Patents by Inventor Huang Lin

Huang Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210296503
    Abstract: A semiconductor structure includes gate spacers disposed over a semiconductor layer, a hafnium-containing dielectric layer, where a first portion of the hafnium-containing dielectric layer having a first thickness is disposed over the semiconductor layer and a second portion of the hafnium-containing dielectric layer having a second thickness is disposed along sidewalls of the gate spacers, and where the first thickness is greater than the second thickness, and a metal gate electrode disposed over the hafnium-containing dielectric layer and between the gate spacers.
    Type: Application
    Filed: June 4, 2021
    Publication date: September 23, 2021
    Inventors: Cheng-Ming Lin, Sai-Hooi Yeong, Chi On Chui, Ziwei Fang, Huang-Lin Chao
  • Publication number: 20210280432
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a substrate having a base portion and a fin portion over the base portion. The semiconductor device structure includes an isolation layer over the base portion and surrounding the fin portion. The semiconductor device structure includes a metal gate stack over the isolation layer and wrapping around an upper part of the fin portion. The metal gate stack includes a gate dielectric layer and a metal gate electrode layer over the gate dielectric layer, and the gate dielectric layer includes fluorine. A first part of the isolation layer is not covered by the metal gate stack, the first part includes fluorine, and a first concentration of fluorine in the first part increases toward a first top surface of the first part.
    Type: Application
    Filed: May 24, 2021
    Publication date: September 9, 2021
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: I-Ming CHANG, Chih-Cheng LIN, Chi-Ying WU, Wei-Ming YOU, Ziwei FANG, Huang-Lin CHAO
  • Publication number: 20210280468
    Abstract: A semiconductor structure includes a substrate including a first region and a second region, a first channel layer disposed in the first region and a second channel layer disposed in the second region, a first dielectric layer disposed on the first channel layer and a second dielectric layer disposed on the second channel layer, and a first gate electrode disposed on the first dielectric layer and a second gate electrode disposed on the second dielectric layer. The first channel layer in the first region includes Ge compound of a first Ge concentration, the second channel layer in the second region includes Ge compound of a second Ge concentration. The first Ge concentration in the first channel layer is greater than the second Ge concentration in the second channel layer.
    Type: Application
    Filed: May 25, 2021
    Publication date: September 9, 2021
    Inventors: I-MING CHANG, CHUNG-LIANG CHENG, HSIANG-PI CHANG, HUNG-CHANG SUN, YAO-SHENG HUANG, YU-WEI LU, FANG-WEI LEE, ZIWEI FANG, HUANG-LIN CHAO
  • Publication number: 20210265220
    Abstract: A method of fabricating a semiconductor device with superlattice structures on a substrate with an embedded isolation structure is disclosed. The method includes forming an etch stop layer on a substrate, forming a superlattice structure on the etch stop layer, depositing an isolation layer on the superlattice structure, depositing a semiconductor layer on the isolation layer, forming a bi-layer isolation structure on the semiconductor layer, removing the substrate and the etch stop layer, etching the superlattice structure, the isolation layer, the semiconductor layer, and the bi-layer isolation structure to form a fin structure, and forming a gate-all-around structure on the fin structure.
    Type: Application
    Filed: August 28, 2020
    Publication date: August 26, 2021
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Pei-Wei LEE, Pang-Yen TSAI, Tsungyu HUNG, Huang-Lin CHAO
  • Publication number: 20210265222
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a substrate having adjacent first and second fins protruding from the substrate. A first gate structure and a second gate structure are across the first and second fins, respectively. An insulating structure is formed between the first gate structure and the second gate structure and includes a first insulating layer separating the first fin from the second fin, a capping structure formed in the first insulating layer, and a second insulating layer covered by the first insulating layer and the capping structure.
    Type: Application
    Filed: April 30, 2021
    Publication date: August 26, 2021
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chu-An LEE, Chen-Hao WU, Peng-Chung JANGJIAN, Chun-Wen HSIAO, Teng-Chun TSAI, Huang-Lin CHAO
  • Publication number: 20210266470
    Abstract: An always-on system with multi-layer power management includes an always-on portion that is powered in shutdown state and all power states while rest portions of the system are not powered in the shutdown state; a memory unit that is powered in sleep state to retain data in the memory unit; an input interface that is powered only in event detection state, in which at least one captured image is received from an image sensor, the event detection state beginning when a trigger signal is issued; an event monitor that detects motion in the captured image; a digital signal processor (DSP) that is powered only in computer vision state to perform image identification on the captured image if motion is detected; and an output interface is powered only in the computer vision state, a result of the DSP being outputted via the output interface.
    Type: Application
    Filed: February 26, 2020
    Publication date: August 26, 2021
    Inventor: Chun Huang Lin
  • Publication number: 20210249308
    Abstract: An integrated circuit device is provided that includes a first fin structure and a second fin structure extending from a substrate. The first fin structure is a first composition, and includes rounded corners. The second fin structure is a second composition, different than the first composition. A first interface layer is formed directly on the first fin structure including the rounded corners and a second interface layer directly on the second fin structure. The first interface layer is an oxide of the first composition and the second interface layer is an oxide of the second composition. A gate dielectric layer is formed over the first interface layer and the second interface layer.
    Type: Application
    Filed: April 5, 2021
    Publication date: August 12, 2021
    Inventors: Chung-Liang CHENG, I-Ming CHANG, Hsiang-Pi CHANG, Yu-Wei LU, Ziwei FANG, Huang-Lin CHAO
  • Publication number: 20210249517
    Abstract: The present disclosure describes a semiconductor device that includes a substrate and a first transistor on the substrate. The first transistor includes a first gate structure and the first gate structure includes a gate dielectric layer and a first work function layer on the gate dielectric layer. The first gate structure also includes a capping layer on the first work function layer. The semiconductor device also includes a second transistor on the substrate, in which the second transistor includes a second gate structure. The second gate structure includes the gate dielectric layer and a second work function layer on the gate dielectric layer. The second gate structure also includes the first work function layer on the second work function layer and the silicon capping layer on the first work function layer.
    Type: Application
    Filed: February 10, 2020
    Publication date: August 12, 2021
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chung-Liang Cheng, Peng-Soon Lim, Ziwei Fang, Huang-Lin Chao
  • Patent number: 11067883
    Abstract: A projection device includes a first lens component, a second lens component, a first reflecting sheet embedded in the first lens component, a second reflecting sheet embedded in the second lens component, a light source opposite to the first reflecting sheet, a diffractive optical element opposite to the second reflecting sheet, and a rotating subassembly. The first lens component and the second lens component are not integral. The second reflecting sheet is opposite to the first reflecting sheet. The rotating subassembly can drive the second lens component to rotate relative to the first lens component. The projection device can realize multi-directional projection of images.
    Type: Grant
    Filed: April 29, 2020
    Date of Patent: July 20, 2021
    Assignee: TRIPLE WIN TECHNOLOGY(SHENZHEN) CO.LTD.
    Inventors: Yu-Chieh Peng, Ching-Huang Lin
  • Patent number: 11069807
    Abstract: The present disclosure relates to a semiconductor device includes a substrate and first and second spacers on the substrate. The semiconductor device includes a gate stack between the first and second spacers. The gate stack includes a gate dielectric layer having a first portion formed on the substrate and a second portion formed on the first and second spacers. The first portion includes a crystalline material and the second portion comprises an amorphous material. The gate stack further includes a gate electrode on the first and second portions of the gate dielectric layer.
    Type: Grant
    Filed: July 18, 2019
    Date of Patent: July 20, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Cheng-Ming Lin, Sai-Hooi Yeong, Ziwei Fang, Bo-Feng Young, Chi On Chui, Chih-Yu Chang, Huang-Lin Chao
  • Patent number: 11049937
    Abstract: The structure of a semiconductor device with different gate structures configured to provide ultra-low threshold voltages and a method of fabricating the semiconductor device are disclosed. The method includes forming first and second nanostructured channel regions in first and second nanostructured layers, respectively, and forming first and second gate-all-around (GAA) structures surrounding the first and second nanostructured channel regions, respectively. The forming the first and second GAA structures includes selectively forming an Al-based n-type work function metal layer and a Si-based capping layer on the first nanostructured channel regions, depositing a bi-layer of Al-free p-type work function metal layers on the first and second nanostructured channel regions, depositing a fluorine blocking layer on the bi-layer of Al-free p-type work function layers, and depositing a gate metal fill layer on the fluorine blocking layer.
    Type: Grant
    Filed: October 18, 2019
    Date of Patent: June 29, 2021
    Inventors: Chung-Liang Cheng, Chun-I Wu, Huang-Lin Chao
  • Patent number: 11038029
    Abstract: A method for forming a semiconductor device structure is provided. The method includes providing a substrate and an insulating layer over the substrate. The insulating layer has a trench partially exposing the substrate. The method includes forming a gate dielectric layer in the trench. The method includes forming a first metal-containing layer over the gate dielectric layer. The method includes forming a silicon-containing layer over the first metal-containing layer. The method includes forming a second metal-containing layer over the silicon-containing layer. The method includes forming a gate electrode layer in the trench and over the second metal-containing layer.
    Type: Grant
    Filed: February 15, 2019
    Date of Patent: June 15, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hsueh-Wen Tsau, Chun-I Wu, Ziwei Fang, Huang-Lin Chao, I-Ming Chang, Chung-Liang Cheng, Chih-Cheng Lin
  • Publication number: 20210171800
    Abstract: A chemical mechanical polishing (CMP) slurry composition includes an oxidant including oxygen, and an abrasive particle having a core structure encapsulated by a shell structure. The core structure includes a first compound and the shell structure includes a second compound different from the first compound, where a diameter of the core structure is greater than a thickness of the shell structure, and where the first compound is configured to react with the oxidant to form a reactive oxygen species.
    Type: Application
    Filed: February 15, 2021
    Publication date: June 10, 2021
    Inventors: An-Hsuan Lee, Shen-Nan Lee, Chen-Hao Wu, Chun-Hung Liao, Teng-Chun Tsai, Huang-Lin Chao
  • Patent number: 11031490
    Abstract: A method of forming a semiconductor device includes forming a sacrificial layer on sidewalls of gate spacers disposed over a semiconductor layer, forming a first hafnium-containing gate dielectric layer over the semiconductor layer in a first trench disposed between the gate spacers, removing the sacrificial layer to form a second trench between the gate spacers and the first hafnium-containing gate dielectric layer, forming a second hafnium-containing gate dielectric layer over the first hafnium-containing gate dielectric layer and on the sidewalls of the gate spacers, annealing the first and the second hafnium-containing gate dielectric layers while simultaneously applying an electric field, and subsequently forming a gate electrode over the annealed first and second hafnium-containing gate dielectric layers.
    Type: Grant
    Filed: June 27, 2019
    Date of Patent: June 8, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
    Inventors: Cheng-Ming Lin, Sai-Hooi Yeong, Chi On Chui, Ziwei Fang, Huang-Lin Chao
  • Patent number: 11031291
    Abstract: A semiconductor structure includes a substrate including a first region and a second region, a first channel layer disposed in the first region and a second channel layer disposed in the second region, a first dielectric layer disposed on the first channel layer and a second dielectric layer disposed on the second channel layer, and a first gate electrode disposed on the first dielectric layer and a second gate electrode disposed on the second dielectric layer. The first channel layer in the first region includes Ge compound of a first Ge concentration, the second channel layer in the second region includes Ge compound of a second Ge concentration. The first Ge concentration in the first channel layer is greater than the second Ge concentration in the second channel layer.
    Type: Grant
    Filed: April 2, 2019
    Date of Patent: June 8, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: I-Ming Chang, Chung-Liang Cheng, Hsiang-Pi Chang, Hung-Chang Sun, Yao-Sheng Huang, Yu-Wei Lu, Fang-Wei Lee, Ziwei Fang, Huang-Lin Chao
  • Publication number: 20210153950
    Abstract: A MRI-guided stereotactic surgery method including the following steps: assigning coordinates of a surgery target point of a surgery cannula and an insertion direction of the surgery cannula; performing coordinate transformation to transform the coordinates of the surgery target point into an insertion position of the surgery target point; substituting the insertion position and the insertion direction into an inverse kinematics model to obtain five parameters respectively corresponding to five degrees of freedom of a MRI-compatible stereotactic surgery device; controlling the MRI-compatible stereotactic surgery device according to the parameters to start a stereotactic surgery procedure, thereby inserting the surgery cannula; obtaining an actual cannula position according to a magnetic resonance (MR) image; comparing the actual cannula position with the surgery target point to obtain an actual position vector; and withdrawing the surgery cannula to finish the stereotactic surgery procedure when the actual po
    Type: Application
    Filed: November 22, 2019
    Publication date: May 27, 2021
    Inventors: Ming-Shaung JU, Chou-Ching LIN, Bing-Lin HO, Huang-Lin CHEN, Yu-Nung PENG
  • Patent number: 11018256
    Abstract: The present disclosure relates to a semiconductor device including a substrate and first and second spacers on the substrate. The semiconductor device also includes a gate stack between the first and second spacers. The gate stack includes a gate dielectric layer having a first portion formed on the substrate and a second portion formed on the first and second spacers; an internal gate formed on the first and second portions of the gate dielectric layer; a ferroelectric dielectric layer formed on the internal gate and in contact with the gate dielectric layer; and a gate electrode on the ferroelectric dielectric layer.
    Type: Grant
    Filed: August 23, 2019
    Date of Patent: May 25, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Cheng-Ming Lin, Sai-Hooi Yeong, Ziwei Fang, Chi On Chui, Huang-Lin Chao
  • Patent number: 11018022
    Abstract: A method for forming a semiconductor device structure is provided. The method includes depositing a gate dielectric layer over a substrate. The substrate has a base portion and a first fin portion over the base portion, and the gate dielectric layer is over the first fin portion. The method includes forming a gate electrode layer over the gate dielectric layer. The gate electrode layer includes fluorine. The method includes annealing the gate electrode layer and the gate dielectric layer so that fluorine from the gate electrode layer diffuses into the gate dielectric layer.
    Type: Grant
    Filed: July 13, 2018
    Date of Patent: May 25, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: I-Ming Chang, Chih-Cheng Lin, Chi-Ying Wu, Wei-Ming You, Ziwei Fang, Huang-Lin Chao
  • Publication number: 20210149290
    Abstract: A single light projection device providing illumination in two opposing directions includes a lens module and a light source module. The lens module includes a light-incident surface, a first light-emitting surface, and a second light-emitting surface. The light source module includes a light source configured for emitting light toward the light-incident surface. The first light-emitting surface and the second light-emitting surface introduce the light from the light source module outside of the light projection device in two different and opposing directions.
    Type: Application
    Filed: June 15, 2020
    Publication date: May 20, 2021
    Inventors: WEI-WEI QI, CHING-HUANG LIN
  • Publication number: 20210141199
    Abstract: A small-scale light projection device emitting structured light for better spot optimization includes a light emitting assembly, an optical path changing unit, and a diffractive optical element. The optical path changing unit of the device is arranged on a light path of the light emitting assembly and applies several changes to the direction of transmission of light within a small space. The diffractive optical element is arranged on a final light path of the optical path changing unit and opposite to the light emitting assembly and applies patterns to the light beam. The optical path changing unit comprises several reflection portions, enabling changes to be made to the light transmission direction.
    Type: Application
    Filed: January 9, 2020
    Publication date: May 13, 2021
    Inventors: WEI-WEI QI, CHING-HUANG LIN