Patents Examined by Adam S Bowen
  • Patent number: 11387150
    Abstract: A method of decreasing height differences of STIs includes providing a substrate comprising a peripheral circuit region. The peripheral circuit region includes a P-type transistor region and an N-type transistor region. A first STI and a third STI are respectively disposed within the N-type transistor region and the P-type transistor region. Later, a first mask is formed to cover the N-type transistor region. Then, an N-type well is formed in the P-type transistor region and part of the third STI is removed by taking the first mask as a mask. Next, the first mask is removed. After that, a second mask is formed to cover the P-type transistor region. Subsequently, a P-type well is formed in the N-type transistor region and part of the first STI is removed by taking the second mask as a mask. Finally, the second mask is removed.
    Type: Grant
    Filed: December 21, 2020
    Date of Patent: July 12, 2022
    Assignee: United Semiconductor (Xiamen) Co., Ltd.
    Inventors: Hui Min Chen, Song Gu, Kai Ping Huang, Wen Yi Tan
  • Patent number: 11374006
    Abstract: Provided are a semiconductor device and a method of forming the same. The semiconductor device includes a substrate, a plurality of hybrid fins, a gate, and a dielectric structure. The substrate includes a plurality of fins. The plurality of hybrid fins are respectively disposed between the plurality of fins. The gate covers portions of the plurality of fins and the plurality of hybrid fins. The dielectric structure lands on one of the plurality of hybrid fins to divide the gate into two segment. The two segments are electrically isolated to each other by the dielectric structure and the one of the plurality of hybrid fins.
    Type: Grant
    Filed: June 12, 2020
    Date of Patent: June 28, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-San Chien, Chun-Sheng Liang, Jhon-Jhy Liaw, Kuo-Hua Pan, Hsin-Che Chiang
  • Patent number: 11374060
    Abstract: The present disclosure provides a display panel and a method for fabricating the same. The display panel includes a light-emitting layer, a touch layer, a light-shielding layer, a plurality of filters, and an insulating protective layer. The light-emitting layer includes a plurality of light-emitting units. The touch layer is disposed on the light-emitting layer and provided with a plurality of grooves. The grooves are disposed corresponding to the light-emitting units. The light-shielding layer is disposed on the touch layer. The filters are disposed in the grooves of the touch layer. The insulating protective layer covers the touch layer, the light-shielding layer, and the filters.
    Type: Grant
    Filed: March 6, 2020
    Date of Patent: June 28, 2022
    Assignee: Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
    Inventor: Yuanhang Li
  • Patent number: 11362090
    Abstract: A semiconductor device includes a buried logic conductor (BLC) CFET, the BLC CFET including: relative to a first direction, first and second active regions arranged in a stack according to CFET-type configuration; first and second contact structures correspondingly electrically coupled to the first active region; third and fourth contact structures correspondingly electrically coupled to the second active region; a first layer of metallization over the stack which includes alpha logic conductors configured for logic signals (alpha logic conductors), and power grid (PG) conductors, the alpha logic and PG conductors being non-overlapping of each other; and a layer of metallization below the stack which includes beta logic conductors which are non-overlapping of each other; and wherein, relative to a second direction, each of the alpha logic, PG and beta logic conductors at least partially overlap one or more of the first, second, third and fourth contact structures.
    Type: Grant
    Filed: September 22, 2020
    Date of Patent: June 14, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Guo-Huei Wu, Pochun Wang, Chih-Liang Chen, Li-Chun Tien
  • Patent number: 11355515
    Abstract: Fabricating a three-dimensional memory device may include forming an alternating stack of insulating layers and sacrificial material layers over a substrate. Stepped surfaces are formed by patterning the alternating stack. Sacrificial pads are formed on physically exposed horizontal surfaces of the sacrificial material layers. A retro-stepped dielectric material portion is formed over the sacrificial pads. After memory stack structures extending through the alternating stack are formed, the sacrificial material layers and the sacrificial pads can be replaced with replacement material portions that include electrically conductive layers. The electrically conductive layers can be formed with thicker end portions. Contact via structures can be formed on the thicker end portions.
    Type: Grant
    Filed: May 21, 2020
    Date of Patent: June 7, 2022
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Naoto Hojo, Takahiro Tabira, Yoshitaka Otsu
  • Patent number: 11355500
    Abstract: A static random access memory (SRAM) cell includes a semiconductor fin, a first gate structure, a second gate structure, an epitaxy structure, and a first fin sidewall structure. The first gate structure crosses the semiconductor fin to form a pull-down (PD) transistor. The second gate structure crosses the semiconductor fin to form a pull-gate (PG) transistor. The epitaxy structure is on the semiconductor fin and between the first and second gate structures. The first fin sidewall structure is on a first side of the epitaxy structure and between the first and second gate structures. A method for manufacturing the semiconductor device is also disclosed.
    Type: Grant
    Filed: July 13, 2020
    Date of Patent: June 7, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yi-Jing Lee, Tsz-Mei Kwok, Ming-Hua Yu, Kun-Mu Li
  • Patent number: 11355401
    Abstract: A method of forming a field effect transistor (FET) includes providing a substrate; forming an nFET source/drain region on the substrate; forming a pFET source/drain region on the substrate and adjacent to the nFET region, the nFET source/drain region directly contacting the pFET source/drain region; forming a first insulator layer on the nFET source/drain region and the pFET source/drain region; etching away a portion of the first insulator layer between the nFET source/drain region and the pFET source/drain region down to a level of the substrate, thereby breaking the contact between the nFET source/drain region and the pFET source/drain region; and forming a second insulator layer between the nFET source/drain region and the pFET source/drain region in a space formed by the etching, the second insulator layer extending from the substrate to a top of the first insulator layer. The second insulator layer is harder than the first insulator layer.
    Type: Grant
    Filed: February 11, 2021
    Date of Patent: June 7, 2022
    Assignee: International Business Machines Corporation
    Inventors: Effendi Leobandung, Veeraraghavan S. Basker, Junli Wang, Albert Chu
  • Patent number: 11349014
    Abstract: In an embodiment, a method of forming a semiconductor device includes forming a dummy gate stack over a substrate; forming a first spacer layer over the dummy gate stack; oxidizing a surface of the first spacer layer to form a sacrificial liner; forming one or more second spacer layers over the sacrificial liner; forming a third spacer layer over the one or more second spacer layers; forming an inter-layer dielectric (ILD) layer over the third spacer layer; etching at least a portion of the one or more second spacer layers to form an air gap, the air gap being interposed between the third spacer layer and the first spacer layer; and forming a refill layer to fill an upper portion of the air gap.
    Type: Grant
    Filed: June 30, 2020
    Date of Patent: May 31, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ming-Jhe Sie, Chen-Huang Huang, Shao-Hua Hsu, Cheng-Chung Chang, Szu-Ping Lee, An Chyi Wei, Shiang-Bau Wang, Chia-Jen Chen
  • Patent number: 11348921
    Abstract: A semiconductor structure comprises a substrate and a fin extruding from the substrate along a first direction, wherein the fin comprises a first conductive type semiconductive layer over the substrate, a second conductive type semiconductive layer stacking over the first conductive type semiconductive layer along the first direction, and a dielectric layer sandwiched by the first conductive type semiconductive layer and the second conductive type semiconductive layer providing electrical isolation along the first direction between the first conductive type semiconductive layer and the second conductive type semiconductive layer.
    Type: Grant
    Filed: July 31, 2020
    Date of Patent: May 31, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventor: Wei-Lun Chen
  • Patent number: 11348840
    Abstract: A method includes forming a gate structure over fins protruding from a semiconductor substrate; forming an isolation region surrounding the fins; depositing a spacer layer over the gate structure and over the fins, wherein the spacer layer fills the regions extending between pairs of adjacent fins; performing a first etch on the spacer layer, wherein after performing the first etch, first remaining portions of the spacer layer that are within inner regions extending between pairs of adjacent fins have a first thickness and second remaining portions of the spacer layer that are not within the inner regions have a second thickness less than the first thickness; and forming an epitaxial source/drain region adjacent the gate structure and extending over the fins, wherein portions of the epitaxial source/drain region within the inner regions are separated from the first remaining portions of the spacer layer.
    Type: Grant
    Filed: June 1, 2020
    Date of Patent: May 31, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wei-Min Liu, Hsueh-Chang Sung, Yee-Chia Yeo
  • Patent number: 11342327
    Abstract: An apparatus is provided which comprises: a first transistor body comprising one or more semiconductor materials and having a length comprising a source region and a drain region with a channel region therebetween, a first dielectric layer over the first transistor body, a second transistor body comprising one or more semiconductor materials and having a length comprising a source region and a drain region with a channel region therebetween, wherein the second transistor body is over the first dielectric layer and wherein the length of the second transistor body is non-parallel to the length of the first transistor body, and a gate coupled with the channel regions of both the first transistor body and the second transistor body. Other embodiments are also disclosed and claimed.
    Type: Grant
    Filed: December 28, 2017
    Date of Patent: May 24, 2022
    Assignee: Intel Corporation
    Inventors: Ravi Pillarisetty, Willy Rachmady, Abhishek A. Sharma, Gilbert Dewey, Jack T. Kavalieros
  • Patent number: 11342328
    Abstract: Disclosed is a semiconductor device comprising a substrate, a plurality of active patterns that protrude from the substrate, a device isolation layer between the active patterns, and a passivation layer that covers a top surface of the device isolation layer and exposes upper portions of the active patterns. The device isolation layer includes a plurality of first isolation parts adjacent to facing sidewalls of the active patterns, and a second isolation part between the first isolation parts. A top surface of the second isolation part is located at a lower level than that of top surfaces of the first isolation parts.
    Type: Grant
    Filed: July 30, 2020
    Date of Patent: May 24, 2022
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Guyoung Cho, Subin Shin, Donghyun Roh, Byung-Suk Jung, Sangjin Hyun
  • Patent number: 11342383
    Abstract: The present disclosure provides a display panel and a display terminal, the display panel including an array substrate, a display device layer, and a color filter layer, wherein the display device layer includes a plurality of sub-pixel cycle units continuously arranged, and the sub-pixel cycle unit includes a plurality of sub-pixels. A part of sub-pixels is covered with the color resistors having colors corresponding to that of the sub-pixels to increase the color gamut of the sub-pixels, and meanwhile, sub-pixels not covered by the color resistors are used to increase brightness of the sub-pixels, thereby reducing the power consumption of the display panel, and improving a service life of the display panel, while improving a color gamut of the display panel.
    Type: Grant
    Filed: November 21, 2019
    Date of Patent: May 24, 2022
    Assignee: Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
    Inventor: Aiguo Tu
  • Patent number: 11335599
    Abstract: A semiconductor device includes dielectric layers and local interconnects that are stacked over a substrate alternatively, and extend along a top surface of the substrate laterally. Sidewalls of the dielectric layers and sidewalls of the local interconnects have a staircase configuration. The local interconnects are spaced apart from each other by dielectric layers and have uncovered portions by the dielectric layers. The semiconductor device also includes conductive layers selectively positioned over the uncovered portions of the local interconnects, where sidewalls of the conductive layers and sidewalls of the local interconnects are coplanar. The semiconductor device further includes isolation caps that extend from the dielectric layers. The isolation caps are positioned along sidewalls of the conductive layers and sidewalls of the local interconnects so as to separate the conductive layers from one another.
    Type: Grant
    Filed: December 19, 2019
    Date of Patent: May 17, 2022
    Assignee: Tokyo Electron Limited
    Inventors: Lars Liebmann, Jeffrey Smith, Anton J. deVilliers, Kandabara Tapily
  • Patent number: 11329054
    Abstract: A semiconductor device and a fabrication method are provided. The method includes providing a substrate; forming a first gate structure and source/drain doped layers over the substrate, where the source/drain doped layers are on both sides of the first gate structure; forming a dielectric layer covering the first gate structure and the source/drain doped layers over the substrate; forming a first trench exposing the first gate structure through the dielectric layer; forming a first conductive structure in the bottom region of the first trench; after forming the first conductive structure, forming an insulation layer in the top region of the first trench; using the insulation layer as a mask, forming recesses on source/drain doped layers through the dielectric layer on both sides of the insulation layer; and forming second conductive structures in the recesses.
    Type: Grant
    Filed: August 8, 2019
    Date of Patent: May 10, 2022
    Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
    Inventor: Fei Zhou
  • Patent number: 11315924
    Abstract: A semiconductor device includes a first active region and a second active region disposed over a substrate. A first source/drain component is grown on the first active region. A second source/drain component is grown on the second active region. An interlayer dielectric (ILD) is disposed around the first source/drain component and the second source/drain component. An isolation structure extends vertically through the ILD. The isolation structure separates the first source/drain component from the second source/drain component.
    Type: Grant
    Filed: June 30, 2020
    Date of Patent: April 26, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Ta-Chun Lin, Kuan-Lin Yeh, Chun-Jun Lin, Kuo-Hua Pan, Mu-Chi Chiang
  • Patent number: 11315959
    Abstract: The present disclosure provides an array substrate and a display panel. The array substrate includes a wiring layer, and a non-wiring layer located on a bottom portion of the wiring layer. The non-wiring layer includes a first film layer and a second film layer, which are sequentially stacked in a direction away from the wiring layer. A refractive index of the second film layer is smaller than a refractive index of the first film layer.
    Type: Grant
    Filed: January 8, 2020
    Date of Patent: April 26, 2022
    Assignee: WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
    Inventor: Xiaofeng Zhao
  • Patent number: 11315837
    Abstract: An embodiment is a device including a first fin extending from a substrate, a first gate stack over and along sidewalls of the first fin, a first gate spacer disposed along a sidewall of the first gate stack, and a first epitaxial source/drain region in the first fin and adjacent the first gate spacer. The first epitaxial source/drain region including a first epitaxial layer on the first fin, the first epitaxial layer including silicon and carbon, a second epitaxial layer on the first epitaxial layer, the second epitaxial layer having a different material composition than the first epitaxial layer, the first epitaxial layer separating the second epitaxial layer from the first fin, and a third epitaxial layer on the second epitaxial layer, the third epitaxial layer having a different material composition than the first epitaxial layer.
    Type: Grant
    Filed: September 4, 2020
    Date of Patent: April 26, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yi-Jing Lee, Tsung-Hsi Yang, Ming-Hua Yu
  • Patent number: 11316099
    Abstract: A memory device includes a memory stack formed on a substrate to program skyrmions within at least one layer of the stack. The skyrmions represent logic states of the memory device. The memory stack further includes a top and bottom electrode to receive electrical current from an external source and to provide the electrical current to the memory stack. A free layer stores a logic state of the skyrmions in response to the electrical current. A Dzyaloshinskii-Moriya (DM) Interaction (DMI) layer in contact with the free layer induces skyrmions in the free layer. A tunnel barrier is interactive with the DMI layer to facilitate detection of the logic state of the skyrmions in response to a read current. At least one fixed magnetic (FM) layer is positioned within the memory stack to facilitate programming of the skyrmions within the free layer in response to the electrical current.
    Type: Grant
    Filed: June 5, 2020
    Date of Patent: April 26, 2022
    Assignee: NORTHROP GRUMMAN SYSTEMS CORPORATION
    Inventors: Michael M. Fitelson, Thomas F. Ambrose, Nicholas D. Rizzo
  • Patent number: 11302822
    Abstract: A thin film transistor and a fabrication method thereof, an array substrate and a fabrication method thereof are disclosed. The thin film transistor includes: a base substrate; a gate electrode, an active layer, a source electrode and a drain electrode on the base substrate; and the thin film transistor further includes: a light-shielding portion between the active layer and the base substrate, the light-shielding portion includes a groove, and the active layer is in the groove.
    Type: Grant
    Filed: May 30, 2019
    Date of Patent: April 12, 2022
    Assignee: BOE TECHNOLOGY GROUP CO., LTD.
    Inventors: Fengjuan Liu, Donghui Yu