Patents by Inventor Hai-Dang Trinh

Hai-Dang Trinh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210280780
    Abstract: Some embodiments relate to a memory device. The memory device includes a bottom electrode overlying a substrate. A data storage layer overlies the bottom electrode. A top electrode overlies the data storage layer. A conductive bridge is selectively formable within the data storage layer to couple the bottom electrode to the top electrode. A diffusion barrier layer is disposed between the data storage layer and the top electrode.
    Type: Application
    Filed: March 3, 2020
    Publication date: September 9, 2021
    Inventors: Albert Zhong, Cheng-Yuan Tsai, Hai-Dang Trinh, Shing-Chyang Pan
  • Publication number: 20210273161
    Abstract: A semiconductor device structure is provided. The structure includes a semiconductor substrate and a data storage element over the semiconductor substrate. The structure also includes an ion diffusion barrier element over the data storage element and a protective element extending along a sidewall of the ion diffusion barrier element. A bottom surface of the protective element is between a top surface of the data storage element and a bottom surface of the data storage element. The structure further includes a first electrode electrically connected to the data storage element and a second electrode electrically connected to the data storage element.
    Type: Application
    Filed: May 19, 2021
    Publication date: September 2, 2021
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hai-Dang TRINH, Hsing-Lien LIN, Cheng-Yuan TSAI
  • Publication number: 20210273003
    Abstract: Various embodiments of the present disclosure are directed towards an image sensor. The image sensor includes and image sensor element disposed within a substrate. The substrate comprises a first material. The image sensor element includes an active layer comprising a second material different from the first material. A buffer layer is disposed between the active layer and the substrate. The buffer layer extends along outer sidewalls and a bottom surface of the active layer. A capping structure overlies the active layer. Outer sidewalls of the active layer are spaced laterally between outer sidewalls of the capping structure such that the capping structure continuously extends over outer edges of the active layer.
    Type: Application
    Filed: May 29, 2020
    Publication date: September 2, 2021
    Inventors: Chun-Kai Lan, Hai-Dang Trinh, Hsun-Chung Kuang
  • Patent number: 11101307
    Abstract: An image sensor device is disclosed. The image sensor device includes: a substrate having a front surface and a back surface; a radiation-sensing region formed in the substrate; an opening extending from the back surface of the substrate into the substrate; a first metal oxide film including a first metal, the first metal oxide film being formed on an interior surface of the opening; and a second metal oxide film including a second metal, the second metal oxide film being formed over the first metal oxide film; wherein the electronegativity of the first metal is greater than the electronegativity of the second metal. An associated fabricating method is also disclosed.
    Type: Grant
    Filed: November 28, 2018
    Date of Patent: August 24, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chih-Yu Lai, Min-Ying Tsai, Yeur-Luen Tu, Hai-Dang Trinh, Cheng-Yuan Tsai
  • Patent number: 11088239
    Abstract: Various embodiments of the present application are directed towards a trench capacitor with a conductive cap structure. In some embodiments, the trench capacitor comprises a lower capacitor electrode, a capacitor dielectric layer overlying the lower capacitor electrode, and an upper capacitor electrode overlying the capacitor dielectric layer. The capacitor dielectric layer and the upper capacitor electrode are depressed into the substrate and define a gap sunken into the substrate. The conductive cap structure overlies and seals the gap on the upper capacitor electrode. In some embodiments, the conductive cap structure comprises a metal layer formed by physical vapor deposition (PVD) and further comprises a metal nitride layer formed overlying the metal layer by chemical vapor deposition (CVD). In other embodiments, the conductive cap structure is or comprises other suitable materials and/or is formed by other deposition processes.
    Type: Grant
    Filed: April 15, 2019
    Date of Patent: August 10, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yao-Wen Chang, Hai-Dang Trinh
  • Publication number: 20210242399
    Abstract: The present disclosure, in some embodiments, relates to a memory device. The memory device includes a bottom electrode disposed over a lower interconnect within a lower inter-level dielectric (ILD) layer over a substrate. A data storage structure is over the bottom electrode. A first top electrode layer is disposed over the data storage structure, and a second top electrode layer is on the first top electrode layer. The second top electrode layer is less susceptible to oxidation than the first top electrode layer. A top electrode via is over and electrically coupled to the second top electrode layer.
    Type: Application
    Filed: July 6, 2020
    Publication date: August 5, 2021
    Inventors: Bi-Shen Lee, Hai-Dang Trinh, Hsun-Chung Kuang, Tzu-Chung Tsai, Yao-Wen Chang
  • Patent number: 11038101
    Abstract: A semiconductor structure includes a first conductive layer and a second conductive layer, and a memory device between the first conductive layer and the second conductive layer. The memory device includes a top electrode, a bottom electrode adjacent to the first conductive layer, and a phase change material between the top electrode and the bottom electrode. The bottom electrode includes a first portion and a second portion between the first portion and the first conductive layer.
    Type: Grant
    Filed: October 11, 2018
    Date of Patent: June 15, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Hsing-Lien Lin, Hai-Dang Trinh, Fa-Shen Jiang
  • Patent number: 11024800
    Abstract: Various embodiments of the present disclosure are directed towards a memory cell. The memory cell includes a bottom electrode overlying a substrate. A data storage structure overlies the bottom electrode. A top electrode overlies the data storage structure. Sidewalls of the top electrode and sidewall of the bottom electrode are aligned. Further, a getter layer abuts the bottom electrode.
    Type: Grant
    Filed: January 23, 2020
    Date of Patent: June 1, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hai-Dang Trinh, Chin-Wei Liang, Hsing-Lien Lin, Fa-Shen Jiang
  • Publication number: 20210159407
    Abstract: In some embodiments, the present disclosure relates to method of forming an integrated chip. The method includes forming a bottom electrode structure over one or more interconnect layers disposed within one or more stacked inter-level dielectric (ILD) layers over a substrate. The bottom electrode structure has an upper surface having a noble metal. A diffusion barrier film is formed over the bottom electrode structure. A data storage film is formed onto the diffusion barrier film, and a top electrode structure is over the data storage film. The top electrode structure, the data storage film, the diffusion barrier film, and the bottom electrode structure are patterned to define a memory device.
    Type: Application
    Filed: January 6, 2021
    Publication date: May 27, 2021
    Inventors: Hai-Dang Trinh, Chii-Ming Wu, Hsing-Lien Lin, Fa-Shen Jiang
  • Patent number: 11018297
    Abstract: A semiconductor device structure is provided. The structure includes a semiconductor substrate and a lower electrode over the semiconductor substrate. The structure also includes a resistance variable layer over the lower electrode and an ion diffusion barrier layer over the resistance variable layer. The structure further includes a capping layer over the ion diffusion barrier layer, and the capping layer is made of a metal material. In addition, the structure includes an upper electrode over the capping layer. The structure includes a protective element extending along a sidewall of the ion diffusion barrier layer and in direct contact with an interface between the resistance variable layer and the ion diffusion barrier layer.
    Type: Grant
    Filed: August 24, 2020
    Date of Patent: May 25, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hai-Dang Trinh, Hsing-Lien Lin, Cheng-Yuan Tsai
  • Publication number: 20210111343
    Abstract: The present disclosure relates to a method of forming a resistive random access memory (RRAM) device. In some embodiments, the method may be performed by forming a first electrode structure over a substrate. A doped data storage element is formed over the first electrode structure. The doped data storage element is formed by forming a first data storage layer over the first electrode structure and forming a second data storage layer over the first data storage layer. The first data storage layer is formed to have a first doping concentration of a dopant and the second data storage layer is formed to have a second doping concentration of the dopant that is less than the first doping concentration. A second electrode structure is formed over the doped data storage element.
    Type: Application
    Filed: October 15, 2019
    Publication date: April 15, 2021
    Inventors: Fa-Shen Jiang, Cheng-Yuan Tsai, Hai-Dang Trinh, Hsing-Lien Lin, Bi-Shen Lee
  • Publication number: 20210074805
    Abstract: Various embodiments of the present disclosure are directed towards a metal-insulator-metal (MIM) capacitor including a diffusion barrier layer. A bottom electrode overlies a substrate. A capacitor dielectric layer overlies the bottom electrode. A top electrode overlies the capacitor dielectric layer. The top electrode includes a first top electrode layer, a second top electrode layer, and a diffusion barrier layer disposed between the first and second top electrode layers.
    Type: Application
    Filed: September 11, 2019
    Publication date: March 11, 2021
    Inventors: Hsing-Lien Lin, Chii-Ming Wu, Hai-Dang Trinh, Fa-Shen Jiang
  • Publication number: 20210066591
    Abstract: Various embodiments of the present disclosure are directed towards a memory cell including a co-doped data storage structure. A bottom electrode overlies a substrate and a top electrode overlies the bottom electrode. The data storage structure is disposed between the top and bottom electrodes. The data storage structure comprises a dielectric material doped with a first dopant and a second dopant.
    Type: Application
    Filed: March 3, 2020
    Publication date: March 4, 2021
    Inventors: Hai-Dang Trinh, Chii-Ming Wu, Hsing-Lien Lin, Tzu-Chung Tsai, Fa-Shen Jiang, Bi-Shen Lee
  • Publication number: 20210066587
    Abstract: Various embodiments of the present disclosure are directed towards a memory cell including a data storage structure. A top electrode overlies a bottom electrode. The data storage structure is disposed between the top electrode and the bottom electrode. The data storage structure includes a first data storage layer, a second data storage layer, and a third data storage layer. The second data storage layer is disposed between the first and third data storage layers. The second data storage layer has a lower bandgap than the third data storage layer. The first data storage layer has a lower bandgap than the second data storage layer.
    Type: Application
    Filed: February 12, 2020
    Publication date: March 4, 2021
    Inventors: Hai-Dang Trinh, Chii-Ming Wu, Cheng-Yuan Tsai, Tzu-Chung Tsai, Fa-Shen Jiang
  • Publication number: 20210043835
    Abstract: In some embodiments, a semiconductor device is provided. The semiconductor device includes a first amorphous switching structure disposed over a first electrode. A buffer structure is disposed over the first amorphous switching structure. A second amorphous switching structure is disposed over the buffer structure. A second electrode is disposed over the second amorphous switching structure, where the first and second amorphous switching structures are configured to switch between low resistance states and high resistance states depending on whether a voltage from the first electrode to the second electrode exceeds a threshold voltage.
    Type: Application
    Filed: October 27, 2020
    Publication date: February 11, 2021
    Inventor: Hai-Dang Trinh
  • Patent number: 10910560
    Abstract: In some embodiments, the present disclosure relates to an integrated chip. The integrated chip includes a bottom electrode disposed over one or more interconnect layers and a diffusion barrier layer is arranged over the bottom electrode. A data storage layer is separated from the bottom electrode by the diffusion barrier layer. A top electrode is over the data storage layer.
    Type: Grant
    Filed: December 26, 2018
    Date of Patent: February 2, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hai-Dang Trinh, Chii-Ming Wu, Hsing-Lien Lin, Fa-Shen Jiang
  • Publication number: 20210005487
    Abstract: In some embodiments, the present disclosure relates to a process tool which includes a housing that defines a vacuum chamber. A wafer chuck is in the housing, and a carrier wafer is on the wafer chuck. A structure that is used for deposition processes is arranged at a top of the housing. A camera is integrated on the wafer chuck such that the camera faces a top of the housing. The camera is configured to wirelessly capture images of the structure used for deposition processes within the housing. Outside of the housing is a wireless receiver. The wireless receiver is configured to receive the images from the camera while the vacuum chamber is sealed.
    Type: Application
    Filed: June 22, 2020
    Publication date: January 7, 2021
    Inventors: Tzu-Chung Tsai, Chii-Ming Wu, Hai-Dang Trinh
  • Publication number: 20200411756
    Abstract: The present disclosure relates to a memory device. The memory device includes a first electrode over a substrate and a second electrode over the substrate. A data storage structure is disposed between the first electrode and the second electrode. The data storage structure includes one or more metals having non-zero concentrations that change as a distance from the substrate increases.
    Type: Application
    Filed: September 16, 2020
    Publication date: December 31, 2020
    Inventors: Hai-Dang Trinh, Cheng-Yuan Tsai, Hsing-Lien Lin, Wen-Ting Chu
  • Publication number: 20200411372
    Abstract: A method for forming a semiconductor structure includes following operations. A first substrate including a first side, a second side opposite to the first side, and a metallic pad disposed over the first side is received. A dielectric structure including a first trench directly above the metallic pad is formed. A second trench is formed in the dielectric structure and a portion of the first substrate. A sacrificial layer is formed to fill the first trench and the second trench. A third trench is formed directly above the metallic pad. A barrier ring and a bonding structure are formed in the third trench. A bonding layer is disposed to bond the first substrate to a second substrate. A portion of the second side of the first substrate is removed to expose the sacrificial layer. The sacrificial layer is removed by an etchant.
    Type: Application
    Filed: September 10, 2020
    Publication date: December 31, 2020
    Inventors: GUNG-PEI CHANG, YAO-WEN CHANG, HAI-DANG TRINH
  • Patent number: 10868247
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a semiconductor substrate and a lower electrode over the semiconductor substrate. The semiconductor device structure also includes a first dielectric layer over the lower electrode, a second dielectric layer over the first dielectric layer, and a third dielectric layer over the second dielectric layer. Oxygen ions are bonded more tightly in the second dielectric layer than those in the first dielectric layer, and oxygen ions are bonded more tightly in the second dielectric layer than those in the third dielectric layer.
    Type: Grant
    Filed: May 14, 2020
    Date of Patent: December 15, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hai-Dang Trinh, Hsing-Lien Lin, Chii-Ming Wu, Cheng-Yuan Tsai