Abstract: Embodiments of the present disclosure provide a method and an apparatus of testing a word line. After repair of a memory array is completed, if a target word line in a failure state exists in the memory array, a second numerical value is written into the target word line, and then it is determined, according to a numerical value outputted by each word line in the memory array, whether there are at least two word lines in an on-state in the memory array; if there are at least two word lines in an on-state simultaneously in the memory array, a current value generated by the target word line in an on-to-off process is detected; when the current value generated by the target word line in the on-to-off process is greater than a preset current threshold, it is determined that the target word line has a repair fault.

Abstract: A semiconductor structure and a method for forming the same are provided. The method for forming a semiconductor structure includes the following operations. A substrate is provided. A dielectric layer having a first trench is formed on the substrate. A first filling layer is formed for partially filling the first trench. A first mask layer having a first opening is formed on the dielectric layer. The first opening exposes the first filling layer and part of the dielectric layer. The dielectric is etched by taking the first mask layer as a mask to form a second trench. The first filling layer is removed. And, conductive materials are formed in the first trench and the second trench.

Abstract: Embodiments of the disclosure, there is provided a method, a system for adjusting the memory, and a semiconductor device. The method for adjusting the memory includes: acquiring a mapping relationship between a temperature of a transistor, an equivalent width-length ratio of a sense amplifier transistor in a sense amplifier and an actual time at which the data is written into the memory; acquiring a current temperature of the transistor; and adjusting the equivalent width-length ratio, based on the current temperature and the mapping relationship, so that the actual time at which the data is written into the memory corresponding to the adjusted equivalent width-length ratio is within a preset writing time.

Abstract: A memory and a method for manufacturing the same are provided. The memory includes a substrate; at least one pair of transistors on a surface of the substrate, in which conductive channels of the transistors extend in a direction perpendicular to the surface of the substrate; storage layers, which each are located at one side of the transistors and are interconnected with the conductive channels of the transistors, the pair of transistors is located between two storage layers corresponding to the pair of transistors, and the storage layers are configured to store electric charges and transfer the electric charges between the storage layers and the conductive channels interconnected therewith.

Abstract: A layout of a delay circuit unit, a layout of a delay circuit, and a semiconductor memory are provided. The layout of the delay circuit unit includes multiple layout units arranged in an array and each forming a NOT-AND (NAND) gate circuit; here several layout units conforming to a first layout pattern are sequentially arranged in a first row of the array; and several layout units conforming to a second layout pattern are sequentially arranged in a second row of the array; here the first layout pattern is different from the second layout pattern, and the first layout pattern and the second layout pattern are such that the first row and the second row form a center-symmetrical structure.

Abstract: A method for manufacturing a memory includes the following operations. A substrate and a plurality of separate initial bit line contact structures are provided, in which a plurality of active regions are formed in the substrate, and each of the initial bit line contact structures is electrically connected with the active regions, and each of the initial bit line contact structures is partially located in the substrate. Pseudo-bit line structures on the tops of the initial bit line contact structures are formed. The initial bit line contact structures are etched to form bit line contact layers and gaps between the substrate and the side walls of the bit line contact layers. First dielectric layers are formed on the side walls of the pseudo-bit line structures, in which the first dielectric layers are also located right above the gaps.

Abstract: A local amplifier circuit includes write control transistors, configured to connect, based on write enable signal, global data line to local data line; column selection transistors, configured to connect, based on column selection signal, bit line to local data line; first control PMOS transistor having gate connected to local data line, one of source or drain connected to global data line, and the other one connected to read control transistor; and second control PMOS transistor having gate connected to complementary local data line, one of source or drain connected to complementary global data line, and the other one connected to read control transistor. Read control transistors are configured to pull up or down levels at terminals of first control PMOS transistor and second control PMOS transistor, each of which is source or drain connected to a respective one of read control transistors, to preset level based on read enable signal.

Abstract: A semiconductor device, a preparation method thereof and a memory apparatus are provided. The semiconductor device includes a semiconductor substrate on which multiple strip-shaped stacked structures and a sidewall structure covering a periphery of each stacked structure are disposed, and a conductive structure is disposed on a side of the stacked structure far away from the semiconductor substrate. The stacked structure includes a conductor layer disposed on the semiconductor substrate and configured to transmit a data signal, an isolation layer disposed on a side of the conductor layer far away from the semiconductor substrate, a separation layer disposed on a side of the isolation layer far away from the semiconductor substrate and made of a low dielectric constant material, and a dielectric layer disposed on a side of the separation layer far away from the semiconductor substrate and configured to isolate the separation layer from the conductive structure.

Abstract: Embodiments of the present application relate to the field of semiconductor manufacturing technologies, in particular to a semiconductor structure and a mask plate structure. The semiconductor structure includes a substrate, where the substrate is provided therein with active areas and a plurality of bit line structures arranged at intervals in parallel in the substrate. A plurality of word line structures are arranged at intervals in parallel in the substrate. The word line structures and the bit line structures intersect to define a plurality of grids arranged in an array on the substrate. Capacitor plugs are located in the grids. Projection of each of the capacitor plugs on the substrate covers a part of one of the active areas. Cross sections of the capacitor plugs are arcuate in a cross section parallel to a surface of the substrate.

Abstract: In a bit line lead-out structure preparation method, a bit line extending in a Y-axis direction is formed on a substrate. A contact via covering the bit line in an X-axis direction is formed, the X-axis direction being perpendicular to the Y-axis direction. A metal wire covering the contact via is formed, the contact via being located between the bit line and the metal wire and being in contact with the bit line and the metal wire respectively, wherein a contact area between the contact via and the metal wire is larger than a contact area between the contact via and the bit line.

Abstract: A double-sided capacitor structure and a method for forming the same are provided. The method includes: providing a base including a substrate, capacitor contacts in the substrate, a stacked structure on a surface of the substrate, and capacitor holes penetrating through the stacked structure and exposing the capacitor contacts, and the stacked structure includes sacrificial layers and supporting layers which are alternately stacked in a direction perpendicular to the substrate; forming a first electrode layer, a first dielectric layer and a second electrode layer on inner walls of the capacitor holes; filling the capacitor holes with a first conductive material to form a first conductive filling layer; completely removing several of the sacrificial layers and/or the supporting layers to remain at least two of the supporting layers; and forming a second dielectric layer and a third electrode layer that covers a surface of the second dielectric layer.

Abstract: The present disclosure relates to a semiconductor device and a forming method thereof. The forming method includes: providing a substrate; forming node contacts inside the substrate; forming landing pads on an upper surface of the substrate, where the landing pad is in contact with the node contact; forming a barrier layer on exposed surfaces of the landing pads and the node contacts; and after performing an electrical test on the semiconductor device on which the barrier layer is formed, removing the barrier layer on an upper surface of the landing pads.

Abstract: The examples of the present application disclose a semiconductor structure and a method for manufacturing the same. The semiconductor structure includes: a functional structure and a first mark structure located on a substrate, in which the functional structure and the first mark structure have the same feature size; and a first dielectric layer located at the functional structure and the first mark structure, in which a thickness of the first dielectric layer at the functional structure is different from a thickness of the first dielectric layer at the first mark structure. The examples of the present application can improve the alignment accuracy of the manufacturing process and improve the product yield and production efficiency at the same time.

Abstract: A semiconductor structure and a manufacturing method thereof are provided. The manufacturing method of the semiconductor structure comprises: providing a substrate, comprising a polysilicon layer, a first conductive layer, a first dielectric layer, a mask layer, and a sacrificial layer sequentially formed thereon, wherein the sacrificial layer has a plurality of first trenches distributed at intervals; forming a first insulating layer on the sacrificial layer; forming a protective layer, the protective layer only covering a surface of the first insulating layer above the top surface of the sacrificial layer; removing the protective layer, part of the first insulating layer, the sacrificial layer, and part of the mask layer to form a first pattern layer; and removing part of the first dielectric layer, part of the first conductive layer, and part of the polysilicon layer by using the first pattern layer as a mask to form a BL structure.

Abstract: A semiconductor device includes a substrate, a gate oxide layer, a gate electrode and an injection region. The substrate includes a trench, a source region, a drain region and a channel region. The trench includes trench sidewalls and a trench bottom wall. The gate oxide layer is disposed in the trench. The gate oxide layer includes a groove. The gate electrode is disposed in the groove. The injection region is located on at least a side of the trench bottom wall, and at least a part of the injection region is closer to the drain region than the source region so that a threshold voltage at a portion of the channel region close to the injection region is less than a threshold voltage at a portion of the channel region far from the injection region.

Abstract: The present application discloses a semiconductor structure. The semiconductor structure includes: a substrate, the substrate being provided with a conductive structure; a first lower electrode and a second lower electrode sequentially stacked, the first lower electrode being located between the second lower electrode and the substrate, and the first lower electrode being electrically connected to the conductive structure; a first dielectric layer and a first upper electrode, the first dielectric layer covering a sidewall surface of the first lower electrode, and the first upper electrode being located on one side of the first dielectric layer away from the first lower electrode; and a second dielectric layer and a second upper electrode, the second dielectric layer covering an inner wall and a bottom surface of the second lower electrode, and the second upper electrode filling the recess of the second lower electrode.

Abstract: A semiconductor testing structure forming method includes: a semiconductor substrate is provided, and the semiconductor substrate includes a plurality of active areas arranged separately; a first conductive wire is formed at a preset distance from the plurality of active areas in the semiconductor substrate, and the first conductive wire is connected with a substrate of a respective active device formed in each of the plurality of active areas; a plurality of first contact holes is formed on the first conductive wire; and a first metal layer is formed on top of each of the plurality of first contact holes to obtain the semiconductor testing structure, where the first metal layer is electrically connected with a first common pad and the first common pad is configured to perform an electric performance test on the semiconductor testing structure.

Abstract: A film deposition method and a film deposition apparatus are provided. The film deposition method includes: putting a substrate into a furnace tube, the furnace tube including a first section for placing the substrate, the first section having an inlet for reaction gas; heating, within a first preset time, a first heating module from a first initial temperature to a first preset temperature, the first heating module surrounding the first section and being configured to heat the first section; maintaining, within a second preset time, the first heating module continuously at the first preset temperature; and within a third preset time, introducing the reaction gas into the furnace tube from the inlet, and heating the first heating module from the first preset temperature to a second preset temperature so as to form a target film on a surface of the substrate placed in the first section.

Abstract: A method for manufacturing a bit line structure includes the following operations. A bit line conductive layer is formed on a surface of a semiconductor substrate, and the bit line conductive layer is partially located in a groove in the surface of the semiconductor substrate. A first protective layer is formed on surfaces of the bit line conductive layer and the semiconductor substrate. A first barrier layer is formed on a surface of the first protective layer. The surface of the first barrier layer is subjected with passivating treatment. A sacrificial layer is formed on the surface of the first barrier layer, and is provided with a filling part filled in the groove. A part, other than the filling part, of the sacrificial layer is cleaned and stripped.

Abstract: An anti-fuse device includes: a substrate; an anti-fuse gate, partially embedded in the substrate, a portion of the anti-fuse gate embedded in the substrate having one or more sharp corners; and an anti-fuse gate oxide layer, located between the anti-fuse gate and the substrate.