Patents by Inventor Julien Frougier

Julien Frougier has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230329122
    Abstract: Embodiments of present invention provide a method of improving yield of making MRAM arrays. More specifically, the method includes receiving an MRAM array; identifying a weak MRAM cell from the MRAM array wherein the weak MRAM cell includes an access transistor; and modifying the access transistor. In one embodiment, modifying the access transistor includes performing a hot carrier injection into a gate dielectric layer of the access transistor.
    Type: Application
    Filed: April 12, 2022
    Publication date: October 12, 2023
    Inventors: Dimitri Houssameddine, Kangguo Cheng, Julien Frougier, Ruilong Xie
  • Patent number: 11784125
    Abstract: A cross-couple contact structure is provided that is located on, and physically contacts, a topmost surface of a functional gate structure that is located laterally adjacent to a gate cut region. The cross-couple contact structure extends into the laterally adjacent gate cut region and physically contacts a sidewall of the functional gate structure, an upper portion of a first sidewall of a dielectric plug that is present in the gate cut region, and an upper surface of a dielectric liner that is located on a lower portion of the first sidewall of the dielectric plug.
    Type: Grant
    Filed: July 14, 2021
    Date of Patent: October 10, 2023
    Assignee: International Business Machines Corporation
    Inventors: Ruilong Xie, Kangguo Cheng, Chanro Park, Julien Frougier
  • Publication number: 20230317727
    Abstract: A set of stacked transistors, system, and method to connect the gates of stacked field-effect transistors through sidewall straps. The set of stacked transistors may include a first transistor including a first gate. The set of stacked transistors may also include a second transistor including a second gate, where the second transistor is above the first transistor. The set of stacked transistors may also include a dielectric preventing direct contact between the first gate and the second gate. The set of stacked transistors may also include a first sidewall strap proximately connected to the first gate and the second gate, where the first sidewall strap connects the first transistor and the second transistor.
    Type: Application
    Filed: March 29, 2022
    Publication date: October 5, 2023
    Inventors: Chen Zhang, Julien Frougier, Ruilong Xie, Heng Wu
  • Patent number: 11777275
    Abstract: A device and a method to produce an augmented-laser (ATLAS) comprising a bi-stable resistive system (BRS) integrated in series with a semiconductor laser. The laser exhibits reduction/inhibition of the Spontaneous Emission (SE) below lasing threshold by leveraging the abrupt resistance switch of the BRS. The laser system comprises a semiconductor laser and a BRS operating as a reversible switch. The BRS operates in a high resistive state in which a semiconductor laser is below a lasing threshold and emitting in a reduced spontaneous emission regime, and a low resistive state in which a semiconductor laser is above or equal to a lasing threshold and emitting in a stimulated emission regime. The BRS operating as a reversible switch is electrically connected in series across two independent chips or on a single wafer. The BRS is formed using insulator-to-metal transition (IMT) materials or is formed using threshold-switching selectors (TSS).
    Type: Grant
    Filed: September 24, 2021
    Date of Patent: October 3, 2023
    Assignee: International Business Machines Corporation
    Inventors: Julien Frougier, Kangguo Cheng, Ruilong Xie, Chanro Park
  • Publication number: 20230307452
    Abstract: A semiconductor device includes a first semiconductor layer and a second semiconductor layer. The first semiconductor layer of the semiconductor device includes a standard-gate field-effect transistor. The second semiconductor layer of the semiconductor device includes an extended-gate field-effect transistor. The first semiconductor layer and the second semiconductor layer are formed on top of one another.
    Type: Application
    Filed: March 25, 2022
    Publication date: September 28, 2023
    Inventors: Ruilong Xie, Julien Frougier, Nicolas Jean Loubet, Junli Wang, Ruqiang Bao, Min Gyu Sung, Heng Wu, Oleg Gluschenkov
  • Publication number: 20230309320
    Abstract: Embodiments are disclosed for a system. The system includes a semiconductor structure. The semiconductor structure includes a wafer, multiple transistors, and a magnetoresistive random access memory (MRAM) cell disposed on the backside of the wafer. The transistors are disposed on a front end of line (FEOL) of the wafer. The MRAM cell is connected to a source-drain of the transistors by a contact disposed on the backside of the wafer. The transistors are in direct electrical contact with the MRAM cell by at least one contact.
    Type: Application
    Filed: March 23, 2022
    Publication date: September 28, 2023
    Inventors: Heng Wu, Ruilong Xie, Julien Frougier, Min Gyu Sung, Chen Zhang
  • Publication number: 20230307296
    Abstract: A stacked field-effect transistors (FETs) layout and a method for fabrication are provided. The stacked FETs include a buried interconnect within the stacked devices which provides power to buried components without requiring a wired connection from a top of the stacked FET to the buried components. The buried interconnect allows for efficient scaling of the stacked devices without extraneous wiring from a top of the device to each epitaxial region/device within the overall device.
    Type: Application
    Filed: March 23, 2022
    Publication date: September 28, 2023
    Inventors: Ruilong XIE, Chen ZHANG, Heng WU, Julien FROUGIER, Alexander REZNICEK
  • Publication number: 20230298646
    Abstract: An approach for providing a semiconductor structure for a stacked magnetoresistive random-access memory (MRAM) device that includes a first magnetic tunnel junction on a bottom electrode and at least one second magnetic tunnel junction above the first magnetic tunnel junction. The semiconductor structure includes the first magnetic tunnel junction is a voltage-controlled magnetic anisotropy (VCMA) magnetic tunnel junction of a voltage-controlled magnetic anisotropy (VCMA) MRAM device. The VCMA-MRAM device is composed of a first reference layer, a first tunnel barrier layer, and a first free layer. The semiconductor structure includes the second magnetic tunnel junction that is a spin-transfer torque (STT) magnetic tunnel junction of a STT-MRAM device. The STT-MRAM device is composed of a second reference layer, a second tunnel barrier layer, and a second free layer where the STT magnetic tunnel junction has a smaller cross-sectional area than the VCMA magnetic tunnel junction (MTJ).
    Type: Application
    Filed: March 21, 2022
    Publication date: September 21, 2023
    Inventors: Heng Wu, Julien Frougier, Ruilong Xie, Kangguo Cheng, Dimitri Houssameddine
  • Publication number: 20230299085
    Abstract: A semiconductor structure including a first stacked transistor structure including a top device stacked directly above a bottom device, and a second stacked transistor structure adjacent to the first stacked transistor, the second stacked transistor including a top device stacked directly above a bottom device, where the top device of the first stacked transistor structure and the top device of the second stacked transistor structure are made from different gate dielectric materials, and where the bottom device of the first stacked transistor structure and the bottom device of the second stacked transistor structure are made from different gate dielectric materials.
    Type: Application
    Filed: March 21, 2022
    Publication date: September 21, 2023
    Inventors: Ruilong Xie, Nicolas Jean Loubet, Julien Frougier, Dechao Guo
  • Publication number: 20230299080
    Abstract: A semiconductor device includes a bottom device, a top device, and a spacer. The bottom device includes a first set of silicon sheets and a first source-drain epitaxy in direct contact with the first set of silicon sheets. The top device includes a second set of silicon sheets, a set of separation layers, and a second source-drain epitaxy. Each silicon sheet of the second set of silicon sheets is separated by a separation layer of the set of separation layers. The second source-drain epitaxy is arranged in direct contact with the second set of silicon sheets. The spacer is arranged between the first source-drain epitaxy and the second source-drain epitaxy and is arranged between each silicon sheet of the second set of silicon sheets.
    Type: Application
    Filed: March 21, 2022
    Publication date: September 21, 2023
    Inventors: Sagarika Mukesh, Julien Frougier, Nicolas Jean Loubet, Ruilong Xie
  • Publication number: 20230297340
    Abstract: A system includes an emitter unit that generates random numbers encoded in light polarization, and a detector unit positioned with respect to the emitter. The detector receives the random numbers from the emitter and converts them into an electrical signal.
    Type: Application
    Filed: March 21, 2022
    Publication date: September 21, 2023
    Inventors: Julien Frougier, Ruilong Xie, Kangguo Cheng, CHANRO PARK
  • Publication number: 20230298683
    Abstract: Embodiments disclosed herein include a semiconductor device. The semiconductor device may include a magnetoresistive random access memory (MRAM) array. The MRAM array may include defective MRAM cells, redundancy MRAM cells, and operational MRAM cells. The semiconductor device may also include an address input electrically connected to the MRAM array and a selector circuit wired to the address input and an output of the MRAM array. The selector circuit may be configured to read the defective MRAM cells to identify the MRAM array.
    Type: Application
    Filed: March 16, 2022
    Publication date: September 21, 2023
    Inventors: Julien Frougier, Kangguo Cheng, Ruilong Xie
  • Publication number: 20230301213
    Abstract: A resistive random access memory (ReRAM) device is provided. The ReRAM device includes a first electrode including a first conductive layer sandwiching a second conductive layer, the second conductive layer being wider than the first conductive layer; a resistive switching element layer formed in contact with sidewalls of the first electrode, a first portion of the resistive switching element layer that is in contact with the sidewalls of the first conductive layer having a width that is greater than a second portion of the resistive switching element layer that is in contact with the sidewalls of the second conductive layer; and a second electrode that is in contact with the resistive switching element layer.
    Type: Application
    Filed: March 15, 2022
    Publication date: September 21, 2023
    Inventors: Kangguo Cheng, Julien Frougier, Ruilong Xie, Chanro Park
  • Publication number: 20230299205
    Abstract: A semiconductor structure including a bottom source drain region arranged above front-end-of-line circuitry, a gate region disposed above and insulated from the bottom source drain region, a top source drain region disposed above and insulated from the gate region, and a channel region adjacent to the gate region and extending vertically from a top surface of the bottom source drain region to a bottom surface of the top source drain region.
    Type: Application
    Filed: March 18, 2022
    Publication date: September 21, 2023
    Inventors: Heng Wu, Julien Frougier, Ruilong Xie, Chen Zhang
  • Patent number: 11764265
    Abstract: A field effect transistor (FET) structure upon a substrate formed by forming a stack of nanosheets upon a semiconductor substrate, the stack including alternating layers of a compound semiconductor material and an elemental semiconductor material, forming a dummy gate structure upon the stack of nanosheets, recessing the stack of nanosheets in alignment with the dummy gate structure, recessing the compound semiconductor layers beyond the edges of the dummy gate, yielding indentations between adjacent semiconductor nanosheets. Further by filling the indentations with a bi-layer dielectric material, epitaxially growing source/drain regions adjacent to the nanosheet stack and bi-layer dielectric material, removing remaining portions of the compound semiconductor nanosheet layers, recessing the bi-layer dielectric material to expose an inner material layer, and forming gate structure layers in contact with first and second dielectric materials of the bi-layer dielectric material.
    Type: Grant
    Filed: July 21, 2021
    Date of Patent: September 19, 2023
    Assignee: International Business Machines Corporation
    Inventors: Kangguo Cheng, Ruilong Xie, Julien Frougier, Juntao Li
  • Publication number: 20230290821
    Abstract: Embodiments of the invention include a method for fabricating a semiconductor device and the resulting structure. A nanosheet stack of alternating nanosheets of a sacrificial semiconductor material nanosheet and a semiconductor channel material nanosheet and a dielectric nanosheet as a top layer of the nanosheet stack is provided above a semiconductor substrate. A dummy gate with a gate cap and spacers on the sidewalls straddle over the nanosheet stack. End portions of the sacrificial semiconductor material nanosheets are recessed. A dielectric spacer material layer is formed. A source/drain region is formed on the sidewalls of each semiconductor channel material nanosheet. The dummy gate and gate cap are removed. Each sacrificial semiconductor material nanosheet is removed. A functional gate structure is formed that wraps around each suspended semiconductor channel material nanosheet. A self-aligned source/drain contact region is formed.
    Type: Application
    Filed: March 10, 2022
    Publication date: September 14, 2023
    Inventors: Kangguo Cheng, Ruilong Xie, Julien Frougier, CHANRO PARK
  • Publication number: 20230290823
    Abstract: A semiconductor device including a nanodevice located on a substrate, where the nanodevice includes a plurality of nanosheets. Each of the plurality of nanosheets are spaced apart from each other by a first distance. A gate located on the substrate, where the gate surrounds each of the plurality of nanosheets. A first dielectric layer located on the substrate, where the first dielectric layer is located adjacent to a sidewall of the gate. The gate has a first thickness when measured from the sidewall of one of the plurality of nanosheets to a sidewall of the first dielectric layer, where the first thickness is larger than the first distance. An inner spacer located on the substrate, where the inner spacer is wraps around an end of each of the plurality of nanosheets. The inner spacer has a second thickness, where the second thickness is substantially equal to the first distance.
    Type: Application
    Filed: March 14, 2022
    Publication date: September 14, 2023
    Inventors: Ruilong Xie, Balasubramanian S. Pranatharthiharan, Julien Frougier, Junli Wang
  • Patent number: 11757036
    Abstract: A uniform moon-shaped bottom spacer for a VTFET device is provided utilizing a replacement bottom spacer that is epitaxially grown above a bottom source/drain region. After filling a trench that is formed into a substrate with a dielectric fill material that also covers the replacement bottom spacer, the replacement bottom spacer is accessed, removed and then replaced with a moon-shaped bottom spacer.
    Type: Grant
    Filed: July 29, 2021
    Date of Patent: September 12, 2023
    Assignee: International Business Machines Corporation
    Inventors: Ruilong Xie, Chen Zhang, Julien Frougier, Alexander Reznicek, Shogo Mochizuki
  • Publication number: 20230282722
    Abstract: A semiconductor device including a first nanodevice is located on a substrate, where the first nanodevice includes at least one channel. A first source/drain connected to the first nanodevice. A second nanodevice located on the substrate, where the second nanodevice includes at least one channel and a second source/drain connected to the second nanodevice. A first contact located above the first source/drain. A second contact located above the second source/drain. A contact cap located on top of the first contact and the second contact, where the contact cap has a first leg that extends downwards between the first contact and the second contact. The first leg of the contact cap is in contact with a first sidewall of the first contact, and a first sidewall of the second contact.
    Type: Application
    Filed: March 4, 2022
    Publication date: September 7, 2023
    Inventors: Julien Frougier, Sagarika Mukesh, Albert M Chu, Ruilong Xie, Andrew M. Greene, Eric Miller, Junli Wang, Veeraraghavan S. Basker, Prateek Hundekar, Tushar Gupta, Su Chen Fan
  • Patent number: 11742350
    Abstract: Embodiments of the present invention are directed to fabrication methods and resulting structures that provide metal gate N/P boundary control in an integrated circuit (IC) using an active gate cut and recess processing scheme. In a non-limiting embodiment of the invention, a gate cut is formed in an N/P boundary between an n-type field effect transistor (FET) and a p-type FET. A first portion of a first work function metal is removed over a channel region of the n-type FET. The gate cut prevents etching a second portion of the first work function metal. The first portion of the first work function metal is replaced with a second work function metal. The gate cut is recessed, and a conductive region is formed on the recessed surface of the gate cut. The conductive region provides electrical continuity across the N/P boundary.
    Type: Grant
    Filed: September 23, 2021
    Date of Patent: August 29, 2023
    Assignee: International Business Machines Corporation
    Inventors: Andrew Gaul, Chanro Park, Julien Frougier, Ruilong Xie, Andrew M. Greene, Christopher J. Waskiewicz