Abstract: A first edge ring for a substrate support is provided. The first edge ring includes an annular-shaped body and one or more lift pin receiving elements. The annular-shaped body is sized and shaped to surround an upper portion of the substrate support. The annular-shaped body defines an upper surface, a lower surface, a radially inner surface, and a radially outer surface. The one or more lift pin receiving elements are disposed along the lower surface of the annular-shaped body and sized and shaped to receive and provide kinematic coupling with top ends respectively of three or more lift pins.

Abstract: Various embodiments include a reflectometer and a reflectometry system for monitoring movements of a substrate, such as a silicon wafer. In one embodiment, a reflectometry system monitors and controls conditions associated with a substrate disposed within a process chamber. The process chamber includes a substrate-holding device having an actuator mechanism to control movement of the substrate with respect to the substrate-holding device. The reflectometry system includes a light source configured to emit a beam of light directed at the substrate, collection optics configured to receive light reflected from the substrate by the beam of light directed at the substrate and output a signal related to one or more conditions associated with the substrate, and a processor configured to process the signal and direct the actuator mechanism to control the movement of the substrate with respect to the substrate-holding device based on the signal. Other devices and methods are disclosed.

Abstract: Certain examples of the present disclosure relate to systems and methods for controlling a vehicle. In particular, the present disclosure provides systems and methods for moving an aerial vehicle by decoupling the pitch- and roll-movement from thrust production. This decoupling can occur by shifting the center of gravity of the vehicle to create a moment about a desired axis. Some examples describe single-shaft rotary vehicles, while other examples describe coaxial rotary vehicles. The vehicles described herein may include a first mass moveable from a first position to a second position to create at least one of a rolling moment or a pitching moment to alter the direction of movement of the vehicle. A second mass may also be provided to alter the rolling moment or pitching moment. Methods for controlling the vehicles are also provided herein.

Abstract: Disclosed herein is a method of accessing a cache, the method comprising: mapping respective physical line addresses (PLAs) of a plurality of PLAs to respective cache locations of a plurality of cache locations in a cache, each PLA of the plurality of PLAs having an associated memory line; encrypting, with a block cipher using a first key, a first PLA of the plurality of PLAs to provide a first encrypted line address (ELA), the first ELA having an associated first encrypted cache location; upon receiving a request to access a first memory line associated with the first PLA, encrypting, using the first key, the first PLA into the first ELA to determine the associated first encrypted cache location; and accessing the first encrypted cache location. Also disclosed herein are systems for implementing the same.

Abstract: An apparatus for confining plasma within a plasma processing chamber is provided. The plasma processing chamber includes a lower electrode for supporting a substrate and an upper electrode disposed over the lower electrode. The apparatus is a confinement ring that includes a lower horizontal section extending between an inner lower radius and an outer radius of the confinement ring. The lower horizontal section includes an extension section that bends vertically downward at the inner lower radius, and the lower horizontal section further includes a plurality of slots. The confinement ring further includes an upper horizontal section extending between an inner upper radius and the outer radius of the confinement ring and a vertical section that integrally connects the lower horizontal section with the upper horizontal section. The extension section of the lower horizontal section is configured to surround the lower electrode when installed in the plasma processing chamber.

Abstract: A three-dimensional (3D) memory structure includes memory cells and a plurality of oxide layers and a plurality of word line layers. The plurality of oxide layers and the plurality of word line layers are alternately stacked in a first direction. A plurality of double channel holes extend through the plurality of oxide layers and the plurality of word line layers in the first direction. The plurality of double channel holes have a peanut-shaped cross-section in a second direction that is transverse to the first direction.

Abstract: Methods of filling features including metal and dielectric surfaces with conductive materials involve cleaning the metal surfaces with little or no damage to the dielectric surfaces. After cleaning, the feature may be exposed to one or more reactants to fill the feature with the conductive material in an atomic layer deposition (ALD) or chemical vapor deposition (CVD) process. Deposition may be selective or non-selective to the metal surface. In some embodiments, the filled feature is barrier-less, such that the conductive material directly contacts the metal and dielectric surfaces with no interposing barrier or adhesion layer.

Abstract: Thin tin oxide films can be used in semiconductor device manufacturing. In one implementation, a method of processing a semiconductor substrate includes: providing a semiconductor substrate having a plurality of protruding features residing on an etch stop layer material, and an exposed tin oxide layer in contact with both the protruding features and the etch stop layer material, where the tin oxide layer covers both sidewalls and horizontal surfaces of the protruding features; and then completely removing the tin oxide layer from horizontal surfaces of the semiconductor substrate without completely removing the tin oxide layer residing at the sidewalls of the protruding features. Next, the protruding features can be removed without completely removing the tin oxide layer that resided at the sidewalls of the protruding features, thereby forming tin oxide spacers.

Abstract: An isolation system includes an input junction coupled to one or more RF power supplies via a match network for receiving radio frequency (RF) power. The isolation system further includes a plurality of channel paths connected to the input junction for distributing the RF power among the channel paths. The isolation system includes an output junction connected between each of the channel paths and to an electrode of a plasma chamber for receiving portions of the distributed RF power to output combined power and providing the combined RF power to the electrode. Each of the channel paths includes bottom and top capacitors for blocking a signal of the different type than that of the RF power. The isolation system avoids a risk of electrical arcing created by a voltage difference between an RF terminal and a non-RF terminal when the terminals are placed proximate to each other.

Abstract: A space-based communications network (100) includes at least one central ground station (116) having a transceiver that is configured to communicate with satellites, such as cube satellites (110). The cube satellites (110) form an ad hoc network of orbital cube satellites, in which each of the cube satellites (110) communicate with each other. One of the cube satellites communicates with the ground station (116). A ground-based control system (1000) communicates with the central ground station (116). The control system (1000) continuously determines a configuration of the ad hoc network (100) and communicates network control information for the cube satellites (110) to maintain communications in the ad hoc network (100). The cube satellites (110) disseminate the network control to each other via the ad hoc network (100).

Abstract: Disclosed herein are systems and methods for identifying and mitigating Flush-based cache attacks. The systems and methods can include adding a zombie bit to a cache line. The zombie bit can be used to track the status of cache hits and misses to the flushed line. A line that is invalidated due to a Flush-Caused Invalidation can be marked as a zombie line by marking the zombie bit as valid. If another hit, or access request, is made to the cache line, data retrieved from memory can be analyzed to determine if the hit is benign or is a potential attack. If the retrieved data is the same as the cache data, then the line can be marked as a valid zombie line. Any subsequent hit to the valid zombie line can be marked as a potential attack. Hardware- and software-based mitigation protocols are also described.

Abstract: An edge seal for sealing an outer surface of a lower electrode assembly configured to support a semiconductor substrate in a plasma processing chamber, the lower electrode assembly including an annular groove defined between a lower member and an upper member of the lower electrode assembly. The edge seal includes an elastomeric band configured to be arranged within the groove, the elastomeric band having an annular upper surface, an annular lower surface, an inner surface, and an outer surface. When the elastomeric band is in an uncompressed state, the outer surface of the elastomeric band is concave. When the upper and lower surfaces are axially compressed at least 1% such that the elastomeric band is in a compressed state, an outward bulging of the outer surface is not greater than a predetermined distance. The predetermined distance corresponds to a maximum outer diameter of the elastomeric band in the uncompressed state.

Abstract: A method of creating a reperfusion injury can include: providing a cell culture device having an internal chamber with at least one port coupled to a perfusion modulating system capable of modulating perfusion in the internal chamber, wherein the internal chamber includes a cell culture; perfusing a fluid through the internal chamber with the perfusion modulating system, wherein the perfusion modulating system includes at least one pump; reducing fluid flow through the internal chamber; reperfusing fluid flow through the internal chamber; and creating a reperfusion injury in the cell culture by the reperfusion of the fluid flow through the internal chamber. The cell culture includes at least one type of tissue cell. The cell culture can include a tissue construct formed of hydrogel and/or extracellular matrix.

Abstract: A radiation detector (100) includes an insulating substrate (110), which includes a material that undergoes a change in an electrical property when subjected to ionizing radiation. A conductive film (112) is disposed in relation to a surface of the substrate. The conductive film (112) has a resistance that is a function of a state of the electrical property. A resistance measuring device measures resistance across the conductive film (112). The resistance measured by the resistance measuring device indicates an amount of ionizing radiation to which the substrate (110) has been subjected. In a method of determining exposure to a type of radiation, a boron nitride substrate is exposed to a radiation environment. A resistance is measured across a conductive film disposed in relation to the boron nitride substrate. Radiation exposure is calculated as a function of the resistance.

Abstract: Core-shell nanostructures with platinum overlayers conformally coating palladium nano-substrate cores and facile solution-based methods for the preparation of such core-shell nanostructures are described herein. The obtained Pd@Pt core-shell nanocatalysts showed enhanced specific and mass activities towards oxygen reduction, compared to a commercial Pt/C catalyst.

Abstract: The present disclosure relates to a photovoltaic (PV) device that includes a first junction constructed with a first alloy and having a bandgap between about 1.0 eV and about 1.5 eV, and a second junction constructed with a second alloy and having a bandgap between about 0.9 eV and about 1.3 eV, where the first alloy includes III-V elements, the second alloy includes III-V elements, and the PV device is configured to operate in a thermophotovoltaic system having an operating temperature between about 1500° C. and about 3000° C.

Abstract: Embodiments of the present disclosure relate generally to acoustically decoupled microelectromechanical system devices and, more particularly, to acoustically decoupled microelectromechanical system devices anchored upon phononic crystals. In some embodiments described herein, a device may comprise a resonator, a handle layer, and a pedestal disposed between the resonator and the handle layer, the pedestal connecting the resonator to the handle layer. In the devices described herein, the resonator and the handle layer may be non-coplanar. In some embodiments, the handle layer comprises a phononic crystal to acoustically decouple the resonator from the substrate of the handle layer.

Abstract: In a method of making a carbon fiber, PAN (poly(acrylonitrile-co methacrylic acid)) is dissolved into a solvent to form a PAN solution. The PAN solution is extruded through a spinneret, thereby generating at least one precursor fiber. The precursor fiber is passed through a cold gelation medium, thereby causing the precursor fiber to gel. The precursor fiber is drawn to a predetermined draw ratio. The precursor fiber is continuously stabilized to form a stabilized fiber. The stabilized fiber is continuously carbonized thereby generating the carbon fiber. The carbon fiber is wound onto a spool. A carbon fiber has a fiber tensile strength in a range of 5.5 GPa to 5.83 GPa. The carbon fiber has a fiber tensile modulus in a range of 350 GPa to 375 GPa. The carbon fiber also has an effective diameter in a range of 5.1 ?m to 5.2 ?m.

Abstract: A carbon molecular sieve (CMS) membrane having improved separation characteristics for separating olefins from their corresponding paraffins is comprised of carbon with at most trace amounts of sulfur and a group 13 metal. The CMS membrane may be made by pyrolyzing a precursor polymer devoid of sulfur in which the precursor polymer has had a group 13 metal incorporated into it, wherein the metal is in a reduced state. The pyrolyzing for the precursor having the group 13 metal incorporated into it is performed in a nonoxidizing atmosphere and at a heating rate and temperature such that the metal in a reduced state (e.g., covalently bonded to carbon or nitrogen or in the metal state).

Abstract: Tubing structures are connected to each other to form a tubing assembly having one or more fluid pathways from a fluid entrance to a fluid exit. A heating device is bonded to the tubing structures along a length of the tubing assembly. The heating device has a flexibility to follow along one or more bends present along the length of the tubing assembly. The heating device includes one or more heater traces embedded within an encasing material. The encasing material is thermally conductive and electrically insulative. The one or more heater traces are formed of a material that generates heat in the presence of an electrical current. The heating device has a continuous and unbroken structure along the length of the tubing assembly. An encapsulation layer of thermal insulating material is disposed over the tubing assembly and covers the heating device.