Abstract: Provided are a diagnosis device in which a bio-chemical reaction between a reference sample and a target sample occurs and a result of the bio-chemical reaction can be detected and a method of manufacturing the diagnosis device. The diagnosis device includes an image sensor where a plurality of photo-detectors are formed; a polymer layer which is made of a polymer material and formed on an upper portion of the image sensor; and a plurality of wells which are formed corresponding to the plurality of photo-detectors on the polymer layer, wherein an inner portion of each well is empty.

Abstract: The invention relates to optical elements with gradient structure, in particular for holographic applications, wherein the gradient structure is formed by a refractive index gradient and a method for production of said optical elements with gradient structure.

Abstract: A type and polarization selective device for Raman spectroscopy includes a set of at least two antennas and a gap at their intersection. First antenna geometry is such that it is configured to resonate, for first or second (different from the first) polarization, at a predetermined stimulation frequency of a material for which Raman scattering is to be studied, or at a Stokes or anti-Stokes frequency corresponding with the material when excited at stimulation frequency. Second antenna geometry is such that it is configured to resonate, for the other of second or first polarization, at the Stokes frequency when the first antenna is configured to resonate at the stimulation or anti-Stokes frequency, or at the anti-Stokes frequency when the first antenna is configured to resonate at the stimulation or Stokes frequency, or at the stimulation frequency when the first antenna is configured to resonate at the Stokes or anti-Stokes frequency.

Abstract: A sheeting and a method of forming a sheeting from a master tool are described where the sheeting has a composite image that floats above or below the sheeting. The method includes providing a first sheeting comprising a first array of microlenses and a photopolymerizable first material layer adjacent to the first array of microlenses. Another step is exposing the first sheeting to a radiation source to form a master tool comprising a plurality of polymerized first structured areas in the first material layer, wherein at least some of the first structured areas include a portion shape in common with at least some of the first structured areas and wherein each first structured area is associated with one of the first array of microlenses. Yet another step is replicating the plurality of first structured areas using a substance that conforms to the plurality of structured areas to form a second material layer having a plurality of replicated structured areas.

Abstract: An optical limiting structure includes a metal layer with a single metal particle or a plurality of metal particles spaced from each other so as to form an array, where the metal particles have sizes no greater than about 1000 nanometers. A phase-change material layer is disposed adjacent at least a portion of the metal layer, where the phase-change material layer includes a phase-change material. The optical limiting structure is configured to transition from a first optical state to a second optical state, where the optical limiting structure substantially limits transmittance of light of at least one wavelength through the optical limiting structure at the second optical state, and the at least one wavelength at which the optical limiting structure substantially limits transmittance of light is different from any wavelength of light at which transmittance is substantially limited through the phase-change material prior to integration into the optical limiting structure.

Abstract: Provided are an optical device and a method of fabricating the same. The optical device includes: a substrate; and a ring resonator on the substrate. The ring resonator includes: a cladding layer including a lower cladding layer and an upper cladding layer on the substrate; a core including a plurality of rings between the lower cladding layer and the upper cladding layer; and an embeded layer interposed between the core and the cladding layer and having a refractive index less than that of the core and more than that of the cladding layer.

Abstract: A display apparatus including a display panel, a plurality of light sources provided below the display panel to emit light, and an optical plate provided between the display panel and the light sources to diffuse light are disclosed according to one or more embodiments. The optical plate comprises a base including a plurality of regions having different thicknesses, and a convex pattern formed on the base.

Abstract: Compounds of the formula (I), wherein X is a single bond, CRaRbO, S, NRc or NCORc; Z is formula (II) or C3-C20heteroaryl; L, L1, L2, L3, L4, L5, L6, L7 and L8 for example independently of one another are hydrogen or an organic substituent; Ra, Rb and Rc independently of one another are hydrogen or an organic substituent; R is for example is C5-C20heteroaryl or C6-C14 aryl; and Y is an inorganic or organic anion; are suitable as photolatent acid generators.

Abstract: Compounds of the Formula (I), wherein L1, L?1, L?1, L2, L?2, L?2, L3, L?3, L?3, L4, L?4 and L?4 for example are hydrogen or COT; R, R? and R? for example are hydrogen, C6-C12aryl or C3-C20heteroaryl; X, X? and X? for example are O, S, single bond, NRa or NCORa, T is for example hydrogen, C1-C20alkyl, C3-C12cycloalkyl, C2-C20alkenyl, C5-C12cycloalkenyl, C7-C18cycloalkylenaryl, C5-C18cycloalkylenheteroaryl, C6-C14aryl, providedthat at least one of R, R? or R? is unsubstituted or substituted C3-C20heteroaryl; and Y is an inorganic or organic anion; are suitable as photolatent acid generators.

Abstract: The optical element position adjusting mechanism includes a holding member for holding an outer periphery of an optical element, a fixing portion for pivotally fixing the holding member to adjust the position of the optical element, a clamping portion capable of fixing or releasing the holding member against the fixing portion, a driving section for driving the holding member fixed to the fixing portion by the clamping portion in a pivot direction, and a flexure that is interposed between the clamping portion and the holding member and elastically deforms to guide the holding member driven by the driving section in the pivot direction about the clamping portion. The holding member positioned by the pivot is released from the fixing portion by the clamping portion to restore the flexure to the state prior to being elastically deformed, whereby it is again fixed to the fixing portion by the clamping portion.

Abstract: A large mask with random apertures may be formed by forming a smaller mask (also called a cell mask) with a random pattern of transmissive apertures which is then repeatedly replicated to create the large mask. The random pattern may be created by perturbing the aperture locations by a small amount or the apertures may be randomly placed within the cell mask provided certain criteria are met. Alternatively, a large mask with a random pattern of transmissive apertures may be formed without using a cell mask. This large mask may be used to fabricate diffusers and other devices that do not suffer from the interference, diffraction and other optical effects common in devices having structures that are non-randomly patterned.

Abstract: A method of fabricating a grayscale mask includes preparing a silicon wafer; depositing a layer of Si3N4 directly on the silicon wafer; implanting H+ ions into the silicon wafer to form a defect layer; depositing a first layer of SiOxNy directly on the Si3N4 layer; depositing a layer of SRO directly on the first layer of SiOxNy; patterning and etching the SRO layer to form a microlens array in the SRO layer; depositing a second layer of SiOxNy on the SRO microlens array; CMP to planarize the second layer of SiOxNy; bonding and cleaving the planarized SiOxNyto a quartz plate to form a graymask reticle; etching to remove silicon from the bonded structure; etching to remove SiOxNy and Si3N4 from the bonded structure; and cleaning and drying the graymask reticle.

Abstract: A method for manufacturing a patterned thin-film layer includes the steps of: providing a substrate with a plurality of banks thereon, the plurality of banks defining a plurality of spaces therein for receiving ink therein, each of the banks having a top surface; providing a UV light source for emitting UV light toward the substrate; disposing a photo mask between the UV light source and the substrate; applying UV light on the substrate through the photo mask so as to reduce surface wettability of the ink on the top surfaces of the substrate, wherein the UV light is applied in a manner that the top surfaces of the banks are blocked by the photo mask and thus free of radiation from the UV light emitted from the UV light source; applying the ink into the spaces; and curing the ink so as to form a patterned thin-film layer on the substrate.

Abstract: The invention provides an optical mux/demux for an optical printed circuit board. The mux/demux comprises: a first waveguide formed on a support layer for carrying a wavelength division multiplexed optical signal; a separator/combiner for separating the wavelength division multiplexed signal into component signals of corresponding wavelengths or for combining component signals into the said wavelength division multiplexed signal; and plural second waveguides, each for receiving or providing one or more of the said component signals, wherein the separator/combiner is at a predetermined location relative to the waveguides.

Abstract: A lens forming method according to the present invention for forming lenses capable of focusing light on a plurality of respective photoelectric conversion sections constituting of a semiconductor apparatus is described. The method includes a lens forming step of processing a lens forming material, in which an average gradient of a ? curve indicating a residual film thickness with respect to the amount of irradiation light is between ?15 and ?0.8 nm·cm2/mJ within the range of a residual film ratio of 10 to 50% or within the range of the amount of irradiation light of 55 to 137 mJ/cm2 into a lens surface shape, using a photomask with an optical transmittance that is varied according to a lens surface shape, as an exposure mask.

Abstract: Lightguides, devices incorporating lightguides, and processes for making lightguides are described. A lightguide includes light extractors arranged in a pattern on a surface of the lightguide. The pattern of light extractors is arranged to enhance uniformity of light output across a surface of the lightguide and to provide enhanced defect hiding. The efficiency of the light extractors is controlled by a shape factor. The areal density of the light extractors across the surface of the lightguide may be substantially constant or may decrease along the direction of propagation of light from the light source.

Abstract: A photocuring composition includes black particles (A), black particles (B), an organic binder (C), a photopolymerizable monomer (D), and a photopolymerization initiator (E). The black particles (B) have a volume resistivity lower than the volume resistivity of the black particles (A) and an average diameter larger than the average diameter of the black particles (A).

Abstract: A stamper is formed so that a thickness between a concave/convex pattern formation surface, where a concave/convex pattern is formed, and a rear surface gradually decreases in a predetermined area of the stamper. The predetermined area corresponds to an area where pressure is likely to be concentrated when the concave/convex pattern of the stamper is used to form a concave/convex pattern on a substrate. A method of forming a concave/convex pattern uses such stamper, and a method of manufacturing an information recording medium uses a concave/convex pattern formed by such method.

Abstract: The present invention relates to an optical waveguide prepared by laminating a first cladding layer, a patterned core layer and a second cladding layer in this order on a base material, wherein the core layer has a height of 20 ?m or more, and a curing rate in a range of 10 ?m from a circumference of the core layer in the second cladding layer is 95% or more.

Abstract: A method for producing an optical part includes an irradiation process for irradiating a radiation-sensitive polymerizable composition with a radiation. The radiation-sensitive polymerizable composition includes at least a polymerizable compound (a) and a polymerizable or non-polymerizable component (c). The irradiation process includes at least a first step of irradiating with a radiation only a first irradiation region that is a portion of the radiation-sensitive polymerizable composition and a second step of irradiating with a radiation only a second irradiation region that is a portion of the radiation-sensitive polymerizable composition and is different from the first irradiation region in at least one of size and position. When the component (c) is polymerizable, the polymerization rate of the component (c) is controlled to be lower than that of the polymerizable compound (a) in the first and the second steps.

Abstract: In a semi-transmission liquid crystal display device, two resist masks are required to form a reflective electrode and a transparent electrode; therefore, cost is high. A transparent electrode and a reflective electrode which function as a pixel electrode are stacked. A resist pattern which includes a region having a thick film thickness and a region having a thinner film thickness than the aforementioned region is formed over the reflective electrode by using a light exposure mask which includes a semi-transmission portion. The reflective electrode and the transparent electrode are formed by using the resist pattern. Therefore, the reflective electrode and the transparent electrode can be formed by using one resist mask.

Abstract: Disclosed is a resin composition for an optical material which contains a base polymer (A), a photopolymerizable compound (B), and a photopolymerization initiator (C). Also disclosed is a resin film for an optical material which is made of such a resin composition for an optical material. Specifically disclosed is a resin composition for an optical material which has high transparency and high heat resistance, while enabling formation of a thick film with high precision. This resin composition is particularly useful for a resin film which is used for forming optical waveguides. Also specifically disclosed are a resin film for an optical material using such a resin composition and an optical waveguide using such a resin film.

Abstract: A black matrix for a color filter and its method of manufacture include: forming the black matrix in a predetermined shape on a substrate to define a plurality of pixel regions: forming a light shade layer on the substrate, the light shade layer being formed of an ink-philic black material; and forming a Carbon NanoTube (CNT) layer on an upper surface of the light shade layer.

Abstract: The present invention provides an optical component, a manufacturing method of the same and a backlight module including the foregoing optical component. The optical component includes a plurality of microstructures and reflecting members. The microstructure is extended along a first direction and arranged along a second direction on a light exit surface, and a distance between the first curve and the second curve in the second direction is not equal and not parallel, and a distance between the second curve and another first curve in the second direction being not equal and not parallel. Each reflecting member is extended along the first direction and arranged along the second direction on a light entrance surface and the position of each reflecting member is among two microstructures.

Abstract: A fabrication method of a brightness enhancement film (BEF) including the following steps is provided. A light transmissive substrate is provided and has a first surface and a second surface opposite to the first surface. Then, a plurality of first rod-shaped lenses are formed on the first surface. The rod-shaped lenses extend along a first direction and are arranged along a second direction. After that, a plurality of second stripe-shaped prisms are formed on the second surface. The stripe-shaped prisms extend along the second direction and are arranged along the first direction. Next, an electromagnetic wave beam is made to pass through the rod-shaped lenses, the light transmissive substrate and the stripe-shaped prisms in sequence. A first portion of each of the stripe-shaped prisms exposes and leaves a second portion of each of the stripe-shaped prisms unexposed. Then, the second portions of the stripe-shaped prisms are removed.

Abstract: Narrow surface corrugated gratings for integrated optical components and their method of manufacture. An embodiment includes a grating having a width narrower than a width of the waveguide on which the grating is formed. In accordance with certain embodiments of the present invention, masked photolithography is employed to form narrowed gratings having a desired grating strength. In an embodiment, an optical cavity of a laser is formed with a reflector grating having a width narrower than a width of the waveguide. In another embodiment an integrated optical communication system includes one or more narrow surface corrugated gratings.

Abstract: It is to suppress the interference of the reflected light easily and securely even in a highly fine liquid crystal display device. The reflection plate comprises recessed or protruded parts and a reflection film formed over the recessed or protruded parts. A unit shape of the recessed or protruded parts is a polygon, an arbitrary point other than a centroid of the polygon that constitutes the recessed or protrude part is placed at a position that meets with an orderly-mannered lattice point as an origin, and each of the unit-shape polygons is arranged at a position that is rotated randomly with respect to the origin.

Abstract: The present invention comprises a light modulation optical system having a first element which forms a desired light intensity gradient distribution to an incident light beam and a second element which forms a desired light intensity minimum distribution with an inverse peak shape to the same, and an image formation optical system which is provided between the light modulation optical system and a substrate having a polycrystal semiconductor film or an amorphous semiconductor film, wherein the incident light beam to which the light intensity gradient distribution and the light intensity minimum distribution are formed is applied to the polycrystal semiconductor film or the amorphous semiconductor film through the image formation optical system, thereby crystallizing a non-crystal semiconductor film. The pattern of the first element is opposed to the pattern of the second element.

Abstract: An exposure mask of the present invention is an exposure mask for patterning a three-dimensional shape on a resist. The exposure mask comprises a first region where a plurality of openings having a first size smaller than a resolution limit of an exposure apparatus are arranged, a second region where a plurality of openings having a second size smaller than the first size are arranged, and a third region where the plurality of openings having the first size and the plurality of openings having the second size are mixed and arranged between the first region and the second region.

Abstract: Polymers, methods of use thereof, and methods of decomposition thereof, are provided. One exemplary polymer, among others, includes, a photodefinable polymer having a sacrificial polymer and a photoinitiator.

Abstract: Disclosed is a method for producing a plastic lens having reflow heat resistance at 260° C., which is characterized in that a photosensitive resin composition containing a specific resin and a photopolymerization initiator is molded into a lens shape. The resin is obtained by mining one or more compounds (a) selected from the group consisting of (CH3O)3—Si—(CH2)3—O—CO—C(CH3)?CH2, (CH3O)3—Si—(CH2)3—O—CO—CH?CH2, (CH3O)3—Si—(CH2)x—CH?CH2 (wherein X is 1 or 2), (CH3O)2—Si(CH3)(CH2)3—O—CO—C(CH3)?CH2, (CH3O)2—Si(CH3)(CH2)3—O—CO—CH?CH2 and (CH3O)2—Si(CH3)—(CH2)x—CH?CH2 (wherein X is 1 or 2) with a compound (b) represented by (C6H5)2—Si—(OH)2 such that 50-150 moles of the compounds (a) is mixed per 100 moles of the compound (b), and then polycondensing the mixture at 40-15° C. for 0.1-10 hours in the presence of a catalyst.

Abstract: A recessed portion forming method for forming a plurality of recessed portions in a thermally deformable heat mode recording material layer is provided, which method includes: a recessed portion forming step of applying condensed light emitted from an optical system including a light source, to the recording material layer to form the recessed portions; an inspection light illumination step of applying inspection light to the recessed portions during or after formation of the recessed portions in the recording material layer; a detection step of detecting a light quantity of the inspection light reflected or diffracted from the recessed portions; and an output regulation step of regulating an output of the light source based upon the light quantity so that the light quantity becomes a predetermined value. Methods for manufacturing a pit-projection product, a light emitting element, and an optical element, using this method are also provided.

Abstract: Optical devices fabricated from solvent processible polymers suffer from susceptibility to solvents and morphological changes. A semiconductive polymer capable of luminescence in an optical device is provided. The polymer comprises a luminescent film-forming solvent processible polymer which contains cross-linking so as to increase its molar mass and to resist solvent dissolution, the cross-linking being such that the polymer retains semiconductive and luminescent properties.

Abstract: Liquid crystalline epoxy compounds, compositions including the compounds, and methods of using the compositions are disclosed. In one aspect, an epoxy compound may have a melting point that is less than 140° C. and may be liquid crystalline at a temperature greater than 150° C.

Abstract: Disclosed herein are a self-standing parallel plate beam splitter, a method for manufacturing the same, and a laser diode package structure using the same. The self-standing parallel plate beam splitter according to the present invention is easy to manufacture and is applicable to various laser diode packages, thereby enabling easy implementation of a laser diode package that is capable of performing bidirectional communication, a laser diode package having a triplexer function, a laser diode package having a wavelength locking function, and a laser diode package having a front side monitoring function to monitor the operation state of a laser diode chip using some of laser light emitted from the front side of the laser diode chip.

Abstract: Various methods of producing a security document or article including a diffractive optical microstructure are disclosed. One method includes applying an opacifying layer (102) to at least one surface of a transparent substrate (100). An area of the opacifying layer (102) is exposed to laser radiation (108) to ablate apertures (110) in selected portions of the opacifying layer (102), thereby forming a diffractive optical microstructure (112) on the surface of the substrate (100). The laser radiation may be patterned prior to exposing the opacifying layer (102), for example by passing the radiation through a mask (104). Alternatively, a focussed or collimated laser beam (206) may be directed onto the selected portions of the opacifying layer (102). Laser radiation may be directed onto the opacifying layer (102) either directly, or through the transparent substrate (100). Security documents or articles made in accordance with the method are also provided.

Abstract: A resin composition for an optical material, which is excellent in heat resistance and transparency and is soluble in an aqueous alkali solution, a resin film for an optical material made of the resin composition, and an optical waveguide using the same are provided. The resin composition for an optical material includes: (A) an alkali-soluble (meth)acrylate polymer containing a maleimide skeleton in a main chain; (B) a polymerizable compound; and (C) a polymerization initiator. The resin film for an optical material is made of the resin composition for an optical material. The optical waveguide has a core part and/or a clad layer formed using the resin composition for an optical material or the resin film for an optical material.

Abstract: A blazed grating is disclosed as well as mode hop-free tunable lasers and a process for fabricating gratings of this type. The grating lies in a general plane and includes a plurality of elongate beams carrying mutually parallel respective reflection surfaces spaced apart from one another with a predefined pitch, each of these reflection surfaces having a normal direction inclined at a grating angle ? to the normal direction of the general plane. The grating includes a plurality of resilient suspension arms connected to the beams and intended to be fastened to a grating support. A first pair of comb electrodes is provided for applying a mechanical force to this assembly, being placed on a first side of the grating, along an axis transverse to the beams, and designed so as to allow the pitch of the grating to be modified in response to the application of the mechanical force.

Abstract: A display apparatus is provided which can detect light of a predetermined wavelength with a high degree of accuracy from within light incident from a screen by a simple configuration. The display apparatus includes a CF substrate (9) having a plurality of color filters (31) of different colors for passing light for displaying an image on the screen (55a) and an IR filter (33) provided in a region different from an arrangement region of the color filters of the different colors for passing light incident from the screen (55a), and a main sensor (19) provided on the rear side of the IR filter (33) for detecting light incident from the screen (55a) and passing through the IR filter (33). The IR filter (33) has a laminate of filter materials same as filter materials from which at least two or more ones of the color filters of the different colors are formed respectively.

Abstract: A method of fabricating a micro lens, the method including: forming a photo-sensitive film on a substrate; placing a photo mask at a predetermined distance from a top of the photo-sensitive film; exposing the photo-sensitive film by varying an area of exposure of the photo-sensitive film so as to selectively expose three-dimensional structures of the photo-sensitive film corresponding to desired micro lenses; and developing the photo-sensitive film such that the exposed three-dimensional structures remain. Also, there is provided a method of fabricating a master for a micro lens, in which a master material is applied on the photo-sensitive film with the three-dimensional structures to form a master having the three-dimensional structures transferred thereonto.

Abstract: A method of fabricating a printing plate includes: preparing a substrate; forming a metal layer on an entire surface of the substrate; forming a resist pattern on the metal layer, the resist pattern having a fine pattern exposing a portion of the metal layer; wet etching the exposed metal layer, and removing the resist pattern to form a metal layer pattern exposing a portion of the substrate; wet etching the exposed substrate, and removing the metal layer pattern to form a recessed pattern; and forming a compensation layer on an entire surface of the substrate where the recessed pattern is formed.

Abstract: First, a display panel having a pixel region and a controlling circuit region is formed. Then a plurality of pixels arranged in array is formed in the pixel region. A plurality of orientation patterns that do not overlap the pixels is formed. Finally an input device is provided. The input device has a sensor adapted to detect the orientation patterns and generates at least a signal adapted to input data.

Abstract: Optical microstructures, such as microlenses, are fabricated by rotating a cylindrical platform that includes a radiation sensitive layer thereon, about its axis, while simultaneously axially rastering a laser beam across at least a portion of the radiation sensitive layer. The cylindrical platform is also simultaneously translated axially while it is being rotated. The amplitude of the laser beam is continuously varied while rastering. The optical microstructures that are imaged in the radiation sensitive layer can be developed to provide a master for replicating a microlenses.

Abstract: A stamper production method includes: a stamper forming step of producing, by electroplating processing using a matrix in which a pit string constituted of a concave pit is formed on an inorganic resist layer based on recording information, a stamper on which a convex pit corresponding to the concave pit is formed; and an etching step of carrying out etching processing on the stamper so that a reduction ratio of a pit height of a short pit becomes larger than that of a long pit regarding the convex pit of the stamper.

Abstract: A method for manufacturing an optical element that has a function to polarize and split incident light includes: a) forming a grid portion on a face of a substrate in a plural number with a predetermined pitch; b) forming a diffractive structure resist pattern on the face of the substrate, the diffractive structure resist pattern corresponding to a diffractive structure that has a plurality of concave portions and a plurality of convex portions, the concave portions and the convex portions being arranged alternatively on the face of the substrate; c) forming the diffractive structure by etching the substrate anisotropically in a thickness direction with the diffractive structure resist pattern; and d) forming a fine line on the grid portion by depositing a reflective material from an oblique direction onto the face of the substrate where the diffractive structure is provided, the fine line being provided in a direction in which the grid portion extends.

Abstract: A laser mask and method of crystallization using the same that can produce a polycrystalline silicon thin film having uniform crystallization characteristics. According to the present invention, a method of crystallization using a laser mask having a reference pattern in a first block and the reverse pattern of the reference pattern in a second block includes providing a substrate having a silicon thin film; positioning the first block of the laser mask over a portion of the silicon film and irradiating a first laser beam through the first block; and moving either the laser mask or the substrate to position the second block of the laser mask over the portion of the silicon film and irradiating a second laser beam through the second block.

Abstract: A method and system for providing multi-color holographic optical traps and patterns. The method and system employs a laser beam which interacts with a diffractive optical element with a hologram and for optics which acts to selectively pass or attenuate different light color wavelengths and to position the particular color light at selected different locations to form the different color holographic optical trap patterns and to use these patterns for various commercial purposes.

Abstract: A photosensitive resin composition according to the present invention includes: a copolymer having a repeating unit having a thermal crosslinking group; and a photosensitive agent. As such, the photosensitive resin composition according to the present invention can form a resin with improved heat resistance. Further, a microlens-forming photosensitive resin composition according to the present invention includes: a copolymer having a repeating unit having a thermal crosslinking group; and a photosensitive agent, the copolymer having a mass-average molecular weight of 10,000 to 30,000. As such, the microlens-forming photosensitive resin composition according to the present invention can form a resin with improved heat resistance.

Abstract: The present invention relates generally to electro-optically active waveguide segments, and more particularly to the use of a selective voltage input to control the phase, frequency and/or amplitude of a propagating wave in the waveguide. Particular device structures and methods of manufacturing are described herein.

Abstract: The present invention relates generally to electro-optically active waveguide segments, and more particularly to the use of a selective voltage input to control the phase, frequency and/or amplitude of a propagating wave in the waveguide. Particular device structures and methods of manufacturing are described herein.