Satoshi Shiraki, Norihito Tokura, Shigeki Takahashi, Masahiro Yamamoto, Akira Yamada, Hiroyasu Kudo, Youichi Ashida, Akio Nakagawa
  • Patent number: 8766331
    Abstract: In a semiconductor module according to certain aspects the invention, a U-terminal and an M-terminal overlap each other in a manner to reduce inductance and to further to reduce the size of snubber capacitor. In certain aspects of the invention, a P-terminal, M-terminal, N-terminal, and U-terminal are arranged such that the U-terminal, through which currents flow in and out, is arranged farthest away from control electrodes to reduce the noises superposed to control electrodes, and the P-terminal, M-terminal, N-terminal, and U-terminal are aligned to facilitate attaching external connection bars thereto. A power semiconductor module according to aspects of the invention can facilitate reducing the wiring inductance inside and outside the module, reducing the electromagnetic noises introduced into the control terminals, and attaching the external wirings to the terminals thereof simply and easily.
    Type: Grant
    Filed: November 14, 2011
    Date of Patent: July 1, 2014
    Assignee: Fuji Electric Co., Ltd.
    Inventor: Souichi Okita
  • Patent number: 8759911
    Abstract: Plural island-form emitter cells (22) having a p-base region (23) and an n+ emitter region (24) are provided, distanced from each other, on a main surface of an n? layer (21). A trench (25) deeper than the p-base region (23) is formed on either side of the emitter cell (22). A first gate electrode (26) is embedded in the trench (25) across a first gate insulating film (41). A second gate electrode (27) that electrically connects first gate electrodes (26) is provided, across a second gate insulating film (40), on a surface of a region of the p-base region (23) sandwiched by the n+ emitter region (24). A conductive region (28) that electrically connects second gate electrodes (27) is provided, across a third gate insulating film (42), on a surface of the n? layer (21). A contact region (29) that is isolated from the second gate electrode (27), and that short circuits the n+ emitter region (24) and p-base region (23), is provided.
    Type: Grant
    Filed: December 18, 2009
    Date of Patent: June 24, 2014
    Assignee: Fuji Electric Co., Ltd.
    Inventor: Hong-fei Lu
  • Patent number: 8759870
    Abstract: On the top surface of a thin semiconductor wafer, top surface structures forming a semiconductor chip are formed. The top surface of the wafer is affixed to a supporting substrate with a double-sided adhesive tape. Then, from the bottom surface of the thin semiconductor wafer, a trench, which becomes a scribing line, is formed by wet anisotropic etching so that side walls of the trench are exposed. On the side walls of the trench with the crystal face exposed, an isolation layer with a conductivity type different from that of the semiconductor wafer for holding a reverse breakdown voltage is formed simultaneously with a collector region of the bottom surface diffused layer by ion implantation, followed by annealing with laser irradiation. The side walls form a substantially V-shaped or trapezoidal-shaped cross section, with an angle of the side wall relative to the supporting substrate being 30-70°. The double-sided adhesive tape is then removed from the top surface to produce semiconductor chips.
    Type: Grant
    Filed: June 28, 2010
    Date of Patent: June 24, 2014
    Assignee: Fuji Electric Co., Ltd.
    Inventors: Haruo Nakazawa, Kazuo Shimoyama, Manabu Takei
  • Patent number: 8742452
    Abstract: Disclosed herein are a semiconductor device, and a method for manufacturing the semiconductor device. The semiconductor device includes a semiconductor substrate, a base region formed on an upper region of an inside of the semiconductor substrate, at least one gate electrode that penetrates through the base region and has an inverted triangular shape, a gate insulating film formed to enclose an upper portion of the semiconductor substrate and the gate electrode, an inter-layer insulating film formed on an upper portion of the gate electrode and the gate insulating film, an emitter region formed inside the base region and on both sides of the gate electrode, an emitter metal layer formed on an upper portion of the base region and inter-layer insulating film, and a buffer region formed to enclose a lower portion of the gate electrode and to be spaced apart from the base region.
    Type: Grant
    Filed: February 6, 2013
    Date of Patent: June 3, 2014
    Assignee: Samsung Electro-Mechanics Co., Ltd.
    Inventors: Kwang Soo Kim, Bum Seok Suh, In Hyuk Song, Jae Hoon Park, Dong Soo Seo
  • Patent number: 8729600
    Abstract: A semiconductor device has a first conductivity-type semiconductor substrate, second conductivity-type channel regions, and second conductivity-type thinning-out regions. The channel regions and the thinning-out regions are formed adjacent to a substrate surface of the semiconductor substrate. Further, a hole stopper layer is formed in each of the thinning-out regions to divide the thinning-out region into a first part adjacent to the substrate surface and a second part adjacent to a bottom of the thinning-out region. The hole stopper layer has an area density of equal to or less than 4.0×1012 cm?2 to permit a depletion layer to punch through the hole stopper layer, thereby to restrict breakdown properties from being decreased.
    Type: Grant
    Filed: June 27, 2012
    Date of Patent: May 20, 2014
    Assignee: DENSO CORPORATION
    Inventors: Yukio Tsuzuki, Kenji Kouno, Hiromitsu Tanabe
  • Patent number: 8729599
    Abstract: A method for fabricating a semiconductor device includes the following steps. First, a semiconductor substrate is provided, and a first region, a second region and a third region are defined thereon. Then, a first well having a first conductive type is formed in the semiconductor substrate of the first region and the second region, respectively. A semiconductor layer partially overlapping the first well of the second region is formed. Furthermore, a second well having a second conductive type is formed in the semiconductor substrate of the third region and the first well of the second region respectively, where the second well of the second region is disposed underneath the semiconductor layer.
    Type: Grant
    Filed: August 22, 2011
    Date of Patent: May 20, 2014
    Assignee: United Microelectronics Corp.
    Inventors: Yuan-Hsiang Chang, Sung-Bin Lin
  • Patent number: 8716747
    Abstract: A diode region and an IGBT region are formed in a semiconductor layer of a semiconductor device. A lifetime controlled region is formed in the semiconductor layer. In a plan view, the lifetime controlled region has a first lifetime controlled region located in the diode region and a second lifetime controlled region located in a part of the IGBT region. The second lifetime controlled region extends from a boundary of the diode region and the IGBT region toward the IGBT region. In the plan view, a tip of the second lifetime controlled region is located in a forming area of the body region in the IGBT region.
    Type: Grant
    Filed: February 6, 2012
    Date of Patent: May 6, 2014
    Assignee: Toyota Jidosha Kabushiki Kaisha
    Inventors: Jun Saito, Sachiko Aoi, Takahide Sugiyama
  • Patent number: 8710542
    Abstract: A semiconductor device includes a base layer, a second conductivity type semiconductor layer, a first insulating film, and a first electrode. The first insulating film is provided on an inner wall of a plurality of first trenches extending from a surface of the second conductivity type semiconductor layer toward the base layer side, but not reaching the base layer. The first electrode is provided in the first trench via the first insulating film, and provided in contact with a surface of the second conductivity type semiconductor layer. The second conductivity type semiconductor layer includes first and second regions. The first region is provided between the first trenches. The second region is provided between the first second conductivity type region and the base layer, and between a bottom part of the first trench and the base layer. The second region has less second conductivity type impurities than the first region.
    Type: Grant
    Filed: September 21, 2011
    Date of Patent: April 29, 2014
    Assignee: Kabushiki Kaisha Tosiba
    Inventor: Mitsuhiko Kitagawa
  • Patent number: 8710644
    Abstract: A semiconductor unit of certain aspects of the invention includes electrically conductive plates in the shape of the letter L, each consisting of a horizontally disposed leg portion and a vertically disposed flat body portion that is perpendicular to a cooling plate adhered to the bottom of the semiconductor unit. A pair of the vertically disposed flat body portions sandwiches a semiconductor chip. Owing to this construction, the heat generated in the semiconductor chip can be conducted away through the both surfaces of the chip, thus improving cooling performance. Since the heat is conducted away through the leg portions of the L-shaped electrically conductive plates a projected planar area occupied by the cooling plate required for cooling the semiconductor unit is reduced. Therefore, the size of the semiconductor unit can be reduced.
    Type: Grant
    Filed: May 16, 2011
    Date of Patent: April 29, 2014
    Assignee: Fuji Electric Co., Ltd.
    Inventor: Kenichiro Sato
  • Patent number: 8710510
    Abstract: An insulated gate bipolar transistor (IGBT) includes a substrate having a first conductivity type, a drift layer having a second conductivity type opposite the first conductivity type, and a well region in the drift layer and having the first conductivity type. An epitaxial channel adjustment layer is on the drift layer and has the second conductivity type. An emitter region extends from a surface of the epitaxial channel adjustment layer through the epitaxial channel adjustment layer and into the well region. The emitter region has the second conductivity type and at least partially defines a channel region in the well region adjacent to the emitter region. A gate oxide layer is on the channel region, and a gate is on the gate oxide layer. Related methods are also disclosed.
    Type: Grant
    Filed: June 18, 2007
    Date of Patent: April 29, 2014
    Assignee: Cree, Inc.
    Inventors: Qingchun Zhang, Sei-Hyung Ryu, Charlotte Jonas, Anant K. Agarwal
  • Patent number: 8698194
    Abstract: A first annular isolation trench is formed in a periphery of an element region, and a second annular isolation trench is formed around the first annular isolation trench with a predetermined distance provided from the first annular isolation trench, and a semiconductor layer between the first annular isolation trench and the second annular isolation trench is separated into a plurality of portions by a plurality of linear isolation trenches formed in the semiconductor layer between the first annular isolation trench and the second annular isolation trench, and the semiconductor layer (source-side isolation region) which opposes a p-type channel layer end portion and is located between the first annular isolation trench and the second annular isolation trench is separated from other semiconductor layers (drain-side isolation regions) by the linear isolation trenches.
    Type: Grant
    Filed: July 21, 2011
    Date of Patent: April 15, 2014
    Assignee: Hitachi, Ltd.
    Inventors: Takuo Nagase, Junichi Sakano
  • Patent number: 8692244
    Abstract: A semiconductor device includes: an emitter electrode formed of a silicide film, and provided on a semiconductor layer; an insulating film provided on the emitter electrode; and an electrode pad made of Al, and provided on the insulating film.
    Type: Grant
    Filed: June 30, 2011
    Date of Patent: April 8, 2014
    Assignee: Mitsubishi Electric Corporation
    Inventors: Naoto Kaguchi, Norihisa Asano, Katsumi Sato
  • Patent number: 8686469
    Abstract: A semiconductor device includes a semiconductor substrate having a diode active region and an edge termination region adjacent to each other, a first region of a first conductivity type in the diode active region, a second region of a second conductivity type, a third region of the first conductivity type in the edge termination region, and a fourth region of the second conductivity type. The first region and the third region share a drift region of the first conductivity type. The first region and the third region share a fifth region of the first conductivity type. The drift region in the third region is greater in number of crystal defects per unit volume than the drift region in the first region in order that the drift region in the third region is shorter in carrier lifetime than the drift region in the first region.
    Type: Grant
    Filed: April 25, 2011
    Date of Patent: April 1, 2014
    Assignee: Mitsubishi Electric Corporation
    Inventor: Katsumi Nakamura
  • Publication number: 20140061721
    Abstract: An improved MOS device is provided whereby the p-top layer is defined by a series of discretely placed p type top diffusion regions. The invention also provides methods for fabricating the MOS device of the invention.
    Type: Application
    Filed: August 28, 2012
    Publication date: March 6, 2014
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Ching-Lin Chan, Shyi-Yuan Wu, Cheng-Chi Lin, Shih-Chin Lien
  • Patent number: 8664692
    Abstract: According to one embodiment, a semiconductor device includes a first electrode, a first conductivity type cathode layer, a first conductivity type base layer, a second conductivity type anode layer, a second conductivity type semiconductor layer, a first conductivity type semiconductor layer, an buried body, and a second electrode. The first conductivity type semiconductor layer is contiguous to the second conductivity type semiconductor layer in a first direction, and extends on a surface of the anode layer in a second direction that intersects perpendicularly to the first direction. The buried body includes a bottom portion and a sidewall portion. The bottom portion is in contact with the base layer. The sidewall portion is in contact with the base layer, the anode layer, the second conductivity type semiconductor layer and the first conductivity type semiconductor layer. The buried body extends in the first direction.
    Type: Grant
    Filed: August 30, 2012
    Date of Patent: March 4, 2014
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Tsuneo Ogura, Tomoko Matsudai, Yuichi Oshino
  • Patent number: 8659052
    Abstract: A semiconductor device including a semiconductor substrate in which a diode region and an IGBT region are formed is provided. The diode region includes a first layer embedded in a diode trench reaching a diode drift layer from an upper surface side of the semiconductor substrate, and a second layer which is buried in the first layer and which has a lower end located deeper than a boundary between a diode body layer and the diode drift layer. The second layer pressures the first layer in a direction from inside to outside of the diode trench. A lifetime control region is formed in the diode drift layer at least at the depth of the lower end of the second layer, and a crystal defect density inside the lifetime control region is higher than a crystal defect density outside the lifetime control region.
    Type: Grant
    Filed: September 14, 2012
    Date of Patent: February 25, 2014
    Assignee: Toyota Jidosha Kabushiki Kaisha
    Inventor: Tomoharu Ikeda
  • Patent number: 8653556
    Abstract: A vertical semiconductor device includes a semiconductor body, and first and second contacts on opposite sides of the semiconductor body. A plurality of regions are formed in the semiconductor body including, in a direction from the first contact to the second contact, a first region of a first conductivity type, a second region of a second conductivity type; and a third region of the first conductivity type. The third region is electrically connected to the second contact. A semiconductor zone of the second conductivity type and increased doping density is arranged in the second region. The semiconductor zone separates a first part of the second region from a second part of the second region. The semiconductor zone has a maximum doping density exceeding about 1016 cm?3 and a thickness along the direction from the first contact to the second contact of less than about 3 ?m.
    Type: Grant
    Filed: May 7, 2009
    Date of Patent: February 18, 2014
    Assignee: Infineon Technologies Austria AG
    Inventors: Franz Josef Niedernostheide, Hans-Joachim Schulze
  • Patent number: 8653606
    Abstract: It is intended to provide a semiconductor device capable to improve a controllability of dv/dt by a gate drive circuit during a turn-on switching period, while maintaining a low loss and a high breakdown voltage. Trench gates are disposed so as to have narrow distance regions and wide distance regions, wherein each of the narrow distance regions is provided with a channel region, and each of the wide distance regions is provided with trenches, each trench having an electrode electrically connected to the emitter electrode. In this manner, even if a floating-p layer is removed, it is possible to reduce a feedback capacity and maintain a breakdown voltage.
    Type: Grant
    Filed: June 27, 2013
    Date of Patent: February 18, 2014
    Assignee: Hitachi, Ltd.
    Inventor: Masaki Shiraishi
  • Patent number: 8629515
    Abstract: A semiconductor device includes a semiconductor substrate, a source and a drain region formed on the semiconductor substrate, and a gate structure disposed on the substrate between the source and drain regions. The gate structure includes an interfacial layer formed over the substrate, a high-k dielectric formed over the interfacial layer, and a metal gate formed over the high-k dielectric that includes a first metal layer and a second metal layer, where the first metal layer is formed on a portion of the sidewalls of the gate structure and where the second metal layer is formed on another portion of the sidewalls of the gate structure.
    Type: Grant
    Filed: September 26, 2011
    Date of Patent: January 14, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ching-Han Yeh, Chen-Pin Hsu, Ming-Yuan Wu, Kong-Beng Thei, Harry Chuang
  • Patent number: 8629509
    Abstract: High power insulated gate bipolar junction transistors are provided that include a wide band gap semiconductor bipolar junction transistor (“BJT”) and a wide band gap semiconductor MOSFET that is configured to provide a current to the base of the BJT. These devices further include a minority carrier diversion semiconductor layer on the base of the BJT and coupled to the emitter of the BJT, the minority carrier diversion semiconductor layer having a conductivity type opposite the conductivity type of the base of the BJT and forming a heterojunction with the base of the BJT.
    Type: Grant
    Filed: September 10, 2009
    Date of Patent: January 14, 2014
    Assignee: Cree, Inc.
    Inventors: Sei-Hyung Ryu, Qingchun Zhang
  • Publication number: 20130341674
    Abstract: A semiconductor device includes a first emitter region of a first conductivity type, a second emitter region of a second conductivity type complementary to the first type, a drift region of the second conductivity type, and a first electrode. The first and second emitter regions are arranged between the drift region and first electrode and each connected to the first electrode. A device cell of a cell region includes a body region of the first conductivity type adjoining the drift region, a source region of the second conductivity type adjoining the body region, and a gate electrode adjacent the body region and dielectrically insulated from the body region by a gate dielectric. A second electrode is electrically connected to the source and body regions. A parasitic region of the first conductivity type is disposed outside the cell region and includes at least one section with charge carrier lifetime reduction means.
    Type: Application
    Filed: June 21, 2012
    Publication date: December 26, 2013
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Dorothea Werber, Frank Pfirsch, Hans-Joachim Schulze, Carsten Schaeffer, Volodymyr Komarnitskyy, Anton Mauder
  • Patent number: 8614448
    Abstract: A semiconductor device includes a semiconductor substrate having a collector layer in which the carrier concentration is maximized at a carrier concentration peak position that is 1 ?m or more from a surface of the semiconductor substrate. The semiconductor device further includes a collector electrode formed in contact with a surface of the collector layer.
    Type: Grant
    Filed: September 20, 2011
    Date of Patent: December 24, 2013
    Assignee: Mitsubishi Electric Corporation
    Inventor: Shigeto Honda
  • Publication number: 20130320397
    Abstract: A device includes a dielectric layer, and a heavily doped semiconductor layer over the dielectric layer. The heavily doped semiconductor layer is of a first conductivity type. A semiconductor region is over the heavily doped semiconductor layer, wherein the semiconductor region is of a second conductivity type opposite the first conductivity type. A Lateral Insulated Gate Bipolar Transistor (LIGBT) is disposed at a surface of the semiconductor region.
    Type: Application
    Filed: August 31, 2012
    Publication date: December 5, 2013
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Jhy-Jyi Sze, Biay-Cheng Hseih, Shou-Gwo Wuu
  • Patent number: 8598622
    Abstract: A semiconductor device includes: a transistor region including an IGBT having a gate electrode and an emitter electrode; a termination region placed around the transistor region; and an extraction region placed between the transistor and the termination region and extracting redundant carriers. A P-type layer is placed on an N-type drift layer in the extraction region. The P-type layer is connected to the emitter electrode. A dummy gate electrode is placed via an insulation film on the P-type layer. The dummy gate electrode is connected to the gate electrode. Life time of carriers in the termination region is shorter than life time of carriers in the transistor region and the extraction region.
    Type: Grant
    Filed: December 13, 2011
    Date of Patent: December 3, 2013
    Assignee: Mitsubishi Electric Corporation
    Inventors: Koji Sadamatsu, Ze Chen, Katsumi Nakamura
  • Publication number: 20130299871
    Abstract: Representative implementations of devices and techniques provide a high-voltage device on a semiconductor substrate. An insulating polymer layer is formed on an opposite surface to the high-voltage device, the insulating polymer layer having a thickness of at least twice that of the semiconductor substrate.
    Type: Application
    Filed: May 14, 2012
    Publication date: November 14, 2013
    Inventors: Anton MAUDER, Eric GRAETZ
  • Patent number: 8558342
    Abstract: A reverse blocking IGBT according to the invention can include a reverse breakdown withstanding region, p-type outer field limiting rings formed in a reverse breakdown withstanding region and an outer field plate connected to the outer field limiting rings, the outer field plate including a first outer field plate in contact with outer field limiting rings nearest to the active region and second outer field plates in contact with other outer field limiting rings. The first outer field plate having an active region side edge portion projecting toward the active region and second outer field plate having an edge area side edge portion projecting toward the edge area. The reverse blocking IGBT according to the invention can facilitate improving the withstand voltages thereof and reducing the area thereof.
    Type: Grant
    Filed: September 28, 2010
    Date of Patent: October 15, 2013
    Assignee: Fuji Electric Co., Ltd.
    Inventors: Koh Yoshikawa, Motoyoshi Kubouchi
  • Publication number: 20130264607
    Abstract: A semiconductor includes a drift zone of a first conductivity type arranged between a first side and a second side of a semiconductor body. The semiconductor device further includes a first region of the first conductivity type and a second region of a second conductivity type subsequently arranged along a first direction parallel to the second side. The semiconductor device further includes an electrode at the second side adjoining the first and second regions. The semiconductor device further includes a third region of the second conductivity type arranged between the drift zone and the first region. The third region is spaced apart from the second region and from the second side.
    Type: Application
    Filed: April 6, 2012
    Publication date: October 10, 2013
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Dorothea Werber, Anton Mauder, Frank Pfirsch, Hans-Joachim Schulze, Franz Hirler, Alexander Philippou
  • Publication number: 20130256749
    Abstract: Device structures, design structures, and fabrication methods for passive devices that may be used as electrostatic discharge protection devices in fin-type field-effect transistor integrated circuit technologies. A device structure is formed that includes a well of a first conductivity type in a device region and a doped region of a second conductivity in the well. The device region is comprised of a portion of a device layer of a semiconductor-on-insulator substrate. The doped region and a first portion of the well define a junction. A second portion of the well is positioned between the doped region and an exterior sidewall of the device region. Another portion of the device layer may be patterned to form fins for fin-type field-effect transistors.
    Type: Application
    Filed: March 27, 2012
    Publication date: October 3, 2013
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: William F. Clark, JR., Robert J. Gauthier, JR., Junjun Li
  • Publication number: 20130248924
    Abstract: A semiconductor device includes a reverse-conducting insulated gate bipolar transistor (IGBT), wherein the thickness of the semiconductor layer underlying the diode region of the device is thinner than the thickness of the semiconductor layer underlying the IGBT portion of the device. In one aspect, the semiconductor layer is a continuous layer, and trenches defining the anodes in the diode region extend further inwardly of the semiconductor layer than does the base regions of the IGBT portion of the device.
    Type: Application
    Filed: September 8, 2012
    Publication date: September 26, 2013
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Tomoko MATSUDAI, Tsuneo OGURA, Hideaki NINOMIYA