Patents by Inventor Lawrence A. Clevenger

Lawrence A. Clevenger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11171064
    Abstract: Embodiments are directed to a method for repairing features of a host semiconductor wafer. The method includes forming a feature of the host semiconductor wafer, wherein the feature includes a first conductive material and a surface having a planar region and non-planar regions. The method further includes forming a metal conductive liner over the non-planar regions. The method further includes applying a second conductive material metal layer over said the conductive liner. The method further includes recessing the second conductive material to be substantially planar with the planar region.
    Type: Grant
    Filed: August 13, 2018
    Date of Patent: November 9, 2021
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Lawrence A. Clevenger, Baozhen Li, Kirk D. Peterson, John E. Sheets, II
  • Patent number: 11171084
    Abstract: Embodiments of the present invention are directed to fabrication methods and resulting interconnect structures having a conductive thin metal layer on a top via that promotes the selective growth of the next level interconnect lines (the line above). In a non-limiting embodiment of the invention, a first conductive line is formed in a dielectric layer. A via is formed on the first conductive line and a seed layer is formed on the via and the dielectric layer. A surface of the seed layer is exposed and a second conductive line is deposited onto the exposed surface of the seed layer. In a non-limiting embodiment of the invention, the second conductive line is selectively grown from the seed layer.
    Type: Grant
    Filed: April 6, 2020
    Date of Patent: November 9, 2021
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Brent Anderson, Lawrence A. Clevenger, Christopher J. Penny, Nicholas Anthony Lanzillo, Kisik Choi, Robert Robison
  • Patent number: 11171001
    Abstract: A semiconductor device includes at least one mandrel including a dielectric material, and at least one non-mandrel including a hard mask material having an etch property substantially similar to that of the dielectric material.
    Type: Grant
    Filed: October 31, 2019
    Date of Patent: November 9, 2021
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Hsueh-Chung Chen, Yongan Xu, Lawrence A. Clevenger, Yann Mignot, Cornelius Brown Peethala
  • Patent number: 11171063
    Abstract: Embodiments are directed to a method for repairing features of a host semiconductor wafer. The method includes forming a feature of the host semiconductor wafer, wherein the feature includes a first conductive material and a surface having a planar region and non-planar regions. The method further includes forming a metal conductive liner over the non-planar regions. The method further includes applying a second conductive material metal layer over said the conductive liner. The method further includes recessing the second conductive material to be substantially planar with the planar region.
    Type: Grant
    Filed: February 23, 2017
    Date of Patent: November 9, 2021
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Lawrence A. Clevenger, Baozhen Li, Kirk D. Peterson, John E. Sheets, II
  • Publication number: 20210343643
    Abstract: A technique relates to an integrated circuit (IC). The IC includes a conductive line formed on a conductive via, the conductive line being formed though a dielectric material. The IC includes an etch stop layer having one or more extended portions intervening between one or more edge portions of the conductive line and the conductive via, the one or more edge portions being at a periphery of the conductive line and the conductive via, the etch stop layer including a higher dielectric breakdown than the dielectric material. The one or more extended portions of the etch stop layer cause the conductive line to be formed with a bottom part having a reduced dimension than an upper part of the conductive line.
    Type: Application
    Filed: April 29, 2020
    Publication date: November 4, 2021
    Inventors: Brent Anderson, Lawrence A. Clevenger, Nicholas Anthony Lanzillo, Christopher J. Penny, Kisik Choi, Robert ROBISON
  • Publication number: 20210343589
    Abstract: A method for fabricating a semiconductor device includes forming one or more layers including at least one of a liner and a barrier along surfaces of a first interlevel dielectric (ILD) layer within a trench, after forming the one or more liners, performing a via etch to form a via opening exposing a first conductive line corresponding to a first metallization level, and forming, within the via opening and on the first conductive line, a barrier-less prefilled via including first conductive material.
    Type: Application
    Filed: July 16, 2021
    Publication date: November 4, 2021
    Inventors: Nicholas Anthony Lanzillo, Hosadurga Shobha, Junli Wang, Lawrence A. Clevenger, Christopher J. Penny, Robert Robison, Huai Huang
  • Publication number: 20210343585
    Abstract: A method of fabricating an integrated circuit includes forming a first trench such that a portion of the first trench is defined by a portion of a first-type of interconnect and depositing a sacrificial spacer liner in the first trench to cover the portion of the first-type of interconnect element. The method further includes forming a dielectric cap on the sacrificial spacer liner and above the first-type of interconnect element, removing the dielectric cap to expose at least a portion of the first-type of interconnect element, and forming a second-type of interconnect element on the exposed first-type of interconnect element.
    Type: Application
    Filed: April 29, 2020
    Publication date: November 4, 2021
    Inventors: Brent Anderson, Lawrence A. Clevenger, Nicholas Anthony Lanzillo, Christopher J. Penny, Kisik Choi, Robert Robison
  • Patent number: 11164377
    Abstract: Methods and systems of navigating within a virtual environment are described. In an example, a processor may generate a portal that includes a set of portal boundaries. The processor may display the portal within a first scene of the virtual environment being displayed on a device. The processor may display a second scene of the virtual environment within the portal boundaries. The processor may receive sensor data indicating a movement of a motion controller. The processor may reposition the portal and the second scene in the first scene based on the sensor data, wherein the first scene remains stationary on the device during the reposition of the portal and the second scene. The processor may translate a location of the portal within the first scene to move the portal towards a user of the device until the second scene replaces the first scene being displayed on the device.
    Type: Grant
    Filed: May 17, 2018
    Date of Patent: November 2, 2021
    Assignee: International Business Machines Corporation
    Inventors: Aldis Sipolins, Lawrence A. Clevenger, Benjamin D. Briggs, Michael Rizzolo, Christopher J. Penny, Patrick Watson
  • Patent number: 11164817
    Abstract: Techniques are provided for constructing multi-chip package structures. For example, a multi-chip package structure includes a package substrate, an interconnect bridge device, a first chip package, and a second chip package. The first chip package includes a first redistribution layer structure, and a first integrated circuit chip connected to the first redistribution layer structure. The first redistribution layer structure is connected to the interconnect bridge device and to the package substrate. The second chip package includes a second redistribution layer structure, and a second integrated circuit chip connected to the second redistribution layer structure. The second redistribution layer structure is connected to the interconnect bridge device and to the package substrate. The interconnect bridge device includes wiring to provide package-to-package connections between the first and second chip packages.
    Type: Grant
    Filed: November 1, 2019
    Date of Patent: November 2, 2021
    Assignee: International Business Machines Corporation
    Inventors: Joshua M. Rubin, Kamal K. Sikka, Steven Lorenz Wright, Lawrence A. Clevenger
  • Patent number: 11164778
    Abstract: A semiconductor device includes a first interconnect structure formed in an MX level of the semiconductor device, the MX level includes a third interlevel dielectric layer located above a second capping layer, a first trench within the third interlevel dielectric layer extending through the second capping layer to expose a top surface of a contact structure located below the second capping layer, the contact structure is located within a second interlevel dielectric layer, a second metal liner conformally deposited within the first trench, and a first seed layer conformally deposited above the second metal liner, the first seed layer includes a metal manganese film. A first thermal annealing process is conducted on the semiconductor device to form a first barrier liner underneath the second metal liner to prevent diffusion of conductive metals.
    Type: Grant
    Filed: November 25, 2019
    Date of Patent: November 2, 2021
    Assignee: International Business Machines Corporation
    Inventors: Junli Wang, Hsueh-Chung Chen, Su Chen Fan, Yann Mignot, Lawrence A. Clevenger
  • Patent number: 11164777
    Abstract: A method of forming a top via is provided. The method includes forming a sacrificial trench layer and conductive trench plug in an interlayer dielectric (ILD) layer on a conductive line. The method further includes forming a cover layer on the ILD layer, sacrificial trench layer, and conductive trench plug, and forming a sacrificial channel layer and a conductive channel plug on the conductive trench plug. The method further includes removing the cover layer and the ILD layer to expose the sacrificial trench layer and the sacrificial channel layer. The method further includes removing the sacrificial trench layer and the sacrificial channel layer, and forming a barrier layer on the conductive channel plug and conductive trench plug.
    Type: Grant
    Filed: January 15, 2020
    Date of Patent: November 2, 2021
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Lawrence A. Clevenger, Brent Anderson, Kisik Choi, Nicholas Anthony Lanzillo, Christopher J. Penny, Robert Robison
  • Patent number: 11163932
    Abstract: A method is presented for incorporating skip vias in a place and route flow of an integrated circuit design. The method includes employing a place and route tool to add the skip vias, each skip via extending through a metallization layer to electrically connect a metal layer above the metallization layer to a metal layer below the metallization layer and, when a violation of a design rule is detected due to the addition of one or more of the skip vias, substituting skip vias that violate the design rule with a standard via.
    Type: Grant
    Filed: November 13, 2019
    Date of Patent: November 2, 2021
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Dongbing Shao, Zheng Xu, Lawrence A. Clevenger
  • Publication number: 20210335706
    Abstract: A semiconductor device includes a porous dielectric layer including a recessed portion, a conductive layer formed in the recessed portion, and a cap layer formed on the porous dielectric layer and on the conductive layer in the recessed portion, an upper surface of the porous dielectric layer being exposed through a gap in the cap layer.
    Type: Application
    Filed: June 7, 2021
    Publication date: October 28, 2021
    Inventors: Benjamin D. Briggs, Lawrence A. Clevenger, Bartlet H. Deprospo, Huai Huang, Christopher J. Penny, Michael Rizzolo
  • Patent number: 11158584
    Abstract: A semiconductor device and method for forming the semiconductor device are described. The method includes recessing a device pad to below a top surface of an interconnect layer and depositing a cap in the recess over the device pad. A topography assist layer is formed over each of at least one alignment mark using a selective deposition process that deposits material on conductive material of the at least one alignment mark selective to the metal nitride of the device pad such that a top surface of the topography assist feature is higher than a top surface of the cap. Device layers are deposited conformally over the interconnect layer such that the topography assist layer causes a topographical feature in a top surface of the deposited device layers, the topographical feature being vertically aligned with the topography assist layer. The device pad is aligned according to the topographical feature.
    Type: Grant
    Filed: October 23, 2019
    Date of Patent: October 26, 2021
    Assignee: International Business Machines Corporation
    Inventors: Michael Rizzolo, Chih-Chao Yang, Lawrence A. Clevenger, Benjamin D. Briggs
  • Patent number: 11158537
    Abstract: Integrated chips and methods of forming the same include forming a conductive layer to a line height. A dielectric layer is formed over the conductive layer to a via height, with at least one opening that exposes a via region of the conductive layer. A conductive via is formed in the opening having the via height. The conductive layer is patterned to form a conductive line having the line height.
    Type: Grant
    Filed: January 23, 2020
    Date of Patent: October 26, 2021
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Brent Anderson, Lawrence A. Clevenger, Nicholas Anthony Lanzillo, Christopher J. Penny, Kisik Choi, Robert Robison
  • Patent number: 11154628
    Abstract: Techniques regarding self-sterilizing touch sensors are provided. For example, one or more embodiments described herein can comprise an apparatus, which can comprise a heating element. Also, the apparatus can comprise a protective layer adjacent to the heating element. The heating element can generate heat based on a pressure applied to the protective layer and can sterilize the protective layer.
    Type: Grant
    Filed: August 21, 2018
    Date of Patent: October 26, 2021
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kangguo Cheng, Shawn Peter Fetterolf, Donald Francis Canaperi, Lawrence A. Clevenger
  • Publication number: 20210327751
    Abstract: A method of forming an interconnect structure includes forming at least one second-level interconnect in a sacrificial dielectric layer that is formed on an upper surface of a sacrificial etch stop layer, and removing the sacrificial dielectric layer and the sacrificial etch stop layer while maintaining the at least one second-level interconnect so as to expose an underlying dielectric layer. The method further includes depositing a replacement dielectric layer on an upper surface of the underlying dielectric layer to embed the at least one second-level interconnect in the replacement dielectric layer. Accordingly, an interconnect structure can be formed that includes one or more first-level interconnect in a dielectric layer and one or more second-level interconnects in a replacement dielectric layer stacked on the dielectric layer. The replacement dielectric layer directly contacts the dielectric layer.
    Type: Application
    Filed: April 17, 2020
    Publication date: October 21, 2021
    Inventors: Christopher J. Penny, Brent Anderson, Lawrence A. Clevenger, Robert Robison, Kisik Choi, Nicholas Anthony Lanzillo
  • Publication number: 20210327502
    Abstract: A multiterminal non-volatile memory cross-bar array system includes a set of conductive row rails, a set of conductive column rails configured to form a plurality of crosspoints at intersections between the conductive rails and the conductive column rails and a resistive processing unit at each of the crosspoints each representing a neuron in a neural network. At least one given conductive row rail includes first and second row lines is in contact with a given resistive processing unit. At least one given conductive column rail including first and second column lines is in contact with the given resistive processing unit.
    Type: Application
    Filed: April 17, 2020
    Publication date: October 21, 2021
    Inventors: Timothy Mathew Philip, Kevin W. Brew, Lawrence A. Clevenger
  • Patent number: 11152257
    Abstract: A method for fabricating a semiconductor device includes forming one or more layers including at least one of a liner and a barrier along surfaces of a first interlevel dielectric (ILD) layer within a trench, after forming the one or more liners, performing a via etch to form a via opening exposing a first conductive line corresponding to a first metallization level, and forming, within the via opening and on the first conductive line, a barrier-less prefilled via including first conductive material.
    Type: Grant
    Filed: January 16, 2020
    Date of Patent: October 19, 2021
    Assignee: International Business Machines Corporation
    Inventors: Nicholas Anthony Lanzillo, Hosadurga Shobha, Junli Wang, Lawrence A. Clevenger, Christopher J. Penny, Robert Robison, Huai Huang
  • Patent number: 11152299
    Abstract: A technique relates to an integrated circuit. A first dielectric material is formed on a layer, and a second dielectric material is formed on the first dielectric material, the second dielectric material having a different characteristic than the first dielectric material. Conductive material is formed in the first dielectric material, the second dielectric material, and the layer, the conductive material forming interconnects in the layer separated by a stack of the first dielectric material and the second dielectric material. The conductive material forms a self-aligned conductive via on one of the interconnects according to a topography of the stack, the stack of the first dielectric material and the second dielectric material electrically insulating the one of the interconnects from another one of the interconnects.
    Type: Grant
    Filed: March 3, 2020
    Date of Patent: October 19, 2021
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Nicholas Anthony Lanzillo, Christopher J. Penny, Hosadurga Shobha, Lawrence A. Clevenger, Robert Robison