Patents by Inventor Chen Zhang

Chen Zhang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210119928
    Abstract: Embodiments of the application can provide a method, a device, and a terminal for controlling a jitter in network communication, belonging to the technical field of communication. The method includes: generating trigger information, where the trigger information is for triggering switching of a jitter control strategy for the network communication, the jitter control strategy includes a first control strategy based on a first cached data amount and a second control strategy based on a second cached data amount, and the first cached data amount is smaller than the second cached data amount; switching the jitter control strategy to a target control strategy in response to the trigger information; and controlling the jitter in the network communication by using the target control strategy, where the target control strategy is the first control strategy or the second control strategy corresponding to the trigger information.
    Type: Application
    Filed: December 29, 2020
    Publication date: April 22, 2021
    Inventors: Chen ZHANG, Liang GUO, Wenhao XING
  • Publication number: 20210118878
    Abstract: Devices and methods are provided for forming single diffusion break isolation structures for integrated circuit devices including gate-all-around FET devices such as nanosheet FET devices and nanowire FET devices. For example, a semiconductor integrated circuit device includes first and second gate-all-around field-effect transistor devices disposed in first and second device regions, respectively, of a semiconductor substrate. A single diffusion break isolation structure is disposed between the first and second device regions. The single diffusion break isolation structure includes a dummy gate structure disposed on the semiconductor substrate between a first source/drain layer of the first gate-all-around field-effect transistor device and a second source/drain layer of the second gate all-around field-effect transistor device. The single diffusion break isolation structure is configured to electrically isolate the first and second source/drain layers.
    Type: Application
    Filed: December 29, 2020
    Publication date: April 22, 2021
    Inventors: Wenyu Xu, Xin Miao, Chen Zhang, Kangguo Cheng
  • Publication number: 20210119043
    Abstract: A method of forming a vertical fin field effect transistor device is provided. The method includes forming a vertical fin and fin template on a bottom source/drain layer, wherein the fin template is on the vertical fin. The method further includes forming a gate structure on the vertical fin and fin template, and forming a top spacer layer on the gate structure. The method further includes removing the fin template to form an opening in the top spacer layer, and removing a portion of a gate electrode of the gate structure to form a cavity; and removing a portion of a gate dielectric layer of the gate structure to form a groove around the vertical fin.
    Type: Application
    Filed: December 29, 2020
    Publication date: April 22, 2021
    Inventors: Kangguo Cheng, Chen Zhang, Xin Miao, Wenyu Xu
  • Patent number: 10985161
    Abstract: Devices and methods are provided for forming single diffusion break isolation structures for integrated circuit devices including gate-all-around FET devices such as nanosheet FET devices and nanowire FET devices. For example, a semiconductor integrated circuit device includes first and second gate-all-around field-effect transistor devices disposed in first and second device regions, respectively, of a semiconductor substrate. A single diffusion break isolation structure is disposed between the first and second device regions. The single diffusion break isolation structure includes a dummy gate structure disposed on the semiconductor substrate between a first source/drain layer of the first gate-all-around field-effect transistor device and a second source/drain layer of the second gate all-around field-effect transistor device. The single diffusion break isolation structure is configured to electrically isolate the first and second source/drain layers.
    Type: Grant
    Filed: May 31, 2019
    Date of Patent: April 20, 2021
    Assignee: International Business Machines Corporation
    Inventors: Wenyu Xu, Xin Miao, Chen Zhang, Kangguo Cheng
  • Patent number: 10985064
    Abstract: A stacked semiconductor device structure and method for fabricating the same. The stacked semiconductor device structure includes a first vertical transport field effect transistor (VTFET) and a second VTFET stacked on the first VTFET. The structure further includes at least one power line and at least one ground line disposed within a backside of the stacked semiconductor structure. The method includes at least orientating a structure including a first VTFET and a second VTFET stacked on the first VTFET such that a multi-layer substrate, on which the first VTFET is formed, is above the first and second VTFETs. First and second contact trenches are formed through at least one layer of the multi-layer substrate. The first contact trench exposes a portion of a metal contact and the second contact trench exposes a portion of a source/drain region. The first and second contact trenches are filled with a contact material.
    Type: Grant
    Filed: May 29, 2019
    Date of Patent: April 20, 2021
    Assignee: International Business Machines Corporation
    Inventors: Chen Zhang, Heng Wu, Kangguo Cheng, Tenko Yamashita
  • Publication number: 20210111195
    Abstract: The subject disclosure relates to high mobility complementary metal-oxide-semiconductor (CMOS) devices and techniques for forming the CMOS devices with fins formed directly on the insulator. According to an embodiment, a method for forming such a high mobility CMOS device can comprise forming, via a first epitaxial growth of a first material, first pillars within first trenches formed within a dielectric layer, wherein the dielectric layer is formed on a silicon substrate, and wherein the first pillars comprise first portions with defects and second portions without the defects. The method can further comprise forming second trenches within a first region of the dielectric layer, and further forming second pillars within the second trenches via a second epitaxial growth of one or more second materials using the second portions of the first pillars as seeds for the second epitaxial growth.
    Type: Application
    Filed: December 23, 2020
    Publication date: April 15, 2021
    Inventors: Xin Miao, Chen Zhang, Kangguo Cheng, Wenyu Xu
  • Publication number: 20210111121
    Abstract: A semiconductor structure includes a three-dimensional stacked transistor structure including first and second field-effect transistors of a first type at a first vertical level and third and fourth field-effect transistors of a second type at a second vertical level disposed over the first vertical level. The semiconductor structure also includes a first gate structure shared between the first and second field-effect transistors at the first vertical level, a second gate structure shared between the third and fourth field-effect transistors at the second vertical level, and a gate contact shared by the first and second gate structures. The wherein the first and second gate structures are vertically aligned with another in a layout of the three-dimensional stacked transistor structure between source drain/regions of the first, second, third and fourth field-effect transistors.
    Type: Application
    Filed: December 22, 2020
    Publication date: April 15, 2021
    Inventors: Dongbing Shao, Chen Zhang, Zheng Xu, Tenko Yamashita
  • Patent number: 10978046
    Abstract: A method and system of customizing a portable voice-based control user interface for multiple types of appliances are disclosed.
    Type: Grant
    Filed: October 15, 2018
    Date of Patent: April 13, 2021
    Assignee: MIDEA GROUP CO., LTD.
    Inventors: Haibin Huang, Chen Zhang, Xin Liu
  • Patent number: 10971522
    Abstract: The subject disclosure relates to high mobility complementary metal-oxide-semiconductor (CMOS) devices and techniques for forming the CMOS devices with fins formed directly on the insulator. According to an embodiment, a method for forming such a high mobility CMOS device can comprise forming, via a first epitaxial growth of a first material, first pillars within first trenches formed within a dielectric layer, wherein the dielectric layer is formed on a silicon substrate, and wherein the first pillars comprise first portions with defects and second portions without the defects. The method can further comprise forming second trenches within a first region of the dielectric layer, and further forming second pillars within the second trenches via a second epitaxial growth of one or more second materials using the second portions of the first pillars as seeds for the second epitaxial growth.
    Type: Grant
    Filed: August 21, 2018
    Date of Patent: April 6, 2021
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Xin Miao, Chen Zhang, Kangguo Cheng, Wenyu Xu
  • Patent number: 10964603
    Abstract: A method of forming a semiconductor structure includes forming one or more vertical fins each including a first semiconductor layer providing a vertical transport channel for a lower vertical transport field-effect transistor (VTFET) of a stacked VTFET structure, an isolation layer over the first semiconductor layer, and a second semiconductor layer over the isolation layer providing a vertical transport channel for an upper VTFET of the stacked VTFET structure. The method also includes forming a first gate stack including a first gate dielectric layer and a first gate conductor layer surrounding a portion of the first semiconductor layer of the vertical fins. The method further includes forming a second gate stack including a second gate dielectric layer and a second gate conductor layer surrounding a portion of the second semiconductor layer of the vertical fins. The first gate conductor layer and the second gate conductor layer are the same material.
    Type: Grant
    Filed: April 15, 2019
    Date of Patent: March 30, 2021
    Assignee: International Business Machines Corporation
    Inventors: Tenko Yamashita, Takashi Ando, Oleg Gluschenkov, Chen Zhang, Koji Watanabe
  • Patent number: 10960721
    Abstract: A vehicle system comprises a hitch ball mounted on a vehicle and a controller. The controller is configured to identify a coupler position of a trailer and control movement of the vehicle aligning the hitch ball with the coupler position. The controller is further configured to identify a change in the coupler position and stop the motion of the vehicle in response to the change in position of the trailer.
    Type: Grant
    Filed: June 26, 2018
    Date of Patent: March 30, 2021
    Assignee: Ford Global Technologies, LLC
    Inventors: Luke Niewiadomski, Chen Zhang
  • Patent number: 10964601
    Abstract: A method of fabricating a vertical fin field effect transistor with a merged top source/drain, including, forming a source/drain layer at the surface of a substrate, forming a plurality of vertical fins on the source/drain layer; forming protective spacers on each of the plurality of vertical fins, forming a sacrificial plug between two protective spacers, forming a filler layer on the protective spacers not in contact with the sacrificial plug, and selectively removing the sacrificial plug to form an isolation region trench between the two protective spacers.
    Type: Grant
    Filed: January 31, 2020
    Date of Patent: March 30, 2021
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kangguo Cheng, Xin Miao, Wenyu Xu, Chen Zhang
  • Patent number: 10964602
    Abstract: A method of fabricating a vertical fin field effect transistor with a merged top source/drain, including, forming a source/drain layer at the surface of a substrate, forming a plurality of vertical fins on the source/drain layer; forming protective spacers on each of the plurality of vertical fins, forming a sacrificial plug between two protective spacers, forming a filler layer on the protective spacers not in contact with the sacrificial plug, and selectively removing the sacrificial plug to form an isolation region trench between the two protective spacers.
    Type: Grant
    Filed: January 31, 2020
    Date of Patent: March 30, 2021
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kangguo Cheng, Xin Miao, Wenyu Xu, Chen Zhang
  • Patent number: 10962980
    Abstract: A vehicle system comprises a hitch ball mounted on a vehicle. The system further comprises a plurality of sensor devices comprising an ultrasonic sensor and an image sensor. A controller is configured to process image data from the image sensor identifying a coupler position of a trailer. The controller is further configured to process ultrasonic data from the ultrasonic sensor identifying a proximity of the trailer. Based on the proximity of the trailer, the system is configured to identify the trailer in a detection range of the image sensor.
    Type: Grant
    Filed: August 30, 2018
    Date of Patent: March 30, 2021
    Assignee: Ford Global Technologies, LLC
    Inventors: Luke Niewiadomski, Erick Michael Lavoie, Eric L. Reed, Chen Zhang, Roger Arnold Trombley, Douglas J. Rogan, Bruno Sielly Jales Costa
  • Publication number: 20210091207
    Abstract: A method of forming a semiconductor device and resulting structure in which a trench is formed extending through a plurality of layers on a semiconductor substrate. The plurality of layers includes a sequence of dielectric materials. A first portion of the plurality of layers corresponds to a bottom vertical field effect transistor (VFET) and a second portion of the plurality of layers corresponds to a top VFET. A sacrificial layer separates the bottom VFET from the top VFET. A fin is formed within the trench by epitaxially growing a semiconductor material. A hard mask is formed above a central portion of the plurality of layers. Portions of the plurality of layers not covered by the hard mask are removed. The first portion of the plurality of layers is covered to remove the sacrificial layer. The recess resulting from the removal of the sacrificial layer is filled with an oxide material.
    Type: Application
    Filed: September 25, 2019
    Publication date: March 25, 2021
    Inventors: Lan Yu, Xin Miao, Chen Zhang, Heng Wu, Kangguo Cheng
  • Patent number: 10957693
    Abstract: Techniques for forming VFETs with differing gate lengths are provided. In one aspect, a method for forming a VFET device includes: patterning fins in a substrate, wherein at least one of the fins includes a vertical fin channel of a FET1 and at least another one of the fins includes a vertical fin channel of a FET2; forming a bottom source and drain; forming bottom spacers on the bottom source and drain; forming gates surrounding the vertical fin channel of the FET1 and FET2; forming top spacers on the gate; and forming top source and drains at the tops of the fins by varying a positioning of the top source and drains relative to at least one of the vertical fin channel of the FET1 and the FET2 such that the FET1/FET2 have an effective gate length Lgate1/Lgate2, wherein Lgate1>Lgate2. A VFET device is also provided.
    Type: Grant
    Filed: September 26, 2019
    Date of Patent: March 23, 2021
    Assignee: International Business Machines Corporation
    Inventors: Xin Miao, Chen Zhang, Kangguo Cheng, Juntao Li
  • Patent number: 10957605
    Abstract: The present invention provides VFET device designs for top contact resistance measurement. In one aspect, a method of forming a VFET test structure includes: etching fins in a substrate (for active and sensing devices); forming bottom source/drains at a base of the fins; forming a STI region that isolates the bottom source/drains of the active device from that of the sensing device; forming a gate surrounding each of the fins; forming top source/drains over the gate, wherein the top source/drains of the active device and that of the sensing device are merged; and forming contacts to i) the bottom source/drains of the active device, ii) the top source/drains of the active device, and iii) the bottom source/drains of the sensing device. A test structure formed by the method as well as techniques for use thereof for measuring contact resistance are also provided.
    Type: Grant
    Filed: October 3, 2019
    Date of Patent: March 23, 2021
    Assignee: International Business Machines Corporation
    Inventors: Chen Zhang, Zuoguang Liu
  • Patent number: 10957798
    Abstract: A method of fabricating a semiconductor device is described. The method includes forming a nanosheet stack on a substrate, the nanosheet stack includes nanosheet channel layers. A gate is formed around the nanosheet channel layers of the nanosheet stack. A strained material is formed along a sidewall surface of the gate. The strained material is configured to create strain in the nanosheet channel layers of the nanosheet stack.
    Type: Grant
    Filed: February 6, 2019
    Date of Patent: March 23, 2021
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Xin Miao, Kangguo Cheng, Wenyu Xu, Chen Zhang
  • Patent number: 10953711
    Abstract: A hitch assist system is provided herein that includes an imager for capturing one or more images of a trailer having a coupler. The hitch assist system may also include a user-input device for inputting specifications of a hitch ball. A controller within the hitch assist system may be used for estimating a hitch ball height based on the inputted specifications and estimating a trailer height based on a height and projective geometry of the imager.
    Type: Grant
    Filed: July 18, 2018
    Date of Patent: March 23, 2021
    Assignee: Ford Global Technologies, LLC
    Inventors: Yu Ling, Chen Zhang
  • Patent number: 10957783
    Abstract: A method for fabricating a semiconductor device including a vertical transistor includes etching a longitudinal end portion of a fin on a substrate to form a gap exposing the substrate, forming a top source/drain region, and forming, around a horizontal portion and a vertical portion of a bottom source/drain region disposed on the substrate, a contact wrapping in a region including a location where the longitudinal end portion of the fin was removed by the etching.
    Type: Grant
    Filed: November 13, 2019
    Date of Patent: March 23, 2021
    Assignee: International Business Machines Corporation
    Inventors: Wenyu Xu, Chen Zhang, Kangguo Cheng, Xin Miao