Abstract: A process for producing an upper metallization level and a via level connecting this upper metallization level to a lower metallization level includes: producing an insulating region on the lower metallization level; producing a hard mask on the insulating region (4, 5) defining the position of the via and metallic line of the upper metallization level; etching the insulating region through the hard mask so as to form a cavity; cleaning the cavity (which forms an undercut at the interface between the hard mask and the insulating region); and completely filling the cavity. The step of completely filling includes at least partially filling the cavity with copper and plugging the undercut. The undercut is plugged by sputtering a plugging material and forming an overlying doped copper layer.
Abstract: A random access memory circuit includes a plurality of pixels, each having a light sensitive area and a light blocking layer arranged over at least each of the light sensitive areas. In an alternative embodiment, the circuit includes a plurality of memory elements for storing data. Each memory element may comprise a bit node formed between a photodiode, having a light arranged over the photodiode, and a switching element, where data may be stored. The circuit may also include a plurality of reading and writing circuits for reading and writing data to and from the memory cells.
Type:
Grant
Filed:
August 4, 2009
Date of Patent:
June 4, 2013
Assignees:
STMicroelectronics (R&D) Ltd., STMicroelectronics (Crolles 2) SAS
Inventors:
Derek Tolmie, Arnaud Laflaquiere, Francois Roy
Abstract: A cell library intended to be used to form an integrated circuit, this library defining a first cell including a first MOS transistor of minimum dimensions, and a second cell including a second MOS transistor of lower leakage current, wherein the second cell takes up the same surface area as the first cell, and the second MOS transistor has a gate of same length as the gate of the first MOS transistor across at least a first width in its central portion, and of greater length across at least a second width on either side of the central portion.
Type:
Grant
Filed:
February 8, 2011
Date of Patent:
June 4, 2013
Assignees:
STMicroelectronics SA, STMicroelectronics (Crolles 2) SAS, Commissariat a l'Energie Atomique et aux Energies Alternatives
Abstract: A dynamic random access memory device may include DRAM memory cells including several lines of memory cells, and line selection circuitry associated with each line. The line selection circuitry may include a first voltage-elevator stage configured to receive two initial control logic signals each having an initial voltage level corresponding to a first logic state, and to deliver two intermediate control logic signals each having an intermediate voltage level above the initial level and corresponding to the first logic state. The line selection circuitry may also include a control circuit to be supplied by PMOS transistors with a supply voltage having a second voltage level greater than the intermediate voltage level, and configured to, in the presence of the two intermediate control logic signals have their first logic state deliver to the gates of the memory cell transistors, a selection logic signal having the second voltage level.
Abstract: A memory device includes first and second inverters cross-coupled between first and second nodes. The first inverter is configured to be supplied by a first supply voltage via a first transistor and the second inverter is configured to be supplied by the first supply voltage via a second transistor. A first control circuit is configured to control a gate node of the first transistor based on the voltage at the second node and at a gate node of the second transistor. A second control circuit is configured to control the gate node of the second transistor based on the voltage at the first node and at the gate node of the first transistor.
Abstract: A method for determining, in a first semiconductor material wafer having at least one through via, mechanical stress induced by the at least one through via, this method including the steps of: manufacturing a test structure from a second wafer of the same nature as the first wafer, in which the at least one through via is formed by a substantially identical method, a rear surface layer being further arranged on this second wafer so that the via emerges on the layer; measuring the mechanical stress in the rear surface layer; and deducing therefrom the mechanical stress induced in the first semiconductor material wafer.
Type:
Application
Filed:
June 15, 2012
Publication date:
May 9, 2013
Applicants:
Commissariat à l'Énergie Atomique et aux Énergies Alternatives, STMicroelectronics (Crolles 2) SAS
Abstract: A method for manufacturing a back-side illuminated image sensor, including the steps of: forming, inside and on top of an SOI-type silicon layer, components for trapping and transferring photogenerated carriers and isolation regions; forming a stack of interconnection levels on the silicon layer and attaching, on the interconnect stack, a semiconductor handle; removing the semiconductor support; forming, in the insulating layer and the silicon layer, trenches reaching the isolation regions; depositing a doped amorphous silicon layer, more heavily doped than the silicon layer, at least on the walls and the bottom of the trenches and having the amorphous silicon layer crystallize; and filling the trenches with a reflective material.
Abstract: A DMOS on SOI transistor including an elongated gate extending across the entire width of an active area; a drain region of a first conductivity type extending across the entire width of the active area; a source region of the first conductivity type extending parallel to the gate and stopping before the limit of the active area at least on one side of the transistor width, an interval existing between the limit of the source region and the limit of the active area; a bulk region of a second conductivity type extending under the gate and in said interval; a more heavily-doped region of the second conductivity type extending on a portion of said interval on the side of the limit of the active area; and an elongated source metallization extending across the entire width of the active area.
Type:
Application
Filed:
October 25, 2012
Publication date:
May 2, 2013
Applicants:
STMICROELECTRONICS (CROLLES 2) SAS, STMICROELECTRONICS SA
Inventors:
STMicroelectronics SA, STMicroelectronics (Crolles 2) SAS
Abstract: A variable impedance device includes a passive tuner that includes at least one variable component, which is controllable to apply a variable impedance value to an input signal of the passive tuner. A low noise amplifier is configured to supply the input signal to the passive tuner by amplifying an input RF (radio frequency) signal.
Type:
Application
Filed:
August 31, 2012
Publication date:
April 25, 2013
Applicants:
STMICROELECTRONICS SA, STMICROELECTRONICS (CROLLES 2) SAS
Inventors:
Thomas Quemerais, Daniel Gloria, Romain Debroucke
Abstract: A method for defining an insulator in a semiconductor substrate includes forming a trench in the substrate, forming in the trench an insulating material having its upper surface arranged above the surface of the substrate, and forming a diffusion barrier layer in a portion of the insulating material located above the surface of the semiconductor substrate. Such insulators can be used, for example, to insulate and delineate electronic components or portions of components formed in the substrate.
Abstract: A method for defining an insulating area in a semiconductor substrate, including a step of forming of a bonding layer on the walls and the bottom of a trench defined in the substrate. A step of passivation of the apparent surface of said bonding layer, at least close to the surface of said semiconductor substrate.
Abstract: A method of forming a metal-insulator-metal capacitor having top and bottom plates separated by a dielectric layer, one of the top and bottom plates having at least one protrusion extending into a corresponding cavity in the other of the top and bottom plates, the method including the steps of growing one or more nanofibers on a base surface.
Abstract: A method for producing at least one deep trench isolation in a semiconductor substrate including silicon and having a front side may include forming at least one cavity in the semiconductor substrate from the front side. The method may include conformally depositing dopant atoms on walls of the cavity, and forming, in the vicinity of the walls of the cavity, a silicon region doped with the dopant atoms. The method may further include filling the cavity with a filler material to form the at least one deep trench isolation.
Abstract: The disclosure concerns a method of simulating the image projected by a mask during photolithography including determining by a processor (702), taking into account the thickness of a masking layer of a mask, a near-field transmission amplitude curve of light passing through the mask across at least one pattern boundary in the initial mask layout; calculating by the processor, for each of a plurality of zones, average values of the curve; and simulating by a simulator (708) the image projected by the initial mask layout during the photolithography based on the average values.
Abstract: A method is for formation of an electrically conducting through-via within a first semiconductor support having a front face and comprising a silicon substrate. The method may include forming of a first insulating layer on top of the front face of the first semiconductor support, fabricating a handle including, within an additional rigid semiconductor support having an intermediate semiconductor layer, and forming on either side of the intermediate semiconductor layer of a porous region and of an additional insulating layer. The method may also include direct bonding of the first insulating layer and of the additional insulating layer, and thinning of the silicon substrate of the first semiconductor support so as to form a back face opposite to the front face.
Abstract: A structure for storing a native binary code in an integrated circuit, including an array of planar MIM capacitors above an insulating layer formed above a copper metallization network, wherein at least one metallization portion is present under each MIM capacitor. The size of the portion(s) is selected so that from 25 to 75% of the MIM capacitors have a breakdown voltage smaller by at least 10% than that of the other MIM capacitors.
Abstract: A MOS transistor comprising a conductive extension of its source region, insulated from its substrate, and partially extending under its channel.
Abstract: An integrated microelectronic device is formed from a substrate having a first side and a second side and including a doped active zone (2) in the first side of the substrate. A circuit component is situated in the doped active zone. A through silicon via extends between the second side and the first side, the via being electrically isolated from the substrate by an insulating layer. A buffer zone is situated between the insulating layer and the doped active zone. This buffer zone is positioned under a shallow trench isolation zone provided around the doped active zone. The buffer zone functions to reduce the electrical coupling between the through silicon via and the doped active zone.
Abstract: A photodiode includes a first doped layer and a second doped layer that share a common face. A deep isolation trench has a face contiguous with the first and second doped layers. A conducting layer is in contact with a free face of the second doped layer. A protective layer is provided at an interface with the first doped layer and second doped layer. This protective layer is capable of generating a layer of negative charge at the interface. The protective layer may further be positioned within the second doped layer to form an intermediate protective structure.
Type:
Grant
Filed:
May 17, 2010
Date of Patent:
April 2, 2013
Assignees:
STMicroelectronics S.A., STMicroelectronics (Crolles 2) SAS
Abstract: A device and corresponding fabrication method includes a vertical stack having an intermediate layer between a lower region and an upper region. The intermediate layer is extended by a protection layer. The vertical stack has a free lateral face on which the lower region, the upper region and the protection layer are exposed.
Type:
Application
Filed:
September 19, 2012
Publication date:
March 28, 2013
Applicants:
STMicroelectronics SA, STMicroelectronics (Crolles 2) SAS
Inventors:
STMicoelectronics (Crolles 2) SAS, STMicroelectronics SA,