Patents Examined by Michael M Trinh
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Patent number: 11551970Abstract: The present disclosure discloses a method for manufacturing an electronic device, including: setting a basic working area; providing a supporting platform having a plurality of vacuum valves; disposing a substrate on the supporting platform; applying vacuum attraction to a portion of the substrate through a portion of the plurality of vacuum valves, wherein the portion of the substrate corresponding to the vacuum attraction is defined as an attracted region; and performing an exposure on a portion of the attracted region, wherein an area of the attracted region is larger than the basic working area and smaller than an area of the supporting platform.Type: GrantFiled: December 1, 2020Date of Patent: January 10, 2023Assignee: InnoLux CorporationInventors: Cheng-Chi Wang, Yeong-E Chen, Cheng-En Cheng
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Patent number: 11538813Abstract: A method for fabricating a static random access memory (SRAM) includes the steps of: forming a gate structure on a substrate; forming an epitaxial layer adjacent to the gate structure; forming a first interlayer dielectric (ILD) layer around the gate structure; transforming the gate structure into a metal gate; forming a contact hole exposing the epitaxial layer, forming a barrier layer in the contact hole, forming a metal layer on the barrier layer, and then planarizing the metal layer and the barrier layer to form a contact plug. Preferably, a bottom portion of the barrier layer includes a titanium rich portion and a top portion of the barrier layer includes a nitrogen rich portion.Type: GrantFiled: July 8, 2020Date of Patent: December 27, 2022Assignee: UNITED MICROELECTRONICS CORP.Inventors: Ching-Wen Hung, Chun-Hsien Lin, Chien-Hung Chen
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Patent number: 11538769Abstract: A semiconductor device is provided. The semiconductor device includes an electric field (E-field) suppression layer formed over a termination region. The E-field suppression layer is patterned with openings over metal contact areas. The E-field suppression layer has a thickness such that an electric field strength above the E-field suppression layer is below a dielectric strength of an adjacent material when the semiconductor device is operating at or below a maximum voltage.Type: GrantFiled: December 14, 2018Date of Patent: December 27, 2022Assignee: General Electric CompanyInventors: Stephen Daley Arthur, Liangchun Yu, Nancy Cecelia Stoffel, David Richard Esler, Christopher James Kapusta
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Patent number: 11525083Abstract: A quantum dot comprising zinc, tellurium, and selenium and not comprising cadmium, wherein a maximum luminescent peak of the quantum dot is present in a wavelength range of greater than about 470 nanometers (nm) and a quantum efficiency of the quantum dot is greater than or equal to about 10%, and wherein the quantum dot comprises a core comprising a first semiconductor nanocrystal and a semiconductor nanocrystal shell disposed on the core.Type: GrantFiled: April 17, 2020Date of Patent: December 13, 2022Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Soo Kyung Kwon, Seon-Yeong Kim, Yong Wook Kim, Ji-Yeong Kim, Eun Joo Jang
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Patent number: 11525185Abstract: Methods and devices are provided wherein rotational gas-flow is generated by vortex generators to decontaminate dirty gas (e.g., gas contaminated by solid particles) in pumping lines of vacuum systems suitable for use at a semiconductor integrated circuit fabrication facility. The vacuum systems use filterless particle decontamination units wherein rotational gas-flow is applied to separate and trap solid particles from gas prior to the gas-flow entering a vacuum pump. Methods are also described whereby solid deposits along portions of pumping lines may be dislodged and removed and portions of pumping lines may be self-cleaning.Type: GrantFiled: September 17, 2019Date of Patent: December 13, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Ming-Fa Wu, Wen-Lung Ho, Huai-Tei Yang
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Patent number: 11521776Abstract: A spin-orbit-torque magnetization rotational element includes: a spin-orbit torque wiring layer which extends in an X direction; and a first ferromagnetic layer which is laminated on the spin-orbit torque wiring layer, wherein the first ferromagnetic layer has shape anisotropy and has a major axis in a Y direction orthogonal to the X direction on a plane in which the spin-orbit torque wiring layer extends, and wherein the easy axis of magnetization of the first ferromagnetic layer is inclined with respect to the X direction and the Y direction orthogonal to the X direction on a plane in which the spin-orbit torque wiring layer extends.Type: GrantFiled: December 16, 2020Date of Patent: December 6, 2022Assignee: TDK CORPORATIONInventors: Tomoyuki Sasaki, Yohei Shiokawa
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Patent number: 11495464Abstract: An embodiment includes a method including forming an opening in a cut metal gate region of a metal gate structure of a semiconductor device, conformally depositing a first dielectric layer in the opening, conformally depositing a silicon layer over the first dielectric layer, performing an oxidation process on the silicon layer to form a first silicon oxide layer, filling the opening with a second silicon oxide layer, performing a chemical mechanical polishing on the second silicon oxide layer and the first dielectric layer to form a cut metal gate plug, the chemical mechanical polishing exposing the metal gate structure of the semiconductor device, and forming a first contact to a first portion of the metal gate structure and a second contact to a second portion of the metal gate structure, the first portion and the second portion of the metal gate structure being separated by the cut metal gate plug.Type: GrantFiled: July 8, 2020Date of Patent: November 8, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Ya-Lan Chang, Ting-Gang Chen, Tai-Chun Huang, Chi On Chui, Yung-Cheng Lu
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Patent number: 11492549Abstract: A quantum dot comprising zinc, tellurium, and selenium and not comprising cadmium, wherein a maximum luminescent peak of the quantum dot is present in a wavelength range of greater than about 470 nanometers (nm) and a quantum efficiency of the quantum dot is greater than or equal to about 10%, and wherein the quantum dot comprises a core comprising a first semiconductor nanocrystal and a semiconductor nanocrystal shell disposed on the core.Type: GrantFiled: April 17, 2020Date of Patent: November 8, 2022Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Soo Kyung Kwon, Seon-Yeong Kim, Yong Wook Kim, Ji-Yeong Kim, Eun Joo Jang
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Patent number: 11489024Abstract: A display device comprises a substrate including display and peripheral areas, a semiconductor element, a pixel structure, and a plurality of dummy patterns. The semiconductor element is disposed in the display area on the substrate, and the pixel structure is disposed on the semiconductor element. The dummy patterns which have stacked structure are disposed in the peripheral area on the substrate, and contain a material identical to a material constituting the semiconductor element. The dummy patterns are arranged in a grid shape in different layers, and each of the dummy patterns includes a central portion and an edge portion surrounding the central portion. The edge portions of dummy patterns which are adjacent to each other in the different layers among the dummy patterns are overlapped each other in a direction from the substrate to the pixel structure.Type: GrantFiled: August 24, 2020Date of Patent: November 1, 2022Inventors: Sewan Son, Moo Soon Ko, Ji Ryun Park, Jin Sung An, Min Woo Woo, Seong Jun Lee, Wang Woo Lee, Jeong-Soo Lee, Ji Seon Lee, Deuk Myung Ji
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Patent number: 11482617Abstract: A vertical transport field-effect transistor array includes continuous spacers at cell edges that are formed following a replacement metal gate process. Techniques for fabricating the transistor array include forming trenches extending along the fin edges of the array to provide access to sacrificial gates, replacing the sacrificial gates with gate stacks, and forming the continuous spacers to encapsulate the gate stacks once formed. Removal of interlevel dielectric material from the array is not required for gate replacement. Bottom source/drain contacts may be formed in the trenches and in adjoining relation to the continuous spacers.Type: GrantFiled: March 17, 2020Date of Patent: October 25, 2022Assignee: International Business Machines CorporationInventors: Ruilong Xie, Chen Zhang, Kangguo Cheng, Julien Frougier
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Patent number: 11476163Abstract: A method for manufacturing a vertical transistor device includes forming a plurality of fins on a substrate, and forming a gate dielectric layer on the fins and on the substrate adjacent the fins. In the method, one or more sacrificial layers are formed on the gate dielectric layer, and portions of the gate dielectric layer and the one or more sacrificial layers are removed to define a plurality of gate regions. The method also includes depositing a dielectric fill layer in gaps left by the removed gate dielectric and sacrificial layers, and selectively removing the remaining portions of the one or more sacrificial layers to form a plurality of vacant areas in the gate regions. First and second gate structures are respectively formed in first and second vacant areas of the plurality of vacant areas. The first and second gate structures are recessed to a uniform height.Type: GrantFiled: April 17, 2020Date of Patent: October 18, 2022Assignee: International Business Machines CorporationInventors: Ruilong Xie, Chanro Park, Sung Dae Suk, Heng Wu
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Patent number: 11469280Abstract: The present application provides an organic light-emitting diode display. The display includes a plurality of pixel defining units, the pixel defining unit includes a first portion formed on a switch array layer which is not covered by anode electrodes and a second portion formed on the anode electrode, a groove is defined at the first portion, and at least one opening is defined at the second portion; an organic light-emitting layer including a plurality of organic light-emitting units, the organic light-emitting layer is formed on the anode electrodes which are not covered by the second portion.Type: GrantFiled: February 18, 2019Date of Patent: October 11, 2022Assignee: WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.Inventor: Fan Tang
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Patent number: 11456218Abstract: A semiconductor device and a method for manufacturing the semiconductor device. Multiple stacks and an isolation structure among the multiple stacks are formed on a substrate. Each stack includes a first doping layer, a channel layer and a second doping layer. For each stack, the channel layer is laterally etched from at least one sidewall of said stack to form a cavity located between the first doping layer and the second doping layer, and a gate dielectric layer and a gate layer are formed in the cavity. A first sidewall of each stack is contact with the isolation structure, and the at least one sidewall does not include the first side wall. Costly high-precision etching is not necessary, and therefore a device with a small size and a high performance can be achieved with a simple process and a low cost. Diversified device structures can be provided on requirement.Type: GrantFiled: August 27, 2020Date of Patent: September 27, 2022Inventors: Guilei Wang, Henry H Radamson, Zhenzhen Kong, Junjie Li, Jinbiao Liu, Junfeng Li, Huaxiang Yin
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Patent number: 11450573Abstract: A structure and method use different stress-inducing isolation dielectrics to induce appropriate stresses in different polarity FETs to improve performance of both type FETs. The structure may include a first stress-inducing isolation dielectric surrounding and contacting a first active region for a p-type field effect transistor (PFET), and a second stress-inducing isolation dielectric surrounding and contacting a second active region for an n-type field effect transistor (NFET). The first and second stress-inducing isolation dielectrics induce different types of stress, thus improving performance of both polarity of FETs.Type: GrantFiled: June 17, 2020Date of Patent: September 20, 2022Assignee: GlobalFoundries U.S. Inc.Inventors: George R. Mulfinger, Chung F. Tan, Ryan W. Sporer
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Patent number: 11437376Abstract: A 3D IC includes a substrate having a substrate surface, a first stack of semiconductor devices stacked along a thickness direction of the substrate, and a second stack of semiconductor devices stacked along the thickness direction of the substrate and provided adjacent to the first stack in a direction along the substrate surface. Each semiconductor device of the first and second stack includes a gate and a pair of source-drain regions provided on opposite sides of the respective gate, and each gate of the first and second stack is a split gate. A gate contact is physically connected to a first split gate of a first one of the semiconductor devices. The gate contact forms at least part of a local interconnect structure that electrically connects the first semiconductor device to a second semiconductor device in the 3D IC.Type: GrantFiled: April 15, 2020Date of Patent: September 6, 2022Assignee: Tokyo Electron LimitedInventors: Lars Liebmann, Jeffrey Smith, Anton deVilliers, Daniel Chanemougame
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Patent number: 11417714Abstract: A display apparatus includes a display area and a non-display area, a sub-pixel in the display area, and a pixel-defining layer which defines an area of the sub-pixel. The sub-pixel includes an adjacent sub-pixel arranged in the display area to be adjacent to the non-display area, and an internal sub-pixel arranged in the display area, and the adjacent sub-pixel and the internal sub-pixel implement the same color and have different shapes in a plan view.Type: GrantFiled: April 16, 2020Date of Patent: August 16, 2022Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Junhee Lee, Injun Bae
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Patent number: 11410987Abstract: A chip is described including a semiconductor layer including doped regions; a metallization layer on the semiconductor layer and at least one cell row including p-channel field effect transistors and n-channel field effect transistors, wherein the doped regions form source regions and drain regions of the p-channel field effect transistors and the n-channel field effect transistors; contacts extending from the source regions, the drain regions and gate regions of the p-channel field effect transistors and the n-channel field effect transistors to the metallization layer, wherein the metallization layer is structured in accordance with a metallization grid such that the p-channel field effect transistors and the n-channel field effect transistors are connected to form one or more logic gates.Type: GrantFiled: February 16, 2021Date of Patent: August 9, 2022Assignee: INFINEON TECHNOLOGIES AGInventor: Thomas Kuenemund
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Patent number: 11411054Abstract: A display apparatus includes: a substrate including a thin-film transistor including an electrode, a non-display area, and a pad area including a lower and an upper conductive layer facing each other with an insulating layer therebetween. The lower conductive layer includes: a first conductive layer defining an end surface of the display apparatus, and a second conductive layer spaced apart from the first conductive layer to define a space between the first and second conductive layers, the insulating layer defines a first opening portion corresponding to the space, and the upper conductive layer is in a same layer as the electrode of the thin-film transistor, the upper conductive layer extending into the first opening portion corresponding to the space between the first and second conductive layers.Type: GrantFiled: May 19, 2020Date of Patent: August 9, 2022Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Jungtae Kim, Dongyoon So, Youngrae Kim, Kyungmin Park
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Patent number: 11398478Abstract: Semiconductor nanowire devices having (111)-plane channel sidewalls and methods of fabricating semiconductor nanowire devices having (111)-plane channel sidewalls are described. For example, an integrated circuit structure includes a first semiconductor device including a plurality of vertically stacked nanowires disposed above a substrate, each of the nanowires comprising a discrete channel region having <111> lateral sidewalls along a <110> carrier transport direction. The integrated circuit structure also includes a second semiconductor device including a semiconductor fin disposed above the substrate, the semiconductor fin having a channel region with a top and side surfaces, the channel region having <111> lateral sidewalls along a <110> carrier transport direction.Type: GrantFiled: March 22, 2018Date of Patent: July 26, 2022Assignee: Intel CorporationInventors: Cory E. Weber, Harold W. Kennel, Willy Rachmady, Gilbert Dewey
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Patent number: 11387234Abstract: A semiconductor device includes a substrate with a first active region; first and second active patterns extending in a first direction and spaced apart in a second direction, and each having a source pattern, a channel pattern, and a drain pattern that are sequentially stacked; first and second gate electrodes that surround the channel patterns of the first and second active patterns and extend in the first direction; an interlayer dielectric layer that covers the first and second active patterns and the first and second gate electrodes; a first active contact that penetrates the interlayer dielectric layer and is coupled to the first active region between the first and second active patterns; and a first power rail on the interlayer dielectric layer and electrically connected to the first active contact, each of the first and second active patterns including an overlapping region that vertically overlaps the first power rail.Type: GrantFiled: June 24, 2020Date of Patent: July 12, 2022Assignee: Samsung Electronics Co., Ltd.Inventors: Taehyung Kim, Panjae Park, Jaeseok Yang