Patents Examined by Calvin Choi
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Patent number: 9812424Abstract: A process of forming an electronic device includes providing a wire comprising a first ball at an end thereof, operating on the first ball to modify a surface of the first ball to form a modified surface, moving the first ball to a first location on a die, and bonding the first ball along the modified surface to the first location of the die. In an embodiment, the process further includes moving a bonding tool including the wire away from the die while the wire remains bonded to the die.Type: GrantFiled: May 2, 2016Date of Patent: November 7, 2017Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLCInventors: Harold G. Anderson, Cang Ngo
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Patent number: 9812448Abstract: Provided are a semiconductor device configured to block a physical diffusion path by forming an oxide layer between barrier layers to prevent impurities from being diffused through the physical diffusion path between the barrier layers, and a method for fabricating the semiconductor device. The semiconductor device includes a gate insulation layer formed on a substrate, a first barrier layer formed on the gate insulation layer, an oxide layer formed on the first barrier layer, the oxide layer including an oxide formed by oxidizing a material included in the first barrier layer, a second barrier layer formed on the oxide layer, a gate electrode formed on the second barrier layer, and source/drains disposed at opposite sides of the gate electrode in the substrate.Type: GrantFiled: December 9, 2015Date of Patent: November 7, 2017Assignee: Samsung Electronics Co., Ltd.Inventors: Oh-Seong Kwon, Jin-Kyu Jang, Wan-Don Kim, Hoon-Joo Na, Sang-Jin Hyun
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Patent number: 9799511Abstract: Methods for the formation of SiCN, SiCO and SiCON films comprising cyclical exposure of a substrate surface to a silicon-containing gas, a carbon-containing gas and a plasma. Some embodiments further comprise the addition of an oxidizing agent prior to at least the plasma exposure.Type: GrantFiled: April 29, 2016Date of Patent: October 24, 2017Assignee: Applied Materials, Inc.Inventors: Ning Li, Mark Saly, David Thompson, Mihaela Balseanu, Li-Qun Xia
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Patent number: 9799513Abstract: A strain relaxed buffer layer is fabricated by melting an underlying layer beneath a strained semiconductor layer, which allows the strained semiconductor layer to elastically relax. Upon recrystallization of the underlying layer, crystalline defects are trapped in the underlying layer. Semiconductor layers having different melting points, such as silicon germanium layers having different atomic percentages of germanium, are formed on a semiconductor substrate. An annealing process causes melting of only the silicon germanium layer that has the higher germanium content and therefore the lower melting point. The silicon germanium layer having the lower germanium content is elastically relaxed upon melting of the adjoining silicon germanium layer and can be used as a substrate for growing strained semiconductor layers such as channel layers of field-effect transistors.Type: GrantFiled: January 23, 2017Date of Patent: October 24, 2017Assignee: International Business Machines CorporationInventors: Veeraraghavan S. Basker, Oleg Gluschenkov, Shogo Mochizuki, Alexander Reznicek
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Patent number: 9799574Abstract: The present disclosure provides a gate integrated driving circuit and a restoring method thereof, a display panel and a display apparatus. The gate integrated driving circuit may comprise a plurality of cascaded shift registers, wherein at least one restoring thin film transistor is provided in each of the cascaded shift registers and the restoring thin film transistor is configured to replace a thin film transistor having a failure in the shift register. When a thin film transistor in the shift register has a failure, the gate integrated driving circuit according to the present disclosure may replace the thin film transistor having the failure to operate. Thus, the restoring thin film transistor can restore the failure of the gate integrated driving circuit, thereby improving the productivity of the gate integrated driving circuit.Type: GrantFiled: August 15, 2016Date of Patent: October 24, 2017Assignees: BOE TECHNOLOGY GROUP CO., LTD., BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.Inventors: Rui Xu, Xiaochuan Chen, Lei Wang, Jing Li
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Patent number: 9793291Abstract: A method of manufacturing a semiconductor device, the method including forming a structure on a substrate, the structure including a metal pattern, at least a portion of the metal pattern being exposed; forming a preliminary buffer oxide layer to cover the structure, a metal oxide layer being formed at the exposed portion of the metal pattern; and deoxidizing the metal oxide layer so that the preliminary buffer oxide layer is transformed into a buffer oxide layer.Type: GrantFiled: April 29, 2016Date of Patent: October 17, 2017Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Hyun-Jin Shin, Hong-Suk Kim, Jung-Hwan Kim, Sang-Hoon Lee, Hun-Hyeong Lim, Yong-Seok Cho, Young-Dae Kim, Han-Vit Yang
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Patent number: 9786654Abstract: An ESD protection semiconductor device includes a substrate, a first isolation structure disposed in the substrate, a gate disposed on the substrate and overlapping a portion of the first isolation structure, a source region formed in the substrate at a first side of the gate, and a drain region formed in the substrate at a second side of the gate opposite to the first side. The substrate and the drain region include a first conductivity type, the source region includes a second conductivity type, and the first conductivity and the second conductivity type are complementary to each other.Type: GrantFiled: October 20, 2016Date of Patent: October 10, 2017Assignee: UNITED MICROELECTRONICS CORP.Inventors: Jhih-Ming Wang, Li-Cih Wang, Tien-Hao Tang
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Patent number: 9786667Abstract: A method for fabricating floating body memory cells (FBCs), and the resultant FBCs where gates favoring different conductivity type regions are used is described. In one embodiment, a p type back gate with a thicker insulation is used with a thinner insulated n type front gate. Processing, which compensates for misalignment, which allows the different oxide and gate materials to be fabricated is described.Type: GrantFiled: March 30, 2017Date of Patent: October 10, 2017Assignee: Intel CorporationInventors: Peter L. D. Chang, Uygar E. Avci, David Kencke, Ibrahim Ban
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Patent number: 9786498Abstract: Described is a method for producing a nitride compound semiconductor layer, involving the steps of:—depositing a first seed layer (1) comprising a nitride compound semiconductor material on a substrate (10);—desorbing at least some of the nitride compound semiconductor material in the first seed layer from the substrate (10);—depositing a second seed layer (2) comprising a nitride compound semiconductor material; and—growing the nitride compound semiconductor layer (3) containing a nitride compound semiconductor material onto the second seed layer (2).Type: GrantFiled: February 12, 2015Date of Patent: October 10, 2017Assignee: OSRAM Opto Semiconductors GmbHInventors: Juergen Off, Matthias Peter, Thomas Lehnhardt, Werner Bergbauer
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Patent number: 9786487Abstract: A method for temporary coating of cavities, which at least partially run through a semiconductor substrate and are provided for a permanent coating and/or equipping, with a temporarily applied coating material before processing steps for processing at least one surface of the semiconductor substrate. In addition, a method for removing a temporary coating of cavities of a semiconductor substrate, whereby the coating is applied according to a previously-mentioned method and whereby, in particular immediately afterwards, a permanent coating and/or equipping of the cavities is carried out.Type: GrantFiled: January 9, 2015Date of Patent: October 10, 2017Assignee: EV GROUP E. THALLNER GMBHInventor: Andreas Fehkuhrer
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Patent number: 9780044Abstract: A transient electronic device utilizes a glass-based interposer that is treated using ion-exchange processing to increase its fragility, and includes a trigger device operably mounted on a surface thereof. An integrated circuit (IC) die is then bonded to the interposer, and the interposer is mounted to a package structure where it serves, under normal operating conditions, to operably connect the IC die to the package I/O pins/balls. During a transient event (e.g., when unauthorized tampering is detected), a trigger signal is transmitted to the trigger device, causing the trigger device to generate an initial fracture force that is applied onto the glass-based interposer substrate. The interposer is configured such that the initial fracture force propagates through the glass-based interposer substrate with sufficient energy to both entirely powderize the interposer, and to transfer to the IC die, whereby the IC die also powderizes (i.e., visually disappears).Type: GrantFiled: April 23, 2015Date of Patent: October 3, 2017Assignee: Palo Alto Research Center IncorporatedInventors: Scott J. H. Limb, Gregory L. Whiting
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Patent number: 9780338Abstract: A tandem light-emitting element in which generation of crosstalk can be suppressed even when the element is applied to a high-definition display is provided. In the tandem light-emitting element, a layer in contact the anode side of an intermediate layer contains 2,9-bis(naphthalen-2-yl)-4,7-diphenyl-1,10-phenanthroline (abbreviation: NBPhen).Type: GrantFiled: November 30, 2016Date of Patent: October 3, 2017Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Tsunenori Suzuki, Shogo Uesaka, Ryohei Yamaoka, Satoshi Seo
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Patent number: 9773649Abstract: Provided herein are methods of selectively etching silicon-containing block copolymer (BCP) materials. The methods involve exposing a BCP material that includes at least one silicon-containing block and at least one non-silicon-containing block to a plasma that has a reducing chemistry. The reducing plasma selectively removes the non-silicon-containing block, the silicon-containing block to be used in further processing. In some embodiments, the silicon-containing block is used as an etch mask. The reducing plasma reduces or eliminates profile bowing and undercut of the silicon-containing domains, allowing processing of high aspect ratio features. Examples of reducing chemistries include nitrogen (N2), hydrogen (H2), ammonia (NH3), hydrazine (N2H4), and mixtures thereof. Also provided are apparatuses to perform the methods.Type: GrantFiled: November 17, 2014Date of Patent: September 26, 2017Assignee: Lam Research CorporationInventor: Stephen M. Sirard
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Patent number: 9773208Abstract: Quantum information processing apparatus and methods are described. The apparatus comprises a device for defining a qubit and a reflectometry circuit for reading out a state of the qubit. The device comprises a semiconductor nanowire extending along a first direction having first and second obtuse or acute edges running along the first direction, gate dielectric overlying the first and second edges of the nanowire and a split gate running across a section of the nanowire in a second, transverse direction, the split gate comprising first and second gates overlying the first and second edges respectively. The reflectometry circuit comprises a resonator coupled to the first or second gate.Type: GrantFiled: April 11, 2016Date of Patent: September 26, 2017Assignee: HITACHI, LTD.Inventors: Andreas Betz, Miguel Fernando Gonzalez-Zalba
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Patent number: 9768116Abstract: Optimized metal wires for resistance or electromigration, methods of manufacturing thereof and design methodologies are disclosed. The method includes depositing metal material within openings and on a surface of dielectric material resulting in metal filled openings and a topography of recessed areas aligned with the metal filled openings. The method further includes depositing an alloying material over the metal material, including within the recessed areas. The method further includes planarizing the metal material, leaving the alloying material within the recessed areas. The method further includes diffusing the alloying material into the metal material forming alloyed regions self-aligned with the metal filled openings.Type: GrantFiled: September 9, 2016Date of Patent: September 19, 2017Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Lawrence A. Clevenger, Baozhen Li, Kirk D. Peterson
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Patent number: 9768093Abstract: An integrated circuit is provided. The integrated circuit includes a continuous resistor body having first and second distal terminals, and a group of electrically-floating dummy conductors that are formed above the continuous resistor body, and between the first and second distal terminals of the continuous resistor body. Each of the group of dummy conductors is coupled to the continuous resistor body through a respective via structure. The group of dummy conductors serves to dissipate heat for the continuous resistor body. If desired, an active conductor is interposed in the dummy conductors and serves as a center-tap for the continuous resistor body. The active conductor is connected to a contact node on the substrate.Type: GrantFiled: March 4, 2016Date of Patent: September 19, 2017Assignee: Altera CorporationInventors: Queennie Suan Imm Lim, Shahla Honarkhah
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Patent number: 9768190Abstract: A semiconductor memory device may include an electrode structure including a selection line on a substrate and word lines between the substrate and the selection line, vertical pillars penetrating the electrode structure and being connected to the substrate, sub-interconnections and bit lines sequentially stacked on and electrically connected to the vertical pillars, and lower contacts connecting the vertical pillars to the sub-interconnections. The selection line may include a plurality of selection lines separated from each other in a first direction by an insulating separation layer, and central axes of the lower contacts connected in common to one of the sub-interconnections may be shifted, in a second direction across the first direction and parallel to a top surface of the substrate, from central axes of the vertical pillars thereunder.Type: GrantFiled: December 9, 2015Date of Patent: September 19, 2017Assignee: Samsung Electronics Co., Ltd.Inventors: TaeHee Lee, Kyoung-Hoon Kim, Hongsoo Kim
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Patent number: 9768044Abstract: A method includes performing an anneal on a wafer. The wafer includes a wafer-edge region, and an inner region encircled by the wafer-edge region. During the anneal, a first power applied on a portion of the wafer-edge region is at least lower than a second power for annealing the inner region.Type: GrantFiled: April 26, 2016Date of Patent: September 19, 2017Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yi-Chao Wang, Yu-Chang Lin, Li-Ting Wang, Tai-Chun Huang, Pei-Ren Jeng, Tze-Liang Lee
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Patent number: 9741854Abstract: There is provided a method for manufacturing a semiconductor device including a substrate including a plurality of active regions, a plurality of gate electrodes extending in a first direction to intersect a portion of the plurality of active regions, and including first and second gate electrodes disposed to be adjacent to each other in the first direction, a gate isolation portion disposed between the first and second gate electrodes. The gate isolation portion includes a first layer and second layers disposed on both ends of the first layer in a second direction perpendicular to the first direction.Type: GrantFiled: December 4, 2015Date of Patent: August 22, 2017Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Keun Hee Bai, Kyoung Hwan Yeo, Seung Seok Ha, Seung Ju Park, Do Hyoung Kim, Myeong Cheol Kim, Jae Hyoung Koo, Ki Byung Park
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Patent number: 9741843Abstract: A semiconductor device in which current sensing accuracy is maintained while ruggedness of a current sensing region is improved. The semiconductor device includes a semiconductor substrate; a main element provided on the semiconductor substrate and having a first trench gate structure including a first trench disposed on a first main surface side of the semiconductor substrate; a gate insulating film disposed along an inner wall of the first trench; and a gate electrode disposed inside the first trench; and a current detecting element for detecting a current flowing into the semiconductor substrate when the main element is operating provided on the semiconductor substrate and having a second trench gate structure including a second trench disposed on the first main surface side of the semiconductor substrate; the gate insulating film disposed along an inner wall of the second trench; and the gate electrode disposed inside the second trench.Type: GrantFiled: December 8, 2015Date of Patent: August 22, 2017Assignee: FUJI ELECTRIC CO., LTD.Inventor: Takeyoshi Nishimura