Patents Examined by Adam S Bowen
  • Patent number: 11233054
    Abstract: A semiconductor structure and a method for forming the semiconductor structure are provided. The semiconductor structure includes a substrate, which includes a first region, a second region, and a third region. The semiconductor structure also includes a first fin, a second fin, and a third fin formed on the first, second, and third regions, respectively. Moreover, the semiconductor structure includes an isolation layer formed on the substrate, and a portion of sidewall surface of each of the first, second, and third fins. In addition, the semiconductor structure includes a first epitaxial layer, a second epitaxial layer, and a third epitaxial layer formed on the first, second, and third fins, respectively. Two sides of the third epitaxial layer are in contact with the first epitaxial layer and the second epitaxial layer, respectively. Further, the semiconductor structure includes a conductive structure formed on the first, second, and third epitaxial layers.
    Type: Grant
    Filed: January 23, 2020
    Date of Patent: January 25, 2022
    Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
    Inventor: Nan Wang
  • Patent number: 11227799
    Abstract: Wrap-around contact structures for semiconductor fins, and methods of fabricating wrap-around contact structures for semiconductor fins, are described. In an example, an integrated circuit structure includes a semiconductor fin having a first portion protruding through a trench isolation region. A gate structure is over a top and along sidewalls of the first portion of the semiconductor fin. A source or drain region is at a first side of the gate structure, the source or drain region including an epitaxial structure on a second portion of the semiconductor fin. The epitaxial structure has substantially vertical sidewalls in alignment with the second portion of the semiconductor fin. A conductive contact structure is along sidewalls of the second portion of the semiconductor fin and along the substantially vertical sidewalls of the epitaxial structure.
    Type: Grant
    Filed: April 5, 2018
    Date of Patent: January 18, 2022
    Assignee: Intel Corporation
    Inventor: Rishabh Mehandru
  • Patent number: 11227644
    Abstract: A spin orbit torque (SOT) memory device includes a MTJ device on a SOT electrode, where a first portion of the SOT electrode extends beyond a sidewall of the MTJ by a first length that is no greater than a height of the MTJ, and where a second portion of the first electrode extends from the sidewall and under the MTJ by a second length that is no greater than a width of the MTJ. The MTJ device includes a free magnet, a fixed magnet and a tunnel barrier between the free magnet and the fixed magnet.
    Type: Grant
    Filed: March 30, 2018
    Date of Patent: January 18, 2022
    Assignee: Intel Corporation
    Inventors: Kevin O'Brien, Noriyuki Sato, Kaan Oguz, Mark Doczy, Charles Kuo
  • Patent number: 11217488
    Abstract: The disclosed technology generally relates to semiconductor devices and methods of forming the same. In one aspect, a method of forming a semiconductor device having vertical channel field-effect transistor (FET) devices comprises forming on a substrate, a plurality of semiconductor structures protruding vertically from a lower source/drain semiconductor layer of the substrate. The semiconductor structures can be arranged in an array having a plurality of rows and columns. The method can include etching metal line trenches between at least a subset of the rows and forming metal lines in the metal line trenches to contact the lower source/drain layer. The method can also include forming gate structures at least partly enclosing semiconductor structure channel portions located above the lower source/drain layer and forming upper source/drain metal contacts on semiconductor structure upper source/drain portions located above the channel portions.
    Type: Grant
    Filed: March 31, 2020
    Date of Patent: January 4, 2022
    Assignee: IMEC zvw
    Inventors: Anabela Veloso, Trong Huynh Bao, Raf Appeltans
  • Patent number: 11211352
    Abstract: Various embodiments of the present disclosure are directed towards a semiconductor device structure including a bump structure overlying a bond pad. The bond pad is disposed over a semiconductor substrate. An etch stop layer overlies the bond pad. A buffer layer is disposed over the bond pad and separates the etch stop layer and the bond pad. The bump structure includes a base portion contacting an upper surface of the bond pad and an upper portion extending through the etch stop layer and the buffer layer. The base portion of the bump structure has a first width or diameter and the upper portion of the bump structure has a second width or diameter. The first width or diameter being greater than the second width or diameter.
    Type: Grant
    Filed: October 1, 2019
    Date of Patent: December 28, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ching-Sheng Chu, Chern-Yow Hsu
  • Patent number: 11211426
    Abstract: A magnetoresistive random access memory (MRAM) cell includes a bottom electrode, a magnetic tunnel junction structure, a bipolar tunnel junction selector; and a top electrode. The tunnel junction selector includes a MgO tunnel barrier layer and provides a bipolar function for putting the MTJ structure in parallel or anti-parallel mode.
    Type: Grant
    Filed: October 1, 2019
    Date of Patent: December 28, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Mauricio Manfrini, Hon-Sum Philip Wong
  • Patent number: 11205708
    Abstract: Dual self-aligned gate endcap (SAGE) architectures, and methods of fabricating dual self-aligned gate endcap (SAGE) architectures, are described. In an example, an integrated circuit structure includes a first semiconductor fin having a cut along a length of the first semiconductor fin. A second semiconductor fin is parallel with the first semiconductor fin. A first gate endcap isolation structure is between the first semiconductor fin and the second semiconductor fin. A second gate endcap isolation structure is in a location of the cut along the length of the first semiconductor fin.
    Type: Grant
    Filed: April 2, 2018
    Date of Patent: December 21, 2021
    Assignee: Intel Corporation
    Inventors: Sairam Subramanian, Walid M. Hafez, Sridhar Govindaraju, Mark Liu, Szuya S. Liao, Chia-Hong Jan, Nick Lindert, Christopher Kenyon
  • Patent number: 11195719
    Abstract: Embodiments of the present disclosure describe techniques for reducing in-plane distortion from wafer to wafer bonding using a dummy wafer. One embodiment is an apparatus formed using a dummy wafer, the apparatus comprising: a device layer fusion bonded to a first side of a carrier wafer, wherein the dummy wafer comprises a first wafer and the carrier wafer comprises a second wafer that is different than the first wafer; wherein the device layer comprise a portion of a third wafer that is different than the second wafer; and wherein a second opposite side of the carrier wafer includes: a removal process artifact, wherein a distortion signature present in the portion of the second wafer is indicative of the use of the dummy wafer fusion bonded to the second side of the carrier wafer, or a remainder of the dummy wafer. Other embodiments may be disclosed and/or claimed.
    Type: Grant
    Filed: April 2, 2018
    Date of Patent: December 7, 2021
    Assignee: Intel Corporation
    Inventors: Chytra Pawashe, Daniel Pantuso
  • Patent number: 11195805
    Abstract: A package substrate is disclosed. The package substrate includes a die package in the package substrate located at least partially underneath a location of a power delivery interface in a die that is coupled to the surface of the package substrate. Connection terminals are accessible on a surface of the die package to provide connection to the die that is coupled to the surface of the package substrate. Metal-insulator-metal layers inside the die package are coupled to the connection terminals.
    Type: Grant
    Filed: March 30, 2018
    Date of Patent: December 7, 2021
    Assignee: Intel Corporation
    Inventors: Andrew Collins, Sujit Sharan, Jianyong Xie
  • Patent number: 11189564
    Abstract: Embodiments herein may describe techniques for an integrated circuit including a MOSFET having a source area, a channel area, a gate electrode, and a drain area. The channel area may include a first channel region with a dopant of a first concentration next to the source area, and a second channel region with the dopant of a second concentration higher than the first concentration next to the drain area. A source electrode may be in contact with the source area, a gate oxide layer above the channel area, and the gate electrode above the gate oxide layer. A first resistance exists between the source electrode and the gate electrode. A second resistance exists between the source electrode, the gate electrode, and a path through the gate oxide layer to couple the source electrode and the gate electrode after a programming operation is performed. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: April 2, 2018
    Date of Patent: November 30, 2021
    Assignee: Intel Corporation
    Inventors: Yu-Lin Chao, Sarvesh H. Kulkarni, Vincent E. Dorgan, Uddalak Bhattacharya
  • Patent number: 11189631
    Abstract: A three-dimensional flash memory device including a lower and upper word line stack; a cell channel structure; and a dummy channel structure, wherein the cell channel structure includes a lower cell channel structure; an upper cell channel structure; and a cell channel enlarged portion between the lower and upper cell channel structures and having a width greater than that of the lower cell channel structure, wherein the dummy channel structure includes a lower dummy channel structure; an upper dummy channel structure; and a dummy channel enlarged portion between the lower and upper dummy channel structures, the dummy channel enlarged portion having a width greater than that of the lower dummy channel structure, wherein a difference between the width of the dummy channel enlarged portion and the lower dummy channel structure is greater than a difference between the width of the cell channel enlarged portion and the lower cell channel structure.
    Type: Grant
    Filed: October 1, 2019
    Date of Patent: November 30, 2021
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventor: Jisung Cheon
  • Patent number: 11171143
    Abstract: A semiconductor structure is provided. The semiconductor structure includes a first dielectric fin, a first semiconductor fin and a second dielectric fin over a substrate. The first semiconductor fin is between the first dielectric fin and the second dielectric fin. The semiconductor structure also includes a first gate electrode wrapping the first dielectric fin, a channel region of the first semiconductor fin and the second dielectric fin and a first source/drain structure over a source/drain portion of the first semiconductor fin, being in contact with and interposing the first dielectric fin and the second dielectric fin.
    Type: Grant
    Filed: October 1, 2019
    Date of Patent: November 9, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventor: Jhon-Jhy Liaw
  • Patent number: 11164795
    Abstract: Structures for a field-effect transistor and methods of forming a structure for a field-effect transistor. First and second gate structures extend over the semiconductor body. A source/drain region is positioned laterally between the first gate structure and the second gate structure. The source/drain region includes a semiconductor layer having a first section, a second section, and a third section. A first portion of the semiconductor body is positioned between the first section of the semiconductor layer and the second section of the semiconductor layer. A second portion of the semiconductor body is positioned between the second section of the semiconductor layer and the third section of the semiconductor layer.
    Type: Grant
    Filed: March 24, 2020
    Date of Patent: November 2, 2021
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Sipeng Gu, Judson Holt, Haiting Wang, Bangun Indajang
  • Patent number: 11145729
    Abstract: A semiconductor device includes a composite gate structure formed over a semiconductor substrate. The composite gate structure includes a gate dielectric layer, a metal layer, and a semiconductor layer. The metal layer is disposed on the gate dielectric layer. The semiconductor layer is disposed on the gate dielectric layer. The metal layer surrounds the semiconductor layer.
    Type: Grant
    Filed: April 10, 2020
    Date of Patent: October 12, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chi-Feng Huang, Chia-Chung Chen, Victor Chiang Liang, Meng-Chang Ho, Chung-Hao Chu, Tz-Hau Guo
  • Patent number: 11145701
    Abstract: A display device includes a plurality of pixels each including a first light emitting element with a first light reflecting layer, a second light emitting element with a second light reflecting layer, and a third light emitting element with a third light reflecting layer, arranged in a two-dimensional matrix. Each of the light emitting elements includes a first electrode, an organic layer, and a second electrode. Grooves that each have a light shielding layer are formed in a boundary region between the light emitting elements. A bottom of the first groove and a bottom of the third groove are located at a position higher than a top surface of the first light reflecting layer. A bottom of the second groove is located at a position higher than a top surface of the second light reflecting layer.
    Type: Grant
    Filed: February 12, 2020
    Date of Patent: October 12, 2021
    Assignee: Sony Corporation
    Inventor: Tomokazu Ohchi
  • Patent number: 11139239
    Abstract: Various embodiments of the present disclosure are directed towards an integrated circuit (IC) including an interconnect structure overlying a substrate. The interconnect structure has a plurality of metal layers overlying over the substrate. A first dielectric layer overlies an uppermost surface of the interconnect structure. The first dielectric layer has opposing sidewalls defining a trench. A first magnetic layer is disposed within the trench and conformally extends along the opposing sidewalls. Conductive wires are disposed within the trench and overlie the first magnetic layer. A second magnetic layer overlies the first magnetic layer and the conductive wires. The second magnetic layer laterally extends from over a first sidewall of the opposing sidewalls to a second sidewall of the opposing sidewalls.
    Type: Grant
    Filed: October 1, 2019
    Date of Patent: October 5, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hung-Wen Hsu, Jiech-Fun Lu, Kai Tzeng, Wei-Li Huang
  • Patent number: 11139231
    Abstract: A radio frequency module includes: a multilayer substrate that includes a plurality of insulator layers; an amplifying circuit that is provided on the multilayer substrate and amplifies a radio frequency signal; a power supply circuit that is provided on the multilayer substrate and supplies power to the amplifying circuit; a ground conductor that is a first conductor pattern having a ground potential and used in the amplifying circuit; and a ground conductor that is a second conductor pattern having a ground potential and used in the power supply circuit. The ground conductors are physically separated from each other and provided in internal layers of the multilayer substrate.
    Type: Grant
    Filed: October 3, 2019
    Date of Patent: October 5, 2021
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventor: Akifumi Honda
  • Patent number: 11133230
    Abstract: Semiconductor device and the manufacturing method thereof are disclosed herein. An exemplary semiconductor device comprises a substrate having a first region and a second region; a first semiconductor fin formed on the substrate within the first region; a second semiconductor fin formed on the substrate within the second region; a first liner layer disposed along a lower portion of the first semiconductor fin and a lower portion of the second semiconductor fin; a second liner layer disposed over the first liner layer in the second region, wherein the second liner layer is different from the first liner layer in composition; and an isolation feature disposed on the first liner layer in the first region and on the second liner layer in the second region, and separating lower portions of the first semiconductor fin and the second semiconductor fin.
    Type: Grant
    Filed: February 26, 2020
    Date of Patent: September 28, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventor: Yu-Kuan Lin
  • Patent number: 11121205
    Abstract: A display panel measures a contact resistance of an adhesive portion to evaluate adhesion quality of an integrated circuit mounted thereon. The display panel includes a plurality of light-emitting elements, a first pad part including a plurality of first effective pads electrically connected to the light-emitting elements, and n (n being a natural number equal to or greater than 2) first measuring pads insulated from the light-emitting elements, a conductive adhesive film on the first pad part and including a plurality of conductive balls, an integrated circuit on the conductive adhesive film, and including an internal line electrically connected to the first measuring pads by the conductive balls, and a second pad part including a plurality of second effective pads electrically connected to the first effective pads, and 2n second measuring pads electrically connected to the first measuring pads.
    Type: Grant
    Filed: January 24, 2020
    Date of Patent: September 14, 2021
    Assignee: Samsung Display Co., Ltd.
    Inventors: Daegeun Lee, Kyung-Mok Lee, Wuhyen Jung
  • Patent number: 11114366
    Abstract: A semiconductor structure is provided. The semiconductor structure includes a first well region over a substrate, and an isolation structure over the first well region. The semiconductor structure also includes a first transistor over the first well region, and a first buried conductive line over the first well region and electrically connected to a source structure of the first transistor. A top surface of the first buried conductive line is substantially level with or lower than a top surface of the isolation structure.
    Type: Grant
    Filed: October 1, 2019
    Date of Patent: September 7, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventor: Jhon-Jhy Liaw