Abstract: A hot trap for removing a reactive constituent gas from a gas stream via chemical reaction and/or thermal disassociation includes a trap chamber with a heater assembly and a trap medium in its core inner portion and annular pre-heating and counterflow heating ducts in its outer and intermediate portions surrounding the core inner portion for heating an inflowing gas stream and conservation of heat energy in the trap as well as to maintain lower temperatures on external surfaces.
Type:
Grant
Filed:
December 31, 2010
Date of Patent:
August 14, 2012
Assignee:
MKS Instruments, Inc.
Inventors:
Jeffrey D. Kiernan, Matthew C. Grout, Kevin Grout
Abstract: A method and system for partitioning (clustering) large amounts of data in a relatively short processing time. The method involves providing a first data matrix and a second data matrix where each of the first and second data matrices includes one or more variables, and a plurality of data points. The method also involves determining a first score from the first data matrix using a partial least squares (PLS) analysis or orthogonal PLS (OPLS) analysis and partitioning the first and second data matrices (e.g., row-wise) into a first group and a second group based on the sorted first score, the variance of the first data matrix, and a variance of the first and second groups relative to the variances of the first and second data matrices.
Type:
Grant
Filed:
December 19, 2008
Date of Patent:
August 14, 2012
Assignee:
MKS Instruments, Inc.
Inventors:
Svante Bjarne Wold, Johan Trygg, Lennart Eriksson
Abstract: A pressure control system remotely controls pressure within one or more remote zones, each respectively connected to an enclosure through a conduit, by controlling flow of a fluid into and out of each enclosure. The pressure of the fluid is measured within each enclosure. An estimated pressure within each zone is computed, as a function of the measured pressure in the enclosure and known characteristics of the conduit and the zone. For each zone, an inlet proportional valve and an outlet proportional valve of each enclosure is operated so as to control the input flow rate of the fluid into the respective enclosure and the output flow rate of the fluid out of the enclosure as a function of a pressure set point and the estimated pressure, thereby regulating pressure within the zone in accordance with the pressure set point.
Type:
Application
Filed:
October 12, 2011
Publication date:
August 9, 2012
Applicant:
MKS Instruments, Inc.
Inventors:
Ali Shajii, Siddharth P. Nagarkatti, Gordon Hill
Abstract: A power amplifier includes an input module. The input module includes a transformer and is configured to receive a radio frequency signal and generate output signals. Impedance transformation modules each of which having an output impedance and configured to receive a respective one of the output signals from the transformer. Switch modules each of which comprising a transistor and connected to an output of one of the impedance transformation modules. The transistor has an input impedance and outputs an amplified signal. Each of the output impedances is mismatched relative to a respective one of the input impedances.
Abstract: A transformer-less power supply is provided for ozone generation. The power supply advantageously reduces costs and increases reliability of ozone generators. The power supply provides a first AC voltage from a power source to a resonant circuit and the resonant circuit provides a second AC voltage to the ozone generating unit, the second AC voltage being greater than the first AC voltage. A controller for the power supply that adapts to the resonance of the circuit to provide control with a wide tolerance for the high Q circuit component values of the circuit.
Type:
Grant
Filed:
August 14, 2006
Date of Patent:
July 24, 2012
Assignee:
MKS Instruments, Inc.
Inventors:
Igor Elkin, Alan Millner, Ken Tran, Madhuwanti Joshi
Abstract: A hot trap for removing a reactive constituent gas from a gas stream via chemical reaction and/or thermal disassociation includes a trap chamber with a heater assembly and a trap medium in its core inner portion and annular pre-heating and counterflow heating ducts in its outer and intermediate portions surrounding the core inner portion for heating an inflowing gas stream and conservation of heat energy in the trap as well as to maintain lower temperatures on external surfaces.
Type:
Application
Filed:
December 31, 2010
Publication date:
July 5, 2012
Applicant:
MKS Instruments, Inc.
Inventors:
Jeffrey D. Kiernan, Matthew C. Grout, Kevin Grout
Abstract: A method and apparatus for processing metal bearing gases involves generating a toroidal plasma in a plasma chamber. A metal bearing gas is introduced into the plasma chamber to react with the toroidal plasma. The interaction between the toroidal plasma and the metal bearing gas produces at least one of a metallic material, a metal oxide material or a metal nitride material.
Type:
Application
Filed:
December 23, 2011
Publication date:
June 28, 2012
Applicant:
MKS Instruments, Inc.
Inventors:
William M. Holber, John A. Smith, Xing Chen, Donald K. Smith
Abstract: Described are computer-based methods and apparatuses, including computer program products, for automated predictive design space estimation. A design space of input factors and output responses is estimated for a physical process. Data is received for one or more input factors for a physical process, one or more output responses for the process, and criteria. For each of the one or more input factors, a calculated range of input values within the corresponding experimented range of input values is calculated. A modified range of input values is calculated for each of the one or more input factors. A design space estimate is predicted based at least on the modified ranges of input values, wherein the modified ranges of input values each comprise a largest region of variability for one or more of the input factors where the criteria are fulfilled.
Type:
Application
Filed:
December 23, 2011
Publication date:
June 14, 2012
Applicant:
MKS Instruments, Inc.
Inventors:
Ernst Conny Wikström, Hans Georg Joakim Sundström, Tord Åke Börje Nordahl
Abstract: Methods, systems, and computer program products are described for measuring and controlling parameters of a plasma generator. A current in a primary winding of a transformer or inductive element that generates a plasma is measured. A voltage across a secondary winding of the transformer or inductive element is measured. Based on the current of the primary winding and the voltage across the secondary winding, a parameter of the plasma is determined. The parameter includes a resistance value associated with the plasma, a power value associated with the plasma, or both.
Type:
Application
Filed:
December 8, 2010
Publication date:
June 14, 2012
Applicant:
MKS Instruments, Inc.
Inventors:
Siddharth P. Nagarkatti, Ali Shajii, Souheil Benzerrouk
Abstract: An isolation valve includes a shield that surrounds and protects the valve closure actuator components from exposure to corrosive fluids that flow through the valve when the valve is open.
Type:
Grant
Filed:
August 19, 2008
Date of Patent:
June 12, 2012
Assignee:
MKS Instruments, Inc.
Inventors:
Kevin Grout, Jeffrey D. Kiernan, David Neumeister, Matthew C. Grout
Abstract: A metrology system monitors radio frequency (RF) power at a plurality of locations in a circuit. The system includes a plurality of RF sensors that generate respective analog signals based on electrical properties of the RF power, a multiplexing module that generates an output signal based on the analog signals, and an analysis module that generates messages based on the output signal. The messages contain information regarding the electrical properties that are sensed by the plurality of RF sensors.
Type:
Grant
Filed:
September 23, 2011
Date of Patent:
May 29, 2012
Assignee:
MKS Instruments, Inc.
Inventors:
Ray Choueiry, Todd Heckleman, David J. Coumou
Abstract: Described are methods, systems, and a computer-readable storage medium for controlling a discrete-type manufacturing process (e.g., an injection molding process) with a multivariate model. Data representing process parameters, operating parameters, or both of the manufacturing process are received. The received data is compared with a multivariate model that approximates the manufacturing process to provide a result. Upon the result of the comparing satisfying a condition, one or more values for a set of operating parameters for the manufacturing process are determined. When the one or more determined values for the set of operating parameters satisfies a criterion, at least one operating parameter of the manufacturing process is updated.
Type:
Application
Filed:
November 16, 2010
Publication date:
May 17, 2012
Applicant:
MKS Instruments, Inc.
Inventors:
Daniel Robert Hazen, Christopher Paul Ambrozic, Christopher Peter McCready
Abstract: A fast-acting, pneumatic diaphragm valve includes a diaphragm valve closure member, a pneumatic piston that provides a closure force on the closure member, and a solenoid pilot valve that controls pressurized air to the piston to cause the piston to move in a reciprocal manner so that the closure member opens and closes the valve. The valve seat seal can be elastomer for enhancing speed, and the solenoid pilot valve can be positioned and configured with air flow longitudinally through or past the solenoid armature to enhance speed.
Abstract: A method and apparatus for measuring current includes sensing a first voltage at the output of an amplifier and computing a current based on the first voltage and the resistance of a first resistive element, which is electrically coupled between an inverting input of the amplifier and the output of the amplifier, if the first voltage is below a predetermined level. The method also includes sensing a second voltage at the output of a buffer and computing a current based on the first and second voltages and the resistances of the first resistive element and a second resistive element, which is electrically coupled between the inverting input of the amplifier and an input of the buffer and is also electrically coupled to the output of the amplifier through a at least one diode, if the voltage output from the amplifier is above the predetermined level.
Abstract: An apparatus includes a member including a ferromagnetic material, an inductance-capacitance resonant circuit, a substrate disposed relative to the member, and a plurality of radiation sources. The member includes a post disposed at its center and a surface extending to an outer wall. The member defines a gap between the post and the outer wall. The inductance-capacitance resonant circuit is configured to resonate at a measurement frequency. The circuit includes an inductor disposed relative to the post. The substrate is disposed relative to the member. The substrate is electromagnetically coupled to the inductor. The plurality of radiation sources is disposed radially outward from and circumferentially around the post of the member. The apparatus can be used to simultaneously measure conductance (inverse sheet resistance), steady state photoconductance, true steady state minority carrier lifetime, photoconductance build-up and photoconductance decay lifetime.
Type:
Application
Filed:
April 5, 2011
Publication date:
April 5, 2012
Applicant:
MKS Instruments, Inc.
Inventors:
Francisco Machuca, Ronald Chiarello, G. Lorimer Miller, Joseph W. Foster, David C. Tigwell
Abstract: A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals to an electronic controller indicating the measured inlet flow rate and the pressure within the dead volume. The electronic controller employs the measured pressure to compensate the measured inlet flow rate and to thereby produce a compensated measure of the outlet flow rate, which may be used to operate a mass flow controller control valve.
Type:
Grant
Filed:
August 31, 2010
Date of Patent:
April 3, 2012
Assignee:
MKS Instruments, Inc.
Inventors:
Ali Shajii, Nicholas Kottenstette, Jesse Ambrosina
Abstract: Described are computer-based methods and apparatuses, including computer program products, for monitoring, detecting, and quantifying chemical compounds in a sample. A sample measurement comprising a digitized spectroscopic profile is received. A multivariate multistage background model comprising a first model that models a first time effect, a second model that models a second time effect that is different than the first time effect, or both is calculated. A background corrected sample measurement based on the sample measurement and the multivariate multistage background model is generated. A multivariate multistage library search, fault detection, and quantification algorithm is executed to identify one or more primary chemicals in the background corrected sample measurement.
Abstract: A method and apparatus for processing metal bearing gases involves generating a toroidal plasma in a plasma chamber. A metal bearing gas is introduced into the plasma chamber to react with the toroidal plasma. The interaction between the toroidal plasma and the metal bearing gas produces at least one of a metallic material, a metal oxide material or a metal nitride material.
Type:
Grant
Filed:
July 29, 2009
Date of Patent:
February 28, 2012
Assignee:
MKS Instruments, Inc.
Inventors:
William M. Holber, John A. Smith, Xing Chen, Donald K. Smith
Abstract: A method for monitoring a manufacturing tool features acquiring metrology data (“Step a”). Data is acquired for process variables for a first process step performed by the manufacturing tool (“Step b”). A mathematical model of the first process step based on the metrology data and the acquired data is created (“Step c”). Steps b and c are repeated for at least a second process step (“Step d”). An nth mathematical model is created based on the metrology data and the data for the process variables for each of the n process steps (“Step e”). A top level mathematical model is created based on the metrology data and the models created by steps c, d and e (“Step f”). A multivariate metric is calculated based on the top level model of step f and data from subsequent runs of the manufacturing tool. Service is performed if the metric satisfies a condition.
Type:
Application
Filed:
July 22, 2011
Publication date:
February 9, 2012
Applicant:
MKS Instruments, Inc.
Inventors:
Tamara Byrne, Lennart Eriksson, Svante Bjarne Wold
Abstract: Controlling a phase and/or a frequency of a RF generator. The RF generator includes a power source, a sensor, and a sensor signal processing unit. The sensor signal processing unit is coupled to the power source and to the sensor. The sensor signal processing unit controls the phase and/or the frequency of a RF generator.