Patents Assigned to Research Corporation
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Patent number: 11823928Abstract: A system for controlling of wafer bow in plasma processing stations is described. The system includes a circuit that provides a low frequency RF signal and another circuit that provides a high frequency RF signal. The system includes an output circuit and the stations. The output circuit combines the low frequency RF signal and the high frequency RF signal to generate a plurality of combined RF signals for the stations. Amount of low frequency power delivered to one of the stations depends on wafer bow, such as non-flatness of a wafer. A bowed wafer decreases low frequency power delivered to the station in a multi-station chamber with a common RF source. A shunt inductor is coupled in parallel to each of the stations to increase an amount of current to the station with a bowed wafer. Hence, station power becomes less sensitive to wafer bow to minimize wafer bowing.Type: GrantFiled: October 29, 2021Date of Patent: November 21, 2023Assignee: Lam Research CorporationInventors: Edward Augustyniak, David French, Sunil Kapoor, Yukinori Sakiyama, George Thomas
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Patent number: 11819831Abstract: A Ni-based steam reforming catalyst having excellent carbon deposition resistance and sintering resistance is provided. The steam reforming catalyst is constituted by including nickel as a catalytically active metal, lanthanum as a first co-catalyst component, manganese as a second co-catalyst component, and a carrier containing ?-alumina as a main component.Type: GrantFiled: June 11, 2019Date of Patent: November 21, 2023Assignee: RENAISSANCE ENERGY RESEARCH CORPORATIONInventors: Osamu Okada, Kana Motomura, Junya Miyata, Chika Takada, Itsuro Kuwasako, Manami Kawano
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Patent number: 11823875Abstract: Systems and methods for real-time control of temperature within a plasma chamber are described. One of the methods includes sensing a voltage in real time of a rail that is coupled to a voltage source. The voltage source supplies a voltage to multiple heater elements of the plasma chamber. The voltage that is sensed is used to adjust one or more duty cycles of corresponding one or more of the heater elements. The adjusted one or more duty cycles facilitate achieving and maintaining a temperature value within the plasma chamber over time.Type: GrantFiled: July 26, 2021Date of Patent: November 21, 2023Assignee: Lam Research CorporationInventor: Changyou Jing
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Patent number: 11823909Abstract: Selective deposition of a sacrificial material on a semiconductor substrate, the substrate having a surface with a plurality of regions of substrate materials having different selectivities for the sacrificial material, may be conducted such that substantial deposition of the sacrificial material occurs on a first region of the substrate surface, and no substantial deposition occurs on a second region of the substrate surface. Deposition of a non-sacrificial material may then be conducted on the substrate, such that substantial deposition of the non-sacrificial material occurs on the second region and no substantial deposition of the non-sacrificial material occurs on the first region. The sacrificial material may then be removed such that net deposition of the non-sacrificial material occurs substantially only on the second region.Type: GrantFiled: January 15, 2019Date of Patent: November 21, 2023Assignee: Lam Research CorporationInventors: Kashish Sharma, Taeseung Kim, Samantha Tan, Dennis M. Hausmann
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Patent number: 11821958Abstract: Systems, methods, and devices are provided for estimating a state-of-health (SOH) in an energy storage system, where the estimate accounts for both power fade and capacity fade. The SOH estimation system comprises a SOH estimation module configured to receive, and to determine the estimate of the SOH based on: a nominal capacity input; a voltage input; a current input; a nominal open circuit voltage curve; an operational resistance model; a nominal resistance model; an operational dynamic model; and a rated discharge current. The SOH estimation module may further comprise a SOH aggregation module configured to receive a power rating estimate, PRn, and a normalized capacity estimate, NCn, and may be configured to determine the estimate of the SOH based on the power rating estimate, PRn, and the normalized capacity estimate, NCn.Type: GrantFiled: January 26, 2022Date of Patent: November 21, 2023Assignee: NUVATION RESEARCH CORPORATIONInventors: Michael Worry, Stefan Janhunen, Manoj Mathew
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Patent number: 11821071Abstract: Molybdenum-containing films are deposited on semiconductor substrates using reactions of molybdenum-containing precursors in ALD and CVD processes. In some embodiments, the precursors can be used for deposition of molybdenum metal films with low levels of incorporation of carbon and nitrogen. In some embodiments, the films are deposited using fluorine-free precursors in a presence of exposed silicon-containing layers without using etch stop layers. The precursor, in some embodiments, is a compound that includes molybdenum, at least one halogen that forms a bond with molybdenum, and at chamber least one organic ligand that includes an element selected from the group consisting of N, O, and S, that forms a bond with molybdenum, In another aspect, the precursor is a molybdenum, compound with at least one sulfur-containing ligand, and preferably no molybdenum-carbon bonds.Type: GrantFiled: March 6, 2020Date of Patent: November 21, 2023Assignee: Lam Research CorporationInventor: Kyle Jordan Blakeney
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Patent number: 11813168Abstract: Embodiments of an artificial meniscus are disclosed herein. An artificial meniscus includes at least one circumferential fiber bundle and the at least one non-circumferential fiber bundle embedded in a polymer material. The non-circumferential fiber bundles are fully encapsulated within the polymer material, and the circumferential fiber bundles extend out of anterior and posterior horns of the artificial meniscus to terminate in ends that are configured for fixation to bone. Methods of making and implanting artificial menisci are also disclosed herein. The methods of making include, but are not limited to, stepwise molding, layering, and curing of polymer material around the circumferential and non-circumferential fiber bundles. The methods of implanting include threading ends of the circumferential fiber bundles through first and second bone tunnels, then immobilizing the ends of the circumferential fiber bundles with respect to the bone of the subject.Type: GrantFiled: April 12, 2019Date of Patent: November 14, 2023Assignee: GEORGIA TECH RESEARCH CORPORATIONInventors: Trent Gardner Callcott, Jonathan William Schwartz, David Nelson Ku
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Patent number: 11817341Abstract: A semiconductor substrate processing apparatus includes a vacuum chamber having a processing zone in which a semiconductor substrate may be processed, a process gas source in fluid communication with the vacuum chamber for supplying a process gas into the vacuum chamber, a showerhead module through which process gas from the process gas source is supplied to the processing zone of the vacuum chamber, and a substrate pedestal module.Type: GrantFiled: February 23, 2022Date of Patent: November 14, 2023Assignee: Lam Research CorporationInventor: Troy Alan Gomm
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Patent number: 11813829Abstract: In a method for making a flexible material, a sheet of graphene oxide-composite paper is subjected to an environment having a relative humidity above a predetermined threshold for a predetermined amount of time. At least one expansion cut is cut in the sheet of graphene oxide-composite paper. A flexible conductive material includes a sheet of graphene oxide-composite paper defining at least one cut passing therethrough and formed it a kirigami structure. A region of the sheet of graphene oxide-composite paper includes reduced graphene oxide.Type: GrantFiled: July 10, 2019Date of Patent: November 14, 2023Assignee: Georgia Tech Research CorporationInventors: Ruilong Ma, Vladimirv V. Tsukruk
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Patent number: 11807909Abstract: Methods and devices are provided for the identification and/or quantification of microbes. In particular, the methods comprise: (a) extracting DNA from a microbial sample; (b) performing 16S ribosomal RNA gene-targeted sequencing to obtain DNA sequences; and (c) analyzing the DNA sequences to identify the species of the one or more microbes.Type: GrantFiled: July 20, 2020Date of Patent: November 7, 2023Assignee: ZYMO RESEARCH CORPORATIONInventors: Ryan Kemp, Mike Weinstein, Shuiquan Tang
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Patent number: 11803725Abstract: Systems and methods are disclosed for radiolocation using backscatter RFID tags and a special-purpose reader that produces a stepped-frequency continuous wave (SFCW) radio frequency (RF) interrogation signal comprising N carrier frequencies. A backscattered interrogation signal from a backscatter RFID tag is down-converted using at least a portion of the generated SFCW RF interrogation signal. Received signal phases (RSP) corresponding to the N carrier frequencies are determined. Received signal strength (RSS) may be determined to improve performance. A distance between the RFID reader and the backscatter RFID tag may be estimated based on at least a summation of differences between RSPs corresponding to adjacent carrier frequencies.Type: GrantFiled: February 10, 2022Date of Patent: October 31, 2023Assignees: Georgia Tech Research Corporation, University of Rome Tor VergataInventors: Cheng Qi, Francesco Amato, Gregory David Durgin
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Patent number: 11802303Abstract: Systems and methods for multiplexed cell sorting are provided herein. The disclosed cell sorting system is referred to as DNA gated sorting (DGS). An exemplary system provides a set of orthogonal sorting probes and release probes for sorting cells of one or more different cell types from a biological specimen.Type: GrantFiled: February 7, 2019Date of Patent: October 31, 2023Assignee: Georgia Tech Research CorporationInventors: Gabriel A. Kwong, Shreyas N. Dahotre
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Patent number: 11804705Abstract: An electrical receptacle contains a plug outlet that has a pair of contacts for electrical connection to respective hot and neutral power lines. A controlled switch, such as a TRIAC, is connected in series relationship between the outlet contact and the hot power line. Sensors in the receptacle outputs signals to a processor having an output coupled to the control terminal of the controlled switch. The processor outputs an activation signal or a deactivation signal to the controlled switch in response to received sensor signals that are indicative of conditions relative to the first and second contacts.Type: GrantFiled: April 27, 2021Date of Patent: October 31, 2023Assignee: Brainwave Research CorporationInventors: John Eriksen, Jean-Guy Gagne, James W. Rogers, Patrick Belanger, Rene K. Pardo
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Patent number: 11798785Abstract: Systems and methods for reverse pulsing are described. One of the systems includes a controller, first and second source radio frequency (RF) generators, and first and second bias RF generators. The controller controls the first source RF generator to generate a first source pulsed signal, and controls the second source RF generator to generate a second source pulsed signal. The system includes a first match circuit that receives the first and second source pulsed signals and combines the first and second source pulsed signals. The controller controls the first bias RF generator to generate a first bias pulsed signal, and controls the second bias RF generator to generate a second bias pulsed signal. The system includes a second match circuit that receives the first and second bias pulsed signals and combines the first and second bias pulsed signals into a combined bias signal.Type: GrantFiled: September 11, 2017Date of Patent: October 24, 2023Assignee: Lam Research CorporationInventors: Maolin Long, Zhongkui Tan, Ying Wu, Qian Fu, Alex Paterson, John Drewery
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Patent number: 11795434Abstract: There is disclosed a cardiac explant-derived stem cell (EDC), the cell comprising a gene encoding an intermediate-conductance Ca2+-activated K+ channel, and wherein the gene causes an overexpression of the intermediate-conductance Ca2+-activated K+ channel, and methods of producing same. There is also disclosed a method of producing engineered EDCs having a modulated bioelectric property, the method comprising: obtaining EDCs; introducing a KCNN4 gene into the EDCs to increase the expression of KCa3.1 channels, to produce engineered EDCs. There is also disclosed a composition for treating or ameliorating a damaged myocardium in a subject, the composition comprising extracellular vesicles isolated from cultures of engineered EDCs. There is also disclosed a method for treating or ameliorating a damaged myocardium in a subject, comprising administering the engineered EDCs or the extracellular vesicles isolated from cultures of engineered EDCs to the damaged myocardium of the subject.Type: GrantFiled: November 8, 2019Date of Patent: October 24, 2023Assignees: Ottawa Heart Institute Research Corporation, L'Institut de Cardiologie de MontréalInventors: Patrick Vigneault, Darryl Davis, Stanley Nattel, Sandrine Parent
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Patent number: 11794164Abstract: Methods of making a poly(propylenimine) (PPI) sorbent, a PPI sorbent, structures including the PPI sorbent, methods of separating CO2 using the PPI sorbent, and the like, are disclosed.Type: GrantFiled: July 22, 2022Date of Patent: October 24, 2023Assignees: Georgia Tech Research Corporation, Global Thermostat Operations, LLCInventors: Simon Pang, Christopher W. Jones, Li-Chen Lee, Miles Sakwa-Novak, Michele Sarazen
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Patent number: 11798784Abstract: Methods and apparatus for processing a substrate in a multi-frequency plasma processing chamber are disclosed. The base RF signal pulses between a high power level and a low power level. Each of the non-base RF generators, responsive to a control signal, proactively switches between a first predefined power level and a second predefined power level as the base RF signal pulses. Alternatively or additionally, each of the non-base RF generators, responsive to a control signal, proactively switches between a first predefined RF frequency and a second predefined RF frequency as the base RF signal pulses. Techniques are disclosed for ascertaining in advance of production time the first and second predefined power levels and/or the first and second predefined RF frequencies for the non-base RF signals.Type: GrantFiled: June 29, 2018Date of Patent: October 24, 2023Assignee: Lam Research CorporationInventors: John C. Valcore, Jr., Bradford J. Lyndaker
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Patent number: 11795456Abstract: Compositions and methods for treating or inactivating viruses in a subject in need thereof are provided herein. Exemplary compositions include nucleic acids encoding an RNA-guided endonuclease and a guide RNA that is complementary to a target sequence in a virus. The RNA-guided endonuclease specifically targets viral nucleic acid sequences for destruction and suppression of that virus in a host cell in vitro or in vivo.Type: GrantFiled: April 15, 2019Date of Patent: October 24, 2023Assignee: Georgia Tech Research CorporationInventors: Swapnil Bawage, Pooja M. Tiwari, Philip J. Santangelo
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Patent number: 11800444Abstract: An asset tracking system that has a master notification unit, a reader relay unit in communication with the master notification unit, and a tag configured to be coupled to an asset. When the reader relay unit identifies a tag, the reader relay unit sends a signal to the master notification unit providing both a tag identifier and a reader relay unit identifier.Type: GrantFiled: September 28, 2020Date of Patent: October 24, 2023Assignee: Fire Research CorporationInventors: Neil Sengupta, Peter Luhrs
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Patent number: 11796085Abstract: An apparatus may be provided that includes a substrate having one or more microfluidic valve structures. The valve structures are non-elastomeric, non-polymeric, non-metallic membrane valves for use in high-vacuum application. Such valves are functional even when the fluid-control side of the valve is exposed to a sub-atmospheric pressure field which may generally act to collapse/seal traditional elastomeric membrane valve.Type: GrantFiled: July 23, 2020Date of Patent: October 24, 2023Assignee: Lam Research CorporationInventors: Mariusch Gregor, Theodoros Panagopoulos, Thorsten Bernd Lill