Patents Examined by Mary Wilczewski
  • Patent number: 10672786
    Abstract: The present disclosure provides a semiconductor device comprising: a block separator including a semiconductor film and a multi-layered insulating film, wherein the multi-layered insulating film surrounds the semiconductor film; memory block stacks divided from each other by the block separator, each memory block stack including interlayer insulating films and conductive patterns alternately stacked, wherein the conductive patterns are coupled to memory cells; and channel structures passing through the memory block stacks and electrically coupled to the memory cells.
    Type: Grant
    Filed: February 9, 2016
    Date of Patent: June 2, 2020
    Assignee: SK hynix Inc.
    Inventor: Nam Jae Lee
  • Patent number: 10665666
    Abstract: A method of forming a semiconductor structure is provided. Trenches are formed in a first dielectric layer having a first height on a substrate. First III-V semiconductor patterns including aluminum are formed in the trenches to a second height lower than the first height. Second III-V semiconductor patterns are formed on the first III-V semiconductor patterns to a third height not higher than the first height to form fins including the first and second III-V semiconductor patterns. The first dielectric layer is completely removed to expose the fins. Selective oxidation is performed to oxidize the first III-V semiconductor patterns to form oxidized first III-V semiconductor patterns. Fin patterning is performed. A second dielectric layer is formed to cover the fins. The second dielectric layer is recessed to a level not higher than top surfaces of the oxidized first III-V semiconductor patterns. The semiconductor structure is also provided.
    Type: Grant
    Filed: December 8, 2017
    Date of Patent: May 26, 2020
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kangguo Cheng, Xin Miao, Wenyu Xu, Chen Zhang
  • Patent number: 10665764
    Abstract: A micro lighting device includes a substrate, an isolation layer formed on the substrate, a side-emission micro device, and a switching device. The side-emission micro device includes a first electrode, a second electrode and an emission surface. The side-emission micro device is disposed in a way so that the emission surface is perpendicular or parallel to the surface of the substrate. The switching device includes a first end, a second end coupled to the first electrode, and a control end.
    Type: Grant
    Filed: March 19, 2018
    Date of Patent: May 26, 2020
    Assignee: ACER INCORPORATED
    Inventors: Jui-Chieh Hsiang, Chih-Chiang Chen
  • Patent number: 10665735
    Abstract: A micro-fabricated atomic clock structure is thermally insulated so that the atomic clock structure can operate with very little power in an environment where the external temperature can drop to ?40° C., while at the same time maintaining the temperature required for the proper operation of the VCSEL and the gas within the vapor cell.
    Type: Grant
    Filed: May 4, 2015
    Date of Patent: May 26, 2020
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Peter J. Hopper, William French, Paul Mawson, Steven Hunt, Roozbeh Parsa, Martin Fallon, Ann Gabrys, Andrei Papou
  • Patent number: 10658183
    Abstract: An impurity-doping apparatus is provided with: a supporting plate which supports a semiconductor substrate; a wall-like block disposed above the supporting plate floating away from the semiconductor substrate, the wall-like block implements a recess inside so as to establish a space for a solution region containing impurity elements, the solution region is localized on an upper surface of the semiconductor substrate, the upper surface being opposite to an bottom surface facing to the supporting plate; and a laser optical system, configured to irradiate a laser beam onto the upper surface of the semiconductor substrate, through the solution region surrounded by the wall-like block, wherein the impurity elements are doped into a part of the semiconductor substrate by irradiation of the laser beam.
    Type: Grant
    Filed: June 6, 2016
    Date of Patent: May 19, 2020
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Kenichi Iguchi, Haruo Nakazawa, Masaaki Ogino
  • Patent number: 10658486
    Abstract: The present disclosure describes an exemplary replacement gate process that forms spacer layers in a gate stack to mitigate time dependent dielectric breakdown (TDDB) failures. For example, the method can include a partially fabricated gate structure with a first recess. A spacer layer is deposited into the first recess and etched with an anisotropic etchback (EB) process to form a second recess that has a smaller aperture than the first recess. A metal fill layer is deposited into the second recess.
    Type: Grant
    Filed: May 18, 2017
    Date of Patent: May 19, 2020
    Assignee: Taiwan Semiconductor Manufacutring Co., Ltd.
    Inventors: Yi-Jyun Huang, Bao-Ru Young, Tung-Heng Hsieh
  • Patent number: 10651126
    Abstract: A wafer-level bridge die is affixed with an adhesive layer to a redistribution layer (RDL) that has been temporarily bonded to a carrier. Electrical interconnects are formed on the RDL and on the bridge die and encapsulated in a first mold layer. A plurality of dies are coupled to the RDL and the bridge die such that a die is electrically connected to at least one electrical interconnect of the RDL and to at least one electrical interconnect of the bridge die. A second mold layer is formed on the first mold layer to encapsulate the plurality of dies. The temporary bond is then broken and the carrier is removed, exposing the RDL connections.
    Type: Grant
    Filed: December 8, 2017
    Date of Patent: May 12, 2020
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Chien-Kang Hsiung, Arvind Sundarrajan
  • Patent number: 10629443
    Abstract: A method for manufacturing a semiconductor device includes forming a first active region on a semiconductor substrate, forming a semiconductor layer on the first active region, patterning the semiconductor layer into a plurality of fins extending from the first active region vertically with respect to the semiconductor substrate, wherein the first active region is located at bottom ends of the plurality of fins, forming a silicide layer on exposed portions of the first active region, forming an electrically conductive contact on the silicide region, forming a second active region on top ends of each of the plurality of fins, and forming a gate structure between the plurality of fins, wherein the gate structure is positioned over the first active region and under the second active region.
    Type: Grant
    Filed: July 20, 2017
    Date of Patent: April 21, 2020
    Assignee: International Business Machines Corporation
    Inventors: Brent A. Anderson, Huiming Bu, Terence B. Hook, Fee Li Lie, Junli Wang
  • Patent number: 10615273
    Abstract: A semiconductor device includes a plurality of unit cell transistors on a common semiconductor structure, the unit cell transistors electrically connected in parallel, and each unit cell transistor including a respective gate finger. Respective threshold voltages of first and second of the unit cell transistors differ by at least 0.1 volts and/or threshold voltages of first and second segments of a third of the unit cell transistors differ by at least 0.1 volts.
    Type: Grant
    Filed: June 21, 2017
    Date of Patent: April 7, 2020
    Assignee: Cree, Inc.
    Inventors: Yueying Liu, Saptharishi Sriram, Scott Sheppard
  • Patent number: 10615052
    Abstract: In a manufacturing process of a transistor including an oxide semiconductor film, oxygen doping treatment is performed on the oxide semiconductor film, and then heat treatment is performed on the oxide semiconductor film and an aluminum oxide film provided over the oxide semiconductor film. Consequently, an oxide semiconductor film which includes a region containing more oxygen than a stoichiometric composition is formed. The transistor formed using the oxide semiconductor film can have high reliability because the amount of change in the threshold voltage of the transistor by a bias-temperature stress test (BT test) is reduced.
    Type: Grant
    Filed: May 29, 2018
    Date of Patent: April 7, 2020
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Yuhei Sato, Keiji Sato, Tetsunori Maruyama, Junichi Koezuka
  • Patent number: 10607839
    Abstract: A method includes kicking out impurity atoms from substitutional sites of a crystal lattice of a semiconductor body by implanting particles via a first surface into the semiconductor body, reducing a thickness of the semiconductor body by removing semiconductor material of the semiconductor body, and annealing the semiconductor body in a first annealing process at a temperature of between 300° C. and 450° C. to diffuse impurity atoms out of the semiconductor body.
    Type: Grant
    Filed: June 28, 2017
    Date of Patent: March 31, 2020
    Assignee: Infineon Technologies AG
    Inventors: Hans-Joachim Schulze, Peter Irsigler, Thomas Wuebben
  • Patent number: 10608070
    Abstract: An organic EL display device includes: a lower electrode; an upper electrode; a first organic layer which is disposed between the lower electrode and the upper electrode and is formed of a plurality of layers including a light emitting layer formed of an organic material that emits light; a metal wire that extends between the pixels within the display region; and a second organic layer which is formed of a plurality of layers the same as that of the first organic layer and which comes into contact with a part of the metal wire and does not come into contact with the first organic layer. The upper electrode comes into contact with the metal wire in the periphery of the second organic layer. Accordingly, it is possible to uniformize the potential of the upper electrode without reducing the light emission area.
    Type: Grant
    Filed: September 19, 2018
    Date of Patent: March 31, 2020
    Assignee: Japan Display Inc.
    Inventors: Yuko Matsumoto, Toshihiro Sato
  • Patent number: 10598997
    Abstract: A pixel array includes pixel unit sets each including a substrate having first and second pixel regions, a scan line, first and second data lines extending along a second direction, first and second active devices respectively in the first and second pixel regions, and first and second pixel electrodes respectively located in the first and second pixel regions and electrically connected to the first and second active devices, respectively. The scan line includes a main scan line and first and second branch scan lines (connected to the main scan line) extending along a first direction. The first active device is electrically connected to the first branch scan line and the first data line. The second active device is electrically connected to the second branch scan line and the second data line. At least one of the first and second data lines is overlapped with the first and second pixel electrodes.
    Type: Grant
    Filed: August 6, 2018
    Date of Patent: March 24, 2020
    Assignee: Au Optronics Corporation
    Inventors: Chun-Feng Lin, Yao-An Hsieh, Yu-Ping Kuo, Ching-Sheng Cheng
  • Patent number: 10600875
    Abstract: A semiconductor device includes a first conductor; a first insulator thereover; a first oxide thereover; a second oxide thereover; a second conductor and a third conductor that are separate from each other thereover; a third oxide over the first insulator, the second oxide, the second conductor, and the third conductor; a second insulator thereover; a fourth conductor thereover; and a third insulator over the first insulator, the second insulator, and the fourth conductor. The second oxide includes a region where the energy of the conduction band minimum of an energy band is low and a region where the energy of the conduction band minimum of the energy band is high. The energy of the conduction band minimum of the third oxide is higher than that of the region of the second oxide where the energy of the conduction band minimum is low. Side surfaces of the first oxide and the second oxide are covered with the third oxide.
    Type: Grant
    Filed: June 21, 2017
    Date of Patent: March 24, 2020
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Tsutomu Murakawa, Toshihiko Takeuchi, Hiroki Komagata, Hiromi Sawai, Yasumasa Yamane, Shota Sambonsuge, Kazuya Sugimoto, Shunpei Yamazaki
  • Patent number: 10600687
    Abstract: Process integration techniques are disclosed that use a carbon fill layer during formation of self-aligned structures. A carbon layer may be placed over an etch stop layer. A cap layer may be provided over the carbon layer. The carbon layer may fill a high aspect ratio structure formed on the substrate. The carbon layer may be removed from a substrate in a highly selective removal technique in a manner that does not damage underlying layers. The carbon layer may fill a self-aligned contact region that is provided for a self-aligned contact process flow. A tone inversion mask may be used to protect multiple self-aligned contact regions. With the blocking mask in place, the carbon layer may be removed from regions that are not the self-aligned contact region. After removal of the blocking mask, the carbon layer which fills the self-aligned contacts may then be removed.
    Type: Grant
    Filed: April 19, 2017
    Date of Patent: March 24, 2020
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Aelan Mosden, Kaushik Kumar
  • Patent number: 10593906
    Abstract: In an aspect, an organic light-emitting display apparatus is provided, including a display substrate; a sealing substrate configured to face the display substrate; a sealing material for bonding the display substrate and the sealing substrate and surrounding a circumference of the display unit; and a bonding layer comprising a plurality of through holes, wherein the plurality of through holes comprise partition walls therein.
    Type: Grant
    Filed: March 23, 2017
    Date of Patent: March 17, 2020
    Assignee: Samsung Display Co., Ltd.
    Inventors: Jae-Man Lee, Seung-Joon Yoo, Hyun-Soo Choi, Jae-Wook Shin
  • Patent number: 10593787
    Abstract: A semiconductor layer may be subjected to etching to form a trench therein. An epitaxial layer may be further formed in the trench. Here, the impurity concentration of the epitaxial layer is controlled to be lower than that of the semiconductor layer. In this manner, concentration of electrical fields in the trench is reduced. A first innovations herein provides a semiconductor device including a first semiconductor layer containing impurities of a first conductivity type, a trench provided in the first semiconductor layer on a front surface side thereof, and a second semiconductor layer provided on an inner wall of the trench, where the second semiconductor layer contains impurities of the first conductivity type at a lower concentration than the first semiconductor layer.
    Type: Grant
    Filed: April 1, 2016
    Date of Patent: March 17, 2020
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventor: Takeyoshi Nishimura
  • Patent number: 10586703
    Abstract: In a vertical MOSFET of a trench gate structure, a high-concentration implantation region is provided in a p-type base region formed from a p-type silicon carbide layer formed by epitaxial growth, so as to include a portion in which a channel is formed. The high-concentration implantation region is formed by ion implantation of a p-type impurity into the p-type silicon carbide layer. The high-concentration implantation region is formed by p-type ion implantation and has an impurity concentration profile in which concentration differences in a depth direction form a bell-shaped curve at a peak of impurity concentration that is higher than that of the p-type silicon carbide layer. In the p-type base region, disorder occurs partially in the crystal structure consequent to the ion implantation for forming the high-concentration implantation region.
    Type: Grant
    Filed: May 17, 2018
    Date of Patent: March 10, 2020
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Setsuko Wakimoto, Masanobu Iwaya
  • Patent number: 10573735
    Abstract: According to one embodiment, a semiconductor device includes a first electrode, a second electrode, a third electrode, a first semiconductor region, a second semiconductor region, a third semiconductor region, and an intermediate region. A position of the first electrode is between a position of the second electrode and a position of the third electrode. The first semiconductor region is separated from the first, second, and third electrodes. The second semiconductor region is provided between the second electrode and the first semiconductor region. The third semiconductor region is provided between the third electrode and the first semiconductor region. The intermediate region includes at least one of a first compound or a second compound. At least a portion of the first electrode is positioned between the second and third semiconductor regions. The intermediate region includes a first partial region, a second partial region, and a third partial region.
    Type: Grant
    Filed: August 30, 2017
    Date of Patent: February 25, 2020
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Masahiro Koyama, Tatsuo Shimizu, Shinya Nunoue
  • Patent number: 10553454
    Abstract: An apparatus for the wafer level packaging (WLP) of micro-bolometer vacuum package assemblies (VPAs), in one embodiment, includes a wafer alignment and bonding chamber, a bolometer wafer chuck and a lid wafer chuck disposed within the chamber in vertically facing opposition to each other, means for creating a first ultra-high vacuum (UHV) environment within the chamber, means for heating and cooling the bolometer wafer chuck and the lid wafer chuck independently of each other, means for moving the lid wafer chuck in the vertical direction and relative to the bolometer wafer chuck, means for moving the bolometer wafer chuck translationally in two orthogonal directions in a horizontal plane and rotationally about a vertical axis normal to the horizontal plane, and means for aligning a fiducial on a bolometer wafer held by the bolometer wafer chuck with a fiducial on a lid wafer held by the lid wafer chuck.
    Type: Grant
    Filed: August 21, 2017
    Date of Patent: February 4, 2020
    Assignee: FLIR Systems, Inc.
    Inventors: Paul Schweikert, Andrew Sharpe, Gregory A. Carlson, Alex Matson, Scott Vilander, Bob Zahuta, Richard M. Goeden