Patents Assigned to MKS Instruments
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Patent number: 7969096Abstract: A method and apparatus for exciting gas that involves generating an alternating magnetic field unidirectionally through a magnetic core defining a gap, across the gap and through a plasma vessel that includes dielectric material. The magnetic field induces an electric field in the plasma vessel that generates the plasma.Type: GrantFiled: December 15, 2006Date of Patent: June 28, 2011Assignee: MKS Instruments, Inc.Inventor: Xing Chen
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Patent number: 7962294Abstract: A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide a continuous absolute pressure profile over a wide range of pressures on a single integrated scale. The absolute pressure measurements and differential pressure measurements are obtained, and a correlation factor between the absolute pressure measurements and the differential pressure measurements is determined. The correlation factor is used to normalize the differential pressure measurements to virtual absolute pressure values on a common absolute pressure scale with the absolute pressure measurements. An absolute pressure profile over a wide pressure range includes the absolute pressure measurements in a portion of the range where the absolute pressure measurements are accurate, and it includes the virtual absolute pressure values in another portion of the range where the differential pressure measurements are accurate.Type: GrantFiled: January 13, 2009Date of Patent: June 14, 2011Assignee: MKS Instruments, IncInventors: Paul Dozoretz, Youfan Gu, Garry Holcomb, Ole Wenzel
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Publication number: 20110134716Abstract: Devices, systems, and methods employed in wet cleaning semiconductor devices are provided. In particular, systems that can deliver deionized water with the desired concentration of CO2 and methods of generating deionized water with a desired concentration of CO2 for use in wet cleaning of semiconductor devices are provided.Type: ApplicationFiled: June 2, 2010Publication date: June 9, 2011Applicant: MKS Instruments, Inc.Inventors: Johannes Seiwert, Ulrich Brammer, Christiane Gottschalk, Joachim Lohr
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Patent number: 7950294Abstract: A valve system includes a valve and a controller that controls the valve. The valve includes a valve body, and a motor configured to deliver a torque to the valve body to cause the valve body to move between an open position and a closed position. The controller is configured to drive the motor by applying a current to the motor. The controller is configured to measure the torque delivered by the motor to the valve body, compare the calculated torque with a threshold value, and diagnose a need by the valve system for preventive maintenance when the calculated torque is substantially equal to the threshold value. The threshold value represents substantially the maximum amount of torque available from the stepper motor.Type: GrantFiled: June 20, 2008Date of Patent: May 31, 2011Assignee: MKS Instruments, Inc.Inventors: Vladislav Davidkovich, Gordon Hill
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Patent number: 7932480Abstract: A multiple heater control system includes cables, connectors, and junction boxes for user-friendly daisy chain connections of heater controllers and heaters in various configurations or combinations of individually controlled heater series and/or master and slave heater series. The heater controllers include process control of AC power to the heaters and upper-limit safety shutoff that is substantially independent from the process control. The heater controllers also have variable levels of control, adjustment, display, and communications functionality in a base module that is expandable to various levels with expansion modules that are attachable to and detachable from the base module. Connector, cable, and junction configurations, adapters, and latch features enhance user friendliness.Type: GrantFiled: April 5, 2006Date of Patent: April 26, 2011Assignees: MKS Instruments, Inc., Watlow Electric Manufacturing CompanyInventors: Youfan Gu, Jeffrey D. Kiernan, Charles C. Lawhead, William C. Bohlinger, Eric E. Ellis, Curtis A. Foster, James P. Hentges, Mark Louis-Gilmer Hoven, James H. Kreisel, Shawn Leininger, Robert O. Moran, Kurt W. Peterson, Jason R. Powell, Dale T. Wolfe
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Patent number: 7914603Abstract: A particle trap for a remote plasma source includes a body structure having an inlet for coupling to a chamber of a remote plasma source and an outlet for coupling to a process chamber inlet. The particle trap for a remote plasma source also includes a gas channel formed in the body structure and in fluid communication with the body structure inlet and the body structure outlet. The gas channel can define a path through the body structure that causes particles in a gas passing from a first portion of the channel to strike a wall that defines a second portion of the gas channel at an angle relative to a surface of the wall. A coolant member can be in thermal communication with the gas channel.Type: GrantFiled: June 26, 2008Date of Patent: March 29, 2011Assignee: MKS Instruments, Inc.Inventors: Ali Shajii, Xing Chen, Andrew Cowe, David Burtner, William Robert Entley, ShouQian Shao
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Patent number: 7891228Abstract: A system performs mass flow delivery of a fluid, and also performs mass flow verification of the fluid. The system includes an inlet valve that controls flow of the fluid into a chamber, an outlet valve that controls flow of the fluid out of the chamber, a pressure transducer that measures the pressure of the fluid within the chamber, a temperature sensor that measures the temperature of the fluid within the chamber, and a controller. The controller is configured to control opening and closing of the inlet and outlet valves, using the measurements of the pressure and the temperature change within the chamber, so as to verify, when in a first mode, a measurement of the flow rate of the fluid by a device, and so as to deliver, when in a second mode, a desired amount of the fluid from the chamber into a processing facility.Type: GrantFiled: November 18, 2008Date of Patent: February 22, 2011Assignee: MKS Instruments, Inc.Inventors: Junhua Ding, Kaveh Zarkar
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Patent number: 7892502Abstract: An improved system and method for controlling ozone concentration in connection with a multi-chamber tool. The system and method involve a first and a second concentration controller in combination with an ozone generator. The first concentration controller detects an EVENT (i.e., one of the chambers in the multi-chamber tool coming on-line or off-line) and in response provides a power instruction to the ozone generator in accordance with a predictive control algorithm. The first concentration controller has a fast (i.e, about 1 second) response time. The second concentration controller is masked from the ozone generator during the EVENT, but otherwise controls the generator after an interval of time has lapsed after the EVENT. The second concentration controller has a slower response time than the first concentration controller, however the second concentration controller provides the system with long-term stability and can be used to provide updated data to the predictive control algorithm.Type: GrantFiled: July 7, 2006Date of Patent: February 22, 2011Assignee: MKS Instruments, Inc.Inventors: Vitaly J. Berkman, Thomas J. Ryan
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Patent number: 7890220Abstract: A tool includes a chamber, a network, a sensor, a tool controller, and a pressure controller. The network carries messages to and from devices on the network. A header portion of a message indicates a sender of the message and at least one intended recipient of the message. The sensor measures a pressure within the chamber. The sensor, tool controller, and pressure controller are on the network. The pressure controller controls the pressure within the chamber in response to measurements provided by the sensor and in response to a set point provided by the tool controller. The pressure controller processes header portions of all messages carried on the network to determine the intended recipients of each message and processes at least part of data portions of both messages intended for the pressure controller and at least some messages not intended for the pressure controller.Type: GrantFiled: May 3, 2005Date of Patent: February 15, 2011Assignee: MKS Instruments, Inc.Inventor: David Brian Chamberlain
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Publication number: 20110012588Abstract: A method and apparatus for measuring current includes sensing a first voltage at the output of an amplifier and computing a current based on the first voltage and the resistance of a first resistive element, which is electrically coupled between an inverting input of the amplifier and the output of the amplifier, if the first voltage is below a predetermined level. The method also includes sensing a second voltage at the output of a buffer and computing a current based on the first and second voltages and the resistances of the first resistive element and a second resistive element, which is electrically coupled between the inverting input of the amplifier and an input of the buffer and is also electrically coupled to the output of the amplifier through a at least one diode, if the voltage output from the amplifier is above the predetermined level.Type: ApplicationFiled: July 16, 2009Publication date: January 20, 2011Applicant: MKS Instruments, Inc.Inventor: William Roger Fletcher
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Patent number: 7871587Abstract: A small scale, but effective, reactive chemical containment system includes apparatus and methods for reaction of process gases exhausted from reaction furnaces with a reactant gas in a non-combustible manner to produce and contain particulate or powder byproducts, thereby removing the process gas from the exhaust gas flow. The apparatus provides process gas inlet, treatment reactive gas diffusion, process gas and treatment reactive gas pre-mixing, primary containment, secondary containment, and outlet zones.Type: GrantFiled: December 22, 2009Date of Patent: January 18, 2011Assignee: MKS Instruments, Inc.Inventors: Youfan Gu, Paul Dozoretz
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Patent number: 7872523Abstract: A radio frequency (RF) power generator includes a first switch-mode amplifier that generates a first RF signal in accordance with a first control signal and a second switch-mode amplifier that generates a second RF signal in accordance with a second control signal. The first and second control signals determine a phase difference between the first and second RF signals. An output signal envelope is based on the first and second RF signals and the phase difference. The first control and second control signals alternate phases of the first and second RF signals.Type: GrantFiled: July 1, 2008Date of Patent: January 18, 2011Assignee: MKS Instruments, Inc.Inventors: Seshadri Sivakumar, Abdullah Eroglu
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Publication number: 20110005922Abstract: A method for creating a protective layer over a surface of an object comprising aluminum and magnesium for use in a semiconductor processing system, which includes oxidizing the surface of the object using a plasma electrolytic oxidation process. The method also includes generating a halogen-comprising plasma by exciting a gas comprising a halogen. The method also includes exposing the oxidized surface to the halogen-comprising plasma or excited gas.Type: ApplicationFiled: July 8, 2009Publication date: January 13, 2011Applicant: MKS Instruments, Inc.Inventors: Chiu-Ying Tai, Xing Chen, Chaolin Hu, Andrew Cowe, Ali Shajii
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Patent number: 7863996Abstract: An impedance matching network includes a first input port that receives radio frequency (RF) power and includes an input impedance, an output port that provides the RF power and includes an output impedance, and a variable capacitance module that varies the output impedance. The variable capacitance module includes a first variable capacitor, a second variable capacitor, a first motor, and a second motor that adjusts a capacitance of the second variable capacitor. A relationship between a desired value of the capacitance and an actual value of the capacitance is dependent on a capacitance of the first variable capacitor.Type: GrantFiled: September 24, 2008Date of Patent: January 4, 2011Assignee: MKS Instruments, Inc.Inventors: Daniel H. Cotter, Sean O. Harnett
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Publication number: 20100327927Abstract: A method for controlling pulsed power that includes measuring a first pulse of power from a power amplifier to obtain data. The method also includes generating a first signal to adjust a second pulse of delivered power, the first signal correlated to the data to minimize a power difference between a power set point and a substantially stable portion of the second pulse. The method also includes generating a second signal to adjust the second pulse of delivered power, the second signal correlated to the data to minimize an amplitude difference between a peak of the second pulse and the substantially stable portion of the second pulse.Type: ApplicationFiled: June 25, 2009Publication date: December 30, 2010Applicant: MKS Instruments, Inc.Inventors: Siddharth Nagarkatti, Feng Tian, David Lam, Abdul Rashid, Souheil Benzerrouk, Ilya Bystryak, David Menzer, Jack J. Schuss, Jesse E. Ambrosina
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Publication number: 20100292812Abstract: Described are computer-based methods and apparatuses, including computer program products, for automated predictive design space estimation. A design space of input factors and output responses is estimated for a physical process. Data is received for one or more input factors for a physical process, one or more output responses for the process, and criteria. For each of the one or more input factors, a calculated range of input values within the corresponding experimented range of input values is calculated. A modified range of input values is calculated for each of the one or more input factors. A design space estimate is predicted based at least on the modified ranges of input values, wherein the modified ranges of input values each comprise a largest region of variability for one or more of the input factors where the criteria are fulfilled.Type: ApplicationFiled: May 14, 2009Publication date: November 18, 2010Applicant: MKS Instruments, Inc.Inventors: Ernst Conny Wikström, Hans Georg Joakim Sundström, Tord Åke Börje Nordahl
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Patent number: 7829353Abstract: A system for delivering a desired mass of gas, including a chamber, a first valve controlling flow into the chamber, a second valve controlling flow out of the chamber, a pressure transducer connected to the chamber, an input device for providing a desired mass to be delivered, and a controller connected to the valves, the pressure transducer and the input device. The controller is programmed to receive the desired mass from the input device, close the second valve and open the first valve, receive chamber pressure measurements from the pressure transducer, and close the inlet valve when pressure within the chamber reaches a predetermined level. The controller is then programmed to wait a predetermined waiting period to allow the gas inside the chamber to approach a state of equilibrium, then open the outlet valve at time=t0, and close the outlet valve at time=t* when the mass of gas discharged equals the desired mass.Type: GrantFiled: October 26, 2006Date of Patent: November 9, 2010Assignee: MKS Instruments, Inc.Inventors: Ali Shajii, Siddharth P. Nagarkatti, Matthew Mark Besen, William R. Clark, Daniel Alexander Smith, Bora Akgerman
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Patent number: 7809473Abstract: A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals to an electronic controller indicating the measured inlet flow rate and the pressure within the dead volume. The electronic controller employs the measured pressure to compensate the measured inlet flow rate and to thereby produce a compensated measure of the outlet flow rate, which may be used to operate a mass flow controller control valve.Type: GrantFiled: December 5, 2007Date of Patent: October 5, 2010Assignee: MKS Instruments, Inc.Inventors: Ali Shajii, Nicholas Kottenstette, Jesse Ambrosnia
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Patent number: 7809450Abstract: A method and apparatus for process monitoring are provided. Process monitoring includes (i) generating a multivariate analysis reference model of a process environment from data corresponding to monitored parameters of the process environment; (ii) designating at least one of the monitored parameters as being correlated to maturation of the process environment; (iii) collecting current process data corresponding to the monitored parameters, including the at least one designated parameter; and (iv) scaling the multivariate reference model based on the current process data of the at least one designated parameter to account for maturation of the process environment. The method further includes generating one or more current multivariate analysis process metrics that represent a current state of the process environment from the current process data; and comparing the current process metrics to the scaled reference model to determine whether the current state of the process environment is acceptable.Type: GrantFiled: July 5, 2006Date of Patent: October 5, 2010Assignee: MKS Instruments, Inc.Inventors: Uzi Josef Lev-Ami, Lawrence Hendler
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Publication number: 20100235690Abstract: A system and method for defect analysis are disclosed wherein a defect data set is input into the system. A radius value is selected by a user, which is the maximum number of bits that bit failures can be separated from one another to be considered a bit cluster. When a defect data set is received, the system and method start with a fail bit and search for neighboring fail bits. The specified radius is used to qualify the found fail bits to be part of the bit cluster or not. If a minimum count of fail bits is not met, the system and method will stop searching and move to the next fail bit. If a minimum count of fail bits is met, the search continues for the next fail bit until the maximum fail bit count specified by the user is reached. Aggregation is provided such that once bit clusters have been classified, the number of clusters that have the exact match or partial match to each other is counted. The user may set the partial match as a threshold count to establish a match.Type: ApplicationFiled: March 22, 2010Publication date: September 16, 2010Applicant: MKS Instruments, Inc.Inventors: Tom T. Ho, Jonathan B. Buckheit, Weidong Wang, Xin Sun