Patents Examined by Mary Wilczewski
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Patent number: 10756084Abstract: The present invention discloses a group-III nitride semiconductor device, which comprises a substrate, a buffer layer, a semiconductor stack structure, and a passivation film. The buffer layer is disposed on the substrate. The semiconductor stack structure is disposed on the buffer layer and comprises a gate, a source, and a drain. In addition, a gate insulating layer is disposed between the gate and the semiconductor stack structure for forming a HEMT. The passivation film covers the HEMT and includes a plurality of openings corresponding to the gate, the source, and the drain, respectively. The material of the passivation film is silicon oxynitride.Type: GrantFiled: June 2, 2017Date of Patent: August 25, 2020Inventor: Wen-Jang Jiang
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Patent number: 10748847Abstract: The present disclosure relates to a semiconductor device comprising a metallisation stack. The metallisation stack may include a first metallisation layer and a second metallisation layer. The first metallisation layer may be electrically connected to the second metallisation layer by a two or more stacked inter-metal vias.Type: GrantFiled: September 9, 2015Date of Patent: August 18, 2020Assignee: Nexperia B.V.Inventors: Paul Huiskamp, Godfried Henricus Josephus Notermans
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Patent number: 10749033Abstract: Disclosed is a semiconductor device including: an insulating layer; a source electrode and a drain electrode embedded in the insulating layer; an oxide semiconductor layer in contact and over the insulating layer, the source electrode, and the drain electrode; a gate insulating layer over and covering the oxide semiconductor layer; and a gate electrode over the gate insulating layer, where the upper surfaces of the insulating layer, the source electrode, and the drain electrode exist coplanarly. The upper surface of the insulating layer, which is in contact with the oxide semiconductor layer, has a root-mean-square (RMS) roughness of 1 nm or less, and the difference in height between the upper surface of the insulating layer and the upper surface of the source electrode or the drain electrode is less than 5 nm. This structure contributes to the suppression of defects of the semiconductor device and enables their miniaturization.Type: GrantFiled: February 4, 2014Date of Patent: August 18, 2020Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Hiromichi Godo, Ryota Imahayashi, Kiyoshi Kato
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Patent number: 10741497Abstract: The present disclosure relates to semiconductor structures and, more particularly, to contact and interconnect structures and methods of manufacture. The structure includes: a single damascene contact structure in electrical contact with a contact of a source region or drain region; and a single damascene interconnect structure in a wiring layer and in direct electrical contact with the single damascene contact structure.Type: GrantFiled: February 15, 2018Date of Patent: August 11, 2020Assignee: GLOBALFOUNDRIES INC.Inventor: Jim Shih-Chun Liang
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Patent number: 10739918Abstract: Disclosed is a display device that may, for example, include a gate line that is provided in a first direction on a backplane and delivers a gate signal; a data line that is provided in a second direction on the backplane and delivers a data signal; a Thin Film Transistor (TFT) in each pixel defined by a crossing between the gate line and the data line; a first electrode spaced apart from one of a source electrode and a drain electrode of the TFT; a second electrode that is provided on a layer different from that on which the first electrode is provided; a TFT passivation layer that is provided on the TFT and has a first contact hole; a first connection pattern that connects one of the source electrode and the drain electrode to the first electrode through the first contact hole; and a second connection pattern that delivers a touch driving signal to the second electrode and is formed of a material substantially identical to that of the first connection pattern.Type: GrantFiled: August 1, 2017Date of Patent: August 11, 2020Assignee: LG DISPLAY CO., LTD.Inventors: Sanghyuk Won, MinJoo Kim
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Patent number: 10727339Abstract: Vertical semiconductor devices having selectively regrown top contacts and method of fabricating vertical semiconductor devices having selectively regrown top contacts are described. For example, a semiconductor device includes a substrate having a surface. A first source/drain region is disposed on the surface of the substrate. A vertical channel region is disposed on the first source/drain region and has a first width parallel with the surface of the substrate. A second source/drain region is disposed on the vertical channel region and has a second width parallel with and substantially greater than the first width. A gate stack is disposed on and completely surrounds a portion of the vertical channel region.Type: GrantFiled: March 28, 2014Date of Patent: July 28, 2020Assignee: Intel CorporationInventors: Benjamin Chu-Kung, Gilbert Dewey, Van H. Le, Jack T. Kavalieros, Marko Radosavljevic, Ravi Pillarisetty, Han Wui Then, Niloy Mukherjee, Sansaptak Dasgupta
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Patent number: 10720520Abstract: A type IV semiconductor substrate having a main surface is provided. A type III-V semiconductor channel region that includes a two-dimensional carrier gas is formed over the type IV semiconductor substrate. A type III-V semiconductor lattice transition region that is configured to alleviate mechanical stress arising from lattice mismatch is formed between the type IV semiconductor substrate and the type III-V semiconductor channel region. Forming the type III-V semiconductor lattice transition region includes forming a first lattice transition layer having a first metallic concentration over the type IV semiconductor substrate, forming a third lattice transition layer having a third metallic concentration that is higher than the first metallic concentration over the first lattice transition layer, and forming a fourth lattice transition layer having a fourth metallic concentration that is lower than the first metallic concentration over the third lattice transition layer.Type: GrantFiled: June 21, 2017Date of Patent: July 21, 2020Assignee: Infineon Technologies Austria AGInventors: Seong-Eun Park, Jianwei Wan, Mihir Tungare, Peter Kim, Srinivasan Kannan
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Patent number: 10720376Abstract: A packaged power transistor device includes a Direct-Bonded Copper (“DBC”) substrate. Contact pads of a first lead are attached with solderless welds to a metal layer of the DBC substrate. In a first example, the solderless welds are ultrasonic welds. In a second example, the solderless welds are laser welds. A single power transistor realized on a single semiconductor die is attached to the DBC substrate. In one example, a first bond pad of the die is wire bonded to a second lead, and a second bond pad of the die is wire bonded to a third lead. The die, the wire bonds, and the metal layer of the DBC substrate are covered with an amount of plastic encapsulant. Lead trimming is performed to separate the first, second and third leads from the remainder of a leadframe, the result being the packaged power transistor device.Type: GrantFiled: November 2, 2018Date of Patent: July 21, 2020Assignee: Littelfuse, Inc.Inventors: Gi-Young Jeun, Kang Rim Choi
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Patent number: 10714663Abstract: A method of manufacturing a light emitting device, includes providing a light emitting element having an element upper surface, an element lower surface opposite to the element upper surface in a thickness direction of the light emitting element, and an element side surface between the element upper surface and the element lower surface. A wavelength converter having a converter lower surface is provided. The wavelength converter is joined to the light emitting element using an adhesive so that the converter lower surface faces the element upper surface. The converter lower surface has an exposed region that does not face the element upper surface viewed along the thickness direction. The adhesive covers the element side surface and the exposed region.Type: GrantFiled: March 1, 2018Date of Patent: July 14, 2020Assignee: NICHIA CORPORATIONInventors: Daisuke Sato, Atsushi Hashizume, Toshiki Nishihama, Shimpei Maeda
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Patent number: 10714471Abstract: A method for fabricating a semiconductor device includes forming a first mask layer, a second mask layer, and a plurality of first patterned layers on an interlayer dielectric layer and a plurality of gate structures. A plurality of first openings separate the first patterned layers with each across a source region, a drain region, and a portion of an isolation area between the source and the drain regions. The second mask layer is then patterned by etching. The method includes forming a plurality of discrete second patterned layers above the isolation areas between source and drain regions and then forming a patterned first mask layer by etching. Further, the method includes forming a plurality of contact vias to expose the source/drain regions through etching using the patterned first mask layer and second mask layer as an etch mask, and then forming a metal silicide layer on each source/drain region.Type: GrantFiled: October 4, 2016Date of Patent: July 14, 2020Assignees: Semiconductor Manufacturing International (Beijing) Corporation, Semiconductor Manfacturing International (Shanghai) CorporationInventors: Yihua Shen, Yunchu Yu, Jian Pan, Fenghua Fu
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Patent number: 10714341Abstract: Lift-off methods for fabricating metal line patterns on a substrate are provided. For example, a method to fabricate a device includes forming a sacrificial layer on a substrate and forming a photoresist mask over the sacrificial layer, isotropically etching a portion of the sacrificial layer exposed through an opening of the photoresist mask to form an undercut region in the sacrificial layer below the photoresist mask, wherein the undercut region defines an overhang structure, and anisotropically etching a portion of the sacrificial layer exposed through the opening of the photoresist mask to form an opening through the sacrificial layer down to the substrate. Metallic material is deposited to cover the photoresist mask and to at least partially fill the opening formed in the sacrificial layer without coating the overhang structure with metallic material. The sacrificial layer is dissolved to lift-off the metallic material covering the photoresist mask.Type: GrantFiled: May 10, 2017Date of Patent: July 14, 2020Assignee: ELPIS TECHNOLOGIES INC.Inventors: Guy M. Cohen, Sebastian U. Engelmann, Steve Holmes, Jyotica V. Patel
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Patent number: 10707285Abstract: A display device includes: a substrate including a curved portion and a flat portion; an insulating layer disposed on the substrate; a first organic light emitting diode disposed on the insulating layer and having a first projection; and a second organic light emitting diode having a second projection, wherein a light emission portion is disposed in the curved portion and the flat portion, the first projection overlaps the light emission portion disposed in the curved portion and is asymmetric in the light emission portion, and the second projection overlaps the light emission portion in the flat portion and is symmetric in the light emission portion.Type: GrantFiled: August 14, 2017Date of Patent: July 7, 2020Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Won Ju Kwon, Hee Seong Jeong
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Patent number: 10707323Abstract: Metal contact openings are etched in the barrier layer of a group III-N HEMT with a first gas combination that etches down into the barrier layer, and a second gas combination that etches further down into the barrier layer to a depth that lies above the top surface of a channel layer that touches and lies below the barrier layer.Type: GrantFiled: May 23, 2019Date of Patent: July 7, 2020Assignee: TEXAS INSTRUMENTS INCORPORATEDInventors: Yoshikazu Kondo, Shoji Wada, Hiroshi Yamasaki, Masahiro Iwamoto
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Patent number: 10707129Abstract: A processing method of a wafer includes a cut groove forming step of carrying out cutting with a cutting blade along streets from the back surface of the wafer to form cut grooves, a wafer dividing step of irradiating the wafer with a laser beam along the cut grooves and dividing the wafer into individual chips after the cut groove forming step is carried out, and a die bonding layer disposing step of applying a liquid die bonding agent on the back surface of the wafer and curing it to form the chips on which die bonding layers are formed on the back surface. According to the processing method of the present invention, the occurrence of clogging in the cutting blade and generation of a burr or the like in the die bonding layers can be prevented.Type: GrantFiled: February 2, 2018Date of Patent: July 7, 2020Assignee: DISCO CORPORATIONInventors: Tetsukazu Sugiya, Heidi Lan
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Patent number: 10707330Abstract: A method of manufacturing a semiconductor device is provided including providing an SOI substrate comprising a semiconductor bulk substrate, a buried insulation layer and a semiconductor layer, forming a shallow trench isolation in the SOI substrate, forming a FET in and over the SOI substrate, and forming a contact to a source or drain region of the FET that is positioned adjacent to the source or drain region, wherein forming the shallow trench isolation includes forming a trench in the SOI substrate, filling a lower portion of the trench with a first dielectric layer, forming a buffer layer over the first dielectric material layer, the buffer layer having a material different from a material of the first dielectric layer, and forming a second dielectric layer over the buffer layer and of a material different from the material of the buffer layer.Type: GrantFiled: February 15, 2018Date of Patent: July 7, 2020Assignee: GLOBALFOUNDRIES Inc.Inventors: Hans-Juergen Thees, Peter Baars, Elliot John Smith
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Patent number: 10693068Abstract: Provided are an organic light-emitting display apparatus and a method of manufacturing the same. The organic light-emitting display apparatus includes a substrate; lower electrodes, the lower electrodes being on the substrate and spaced apart from one another; a pixel-defining film, the pixel-defining film having portions that cover ends of the lower electrodes; upper electrodes, an upper electrode corresponding to each lower electrode, each upper electrode including a first portion contacting the corresponding lower electrode and a second portion contacting the pixel-defining film; organic functional layers, each including an emission layer, an organic functional layer corresponding to each upper electrode and disposed thereon; and an electrode on the organic functional layers.Type: GrantFiled: July 24, 2017Date of Patent: June 23, 2020Assignee: Samsung Display Co., Ltd.Inventors: Joongu Lee, Yeonhwa Lee, Sehoon Jeong, Jiyoung Choung
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Patent number: 10680150Abstract: The invention comprises a solid state infrared source and method of use thereof comprising: (1) an electrically conductive film, comprising a semi-transparent material, the semi-transparent material comprising a transmission property of at least forty percent, wherein at least forty percent of internal infrared emissions from the electrically conductive film transmit to an outer surface of the electrically conductive film, wherein the infrared emissions comprise a peak intensity between 3.9 and 6 micrometers; (2) a first silicon nitride layer; and (3) a second silicon nitride layer, the electrically conductive film positioned between the first silicon nitride layer and the second silicon nitride layer, where applying an electric current of less than one Watt through the electrically conductive film raises a temperature of the electrically conductive film to in excess of eight hundred degrees centigrade in less than twenty milliseconds resultant in the infrared emissions.Type: GrantFiled: August 21, 2017Date of Patent: June 9, 2020Inventors: Dragan Grubisik, Davorin Babic, Alex Kropachev, Arshey Patadia, Viet Nguyen
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Patent number: 10680146Abstract: A method for manufacturing a light emitting device includes: preparing a wavelength conversion member; preparing a light emitting element comprising a pair of electrodes at a second face side of the light emitting element; forming a light transmissive member, which includes: disposing a liquid resin material on a second main face of the wavelength conversion member, disposing the light emitting element on the liquid resin material such that (i) a first face of the light emitting element is opposed to the second main face of the wavelength converting member, (ii) a portion of a first lateral face of the light emitting element and a portion of a second lateral face of the light emitting element are covered by the liquid resin material, and (iii) a first corner of the light emitting element is exposed from the liquid resin material, and curing the liquid resin material; and forming a covering member.Type: GrantFiled: February 6, 2019Date of Patent: June 9, 2020Assignee: NICHIA CORPORATIONInventors: Ikuko Baike, Ryo Suzuki
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Patent number: 10672786Abstract: The present disclosure provides a semiconductor device comprising: a block separator including a semiconductor film and a multi-layered insulating film, wherein the multi-layered insulating film surrounds the semiconductor film; memory block stacks divided from each other by the block separator, each memory block stack including interlayer insulating films and conductive patterns alternately stacked, wherein the conductive patterns are coupled to memory cells; and channel structures passing through the memory block stacks and electrically coupled to the memory cells.Type: GrantFiled: February 9, 2016Date of Patent: June 2, 2020Assignee: SK hynix Inc.Inventor: Nam Jae Lee
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Patent number: 10665666Abstract: A method of forming a semiconductor structure is provided. Trenches are formed in a first dielectric layer having a first height on a substrate. First III-V semiconductor patterns including aluminum are formed in the trenches to a second height lower than the first height. Second III-V semiconductor patterns are formed on the first III-V semiconductor patterns to a third height not higher than the first height to form fins including the first and second III-V semiconductor patterns. The first dielectric layer is completely removed to expose the fins. Selective oxidation is performed to oxidize the first III-V semiconductor patterns to form oxidized first III-V semiconductor patterns. Fin patterning is performed. A second dielectric layer is formed to cover the fins. The second dielectric layer is recessed to a level not higher than top surfaces of the oxidized first III-V semiconductor patterns. The semiconductor structure is also provided.Type: GrantFiled: December 8, 2017Date of Patent: May 26, 2020Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Kangguo Cheng, Xin Miao, Wenyu Xu, Chen Zhang