With Two-dimensional Charge Carrier Gas Channel (e.g., Hemt; With Two-dimensional Charge-carrier Layer Formed At Heterojunction Interface) (epo) Patents (Class 257/E29.246)
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Patent number: 8350297Abstract: A compound semiconductor device is comprised of: a compound semiconductor layer including a first active layer and a second active layer forming a hetero junction with the first active layer so as to naturally generate a two-dimensional carrier gas channel in the first active layer along the hetero junction; a first electrode formed on the second active layer; a second electrode in ohmic contact with the first active layer and isolated from the first electrode; and a channel modifier for locally changing a part of the first active layer under the channel modifier into a normally-off state, the channel modifier being formed on the second active layer so as to enclose but be isolated from the first electrode and the second electrode.Type: GrantFiled: December 7, 2010Date of Patent: January 8, 2013Assignee: Sanken Electric Co., LtdInventor: Nobuo Kaneko
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Patent number: 8350296Abstract: An enhancement mode III-Nitride device has a floating gate spaced from a drain electrode which is programmed by charges injected into the floating gate to form a permanent depletion region which interrupts the 2-DEG layer beneath the floating gate. A conventional gate is formed atop the floating gate and is insulated therefrom by a further dielectric layer. The device is a normally off E mode device and is turned on by applying a positive voltage to the floating gate to modify the depletion layer and reinstate the 2-DEG layer. The device is formed by conventional semiconductor fabrication techniques.Type: GrantFiled: August 21, 2008Date of Patent: January 8, 2013Assignee: International Rectifier CorporationInventor: Hamid Tony Bahramian
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Publication number: 20130001646Abstract: A field effect transistor (FET) includes source and drain electrodes, a channel layer, a barrier layer over the channel layer, a passivation layer covering the barrier layer for passivating the barrier layer, a gate electrode extending through the barrier layer and the passivation layer, and a gate dielectric surrounding a portion of the gate electrode that extends through the barrier layer and the passivation layer, wherein the passivation layer is a first material and the gate dielectric is a second material, and the first material is different than the second material.Type: ApplicationFiled: June 29, 2011Publication date: January 3, 2013Applicant: HRL LABORATORIES, LLCInventors: Andrea Corrion, Karim S. Boutros, Mary Y. Chen, Samuel J. Kim, Rongming Chu, Shawn D. Burnham
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Publication number: 20130001516Abstract: Various embodiments are provided for graphite and/or graphene based semiconductor devices. In one embodiment, a semiconductor device includes a semiconductor layer and a semimetal stack. In another embodiment, the semiconductor device includes a semiconductor layer and a zero gap semiconductor layer. The semimetal stack/zero gap semiconductor layer is formed on the semiconductor layer, which forms a Schottky barrier. In another embodiment, a semiconductor device includes first and second semiconductor layers and a semimetal stack. In another embodiment, a semiconductor device includes first and second semiconductor layers and a zero gap semiconductor layer. The first semiconductor layer includes a first semiconducting material and the second semi conductor layer includes a second semiconducting material formed on the first semiconductor layer. The semimetal stack/zero gap semiconductor layer is formed on the second semiconductor layer, which forms a Schottky barrier.Type: ApplicationFiled: March 14, 2011Publication date: January 3, 2013Inventors: Arthur Foster Hebard, Sefaattin Tongay
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Publication number: 20130001587Abstract: High electron mobility transistors (HEMTs) including a cavity below a drain and methods of manufacturing HEMTS including removing a portion of a substrate below a drain.Type: ApplicationFiled: June 27, 2012Publication date: January 3, 2013Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: In-jun Hwang, Ki-ha Hong, Jae-joon Oh, Jong-bong Ha, Jong-seob Kim, Hyuk-soon Choi, Jai-kwang Shin
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Patent number: 8344419Abstract: An AlN layer (2), a GaN buffer layer (3), a non-doped AlGaN layer (4a), an n-type AlGaN layer (4b), an n-type GaN layer (5), a non-doped AlN layer (6) and an SiN layer (7) are sequentially formed on an SiC substrate (1). At least three openings are formed in the non-doped AlN layer (6) and the SiN layer (7), and a source electrode (8a), a drain electrode (8b) and a gate electrode (19) are evaporated in these openings.Type: GrantFiled: September 15, 2008Date of Patent: January 1, 2013Assignee: Fujitsu LimitedInventor: Toshihide Kikkawa
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Patent number: 8344424Abstract: Enhancement mode III-nitride devices are described. The 2DEG is depleted in the gate region so that the device is unable to conduct current when no bias is applied at the gate. Both gallium face and nitride face devices formed as enhancement mode devices.Type: GrantFiled: February 28, 2012Date of Patent: January 1, 2013Assignee: Transphorm Inc.Inventors: Chang Soo Suh, Umesh Mishra
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Publication number: 20120326165Abstract: A HEMT comprised of nitride semiconductor materials is disclosed. The HEMT includes, on a SiC substrate, a AlN buffer layer, a GaN channel layer, and a AlGaN doped layer. A feature of the HEMT is that the AlN buffer layer is grown on an extraordinary condition of the pressure, and has a large unevenness in a thickness thereof to enhance the release of carriers captured in traps in the substrate back to the channel layer.Type: ApplicationFiled: June 20, 2012Publication date: December 27, 2012Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.Inventors: Ken NAKATA, Keiichi YUI
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Publication number: 20120319169Abstract: A method for manufacturing a III-nitride HEMT having a gate electrode and source and drain ohmic contacts is provided, comprising providing a substrate; forming a stack of III-nitride layers on the substrate; forming a first passivation layer comprising silicon nitride overlying and in contact with an upper layer of the stack of III-nitride layers, wherein the first passivation layer is deposited in-situ with the stack of III-nitride layers; forming a dielectric layer overlying and in contact with the first passivation layer; forming a second passivation layer comprising silicon nitride overlying and in contact with the dielectric layer wherein the second passivation layer is deposited at a temperature higher than 450° C. by LPCVD or MOCVD or any equivalent technique; and thereafter forming the source and drain ohmic contacts and the gate electrode.Type: ApplicationFiled: June 18, 2012Publication date: December 20, 2012Applicant: IMECInventor: Marleen Van Hove
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Publication number: 20120313145Abstract: A nitride semiconductor device is disclosed. The device includes a stack of semiconductor layers including the channel layer, the spacer layer, and the doped layer. The spacer layer is made of AlN while the doped layer is InAlN. A feature of the embodiment is that the spacer layer has a thickness of 0.5 to 1.25 nm.Type: ApplicationFiled: June 6, 2012Publication date: December 13, 2012Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.Inventor: Isao MAKABE
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Patent number: 8330167Abstract: A GaN-based field effect transistor 101 comprises: a substrate 101; a channel layer 104 comprised of p-type GaN-based semiconductor material formed on the substrate 101; an electron supplying layer 106 formed on said channel layer 104 and comprised of GaN-based semiconductor material which has band gap energy greater than that of said channel layer 104; a gate insulating film 111 formed on a surface of said channel layer which was exposed after a part of said electron supplying layer was removed; a gate electrode 112 formed on said gate insulating film; a source electrode 109 and a drain electrode 110 formed so that said gate electrode 112 positions in between them; and a second insulating film 113 formed on said electron supplying layer, which is a different insulating film from said gate insulating film 111 and has electron collapse decreasing effect.Type: GrantFiled: November 25, 2009Date of Patent: December 11, 2012Assignee: Furukawa Electric Co., LtdInventors: Nomura Takehiko, Sato Yoshihiro, Kambayashi Hiroshi, Kaya Shusuke, Iwami Masayuki, Kato Sadahiro
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Publication number: 20120305991Abstract: A manufacturing method of a device having series-connected HEMTs is presented. Transistors are formed on a substrate and integratedly serial-connected as an integrated device by interconnection wires. Therefore, the voltage of the device is the sum of the voltages across each transistors so that the device can have high breakdown voltage.Type: ApplicationFiled: August 14, 2012Publication date: December 6, 2012Applicant: NATIONAL CHIAO TUNG UNIVERSITYInventors: EDWARD YI CHANG, HENG-TUNG HSU
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Patent number: 8324037Abstract: The prior art method for the formation of T-gate or inverted L-gate is achieved through several lift-off processes and requires at least two different photoresists and hence two different developers. In one embodiment of the present invention, an etching method for the formation of the source, the drain and the T-gate or inverted L-gate of a compound semiconductor HEMT device is disclosed. In such a method, only one type of photoresist and developer are needed. In one other embodiment, a fabrication process for a HEMT device is disclosed to have the stem of the T-gate or the inverted L-gate defined by a dielectric cavity and its mechanical strength enhanced by a dielectric layer. In another embodiment, a fabrication process for a HEMT device is disclosed to have the stems of the source and the drain defined by dielectric cavities and their mechanical strength enhanced by a dielectric layer.Type: GrantFiled: September 28, 2011Date of Patent: December 4, 2012Inventors: Ishiang Shih, Cindy X. Qiu, Chunong Qiu, Yi-Chi Shih, Julia Qiu
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Publication number: 20120302178Abstract: Embodiments include but are not limited to apparatuses and systems including a buffer layer, a group III-V layer over the buffer layer, a source contact and a drain contact on the group III-V layer, and a regrown Schottky layer over the group III-V layer, and between the source and drain contacts. The embodiments further include methods for making the apparatuses and systems. Other embodiments may be described and claimed.Type: ApplicationFiled: May 25, 2011Publication date: November 29, 2012Applicant: TRIQUINT SEMICONDUCTOR, INC.Inventor: Edward A. Beam, III
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Publication number: 20120298961Abstract: A method to fabricate a hetero-junction in a Tunnel Field Effect Transistor device configuration (e.g. in a segmented nanowire TFET) is provided. A thin transition layer is inserted in between the source region and channel region such that the out-diffusion is within a very limited region of a few nm, guaranteeing extremely good doping abruptness thanks to the lower diffusion of the dopants in the transition layer. The transition layer avoids the direct contact between the highly doped source region and the lowly doped or undoped channel and allows to contain the whole doping entirely within the source region and transition layer. The thickness of the transition layer can be engineered such that the transition layer coincides with the steep transition step from the highly doped source region to the intrinsic region (channel), and hence maximizing the tunneling current.Type: ApplicationFiled: July 25, 2012Publication date: November 29, 2012Applicant: IMECInventors: Francesca Iacopi, Anne S. Verhulst, Arturo Sibaja-Hernandez
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Publication number: 20120292665Abstract: A novel semiconductor power transistor is presented. The semiconductor structure is simple and is based on a FET structure, where multiple channels and multiple gate regions are formed in order to achieve a lower specific on-resistance, and a higher control on the transport properties of the device. No dielectric layer is present between gate electrodes and device channels, decreasing the parasitic capacitance associated with the gate terminal. The fabrication of the device does not require Silicon On Insulator techniques and it is not limited to Silicon semiconductor materials. It can be fabricated as an enhancement or depletion device with much more control on the threshold voltage of the device, and with superior RF performance.Type: ApplicationFiled: May 16, 2011Publication date: November 22, 2012Inventors: Fabio Alessio Marino, Paolo Menegoli
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Publication number: 20120292663Abstract: The invention provides two Sb-based n- or p-channel layer structures as a template for MISFET and complementary MISFET development. Four types of MISFET devices and two types of complementary MISFET circuit devices can be developed based on the invented layer structures. Also, the layer structures can accommodate more than one complementary MISFETs and more than one single active MISFETs to be integrated on the same substrate monolithically.Type: ApplicationFiled: May 19, 2011Publication date: November 22, 2012Applicant: National Central UniversityInventors: Heng-Kuang LIN, Han-Chieh HO, Pei-Chin CHIU, Jen-Inn CHYI
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Patent number: 8314447Abstract: A semiconductor including a lateral HEMT and to a method for production of a lateral HEMT is disclosed. In one embodiment, the lateral HEMT has a substrate and a first layer, wherein the first layer has a semiconductor material of a first conduction type and is arranged at least partially on the substrate. Furthermore, the lateral HEMT has a second layer, wherein the second layer has a semiconductor material and is arranged at least partially on the first layer. In addition, the lateral HEMT has a third layer, wherein the third layer has a semiconductor material of a second conduction type, which is complementary to the first conduction type, and is arranged at least partially in the first layer.Type: GrantFiled: April 21, 2010Date of Patent: November 20, 2012Assignee: Infineon Technologies Austria AGInventors: Franz Hirler, Walter Rieger, Markus Zundel
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Patent number: 8309986Abstract: Semiconductor structures include a trench formed proximate a substrate including a first semiconductor material. A crystalline material including a second semiconductor material lattice mismatched to the first semiconductor material is formed in the trench. Process embodiments include removing a portion of the dielectric layer to expose a side portion of the crystalline material and defining a gate thereover. Defects are reduced by using an aspect ratio trapping approach.Type: GrantFiled: May 13, 2011Date of Patent: November 13, 2012Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Anthony J. Lochtefeld
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Publication number: 20120280244Abstract: High electron mobility transistors (HEMTs) and methods of manufacturing the same. A HEMT may include a channel layer and a channel supply layer, and the channel supply layer may be a multilayer structure. The channel supply layer may include an etch stop layer and an upper layer on the etch stop layer. A recess region may be in the upper layer. The recess region may be a region recessed to an interface between the upper layer and the etch stop layer. A gate electrode may be on the recess region.Type: ApplicationFiled: November 30, 2011Publication date: November 8, 2012Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: In-jun Hwang, Jai-kwang Shin, Jae-joon Oh, Jong-bong Ha, Hyuk-soon Choi, Ki-ha Hong
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Publication number: 20120280280Abstract: The invention relates to a semiconductor device and a fabrication method thereof. A semiconductor device according to an aspect of the invention comprising: a semiconductor layer on a substrate; an isolation layer on the semiconductor layer; a source and a drain which are in contact with the semiconductor layer, each of the source and the drain comprises multiple fingers, and the multiple fingers of the source intersect the multiple fingers of the drain; and a gate on the isolation layer, the gate is located between the source and the drain and comprises a closed ring structure which encircles the multiple fingers of the source and the drain.Type: ApplicationFiled: August 18, 2010Publication date: November 8, 2012Inventor: Naiqian Zhang
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Publication number: 20120280245Abstract: Some exemplary embodiments of high voltage cascoded III-nitride semiconductor package with a stamped leadframe have been disclosed. One exemplary embodiment comprises a III-nitride transistor having an anode of a diode stacked atop a source of the III-nitride transistor, and a stamped leadframe comprising a first bent lead coupled to a gate of the III-nitride transistor and the anode of the diode, and a second bent lead coupled to a drain of the III-nitride transistor. The bent leads expose respective flat portions that are surface mountable. In this manner, reduced package footprint, improved surge current capability, and higher performance may be achieved compared to conventional wire bonded packages. Furthermore, since multiple packages may be assembled at a time, high integration and cost savings may be achieved compared to conventional methods requiring individual package processing and externally sourced parts.Type: ApplicationFiled: February 1, 2012Publication date: November 8, 2012Applicant: INTERNATIONAL RECTIFIER CORPORATIONInventors: Chuan Cheah, Dae Keun Park
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Publication number: 20120280278Abstract: A normally-off transistor includes a first region of III-V semiconductor material, a second region of III-V semiconductor material on the first region, a third region of III-V semiconductor material on the second region and a gate electrode adjacent at least one sidewall of the third region. The first region provides a channel of the transistor. The second region has a band gap greater than the band gap of the first region and causes a 2-D electron gas (2DEG) in the channel. The second region is interposed between the first region and the third region. The third region provides a gate of the transistor and has a thickness sufficient to deplete the 2DEG in the channel so that the transistor has a positive threshold voltage.Type: ApplicationFiled: May 4, 2011Publication date: November 8, 2012Applicant: INFINEON TECHNOLOGIES AUSTRIA AGInventors: Gilberto Curatola, Oliver Häberlen, Gianmauro Pozzovivo
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Patent number: 8304811Abstract: A HEMT device and a manufacturing of the HEMT device, the HEMT device includes: a buffer layer (14) on the substrate (12); a semiconductor layer on the buffer layer (14); an isolation layer (16, 17) on the semiconductor layer; a source electrode (22) and a drain electrode (23) contacted with the semiconductor layer; and a gate electrode (24, 104 114) between the source electrode (22) and the drain electrode (23); wherein, a channel, which is located in the semiconductor layer below the gate electrode (24, 104, 114), is pinched off.Type: GrantFiled: March 4, 2009Date of Patent: November 6, 2012Assignee: Dynax Semiconductor, Inc.Inventor: Naiqian Zhang
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Patent number: 8304812Abstract: A terahertz wave radiating element includes: a first nitride semiconductor layer formed on a substrate; a second nitride semiconductor layer formed over the first nitride semiconductor layer, and having a wider bandgap than the first nitride semiconductor layer; and source, gate, and drain electrodes formed on the second nitride semiconductor layer. The source electrode is formed by a plurality of source electrode fingers that are arranged periodically, and the drain electrode is formed by a plurality of drain electrode fingers that are arranged periodically.Type: GrantFiled: March 18, 2011Date of Patent: November 6, 2012Assignee: Panasonic CorporationInventors: Toshikazu Onishi, Tatsuya Tanigawa, Shinichi Takigawa, Tsuyoshi Tanaka
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Publication number: 20120274402Abstract: A high electron mobility transistor (HEMT) includes a substrate, a heterojunction on the substrate including a first layer having a Group III-nitride semiconductor material interfaced to a second layer having a doped Group III-nitride semiconductor material. A gate electrode is on a surface of the heterojunction, and a source and a drain are on opposite sides of said gate electrode. A patterned field shaping (FS) layer formed from a wide band-gap semiconductor material is over the heterojunction on at least a portion between the gate electrode and the drain.Type: ApplicationFiled: April 25, 2012Publication date: November 1, 2012Applicant: TEXAS INSTRUMENTS INCORPORATEDInventor: CHRISTOPHER BOGUSLAW KOCON
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Publication number: 20120273760Abstract: A bipolar transistor includes a substrate of semiconductor material, a high-mobility layer in the substrate, and a donor layer adjacent to the high-mobility layer. An emitter terminal forms an emitter contact on the donor layer, and a collector terminal forms a collector contact on the donor layer. A base terminal is electrically conductively connected with the high-mobility layer. The transistor can be produced in a HEMT technology or BiFET technology in GaAs.Type: ApplicationFiled: May 17, 2012Publication date: November 1, 2012Applicant: EPCOS AGInventors: Lcon C.M. van den Oever, Ray J.E. Hueting
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Patent number: 8299498Abstract: A semiconductor device 10 is provided with a first hetero junction 40b configured with two types of nitride semiconductors having different bandgap energy from each other, a second hetero junction 50b configured with two types of nitride semiconductors having different bandgap energy from each other, and a gate electrode 58 facing the second hetero junction 50b. The second hetero junction 50b is configured to be electrically connected to the first hetero junction 40b. The first hetero junction 40b is a c-plane and the second hetero junction 50b is either an a-plane or an m-plane.Type: GrantFiled: April 7, 2008Date of Patent: October 30, 2012Assignees: Kabushiki Kaisha Toyota Chuo Kenkyusho, Toyota Jidosha Kabushiki KaishaInventors: Tsutomu Uesugi, Kenji Ito, Osamu Ishiguro, Tetsu Kachi, Masahiro Sugimoto
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Patent number: 8298897Abstract: A field effect transistor includes a partial SiGe channel, i.e., a channel including a SiGe channel portion, located underneath a gate electrode and a Si channel portion located underneath an edge of the gate electrode near the drain region. The SiGe channel portion can be located directly underneath a gate dielectric, or can be located underneath a Si channel layer located directly underneath a gate dielectric. The Si channel portion is located at the same depth as the SiGe channel portion, and contacts the drain region of the transistor. By providing a Si channel portion near the drain region, the GIDL current of the transistor is maintained at a level on par with the GIDL current of a transistor having a silicon channel only during an off state.Type: GrantFiled: March 23, 2012Date of Patent: October 30, 2012Assignees: International Business Machines Corporation, Globalfoundries Inc.Inventors: Xiangdong Chen, Jie Deng, Weipeng Li, Deleep R. Nair, Jae-Eun Park, Daniel Tekleab, Xiaobin Yuan, Nam Sung Kim
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Publication number: 20120267642Abstract: Provided is a nitride semiconductor device including: a nitride semiconductor layer over a substrate wherein the nitride semiconductor has a two-dimensional electron gas (2DEG) channel inside; a drain electrode in ohmic contact with the nitride semiconductor layer; a source electrode in Schottky contact with the nitride semiconductor layer wherein the source electrode is spaced apart from the drain electrode; a dielectric layer formed on the nitride semiconductor layer between the drain electrode and the source electrode and on at least a portion of the source electrode; and a gate electrode disposed on the dielectric layer to be spaced apart from the drain electrode, wherein a portion of the gate electrode is formed over a drain-side edge portion of the source electrode with the dielectric layer interposed therebetween, and a manufacturing method thereof.Type: ApplicationFiled: August 4, 2011Publication date: October 25, 2012Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.Inventors: Woo Chul Jeon, Ki Yeol Park, Young Hwan Park
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Publication number: 20120267686Abstract: Provided is a nitride semiconductor device including: a nitride semiconductor layer over a substrate wherein the nitride semiconductor has a two-dimensional electron gas (2DEG) channel inside; a drain electrode in ohmic contact with the nitride semiconductor layer; a source electrode spaced apart from the drain electrode, in Schottky contact with the nitride semiconductor layer, and having an ohmic pattern in ohmic contact with the nitride semiconductor layer inside; a dielectric layer formed on the nitride semiconductor layer between the drain electrode and the source electrode and on at least a portion of the source electrode; and a gate electrode disposed on the dielectric layer to be spaced apart from the drain electrode, wherein a portion of the gate electrode is formed over a drain-side edge portion of the source electrode with the dielectric layer interposed therebetween, and a manufacturing method thereof.Type: ApplicationFiled: August 3, 2011Publication date: October 25, 2012Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.Inventors: Woo Chul Jeon, Ki Yeol Park, Young Hwan Park
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Publication number: 20120267687Abstract: Provided is a nitride semiconductor device including: a nitride semiconductor layer over a substrate wherein the nitride semiconductor has a two-dimensional electron gas (2DEG) channel inside; a drain electrode in ohmic contact with the nitride semiconductor layer; a source electrode in Schottky contact with the nitride semiconductor layer wherein the source electrode is spaced apart from the drain electrode; a dielectric layer formed on the nitride semiconductor layer between the drain electrode and the source electrode and on at least a portion of the source electrode, wherein the dielectric layer has a recess formed between the drain electrode and the source electrode; and a gate electrode formed on the dielectric layer and in the recess to be spaced apart from the drain electrode, wherein a portion of the gate electrode is formed over a drain-side edge portion of the source electrode with the dielectric layer interposed therebetween, and a manufacturing method thereof.Type: ApplicationFiled: August 4, 2011Publication date: October 25, 2012Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.Inventors: Woo Chul Jeon, Young Hwan Park, Ki Yeol Park
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Publication number: 20120267637Abstract: Provided is a nitride semiconductor device including: a nitride semiconductor layer over a substrate wherein the nitride semiconductor has a two-dimensional electron gas (2DEG) channel inside; a drain electrode in ohmic contact with the nitride semiconductor layer; a source electrode in Schottky contact with the nitride semiconductor layer wherein the source electrode is spaced apart from the drain electrode; a floating guard ring in Schottky contact with the nitride semiconductor layer between the drain electrode and the source electrode; a dielectric layer formed on the nitride semiconductor layer between the drain electrode and the source electrode and on at least a portion of the source electrode wherein the dielectric layer is applied to the floating guard ring between the drain electrode and the source electrode; and a gate electrode formed on the dielectric layer to be spaced apart from the drain electrode, wherein a portion of the gate electrode is formed over a drain-side edge portion of the source eType: ApplicationFiled: August 4, 2011Publication date: October 25, 2012Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.Inventors: Woo Chul Jeon, Ki Yeol Park, Young Hwan Park
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Publication number: 20120267639Abstract: Disclosed herein are a nitride semiconductor device and a method for manufacturing the same. According to an exemplary embodiment, there is provided a nitride semiconductor device, including: a nitride semiconductor layer having a 2DEG channel; a drain electrode ohmic-contacted with the nitride semiconductor layer; a source electrode Schottky-contacted with the nitride semiconductor layer, including a plurality of patterned protrusion portions protruded to the drain electrode direction, and including an ohmic pattern ohmic-contacted with the nitride semiconductor layer therein; a dielectric layer disposed on the nitride semiconductor layer between the drain electrode and the source electrode and over at least a portion of the source electrode including the patterned protrusion portions; and a gate electrode disposed on the dielectric, wherein a portion of the gate electrode is disposed on the dielectric layer over the patterned protrusion portions and a drain direction edge portion of the source electrode.Type: ApplicationFiled: April 17, 2012Publication date: October 25, 2012Applicant: Samsung Electro-Mechanics Co., Ltd.Inventors: Woo Chul JEON, Ki Yeol Park, Young Hwan Park
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Publication number: 20120267636Abstract: A lateral HEMT includes a substrate, a first semiconductor layer above the substrate and a second semiconductor layer on the first semiconductor layer. The lateral HEMT further includes a gate electrode, a source electrode, a drain electrode and a rectifying Schottky junction. A first terminal of the rectifying Schottky junction is electrically coupled to the source electrode and a second terminal of the rectifying Schottky junction is electrically coupled to the second semiconductor layer.Type: ApplicationFiled: April 20, 2011Publication date: October 25, 2012Applicant: INFINEON TECHNOLOGIES AUSTRIA AGInventors: Markus Zundel, Franz Hirler
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Patent number: 8293609Abstract: Semiconductor transistor devices and related fabrication methods are provided. An exemplary transistor device includes a layer of semiconductor material having a channel region defined therein and a gate structure overlying the channel region. Recesses are formed in the layer of semiconductor material adjacent to the channel region, such that the recesses extend asymmetrically toward the channel region. The transistor device also includes stress-inducing semiconductor material formed in the recesses. The asymmetric profile of the stress-inducing semiconductor material enhances carrier mobility in a manner that does not exacerbate the short channel effect.Type: GrantFiled: January 20, 2012Date of Patent: October 23, 2012Assignee: GLOBALFOUNDRIES, Inc.Inventors: Rohit Pal, Frank Bin Yang, Michael J. Hargrove
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Publication number: 20120261720Abstract: A method for manufacturing a HEMT transistor includes: realizing an undoped epitaxial layer on a substrate; realizing a barrier epitaxial layer on the undoped epitaxial layer so as to form a heterojunction; realizing source and drain structures, separated from one other, on the barrier epitaxial layer; depositing an insulating layer on the barrier epitaxial layer and on the source and drain structures; and photolithographic defining the insulating layer, defining first and second insulating portions in correspondence of the source and drain structures, respectively, and exposing a portion of the barrier epitaxial layer. The method further comprises: forming first and second spacers lying at the corners of the first and second insulating portions; and depositing a gate metal structure at least partially covering said first and second insulating portions, and said first and second spacers, said gate metal structure being a field plate of the HEMT transistor.Type: ApplicationFiled: April 6, 2012Publication date: October 18, 2012Applicant: STMicroelectronics S.r.I.Inventors: Valeria Puglisi, Corinna Altamore, Giovanni Abagnale
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Patent number: 8288796Abstract: One embodiment of a semiconductor device according to the present invention includes a substrate, a base compound semiconductor layer layered on the substrate to form a base, a channel defining compound semiconductor layer layered on the base compound semiconductor layer to define a channel, and an impact ionization control layer that is layered within a layering range of the base compound semiconductor layer and controls the location of impact ionization, wherein the base compound semiconductor layer is formed of a first compound semiconductor, the channel defining compound semiconductor layer is formed of a second compound semiconductor, and the impact ionization control layer is formed of a third compound semiconductor that has a smaller band gap than the first compound semiconductor.Type: GrantFiled: May 21, 2010Date of Patent: October 16, 2012Assignee: Sharp Kabushiki KaishaInventors: Nobuyuki Ito, John Kevin Twynam
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Publication number: 20120256233Abstract: An integrated electrostatic discharge (ESD) shunting circuit includes a III-V semiconductor layer, and a first drain-less high electron mobility transistor (HEMT) or a metal-semiconductor FET (MESFET) transistor having a first gate and at least a second drain-less HEMT or MESFET having a second gate formed in the substrate. The HEMTs or MESFETs include a donor layer on the semiconductor layer, no drains, and a source including an ohmic contact layer on the donor layer.Type: ApplicationFiled: March 29, 2012Publication date: October 11, 2012Applicant: University of Central Florida Research Foundation, Inc.Inventors: QIANG CUI, JUIN JEI LIOU
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Patent number: 8283672Abstract: Methods for integrating wide-gap semiconductors with synthetic diamond substrates are disclosed. Diamond substrates are created by depositing synthetic diamond onto a nucleating layer deposited or formed on a layered structure including at least one layer of gallium nitride, aluminum nitride, silicon carbide, or zinc oxide. The resulting structure is a low stress process compatible with wide-gap semiconductor films, and may be processed into optical or high-power electronic devices. The diamond substrates serve as heat sinks or mechanical substrates.Type: GrantFiled: June 12, 2009Date of Patent: October 9, 2012Assignee: Group4 Labs, Inc.Inventors: Daniel Francis, Felix Ejeckam, John Wasserbauer, Dubravko Babic
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Patent number: 8278687Abstract: Semiconductor heterostructures to reduce short channel effects are generally described. In one example, an apparatus includes a semiconductor substrate, one or more buffer layers coupled to the semiconductor substrate, a first barrier layer coupled to the one or more buffer layers, a back gate layer coupled to the first barrier layer wherein the back gate layer includes a group III-V semiconductor material, a group II-VI semiconductor material, or combinations thereof, the back gate layer having a first bandgap, a second barrier layer coupled to the back gate layer wherein the second barrier layer includes a group III-V semiconductor material, a group II-VI semiconductor material, or combinations thereof, the second barrier layer having a second bandgap that is relatively larger than the first bandgap, and a quantum well channel coupled to the second barrier layer, the quantum well channel having a third bandgap that is relatively smaller than the second bandgap.Type: GrantFiled: March 28, 2008Date of Patent: October 2, 2012Assignee: Intel CorporationInventors: Ravi Pillarisetty, Mantu K. Hudait, Marko Radosavljevic, Gilbert Dewey, Titash Rakshit, Robert S. Chau
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Publication number: 20120235160Abstract: Normally-off semiconductor devices are provided. A Group III-nitride buffer layer is provided. A Group III-nitride barrier layer is provided on the Group III-nitride buffer layer. A non-conducting spacer layer is provided on the Group III-nitride barrier layer. The Group III-nitride barrier layer and the spacer layer are etched to form a trench. The trench extends through the barrier layer and exposes a portion of the buffer layer. A dielectric layer is formed on the spacer layer and in the trench and a gate electrode is formed on the dielectric layer. Related methods of forming semiconductor devices are also provided herein.Type: ApplicationFiled: May 30, 2012Publication date: September 20, 2012Inventors: Sten Heikman, Yifeng Wu
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Publication number: 20120235209Abstract: According to one exemplary embodiment, a rectifier circuit includes a diode. A first depletion-mode transistor is connected to a cathode of the diode. Also, at least one second depletion-mode transistor is in parallel with the first depletion-mode transistor and is configured to supply a pre-determined current range to a cathode of the diode. A pinch off voltage of the at least one second depletion-mode transistor can be more negative than a pinch off voltage of the first depletion-mode transistor and the at least one second depletion-mode transistor can be configured to supply the pre-determined current range while the first depletion-mode transistor is OFF. Also, the pre-determined current range can be greater than a leakage current of the first depletion-mode transistor.Type: ApplicationFiled: November 3, 2011Publication date: September 20, 2012Applicant: INTERNATIONAL RECTIFIER CORPORATIONInventors: Michael A. Briere, Naresh Thapar
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Publication number: 20120235159Abstract: Group III Nitride based field effect transistor (FETs) are provided having a power degradation of less than about 3.0 dB when operated at a drain-to-source voltage (VDS) of about from about 28 to about 70 volts, a gate to source voltage (Vgs) of from about ?3.3 to about ?14 volts and a normal operating temperature for at least about 10 hours.Type: ApplicationFiled: May 30, 2012Publication date: September 20, 2012Inventors: Richard Peter Smith, Scott T. Sheppard, Adam William Saxler, Yifeng Wu
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Patent number: 8269259Abstract: Some exemplary embodiments of a semiconductor device using a III-nitride heterojunction and a novel Schottky structure and related method resulting in such a semiconductor device, suitable for high voltage circuit designs, have been disclosed. One exemplary structure comprises a first layer comprising a first III-nitride material, a second layer comprising a second III-nitride material forming a heterojunction with said first layer to generate a two dimensional electron gas (2DEG) within said first layer, an anode comprising at least a first metal section forming a Schottky contact on a surface of said second layer, a cathode forming an ohmic contact on said surface of said second layer, a field dielectric layer on said surface of said second layer for isolating said anode and said cathode, and an insulating material on said surface of said second layer and in contact with said anode.Type: GrantFiled: December 7, 2009Date of Patent: September 18, 2012Assignee: International Rectifier CorporationInventor: Zhi He
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Patent number: 8268707Abstract: Described herein is a liquid crystal (LC) device having Gallium Nitride HEMT electrodes. The Gallium Nitride HEMT electrodes can be grown on a variety of substrates, including but not limited to sapphire, silicon carbide, silicon, fused silica (using a calcium fluoride buffer layer), and spinel. Also described is a structure provided from GaN HEMT grown on large area silicon substrates and transferred to another substrate with appropriate properties for OPA devices. Such substrates include, but are not limited to sapphire, silicon carbide, silicon, fused silica (using a calcium fluoride buffer layer), and spinel. The GaN HEMT structure includes an AlN interlayer for improving the mobility of the structure.Type: GrantFiled: June 17, 2010Date of Patent: September 18, 2012Assignee: Raytheon CompanyInventors: Daniel P. Resler, William E. Hoke
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Patent number: 8269283Abstract: The present disclosure relates to the field of fabricating microelectronic devices. In at least one embodiment, the present disclosure relates to forming isolation structures in strained semiconductor bodies of non-planar transistors while maintaining strain in the semiconductor bodies.Type: GrantFiled: December 21, 2009Date of Patent: September 18, 2012Assignee: Intel CorporationInventors: Stephen M. Cea, Martin D. Giles, Kelin Kuhn, Jack T. Kavalieros, Markus Kuhn
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Patent number: 8269253Abstract: According to one embodiment, a high electron mobility transistor (HEMT) comprises an insulator layer comprising a first group III-V intrinsic layer doped with a rare earth additive. The HEMT also comprises a second group III-V intrinsic layer formed over the insulator layer, and a group III-V semiconductor layer formed over the second group III-V intrinsic layer. In one embodiment, a method for fabricating a HEMT comprises forming a first group III-V intrinsic layer and doping the first group III-V intrinsic layer with a rare earth additive to produce an insulator layer. The method also comprises forming a second group III-V intrinsic layer over the insulator layer, and further forming a group III-V semiconductor layer over the second group III-V intrinsic layer. A two-dimensional electron gas (2DEG) is formed at a heterojunction interface of the group III-V semiconductor layer and the second group III-V intrinsic layer.Type: GrantFiled: June 8, 2009Date of Patent: September 18, 2012Assignee: International Rectifier CorporationInventor: Ronald H. Birkhahn
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Publication number: 20120228675Abstract: A transistor device capable of high performance at high temperatures. The transistor comprises a gate having a contact layer that contacts the active region. The gate contact layer is made of a material that has a high Schottky barrier when used in conjunction with a particular semiconductor system (e.g., Group-III nitrides) and exhibits decreased degradation when operating at high temperatures. The device may also incorporate a field plate to further increase the operating lifetime of the device.Type: ApplicationFiled: May 24, 2012Publication date: September 13, 2012Inventors: Sten Heikman, Yifeng Wu
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Publication number: 20120228672Abstract: The present invention concerns a method for forming a Semiconductor-On-Insulator structure that includes a semiconductor layer of III/V material by growing a relaxed germanium layer on a donor substrate; growing at least one layer of III/V material on the layer of germanium; forming a cleaving plane in the relaxed germanium layer; transferring a cleaved part of the donor substrate to a support substrate, with the cleaved part being a part of the donor substrate cleaved at the cleaving plane that includes the at least one layer of III/V material. The present invention also concerns a germanium on III/V-On-Insulator structure, a N Field-Effect Transistor (NFET), a method for manufacturing a NFET, a P Field-Effect Transistor (PFET), and a method for manufacturing a PFET.Type: ApplicationFiled: February 17, 2012Publication date: September 13, 2012Applicant: SOITECInventors: Nicolas Daval, Bich-Yen Nguyen, Cecile Aulnette, Konstantin Bourdelle