Patents by Inventor Chun-Lung Chen

Chun-Lung Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9985123
    Abstract: A method for fabricating semiconductor device includes the steps of: providing a substrate having at least a gate structure thereon and an interlayer dielectric (ILD) layer surrounding the gate structure, wherein the gate structure comprises a hard mask thereon; forming a dielectric layer on the gate structure and the ILD layer; removing part of the dielectric layer to expose the hard mask and the ILD layer; and performing a surface treatment to form a doped region in the hard mask and the ILD layer.
    Type: Grant
    Filed: May 22, 2017
    Date of Patent: May 29, 2018
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chia-Lin Lu, Chun-Lung Chen, Kun-Yuan Liao, Feng-Yi Chang, Chih-Sen Huang, Ching-Wen Hung, Wei-Hao Huang
  • Publication number: 20180139840
    Abstract: A method for fabricating a substrate structure is provided, which includes the steps of: disposing at least a strengthening member on a carrier; sequentially forming a first circuit layer and a dielectric layer on the carrier, wherein the strengthening member is embedded in the dielectric layer; forming a second circuit layer on the dielectric layer; removing the carrier; and forming an insulating layer on the first circuit layer and the second circuit layer. The strengthening member facilitates to reduce thermal warping of the substrate structure.
    Type: Application
    Filed: January 11, 2018
    Publication date: May 17, 2018
    Inventors: Jin-Wei You, Chun-Lung Chen
  • Patent number: 9954273
    Abstract: An electronic device may be provided with wireless circuitry that includes antennas. An antenna may be formed from metal traces on a dielectric antenna carrier. The antenna carrier may be formed by molding a layer of plastic onto the surface of a foam member. The foam member may have a low dielectric constant to enhance antenna performance and may be formed from a stiff closed cell plastic foam material. Heat and pressure may be used to attach the layer of plastic to the surface of the foam member without adhesive. A laser may be used to selectively expose portions of the plastic layer to laser light. The plastic layer may include additives that sensitize the plastic layer to light exposure. Electroplated metal traces for the antenna may be formed on the exposed portions of the plastic layer while leaving other portions of the plastic layer uncovered with metal.
    Type: Grant
    Filed: April 1, 2015
    Date of Patent: April 24, 2018
    Assignee: Apple Inc.
    Inventors: Boon W. Shiu, Chun-Lung Chen, Erdinc Irci
  • Publication number: 20180059715
    Abstract: A head-mounted display device includes a wearable device, a display mainframe and a pivoting mechanism. The display mainframe includes a cover body and a display-receiving portion connected to one side of the cover body. The cover body is provided with a light transmissive area and an accommodation area in which the light transmissive area is arranged between the accommodation area and the display-receiving portion. The pivoting mechanism is pivotally connected to the wearable device and the display mainframe.
    Type: Application
    Filed: November 30, 2016
    Publication date: March 1, 2018
    Applicant: Quanta Computer Inc.
    Inventors: Chun-Lung CHEN, Chun-Yun TSENG, Yuan-Peng YU, Hung-Hsun TAI, Po-Hui LIN
  • Patent number: 9907161
    Abstract: A method for fabricating a substrate structure is provided, which includes the steps of: disposing at least a strengthening member on a carrier; sequentially forming a first circuit layer and a dielectric layer on the carrier, wherein the strengthening member is embedded in the dielectric layer; forming a second circuit layer on the dielectric layer; removing the carrier; and forming an insulating layer on the first circuit layer and the second circuit layer. The strengthening member facilitates to reduce thermal warping of the substrate structure.
    Type: Grant
    Filed: August 23, 2015
    Date of Patent: February 27, 2018
    Assignee: Siliconware Precision Industries Co., Ltd.
    Inventors: Jin-Wei You, Chun-Lung Chen
  • Publication number: 20180012975
    Abstract: A semiconductor device and a method of forming the same, the semiconductor device includes a fin shaped structure, agate structure, an epitaxial layer, an interlayer dielectric layer, a first plug and a protection layer. The fin shaped structure is disposed on a substrate, and the gate structure is across the fin shaped structure. The epitaxial layer is disposed in the fin shaped structure, adjacent to the gate structure. The interlayer dielectric layer covers the substrate and the fin shaped structure. The first plug is formed in the interlayer dielectric layer, wherein the first plug is electrically connected to the epitaxial layer. The protection layer is disposed between the first plug and the gate structure.
    Type: Application
    Filed: August 15, 2017
    Publication date: January 11, 2018
    Inventors: Chia-Lin Lu, Chun-Lung Chen, Kun-Yuan Liao, Feng-Yi Chang, Wei-Hao Huang
  • Patent number: 9865593
    Abstract: A method for fabricating semiconductor device is disclosed. A substrate having a first transistor on a first region, a second transistor on a second region, a trench isolation region, a resistor-forming region is provided. A first ILD layer covers the first region, the second region, and the resistor-forming region. A resistor material layer and a capping layer are formed over the first region, the second region, and the resistor-forming region. The capping layer and the resistor material layer are patterned to form a first hard mask pattern above the first and second regions and a second hard mask pattern above the resistor-forming region. The resistor material layer is isotropically etched. A second ILD layer is formed over the substrate. The second ILD layer and the first ILD layer are patterned with a mask and the first hard mask pattern to form a contact opening.
    Type: Grant
    Filed: January 10, 2017
    Date of Patent: January 9, 2018
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chia-Lin Lu, Chun-Lung Chen, Kun-Yuan Liao, Hsiang-Hung Peng, Wei-Hao Huang, Ching-Wen Hung, Chih-Sen Huang
  • Publication number: 20180006133
    Abstract: A semiconductor device with reinforced gate spacers and a method of fabricating the same. The semiconductor device includes low-k dielectric gate spacers adjacent to a gate structure. A high-k dielectric material is disposed over an upper surface of the low-k dielectric gate spacers to prevent unnecessary contact between the gate structure and a self-aligned contact structure. The high-k dielectric material may be disposed, if desired, over an upper surface of the gate structure to provide additional isolation of the gate structure from the self-aligned contact structure.
    Type: Application
    Filed: August 29, 2017
    Publication date: January 4, 2018
    Inventors: Chia-Lin Liu, Yu-Cheng Tung, Chun-Lung Chen, Kun-Yuan Liao, Feng-Yi Chang
  • Patent number: 9799550
    Abstract: The present invention provides a method for forming an opening, including: first, a hard mask material layer is formed on a target layer, next, a tri-layer hard mask is formed on the hard mask material layer, where the tri-layer hard mask includes an bottom organic layer (ODL), a middle silicon-containing hard mask bottom anti-reflection coating (SHB) layer and a top photoresist layer, and an etching process is then performed, to remove parts of the tri-layer hard mask, parts of the hard mask material layer and parts of the target layer in sequence, so as to form at least one opening in the target layer, where during the step for removing parts of the hard mask material layer, a lateral etching rate of the hard mask material layer is smaller than a lateral etching rate of the ODL.
    Type: Grant
    Filed: September 4, 2015
    Date of Patent: October 24, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Wei-Hao Huang, Chia-Lin Lu, Chun-Lung Chen, Kun-Yuan Liao, Feng-Yi Chang, Chieh-Te Chen, Shang-Yuan Tsai
  • Patent number: 9793382
    Abstract: A semiconductor device and a method of manufacturing the same, the semiconductor device includes a fin shaped structure, a gate structure, an epitaxial layer, a germanium layer, an interlayer dielectric layer and a first plug. The fin shaped structure is disposed on a substrate. The gate structure is formed across the fin shaped structure. The epitaxial layer is disposed in the fin shaped structure adjacent to the gate structure. The germanium layer is disposed on the epitaxial layer. The interlayer dielectric layer covers the substrate and the fin shaped structure. The first plug is disposed in the interlayer dielectric layer to contact the germanium layer.
    Type: Grant
    Filed: March 28, 2017
    Date of Patent: October 17, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chia-Lin Lu, Chun-Hsien Lin, Chun-Lung Chen, Kun-Yuan Liao, Feng-Yi Chang
  • Patent number: 9780193
    Abstract: A semiconductor device with reinforced gate spacers and a method of fabricating the same. The semiconductor device includes low-k dielectric gate spacers adjacent to a gate structure. A high-k dielectric material is disposed over an upper surface of the low-k dielectric gate spacers to prevent unnecessary contact between the gate structure and a self-aligned contact structure. The high-k dielectric material may be disposed, if desired, over an upper surface of the gate structure to provide additional isolation of the gate structure from the self-aligned contact structure.
    Type: Grant
    Filed: October 27, 2015
    Date of Patent: October 3, 2017
    Assignee: UNITED MICROELECTRONICS CORPORATION
    Inventors: Chia-Lin Lu, Yu-Cheng Tung, Chun-Lung Chen, Kun-Yuan Liao, Feng-Yi Chang
  • Patent number: 9773890
    Abstract: A semiconductor device and a method of forming the same, the semiconductor device includes a fin shaped structure, agate structure, an epitaxial layer, an interlayer dielectric layer, a first plug and a protection layer. The fin shaped structure is disposed on a substrate, and the gate structure is across the fin shaped structure. The epitaxial layer is disposed in the fin shaped structure, adjacent to the gate structure. The interlayer dielectric layer covers the substrate and the fin shaped structure. The first plug is formed in the interlayer dielectric layer, wherein the first plug is electrically connected to the epitaxial layer. The protection layer is disposed between the first plug and the gate structure.
    Type: Grant
    Filed: October 21, 2015
    Date of Patent: September 26, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chia-Lin Lu, Chun-Lung Chen, Kun-Yuan Liao, Feng-Yi Chang, Wei-Hao Huang
  • Publication number: 20170263744
    Abstract: A method for fabricating semiconductor device includes the steps of: providing a substrate having at least a gate structure thereon and an interlayer dielectric (ILD) layer surrounding the gate structure, wherein the gate structure comprises a hard mask thereon; forming a dielectric layer on the gate structure and the ILD layer; removing part of the dielectric layer to expose the hard mask and the ILD layer; and performing a surface treatment to form a doped region in the hard mask and the ILD layer.
    Type: Application
    Filed: May 22, 2017
    Publication date: September 14, 2017
    Inventors: Chia-Lin Lu, Chun-Lung Chen, Kun-Yuan Liao, Feng-Yi Chang, Chih-Sen Huang, Ching-Wen Hung, Wei-Hao Huang
  • Patent number: 9748349
    Abstract: A semiconductor device is disclosed. The semiconductor device includes: a substrate; a gate structure on the substrate; an interlayer dielectric (ILD) around the gate structure; a first contact plug in the ILD layer; a second dielectric layer on the ILD layer; a second contact plug in the second dielectric layer and electrically connected to the first contact plug; and a spacer between the second contact plug and the second dielectric layer.
    Type: Grant
    Filed: May 28, 2015
    Date of Patent: August 29, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chia-Lin Lu, Chun-Lung Chen, Kun-Yuan Liao, Feng-Yi Chang, Chieh-Te Chen, Wei-Hao Huang
  • Patent number: 9728455
    Abstract: A method for fabricating semiconductor device includes the steps of: providing a substrate having a gate structure thereon and an interlayer dielectric (ILD) layer surrounding the gate structure; forming a sacrificial layer on the gate structure; forming a first contact plug in the sacrificial layer and the ILD layer; removing the sacrificial layer; and forming a first dielectric layer on the gate structure and the first contact plug.
    Type: Grant
    Filed: January 11, 2017
    Date of Patent: August 8, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chia-Lin Lu, Chun-Lung Chen, Kun-Yuan Liao, Feng-Yi Chang, Chieh-Te Chen
  • Patent number: 9711411
    Abstract: A method for fabricating semiconductor device is disclosed. The method includes the steps of: providing a substrate; forming a first gate structure and a second gate structure on the substrate; forming a contact etch stop layer (CESL) on the first gate structure, the second gate structure, and the substrate; removing part of the CESL between the first gate structure and the second gate structure; and forming an interlayer dielectric (ILD) layer on the CESL.
    Type: Grant
    Filed: December 8, 2015
    Date of Patent: July 18, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chia-Lin Lu, Shih-Fang Tzou, Chun-Lung Chen, Kun-Yuan Liao, Feng-Yi Chang, Wei-Hao Huang
  • Publication number: 20170200811
    Abstract: A semiconductor device and a method of manufacturing the same, the semiconductor device includes a fin shaped structure, a gate structure, an epitaxial layer, a germanium layer, an interlayer dielectric layer and a first plug. The fin shaped structure is disposed on a substrate. The gate structure is formed across the fin shaped structure. The epitaxial layer is disposed in the fin shaped structure adjacent to the gate structure. The germanium layer is disposed on the epitaxial layer. The interlayer dielectric layer covers the substrate and the fin shaped structure. The first plug is disposed in the interlayer dielectric layer to contact the germanium layer.
    Type: Application
    Filed: March 28, 2017
    Publication date: July 13, 2017
    Inventors: Chia-Lin Lu, Chun-Hsien Lin, Chun-Lung Chen, Kun-Yuan Liao, Feng-Yi Chang
  • Patent number: 9698255
    Abstract: A method for fabricating semiconductor device is disclosed. The method includes the steps of: providing a substrate having at least a gate structure thereon and an interlayer dielectric (ILD) layer surrounding the gate structure, wherein the gate structure comprises a hard mask thereon; forming a dielectric layer on the gate structure and the ILD layer; removing part of the dielectric layer to expose the hard mask and the ILD layer; and performing a surface treatment to form a doped region in the hard mask and the ILD layer.
    Type: Grant
    Filed: April 8, 2015
    Date of Patent: July 4, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chia-Lin Lu, Chun-Lung Chen, Kun-Yuan Liao, Feng-Yi Chang, Chih-Sen Huang, Ching-Wen Hung, Wei-Hao Huang
  • Publication number: 20170180850
    Abstract: A waterproof electronic device that is waterproof and has pressure-equilibrium functions is provided. The waterproof electronic device includes a housing, a microphone, an elastic element, and a waterproof element. The housing has a chamber and an acoustic hole communicating with the chamber. The microphone is disposed in the chamber. The elastic element is disposed on the microphone. The elastic element includes a through hole facing the microphone, and a ventilation groove communicating with the through hole. The waterproof element is connected to the elastic element and the housing, and is configured to block liquid. The waterproof element includes pores communicating with the acoustic hole and the through hole.
    Type: Application
    Filed: December 17, 2015
    Publication date: June 22, 2017
    Inventors: Chia-Ju HSU, Yu-Liang CHEN, Ko-Chun WANG, Chun-Nan HUANG, Zih-Yun WANG, Chun-Wen WANG, Chiung-Chang TSAI, Ji-Dein WU, Chun-Lung CHEN, Chen-Hsiang LIN
  • Patent number: 9685531
    Abstract: A method for manufacturing a semiconductor device having metal gates includes following steps. A substrate including a first transistor and a second transistor formed thereon is provided. The first transistor includes a first gate trench and the second transistor includes a second gate trench. A patterned first work function metal layer is formed in the first gate trench and followed by forming a second sacrificial masking layer respectively in the first gate trench and the second gate trench. An etching process is then performed to form a U-shaped first work function metal layer in the first gate trench. Subsequently, a two-step etching process including a strip step and a wet etching step is performed to remove the second sacrificial masking layer and portions of the U-shaped first work function metal layer to form a taper top on the U-shaped first work function metal layer in the first gate trench.
    Type: Grant
    Filed: September 12, 2016
    Date of Patent: June 20, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chia-Lin Lu, Chun-Lung Chen, Kun-Yuan Liao, Feng-Yi Chang