Patents by Inventor Anh Phan

Anh Phan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11594533
    Abstract: A device is disclosed. The device includes a first semiconductor fin, a first source-drain epitaxial region adjacent a first portion of the first semiconductor fin, a second source-drain epitaxial region adjacent a second portion of the first semiconductor fin, a first gate conductor above the first semiconductor fin, a gate spacer covering the sides of the gate conductor, a second semiconductor fin below the first semiconductor fin, a second gate conductor on a first side of the second semiconductor fin and a third gate conductor on a second side of the second semiconductor fin, a third source-drain epitaxial region adjacent a first portion of the second semiconductor fin, and a fourth source-drain epitaxial region adjacent a second portion of the second semiconductor fin. The device also includes a dielectric isolation structure below the first semiconductor fin and above the second semiconductor fin that separates the first semiconductor fin and the second semiconductor fin.
    Type: Grant
    Filed: June 27, 2019
    Date of Patent: February 28, 2023
    Assignee: Intel Corporation
    Inventors: Willy Rachmady, Cheng-Ying Huang, Gilbert Dewey, Aaron Lilak, Patrick Morrow, Anh Phan, Ehren Mannebach, Jack T. Kavalieros
  • Patent number: 11573798
    Abstract: Disclosed herein are stacked transistors with different gate lengths in different device strata, as well as related methods and devices. In some embodiments, an integrated circuit structure may include stacked strata of transistors, with two different device strata having different gate lengths.
    Type: Grant
    Filed: March 1, 2019
    Date of Patent: February 7, 2023
    Assignee: Intel Corporation
    Inventors: Aaron D. Lilak, Gilbert W. Dewey, Willy Rachmady, Rishabh Mehandru, Ehren Mannebach, Cheng-Ying Huang, Anh Phan, Patrick Morrow
  • Publication number: 20230029903
    Abstract: Systems and methods for uplink cancellation are provided. In some embodiments, a method performed by a wireless device for performing uplink cancellation includes receiving an indication to stop a transmission; and receiving an indication to transmit on cancelled uplink resources. In some embodiments, in response to receiving the indication to stop the transmission, performing one of: cancelling the transmission; and muting the transmission. In this way, the New Radio (NR) Uplink (UL) cancellation mechanism can be enabled on NR-Unlicensed (NR-U) resources and helps to cater Ultra-Reliable and Low Latency Communication (URLLC) services.
    Type: Application
    Filed: February 5, 2021
    Publication date: February 2, 2023
    Inventors: Bikramjit Singh, Alexey Shapin, Ali Behravan, Mai-Anh Phan, Sorour Falahati, Abdulrahman Alabbasi
  • Patent number: 11552104
    Abstract: Disclosed herein are stacked transistors with dielectric between channel materials, as well as related methods and devices. In some embodiments, an integrated circuit structure may include stacked strata of transistors, wherein a dielectric material is between channel materials of adjacent strata, and the dielectric material is surrounded by a gate dielectric.
    Type: Grant
    Filed: February 19, 2019
    Date of Patent: January 10, 2023
    Assignee: Intel Corporation
    Inventors: Aaron D. Lilak, Gilbert W. Dewey, Willy Rachmady, Rishabh Mehandru, Ehren Mannebach, Cheng-Ying Huang, Anh Phan, Patrick Morrow, Kimin Jun
  • Patent number: 11532719
    Abstract: Embodiments herein describe techniques for a semiconductor device over a semiconductor substrate. A first bonding layer is above the semiconductor substrate. One or more nanowires are formed above the first bonding layer to be a channel layer. A gate electrode is around a nanowire, where the gate electrode is in contact with the first bonding layer and separated from the nanowire by a gate dielectric layer. A source electrode or a drain electrode is in contact with the nanowire, above a bonding area of a second bonding layer, and separated from the gate electrode by a spacer, where the second bonding layer is above and in direct contact with the first bonding layer.
    Type: Grant
    Filed: December 17, 2018
    Date of Patent: December 20, 2022
    Assignee: Intel Corporation
    Inventors: Kimin Jun, Jack T. Kavalieros, Gilbert Dewey, Willy Rachmady, Aaron Lilak, Brennen Mueller, Hui Jae Yoo, Patrick Morrow, Anh Phan, Cheng-Ying Huang, Ehren Mannebach
  • Publication number: 20220352032
    Abstract: Backside contact structures include etch selective materials to facilitate backside contact formation. An integrated circuit structure includes a frontside contact region, a device region below the frontside contact region, and a backside contact region below the device region. The device region includes a transistor. The backside contact region includes a first dielectric material under a source or drain region of the transistor, a second dielectric material laterally adjacent to the first dielectric material and under a gate structure of the transistor. A non-conductive spacer is between the first and second dielectric materials. The first and second dielectric materials are selectively etchable with respect to one another and the spacer. The backside contact region may include an interconnect feature that, for instance, passes through the first dielectric material and contacts a bottom side of the source/drain region, and/or passes through the second dielectric material and contacts the gate structure.
    Type: Application
    Filed: July 15, 2022
    Publication date: November 3, 2022
    Applicant: INTEL CORPORATION
    Inventors: Aaron D. LILAK, Ehren MANNEBACH, Anh PHAN, Richard E. SCHENKER, Stephanie A. BOJARSKI, Willy RACHMADY, Patrick R. MORROW, Jeffrey D. BIELEFELD, Gilbert DEWEY, Hui Jae YOO
  • Publication number: 20220352029
    Abstract: In an embodiment of the present disclosure, a device structure includes a fin structure, a gate on the fin structure, and a source and a drain on the fin structure, where the gate is between the source and the drain. The device structure further includes an insulator layer having a first insulator layer portion adjacent to a sidewall of the source, a second insulator layer portion adjacent to a sidewall of the drain, and a third insulator layer portion therebetween adjacent to a sidewall of the gate, and two or more stressor materials adjacent to the insulator layer. The stressor materials can be tensile or compressively stressed and may strain a channel under the gate.
    Type: Application
    Filed: July 12, 2022
    Publication date: November 3, 2022
    Applicant: Intel Corporation
    Inventors: Aaron D. Lilak, Christopher J. Jezewski, Willy Rachmady, Rishabh Mehandru, Gilbert Dewey, Anh Phan
  • Publication number: 20220344376
    Abstract: A stacked device structure includes a first device structure including a first body that includes a semiconductor material, and a plurality of terminals coupled with the first body. The stacked device structure further includes an insulator between the first device structure and a second device structure. The second device structure includes a second body such as a fin structure directly above the insulator. The second device structure further includes a gate coupled to the fin structure, a spacer including a dielectric material adjacent to the gate, and an epitaxial structure adjacent to a sidewall of the fin structure and between the spacer and the insulator. A metallization structure is coupled to a sidewall surface of the epitaxial structure, and further coupled with one of the terminals of the first device.
    Type: Application
    Filed: July 13, 2022
    Publication date: October 27, 2022
    Applicant: Intel Corporation
    Inventors: Aaron D. Lilak, Anh Phan, Patrick Morrow, Willy Rachmady, Gilbert Dewey, Jessica M. Torres, Kimin Jun, Tristan A. Tronic, Christopher J. Jezewski, Hui Jae Yoo, Robert S. Chau, Chi-Hwa Tsang
  • Patent number: 11482621
    Abstract: Embodiments include transistor devices and a method of forming the transistor devices. A transistor device includes a first dielectric over a substrate, and vias on a first metal layer, where the first metal layer is on an etch stop layer that is on the first dielectric. The transistor device also includes a second dielectric over the first metal layer, vias, and etch stop layer, where the vias include sidewalls, top surfaces, and bottom surfaces, and stacked transistors on the second dielectric and the top surfaces of the vias, where the sidewalls and top surfaces of the vias are positioned within a footprint of the stacked transistors. The stacked transistors include gate electrodes and first and second transistor layers. The first metal layer includes conductive materials including tungsten or cobalt. The footprint may include a bottom surface of the first transistor layer and a bottom surface of the gate electrodes.
    Type: Grant
    Filed: September 26, 2018
    Date of Patent: October 25, 2022
    Assignee: Intel Corporation
    Inventors: Willy Rachmady, Patrick Morrow, Aaron Lilak, Rishabh Mehandru, Cheng-Ying Huang, Gilbert Dewey, Kimin Jun, Ryan Keech, Anh Phan, Ehren Mannebach
  • Publication number: 20220322098
    Abstract: Methods and apparatus are provided. In an example aspect, a method performed by a wireless device is provided. The method comprises receiving an indication that data scheduled to be transmitted from the wireless device to a network node on a first cell using unlicensed spectrum should be transmitted on a second cell different to the first cell, and transmitting the data on the second cell.
    Type: Application
    Filed: September 13, 2019
    Publication date: October 6, 2022
    Inventors: Torsten Dudda, Hubertus Munz, Alexandros Palaios, Dhruvin Patel, Reem Karaki, Mai-Anh Phan
  • Patent number: 11437405
    Abstract: Embodiments herein describe techniques for an integrated circuit (IC). The IC may include a first transistor, an insulator layer above the first transistor, and a second transistor above the insulator layer. The first transistor may be a p-type transistor including a channel in a substrate, a first source electrode, and a first drain electrode. A first metal contact may be coupled to the first source electrode, while a second metal contact may be coupled to the first drain electrode. The insulator layer may be next to the first metal contact, and next to the second metal contact. The second transistor may include a second source electrode, and a second drain electrode. The second source electrode may be coupled to the first metal contact, or the second drain electrode may be coupled to the second metal contact. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: June 29, 2018
    Date of Patent: September 6, 2022
    Assignee: Intel Corporation
    Inventors: Gilbert Dewey, Patrick Morrow, Aaron Lilak, Willy Rachmady, Anh Phan, Ehren Mannebach, Hui Jae Yoo, Abhishek Sharma, Van H. Le, Cheng-Ying Huang
  • Patent number: 11437283
    Abstract: Backside contact structures include etch selective materials to facilitate backside contact formation. An integrated circuit structure includes a frontside contact region, a device region below the frontside contact region, and a backside contact region below the device region. The device region includes a transistor. The backside contact region includes a first dielectric material under a source or drain region of the transistor, a second dielectric material laterally adjacent to the first dielectric material and under a gate structure of the transistor. A non-conductive spacer is between the first and second dielectric materials. The first and second dielectric materials are selectively etchable with respect to one another and the spacer. The backside contact region may include an interconnect feature that, for instance, passes through the first dielectric material and contacts a bottom side of the source/drain region, and/or passes through the second dielectric material and contacts the gate structure.
    Type: Grant
    Filed: March 15, 2019
    Date of Patent: September 6, 2022
    Assignee: Intel Corporation
    Inventors: Aaron D. Lilak, Ehren Mannebach, Anh Phan, Richard E. Schenker, Stephanie A. Bojarski, Willy Rachmady, Patrick R. Morrow, Jeffery D. Bielefeld, Gilbert Dewey, Hui Jae Yoo
  • Patent number: 11430814
    Abstract: A stacked device structure includes a first device structure including a first body that includes a semiconductor material, and a plurality of terminals coupled with the first body. The stacked device structure further includes an insulator between the first device structure and a second device structure. The second device structure includes a second body such as a fin structure directly above the insulator. The second device structure further includes a gate coupled to the fin structure, a spacer including a dielectric material adjacent to the gate, and an epitaxial structure adjacent to a sidewall of the fin structure and between the spacer and the insulator. A metallization structure is coupled to a sidewall surface of the epitaxial structure, and further coupled with one of the terminals of the first device.
    Type: Grant
    Filed: March 5, 2018
    Date of Patent: August 30, 2022
    Assignee: Intel Corporation
    Inventors: Aaron D. Lilak, Anh Phan, Patrick Morrow, Willy Rachmady, Gilbert Dewey, Jessica M. Torres, Kimin Jun, Tristan A. Tronic, Christopher J. Jezewski, Hui Jae Yoo, Robert S. Chau, Chi-Hwa Tsang
  • Patent number: 11424160
    Abstract: In some embodiments, a semiconductor device structure is formed by using an angled etch to remove material so as to expose a portion of an adjacent conductor. The space formed upon removing the material can then be filled with a conductive material during formation of a contact or other conductive structure (e.g., and interconnection). In this way, the contact formation also fills the space to form an angled local interconnect portion that connects adjacent structures (e.g., a source/drain contact to an adjacent source/drain contact, a source/drain contact to an adjacent gate contact, a source/drain contact to an adjacent device level conductor also connected to a gate/source/drain contact). In other embodiments, an interconnection structure herein termed a “jogged via” establishes and electrical connection from laterally adjacent peripheral surfaces of conductive structures that are not coaxially or concentrically aligned with one another.
    Type: Grant
    Filed: February 13, 2019
    Date of Patent: August 23, 2022
    Assignee: Intel Corporation
    Inventors: Aaron D. Lilak, Ehren Mannebach, Anh Phan, Richard Schenker, Stephanie A. Bojarski, Willy Rachmady, Patrick Morrow, Jeffery Bielefeld, Gilbert Dewey, Hui Jae Yoo, Nafees Kabir
  • Publication number: 20220246608
    Abstract: Stacked transistor structures having a conductive interconnect between upper and lower transistors. In an embodiment, the interconnect is formed by first provisioning a protective layer over an area to be protected (gate dielectric or other sensitive material) of upper transistor, and then etching material adjacent and below the protected area to expose an underlying contact point of lower transistor. A metal is deposited into the void created by the etch to provide the interconnect. The protective layer is resistant to the etch process and is preserved in the structure, and in some cases may be utilized as a work-function metal. In an embodiment, the protective layer is formed by deposition of reactive semiconductor and metal material layers which are subsequently transformed into a work function metal or work function metal-containing compound. A remnant of unreacted reactive semiconductor material may be left in structure and collinear with protective layer.
    Type: Application
    Filed: April 21, 2022
    Publication date: August 4, 2022
    Inventors: Aaron D. LILAK, Anh PHAN, Ehren MANNEBACH, Cheng-Ying HUANG, Stephanie A. BOJARSKI, Gilbert DEWEY, Orb ACTON, Willy RACHMADY
  • Publication number: 20220240317
    Abstract: Methods and apparatus are provided. In an example aspect, a method of transmitting data performed by a wireless device is provided, wherein the wireless device is associated with multiple serving cells. The method comprises transmitting data to a network node on one or more of the serving cells based on a respective cell weighting for each of the serving cells.
    Type: Application
    Filed: September 13, 2019
    Publication date: July 28, 2022
    Inventors: Torsten Dudda, Reem Karaki, Hubertus Munz, Dhruvin Patel, Mai-Anh Phan, Alexandros Palaios
  • Publication number: 20220240316
    Abstract: Methods and apparatus are provided. In an example aspect, a method of transmitting data is provided. The method comprises determining if a first channel on a first cell is occupied and, if the first channel on the first cell is occupied for at least a predetermined period, transmitting the data on a second channel on a second cell.
    Type: Application
    Filed: September 13, 2019
    Publication date: July 28, 2022
    Inventors: Torsten Dudda, Reem Karaki, Hubertus Munz, Dhruvin Patel, Mai-Anh Phan, Alexandros Palaios
  • Patent number: 11393722
    Abstract: In an embodiment of the present disclosure, a device structure includes a fin structure, a gate on the fin structure, and a source and a drain on the fin structure, where the gate is between the source and the drain. The device structure further includes an insulator layer having a first insulator layer portion adjacent to a sidewall of the source, a second insulator layer portion adjacent to a sidewall of the drain, and a third insulator layer portion therebetween adjacent to a sidewall of the gate, and two or more stressor materials adjacent to the insulator layer. The stressor materials can be tensile or compressively stressed and may strain a channel under the gate.
    Type: Grant
    Filed: January 12, 2018
    Date of Patent: July 19, 2022
    Assignee: Intel Corporation
    Inventors: Aaron D. Lilak, Christopher J. Jezewski, Willy Rachmady, Rishabh Mehandru, Gilbert Dewey, Anh Phan
  • Patent number: 11393818
    Abstract: An integrated circuit structure comprises a lower device layer that includes a first structure comprising a plurality of PMOS transistors. An upper device layer is formed on the lower device layer, wherein the upper device layer includes a second structure comprising a plurality of NMOS thin-film transistors (TFT).
    Type: Grant
    Filed: March 28, 2018
    Date of Patent: July 19, 2022
    Assignee: Intel Corporation
    Inventors: Gilbert Dewey, Ravi Pillarisetty, Abhishek A. Sharma, Aaron D. Lilak, Willy Rachmady, Rishabh Mehandru, Kimin Jun, Anh Phan, Hui Jae Yoo, Patrick Morrow, Cheng-Ying Huang
  • Publication number: 20220225110
    Abstract: Methods and apparatus are provided. In an example aspect, a method in a network node is provided, the method comprising monitoring unlicensed spectrum access attempts for transmissions to and/or from at least one User Equipment, UE, in a first group of UEs configured to use unlicensed spectrum to send uplink transmissions and/or receive downlink transmissions and, in response to the monitoring, causing the UEs in the first group to use licensed spectrum to send uplink transmissions and/or receive downlink transmissions.
    Type: Application
    Filed: September 13, 2019
    Publication date: July 14, 2022
    Inventors: Dhruvin Patel, Guido Roland Hiertz, Mai-Anh Phan, Hubertus Andreas Munz, Alexandros Palaios, Reem Karaki, Torsten Dudda