Patents by Inventor Anh Phan

Anh Phan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11764104
    Abstract: Embodiments of the present disclosure may generally relate to systems, apparatus, and/or processes to form volumes of oxide within a fin, such as a Si fin. In embodiments, this may be accomplished by applying a catalytic oxidant material on a side of a fin and then annealing to form a volume of oxide. In embodiments, this may be accomplished by using a plasma implant technique or a beam-line implant technique to introduce oxygen ions into an area of the fin and then annealing to form a volume of oxide. Processes described here may be used manufacture a transistor, a stacked transistor, or a three-dimensional (3-D) monolithic stacked transistor.
    Type: Grant
    Filed: June 27, 2019
    Date of Patent: September 19, 2023
    Assignee: Intel Corporation
    Inventors: Cheng-Ying Huang, Gilbert Dewey, Jack T. Kavalieros, Aaron Lilak, Ehren Mannebach, Patrick Morrow, Anh Phan, Willy Rachmady, Hui Jae Yoo
  • Patent number: 11764263
    Abstract: Gate-all-around integrated circuit structures having depopulated channel structures, and methods of fabricating gate-all-around integrated circuit structures having depopulated channel structures using multiple bottom-up oxidation approaches, are described. For example, an integrated circuit structure includes a vertical arrangement of nanowires. All nanowires of the vertical arrangement of nanowires are oxide nanowires. A gate stack is over the vertical arrangement of nanowires, around each of the oxide nanowires. The gate stack includes a conductive gate electrode.
    Type: Grant
    Filed: January 4, 2019
    Date of Patent: September 19, 2023
    Assignee: Intel Corporation
    Inventors: Ehren Mannebach, Anh Phan, Aaron Lilak, Willy Rachmady, Gilbert Dewey, Cheng-Ying Huang, Richard Schenker, Hui Jae Yoo, Patrick Morrow
  • Patent number: 11742346
    Abstract: Stacked transistor structures having a conductive interconnect between source/drain regions of upper and lower transistors. In some embodiments, the interconnect is provided, at least in part, by highly doped epitaxial material deposited in the upper transistor's source/drain region. In such cases, the epitaxial material seeds off of an exposed portion of semiconductor material of or adjacent to the upper transistor's channel region and extends downward into a recess that exposes the lower transistor's source/drain contact structure. The epitaxial source/drain material directly contacts the lower transistor's source/drain contact structure, to provide the interconnect. In other embodiments, the epitaxial material still seeds off the exposed semiconductor material of or proximate to the channel region and extends downward into the recess, but need not contact the lower contact structure.
    Type: Grant
    Filed: June 29, 2018
    Date of Patent: August 29, 2023
    Assignee: Intel Corporation
    Inventors: Aaron D. Lilak, Gilbert Dewey, Cheng-Ying Huang, Christopher Jezewski, Ehren Mannebach, Rishabh Mehandru, Patrick Morrow, Anand S. Murthy, Anh Phan, Willy Rachmady
  • Patent number: 11716662
    Abstract: A network-based method allows a network to optimize its control of radio resource usage by directing connected and idle mode User Equipment (UEs) (10) to another network node, e.g. a neighbor cell, having a better duty cycle, or by configuring the UEs to use another frequency band served by the same network node or a different network node. Signaling its duty cycle budget to the UEs allows the UEs to optimize their idle mode operation by performing cell re-selection to a network node which has a better duty cycle budget.
    Type: Grant
    Filed: September 19, 2019
    Date of Patent: August 1, 2023
    Assignee: TELEFONAKTIEBOLAGET LM ERICSSON (PUBL)
    Inventors: Olof Liberg, David Sugirtharaj, Emma Wittenmark, Mai-Anh Phan
  • Publication number: 20230238436
    Abstract: A device is disclosed. The device includes a first epitaxial region, a second epitaxial region, a first gate region between the first epitaxial region and a second epitaxial region, a first dielectric structure underneath the first epitaxial region, a second dielectric structure underneath the second epitaxial region, a third epitaxial region underneath the first epitaxial region, a fourth epitaxial region underneath the second epitaxial region, and a second gate region between the third epitaxial region and a fourth epitaxial region and below the first gate region. The device also includes, a conductor via extending from the first epitaxial region, through the first dielectric structure and the third epitaxial region, the conductor via narrower at an end of the conductor via that contacts the first epitaxial region than at an opposite end.
    Type: Application
    Filed: April 4, 2023
    Publication date: July 27, 2023
    Inventors: Ehren MANNEBACH, Aaron LILAK, Hui Jae YOO, Patrick MORROW, Anh PHAN, Willy RACHMADY, Cheng-Ying HUANG, Gilbert DEWEY
  • Patent number: 11706673
    Abstract: A method performed by a wireless communication device for reducing handover delay, wherein the wireless communication device is arranged to operate in a cellular communication system and to operate in a cell using unlicensed spectrum. The method includes receiving a downlink, DL, signal from network node operating a neighbouring cell operating in the unlicensed spectrum, wherein the DL signal includes a discovery reference signal, DRS, subframe, storing data associated with the DRS subframe, receiving a handover command from a network node operating a serving cell where the neighbouring cell is a target cell, and performing a random access procedure for handover to the target cell. A device performing the method and a computer program for implementing the method are also disclosed.
    Type: Grant
    Filed: December 1, 2021
    Date of Patent: July 18, 2023
    Assignee: Telefonsktiebolaget LM Ericsson (Dubl)
    Inventors: Chunhui Zhang, Peter Alriksson, Yusheng Liu, Mai-Anh Phan, David Sugirtharaj, Emma Wittenmark
  • Patent number: 11699637
    Abstract: An integrated circuit structure comprises a lower device layer that includes a first structure comprising a first set of transistor fins and a first set of contact metallization. An upper device layer is bonded onto the lower device layer, where the upper device layer includes a second structure comprising a second set of transistor fins and a second set of contact metallization. At least one power isolation wall extends from a top of the upper device layer to the bottom of the lower device layer, wherein the power isolation wall is filled with a conductive material such that power is routed between transistor devices on the upper device layer and the lower device layer.
    Type: Grant
    Filed: December 9, 2021
    Date of Patent: July 11, 2023
    Assignee: Intel Corporation
    Inventors: Aaron D. Lilak, Anh Phan, Patrick Morrow, Stephanie A. Bojarski
  • Publication number: 20230189338
    Abstract: According to some embodiments, a method is performed by a wireless device for operation with shared spectrum channel access, wherein a first plurality of fixed frame periods (FFPs) are associated with the wireless device and a second plurality of fixed frame periods (FFPs) are associated with a network node and wherein each FFP comprises an idle period with no transmission and a channel occupancy time (COT) for potential transmission. The method comprises initiating a COT in one of the FFPs of the first plurality of FFPs and upon successful initiation of the COT, transmitting uplink data from the beginning of the COT.
    Type: Application
    Filed: April 23, 2021
    Publication date: June 15, 2023
    Inventors: Bikramjit Singh, Alexey Shapin, Reem Karaki, Sorour Falahati, Mai-Anh Phan
  • Patent number: 11676966
    Abstract: Disclosed herein are stacked transistors having device strata with different channel widths, as well as related methods and devices. In some embodiments, an integrated circuit structure may include stacked strata of transistors, wherein different channel materials of different strata have different widths.
    Type: Grant
    Filed: March 15, 2019
    Date of Patent: June 13, 2023
    Assignee: Intel Corporation
    Inventors: Gilbert W. Dewey, Jack T. Kavalieros, Willy Rachmady, Cheng-Ying Huang, Matthew V. Metz, Kimin Jun, Patrick Morrow, Aaron D. Lilak, Ehren Mannebach, Anh Phan
  • Publication number: 20230170350
    Abstract: A device is disclosed. The device includes a first semiconductor fin, a first source-drain epitaxial region adjacent a first portion of the first semiconductor fin, a second source-drain epitaxial region adjacent a second portion of the first semiconductor fin, a first gate conductor above the first semiconductor fin, a gate spacer covering the sides of the gate conductor, a second semiconductor fin below the first semiconductor fin, a second gate conductor on a first side of the second semiconductor fin and a third gate conductor on a second side of the second semiconductor fin, a third source-drain epitaxial region adjacent a first portion of the second semiconductor fin, and a fourth source-drain epitaxial region adjacent a second portion of the second semiconductor fin. The device also includes a dielectric isolation structure below the first semiconductor fin and above the second semiconductor fin that separates the first semiconductor fin and the second semiconductor fin.
    Type: Application
    Filed: January 11, 2023
    Publication date: June 1, 2023
    Inventors: Willy RACHMADY, Cheng-Ying HUANG, Gilbert DEWEY, Aaron LILAK, Patrick MORROW, Anh PHAN, Ehren MANNEBACH, Jack T. KAVALIEROS
  • Publication number: 20230156540
    Abstract: Methods and apparatuses involve a network node (22) of a wireless communication network (10) and a wireless device (12) attempting redirection with respect to the network (10). An overall bound limits how many times or for how long the wireless device (12) attempts redirection and provides a mechanism for the wireless device (12) to extend its redirection efforts to one or more redirection targets beyond those indicated by the network (10).
    Type: Application
    Filed: April 9, 2021
    Publication date: May 18, 2023
    Inventors: Min Wang, Muhammad Ali Kazmi, Marco Belleschi, Iana Siomina, Jan Christoffersson, Mai-Anh Phan
  • Publication number: 20230141148
    Abstract: A method by a network node in a wireless communication network includes buffering first data for downlink transmission to a first wireless device, and preemptively transmitting the first data on a channel that is subject to clear channel assessment procedures. The first data is transmitted in a reference downlink resource (RDR) domain in the channel in which second data for a second wireless device was previously scheduled for transmission by the network node. The method further includes transmitting a preemption indicator to the second wireless device, the preemption indicator identifying the RDR domain. Related network nodes, methods of operating a wireless device, and wireless devices are also disclosed.
    Type: Application
    Filed: March 26, 2021
    Publication date: May 11, 2023
    Inventors: Bikramjit Singh, Alexey Shapin, Ali Behravan, Mai-Anh Phan
  • Publication number: 20230146147
    Abstract: A wireless device (11, 12) determines a set of carriers. The carriers each require a listen-before-talk, LBT, procedure before transmitting on the carrier. Further, the wireless device (11, 12) determines a reliability target for a wireless transmission from the wireless device (11, 12) to the wireless communication network, in particular to an access node (101-1, 101-2, 101-3, 101-4) of the wireless communication network. Depending on the reliability target, the wireless device (11, 12) controls aggregation of carriers from the set for redundantly 10 performing the wireless transmission on the aggregated carriers.
    Type: Application
    Filed: April 1, 2020
    Publication date: May 11, 2023
    Inventors: Alexandros Palaios, Torsten Dudda, Reem Karaki, Dhruvin Patel, Mai-Anh Phan, Abdulrahman Alabbasi
  • Patent number: 11646352
    Abstract: A device is disclosed. The device includes a first epitaxial region, a second epitaxial region, a first gate region between the first epitaxial region and a second epitaxial region, a first dielectric structure underneath the first epitaxial region, a second dielectric structure underneath the second epitaxial region, a third epitaxial region underneath the first epitaxial region, a fourth epitaxial region underneath the second epitaxial region, and a second gate region between the third epitaxial region and a fourth epitaxial region and below the first gate region. The device also includes, a conductor via extending from the first epitaxial region, through the first dielectric structure and the third epitaxial region, the conductor via narrower at an end of the conductor via that contacts the first epitaxial region than at an opposite end.
    Type: Grant
    Filed: June 27, 2019
    Date of Patent: May 9, 2023
    Assignee: Intel Corporation
    Inventors: Ehren Mannebach, Aaron Lilak, Hui Jae Yoo, Patrick Morrow, Anh Phan, Willy Rachmady, Cheng-Ying Huang, Gilbert Dewey
  • Patent number: 11640961
    Abstract: An integrated circuit structure comprises a lower device layer that includes a first structure comprising a plurality of PMOS transistors. An upper device layer is formed on the lower device layer, wherein the upper device layer includes a second structure comprising a plurality of NMOS transistors having a group III-V material source/drain region.
    Type: Grant
    Filed: March 28, 2018
    Date of Patent: May 2, 2023
    Assignee: Intel Corporation
    Inventors: Gilbert Dewey, Ravi Pillarisetty, Jack T. Kavalieros, Aaron D. Lilak, Willy Rachmady, Rishabh Mehandru, Kimin Jun, Anh Phan, Hui Jae Yoo, Patrick Morrow, Cheng-Ying Huang, Matthew V. Metz
  • Patent number: 11616060
    Abstract: A stacked transistor architecture has a fin structure that includes lower and upper portions separated by an isolation region built into the fin structure. Upper and lower gate structures on respective upper and lower fin structure portions may be different from one another (e.g., with respect to work function metal and/or gate dielectric thickness). One example methodology includes depositing lower gate structure materials on the lower and upper channel regions, recessing those materials to re-expose the upper channel region, and then re-depositing upper gate structure materials on the upper channel region. Another example methodology includes depositing a sacrificial protective layer on the upper channel region. The lower gate structure materials are then deposited on both the exposed lower channel region and sacrificial protective layer.
    Type: Grant
    Filed: June 29, 2018
    Date of Patent: March 28, 2023
    Assignee: Intel Corporation
    Inventors: Aaron D. Lilak, Gilbert Dewey, Willy Rachmady, Rami Hourani, Stephanie A. Bojarski, Rishabh Mehandru, Anh Phan, Ehren Mannebach
  • Patent number: 11616056
    Abstract: An integrated circuit structure includes a first semiconductor fin extending horizontally in a length direction and including a bottom portion and a top portion above the bottom portion, a bottom transistor associated with the bottom portion of the first semiconductor fin, a top transistor above the bottom transistor and associated with the top portion of the first semiconductor fin, and a first vertical diode. The first vertical diode includes: a bottom region associated with at least the bottom portion of the first semiconductor fin, the bottom region including one of n-type and p-type dopant; a top region associated with at least the top portion of the first semiconductor fin, the top region including the other of n-type and p-type dopant; a bottom terminal electrically connected to the bottom region; and a top terminal electrically connected to the top region at the top portion of the first semiconductor fin.
    Type: Grant
    Filed: January 18, 2018
    Date of Patent: March 28, 2023
    Assignee: Intel Corporation
    Inventors: Aaron D. Lilak, Patrick Morrow, Anh Phan, Cheng-Ying Huang, Rishabh Mehandru, Gilbert Dewey, Willy Rachmady
  • Publication number: 20230090092
    Abstract: An integrated circuit having a transistor architecture includes a first semiconductor body and a second semiconductor body. The first and second semiconductor bodies are arranged vertically (e.g., stacked configuration) or horizontally (e.g., forksheet configuration) with respect to each other, and separated from one another by insulator material, and each can be configured for planar or non-planar transistor topology. A first gate structure is on the first semiconductor body, and includes a first gate electrode and a first high-k gate dielectric. A second gate structure is on the second semiconductor body, and includes a second gate electrode and a second high-k gate dielectric. In an example, the first gate electrode includes a layer comprising a compound of silicon and one or more metals; the second gate structure may include a silicide workfunction layer, or not. In one example, the first gate electrode is n-type, and the second gate electrode is p-type.
    Type: Application
    Filed: September 22, 2021
    Publication date: March 23, 2023
    Inventors: Aaron D. Lilak, Orb Acton, Cheng-Ying Huang, Gilbert Dewey, Ehren Mannebach, Anh Phan, Willy Rachmady, Jack T. Kavalieros
  • Patent number: 11605565
    Abstract: Embodiments herein describe techniques for a semiconductor device including a first transistor stacked above and self-aligned with a second transistor, where a shadow of the first transistor substantially overlaps with the second transistor. The first transistor includes a first gate electrode, a first channel layer including a first channel material and separated from the first gate electrode by a first gate dielectric layer, and a first source electrode coupled to the first channel layer. The second transistor includes a second gate electrode, a second channel layer including a second channel material and separated from the second gate electrode by a second gate dielectric layer, and a second source electrode coupled to the second channel layer. The second source electrode is self-aligned with the first source electrode, and separated from the first source electrode by an isolation layer. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: December 28, 2018
    Date of Patent: March 14, 2023
    Assignee: Intel Corporation
    Inventors: Cheng-Ying Huang, Willy Rachmady, Gilbert Dewey, Aaron Lilak, Kimin Jun, Brennen Mueller, Ehren Mannebach, Anh Phan, Patrick Morrow, Hui Jae Yoo, Jack T. Kavalieros
  • Patent number: 11594533
    Abstract: A device is disclosed. The device includes a first semiconductor fin, a first source-drain epitaxial region adjacent a first portion of the first semiconductor fin, a second source-drain epitaxial region adjacent a second portion of the first semiconductor fin, a first gate conductor above the first semiconductor fin, a gate spacer covering the sides of the gate conductor, a second semiconductor fin below the first semiconductor fin, a second gate conductor on a first side of the second semiconductor fin and a third gate conductor on a second side of the second semiconductor fin, a third source-drain epitaxial region adjacent a first portion of the second semiconductor fin, and a fourth source-drain epitaxial region adjacent a second portion of the second semiconductor fin. The device also includes a dielectric isolation structure below the first semiconductor fin and above the second semiconductor fin that separates the first semiconductor fin and the second semiconductor fin.
    Type: Grant
    Filed: June 27, 2019
    Date of Patent: February 28, 2023
    Assignee: Intel Corporation
    Inventors: Willy Rachmady, Cheng-Ying Huang, Gilbert Dewey, Aaron Lilak, Patrick Morrow, Anh Phan, Ehren Mannebach, Jack T. Kavalieros