Patents Assigned to Heraeus GmbH
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Patent number: 4611329Abstract: Gas laser of circular cross section perpendicular to the direction of beam propagation, having an optical resonator. The laser has, for continuous or modulated continuous beam operation, a tube as the inner electrode (2), which is connected to a high-frequency voltage source. The outer electrode (4) likewise comprises a tube which is disposed coaxially with the inner electrode (2). Between the two electrodes (2, 4) is the annular excitation chamber (3). The tube wall serving as outer electrode (4) is provided with slot-like cavities (1) which are open toward the excitation chamber (3) and serve for the cooling of the gas therein.Type: GrantFiled: September 25, 1984Date of Patent: September 9, 1986Assignee: W. C. Heraeus GmbHInventors: Volker Ernst, Hans Opower
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Patent number: 4605832Abstract: A differential pressure switch with a housing having two faces opposite each other which comprises two approximately coaxial bellows arranged in the housing, so that each bellows has one of its sides securely fastened to a face of the housing, with a dividing sheet arranged between the bellows such that two separated work chambers are formed. Each work chamber is defined by one face of the housing, by a bellows and by the dividing sheet. The dividing sheet has a section projecting sideways through the bellows for switch control.Type: GrantFiled: June 4, 1984Date of Patent: August 12, 1986Assignee: Leybold Heraeus GmbHInventor: Gerd Koopmann
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Patent number: 4594107Abstract: A lead free decorative gold composition containing a flux composed of a mixture of a vanadium compound, rhodium sulforesinate and bismuth resinate is disclosed. The preparation produces a gold decoration firmly adhering to glass and having good mechanical and chemical stability.Type: GrantFiled: May 10, 1985Date of Patent: June 10, 1986Assignee: W. C. Heraeus GmbHInventors: Wolfgang Wild, Gunter Landgraf
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Patent number: 4590983Abstract: A precision vacuum melting and casting furnace with a melting chamber containing a melting device. A casting chamber is positioned below the melting chamber. The casting chamber can be raised, lowered, and swung out to the side. The casting chamber communicates with the melting chamber through a valve chamber, which contains a vacuum valve. The valve chamber accommodates a lift platform for raising the mold up under the melting device. The casting chamber has a lifting mechanism, and the vacuum valve has an activating rod. In order to essentially simplify precise alignment of the different movable parts and to convert an existing conventional casting furnace into a furnace in accordance with the present invention, a hollow vertical shaft is attached to the valve chamber. The rod that activates the vacuum valve extends vacuum-tight through the shaft. A sleeve that guides the casting chamber is positioned at the outer surface of the shaft.Type: GrantFiled: April 25, 1985Date of Patent: May 27, 1986Assignee: Leybold-Heraeus GmbHInventors: Wolfgang Reuter, Manfred Hartmann
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Patent number: 4591537Abstract: A heat conductive ceramic substrate for semiconductor circuits, comprising polycrystalline aluminum nitride of high density containing as an additive boron nitride or oxides of calcium, magnesium, aluminum, titanium, zirconium, chrome, silicon, and/or rare earth metals. The boron nitride additive concentration ranges between 0.1 and 3% by weight, preferably between 0.5 and 2% by weight. The oxide additive concentration ranges between 0.1 and 5% by weight. The substrate has a significantly higher thermal conductivity than aluminum oxide substrates and is more economincal to manufacture than beryllium oxide substrates.Type: GrantFiled: June 5, 1985Date of Patent: May 27, 1986Assignee: W. C. Heraeus GmbHInventors: Fritz Aldinger, Richard Keilberth, Waltraud Werdecker
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Patent number: 4589369Abstract: A device for holding one or more substrates, each of substantially circular profile, especially in vacuum coating apparatus. In a vertical plate there is provided an opening on whose edge holding means are provided into which each substrate is fitted. In accordance with the invention, the opening has in its bottom area an approximately semicircular radial groove which is defined on both sides by semicircular rims. In its upper portion the opening has on one side a lip which merges with one of the rims in the lower part of the opening. On the other side there is disposed a counterbore offset eccentrically upward from the opening, whose radius is at least as great as the radius of the groove bottom. In this manner an insertion opening is formed on one side of the plate for the eccentric insertion of the substrate.Type: GrantFiled: March 20, 1985Date of Patent: May 20, 1986Assignee: Leybold Heraeus GmbHInventor: Peter Mahler
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Patent number: 4588504Abstract: An oil-sealed vacuum pump has an oil circuit which has an externally located oil filter that may be operatively connected to or disconnected from the oil circuit by a coupler. The coupler has a rotatably supported valve disc having a first face oriented towards oil circuit ports in the pump and a second face oriented towards the filter. The valve disc further has spaced first and second apertures passing therethrough and a groove provided in the first face and oriented approximately perpendicularly to an imaginary line connecting the first and second apertures with one another.Type: GrantFiled: October 1, 1985Date of Patent: May 13, 1986Assignee: Leybold-Heraeus GmbHInventors: Hanns-Peter Berges, Wolfgang Leier
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Patent number: 4574178Abstract: An electron gun with a beam generator 4, a high-voltage connection 25 and a high-voltage insulator 23 is equipped with at least one insulating transformer 26, 27 and circuit elements 43 for producing auxiliary voltages at high-voltage potential. The beam generator 4 and the high-voltage insulator 23. are surrounded by a grounded metallic jacket 32. The insulating transformer is arranged above the high-voltage insulator 23. For the purpose of solving the problem of permitting use of a single-pole high-voltage cable, the one or more insulating transformers 26, 27 are embedded in an insulating member 24 which is mounted directly on the high-voltage insulator 23. The portion of the insulating member 24 that projects beyond the grounded jacket 32 is surrounded by a metallic hood which, together with the jacket 32, forms a common Faraday cage. The circuit elements 43 for the auxiliary voltages are likewise arranged in the Faraday cage.Type: GrantFiled: September 13, 1984Date of Patent: March 4, 1986Assignee: Leybold-Heraeus GmbHInventor: Helmut Spruck
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Patent number: 4572842Abstract: Method for reactive vapor deposition of compounds of metals and semi-conductors on at least one substrate by glow discharge. Into a space between a magnetron cathode (1) with a target (5) and the substrate (11) an inert gas and a reaction gas for the formation of the desired compound with the target material are separately introduced. Two solve the problem of making it possible to maintain the vapor deposition process stable over long time periods, according to the invention, a flow restriction is introduced between the target (5) and the substrate (11) by a diaphragm (20), which amounts to at least 40% of the cross-section of the space. Further, the inert gas is fed between target (5) and aperture (20) at the periphery of the target.Type: GrantFiled: August 24, 1984Date of Patent: February 25, 1986Assignee: Leybold-Heraeus GmbHInventors: Anton Dietrich, Klaus Hartig, Michael Scherer
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Patent number: 4572776Abstract: A magnetron cathode for sputtering ferromagnetic targets. The magnet system consists of magnet poles of opposite polarity lying one within the other disposed on a basic cathode body. Between the target and the pole shoes, which consist of target material, two circumferential air gaps in the direction of the depth of the system are formed. The surfaces of projection of the magnet poles and target do not overlap. For the purpose of making the target ablation uniform while simultaneously achieving high sputtering rates, the pole shoes are separated, in accordance with the invention, each by a distance S from the magnet poles. The magnet poles lie in an area which runs from a plane passing through the sputtering surface in the direction of the depth of the system. Between the pole shoes and the target, on the one hand, and the magnet poles on the other, there is disposed a thermally conductive metal body which is in communication with at least one coolant passage and consists of a nonferromagnetic material.Type: GrantFiled: December 5, 1984Date of Patent: February 25, 1986Assignee: Leybold-Heraeus GmbHInventors: Hans Aichert, Jorg Kieser, Reiner Kukla
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Patent number: 4569738Abstract: A method for producing amorphous carbon coatings on substrates by degrading a gaseous hydrocarbon compound in an ionized gas atomsphere within a reaction chamber. An electromagnetic alternating field is used for the excitation of the plasma. To achieve the object of increasing the deposition rate and permitting substrates even of great surface area to be uniformly coated, the frequency of the electromagnetic alternating field is selected in the microwave region (915 to 2,540 MHz). Furthermore, the microwave energy is put into the gaseous atmosphere by means of at least one ladder-type waveguide situated outside of the reaction chamber. The invention also relates to a substrate provided with an amorphous carbon coating, in which an adhesion-mediating coating consisting of a polymer from the group of the siloxanes or silazanes is provided between the substrate and the amorphous carbon coating.Type: GrantFiled: May 4, 1984Date of Patent: February 11, 1986Assignee: Leybold-Heraeus GmbHInventors: Jorg Kieser, Michael Neusch
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Patent number: 4562943Abstract: An arrangement for controlling the pouring of a melt out of a crucible with a hole in the bottom which hole is blocked while the material is being melted with a closure plate that melts through locally as the result of heat transferred from the melt. To precisely establish the time at which the closure plate melts through, the plate is cooled from below while the starting material is being melted. Cooling is at least decreased and preferably terminated when it is time to pour out the melt. The plate can be cooled by a flow of a gas coolant directed against it or by contact with a cooling element that is raised into position against it from below.Type: GrantFiled: July 8, 1983Date of Patent: January 7, 1986Assignee: Leybold-Heraeus GmbHInventors: Friedrich-Carl Freytag, Josef Gediga, Rolf Ruthardt, Wolfgang Wagner
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Patent number: 4553242Abstract: A gas laser of circular cross section perpendicular to the direction of beam propagation and having an optical resonator is disclosed. The laser has, for continuous or modulated continuous beam operation, a metal tube as inside conductor, which is connected to a high-frequency voltage source. An outside conductor, which is coaxial with the inside conductor consists of a tube of metal of good electrical conductivity. The inside conductor is surrounded, leaving an intervening space, by a jacket tube of dielectric or metallic material. A dielectric cooling liquid of electrical insulating quality and low loss factor for high-frequency fields flows through the space between the inside conductor and the jacket tube.Type: GrantFiled: April 19, 1984Date of Patent: November 12, 1985Assignee: W.C. Heraeus GmbHInventors: Hans Opower, Volker Ernst
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Patent number: 4550593Abstract: A turbomolecular pump for counterflow leakage tests and the method of its use arranges two, tandem turbomolecular pump stages for pumping toward each other and connects opposite ends of the tandem pump stages respectively to a container or test tank through which a test gas is provided when there is a leak and a detector for detecting the test gas. A connection between the tandem pump stages connects to a forepump for assisting the turbomolecular pump. Arranging the turbomolecular pump in this way permits different pressures in the container or test tank and detector, as is often desired when, for example, the detector is a mass spectrometer, without partition and conduit arrangements therefor.Type: GrantFiled: July 19, 1982Date of Patent: November 5, 1985Assignee: Leybold-Heraeus GmbHInventor: Gunter Reich
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Patent number: 4551608Abstract: High-power laser metalworking apparatus, especially one having a carbon dioxide laser. After the laser beam emerges from an optical resonator it is deflected by a mirror against a workpiece and focused on the surface thereon. An image-rotating means is disposed in the beam path after the deflection mirror, and has an odd number of fully reflective mirrors, but at least 3 such mirrors. The angle of rotation of the image-rotating means is electronically controllable in accordance with the direction of the path of the working movement. The image-rotating means and focusing system advantageously form a single component in which at least one of the mirrors of the image-rotating means focuses the laser beam onto the surface of the workpiece.Type: GrantFiled: May 10, 1984Date of Patent: November 5, 1985Assignee: W.C. Heraeus GmbHInventor: Hans Opower
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Patent number: 4548698Abstract: The invention concerns equipment for producing coatings having a rotationally symmetric thickness profile on substrates. The equipment comprises an evaporizing cathode and, for each substrate, a mask and a rotatable substrate holder arranged behind the mask. The mask has a cut-away portion such that the desired thickness profile of the coating can be produced by rotating the substrate.According to the invention and for the purpose of increasing the throughput of the equipment while maintaining close tolerances for the thickness profile of the coatings, a plurality of masks (6) and a plurality of substrate holders (13) associated with the masks are provided on a common movable frame (1). The movable frame (1) is displaceable relatively to the evaporizing cathode (10), continuous rotary movement being imparted to the substrate holders.Type: GrantFiled: February 1, 1984Date of Patent: October 22, 1985Assignee: Leybold-Heraeus GmbHInventor: Michael Sellschopp
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Patent number: 4548691Abstract: A method of producing glass sheets having good transmission behavior in the visible spectrum range and having good reflection behavior as regards heat radiation. A transparent substrate S is coated by cathodic atomization with, successively, a first oxide layer 1 comprising indium oxide, tin oxide or mixtures thereof, a layer 2 consisting of silver in a thickness of 5 to 50 n, a metallic layer 3 selected from aluminium, titanium, tantalum, chromium, manganese and zirconium in a thickness ranging from 1 to 5 nm and applied directly to the silver layer 2 for the purpose of maintaining the condition thereof, and a final protective oxide layer 4 of indium oxide, tin oxide or mixtures thereof.Type: GrantFiled: February 29, 1984Date of Patent: October 22, 1985Assignee: Leybold-Heraeus GmbHInventors: Anton Dietrich, Klaus Hartig, Werner Lenz, Michael Scherer
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Patent number: 4544468Abstract: An apparatus for and method of coating a three-dimensional shaped-part surface by the cathodic atomization of target material from two, facing, magnetically-concentrating cathodic atomization devices applies a voltage, which is negative with respect to ground and of such magnitude that touching of the plasma clouds from the devices is facilitated to the shaped part.Type: GrantFiled: January 19, 1984Date of Patent: October 1, 1985Assignee: Leybold Heraeus GmbHInventors: Wolf D. Munz, Gerhard Hessberger
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Patent number: 4534841Abstract: Solar-controlled glazing having a transmission of between 5 and 40% in the visible spectrum range and having heat-reflection properties is produced by applying an oxide layer having an optical thickness of between 20 and 280 nm directly to a transparent substrate by cathodic evaporation in an oxygen-containing atmosphere to form a first layer. A chromium nitride layer having a geometric thickness of between 10 and 40 nm is then applied in an atmosphere consisting of inert gas and nitrogen to provide a second layer. An optical third dielectric layer may be applied to the second layer. The oxide layer is selected from oxides of tin, titanium and aluminium.Type: GrantFiled: March 23, 1984Date of Patent: August 13, 1985Assignee: Leybold-Heraeus GmbHInventors: Klaus Hartig, Anton Dietrich, Michael Scherer
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Patent number: 4530100Abstract: A vaporizer crucible for vacuum vapor-deposition apparatus, comprises a metallic body 1 having a recess 2 for accommodating vaporizing material and connected in a thermally-conductive manner to a cooling duct 7 which surrounds the recess 2 at least partially. For effectively preventing reduction in heat transfer in the event of the formation of vapor bubbles in the cooling medium at least one guide device 22 for imparting a swirling motion to the cooling medium flowing in the cooling duct 7 is provided in said duct. The guide device 22 preferably takes the form of a spiral element matching the path of the cooling duct.Type: GrantFiled: July 7, 1983Date of Patent: July 16, 1985Assignee: Leybold-Heraeus GmbHInventors: Albert Feuerstein, Klaus-Jurgen Heimbach, Helmut Warscheit