Patents by Inventor Ming-Cheng Chang

Ming-Cheng Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20090166702
    Abstract: A trench-type semiconductor device structure is disclosed. The structure includes a semiconductor substrate, a gate dielectric layer and a substrate channel structure. The semiconductor substrate includes a trench having an upper portion and a lower portion. The upper portion includes a conductive layer formed therein. The lower portion includes a trench capacitor formed therein. The gate dielectric layer is located between the semiconductor substrate and the conductive layer. The substrate channel structure with openings, adjacent to the trench, is electrically connected to the semiconductor substrate via the openings.
    Type: Application
    Filed: July 22, 2008
    Publication date: July 2, 2009
    Applicant: NANYA TECHNOLOGY CORP.
    Inventors: Shian-Jyh LIN, Ming-Cheng Chang, Neng Tai Shih, Hung-Chang Liao
  • Publication number: 20090108321
    Abstract: A flash memory is provided. The flash memory includes a substrate, a first insulation layer formed on the substrate, a control gate disposed on the first insulation layer, and two floating gates coplanar with the substrate respectively disposed on both sides of the control gate.
    Type: Application
    Filed: November 30, 2007
    Publication date: April 30, 2009
    Applicant: NANYA TECHNOLOGY CORPORATION
    Inventors: Ming-Cheng Chang, Wei-Ming Liao, Jer-Chyi Wang, Chien-Chang Huang
  • Publication number: 20090090955
    Abstract: A FLASH device including a substrate having a protrusive portion integrally formed thereon, two floating gates, a control gate and a dielectric layer is provided. The two floating gates are disposed on two sides of the protrusive portion and respectively covering a portion of the protrusive portion. The control gate is disposed on top of the protrusive portion and sandwiched between the two floating gates. The dielectric layer is disposed between each of the two floating gates and the control gate. Because the control gate of the FLASH device is disposed on the protrusive portion, an elevated channel can be formed. Moreover, because of the position of the two floating gates, an effective floating gate (FG) length can be increased without impacting the cell density.
    Type: Application
    Filed: March 28, 2008
    Publication date: April 9, 2009
    Applicant: NANYA TECHNOLOGY CORPORATION
    Inventors: Jer-Chyi Wang, Ming-Cheng Chang, Yi-Feng Chang, Wei-Ming Liao, Chien-Chang Huang
  • Publication number: 20090085089
    Abstract: A flash memory includes a substrate with a protrusion, a control gate, two floating gates, and a dielectric layer. The protrusion extends from a top face of the substrate. The control gate is formed on the protrusion of the substrate and extendedly covers opposite sidewalls of the protrusion. The floating gates are respectively formed on top of the protrusion and being on two opposite sides of the control gate. The dielectric layer is sandwiched the control gate and each of the two floating gates. Because of the arcuate control gate used in the flash memory, the controllability of the control gate is increased and the memory cell window is enhanced.
    Type: Application
    Filed: April 8, 2008
    Publication date: April 2, 2009
    Applicant: NANYA TECHNOLOGY CORPORATION
    Inventors: Ming-Cheng Chang, Wei-Ming Liao, Jer-Chyi Wang, Yi-Feng Chang
  • Publication number: 20090075467
    Abstract: A method for forming a semiconductor device includes providing a substrate and forming conductor patterns and openings on the substrate. Next the openings are filled with a mask layer and upper portions of the conductor patterns are etched to form cavities. Following, a portion of the mask layer is removed to form a trench between two neighboring conductor patterns, wherein the trench exposes the substrate and the sidewalls of the two neighboring conductor patterns. Next, an insulating layer on the cavities and the trench is conformably formed, a second conductive layer is formed on the insulating layer and the trench is filled with the second conductive layer.
    Type: Application
    Filed: January 17, 2008
    Publication date: March 19, 2009
    Applicant: NANYA TECHNOLOGY CORPORATION
    Inventors: Wei-Ming Liao, Ming-Cheng Chang
  • Publication number: 20090061612
    Abstract: A nonvolatile memory device and method for fabricating the same are provided. The method for fabricating the nonvolatile memory device comprises providing a substrate. A tunnel insulating layer and a first conductive layer are formed in the substrate. A trench is formed through the first conductive layer and the tunnel insulating layer, wherein a portion of the substrate is exposed from the trench. A first insulating layer is formed in the trench. A second insulating layer is formed on sidewalls of the first insulating layer. A third insulating layer is conformably formed in the trench, covering the first insulating layer on a bottom portion of the trench and the second insulating layer on the sidewalls of the trench, wherein thickness of the third insulating layer on the sidewalls is thinner than that on the bottom of the trench. A control gate is formed on the third insulating layer in the trench.
    Type: Application
    Filed: January 17, 2008
    Publication date: March 5, 2009
    Applicant: NANYA TECHNOLOGY CORPORATION
    Inventors: Ming-Cheng Chang, Chih-Hsiung Hung, Mao-Ying Wang, Wei-Hui Hsu
  • Publication number: 20090047764
    Abstract: A non-volatile memory having a gate structure and a source/drain region is provided. The gate structure is disposed on a substrate. The gate structure includes a pair of floating gates, tunneling dielectric layers, a control gate and an inter-gate dielectric layer. The floating gates are disposed on the substrate. Each tunneling dielectric layer is disposed between each floating gate and the substrate. The control gate is disposed on the substrate between the pair of the floating gates and covers a top surface and sidewalls of each floating gate. The inter-gate dielectric layer is disposed between the control gate and each of the floating gates, disposed between the control gate and each of the tunneling dielectric layers, and disposed between the control gate and the substrate. The source/drain region is disposed in the substrate at respective sides of the gate structure.
    Type: Application
    Filed: December 10, 2007
    Publication date: February 19, 2009
    Applicant: NANYA TECHNOLOGY CORPORATION
    Inventors: Wei-Ming Liao, Ming-Cheng Chang, Chien-Chang Huang
  • Publication number: 20090020801
    Abstract: A flash memory cell includes a control gate oxide layer on a substrate, a T-shaped control gate on the control gate oxide layer, a floating gate disposed on two recessed sidewalls of the T-shaped control gate, an insulating layer between the control gate and the floating gate, a dielectric layer between the floating gate and the substrate, a spacer on the sidewall of the floating gate, a P+ source/drain region next to the spacer, and an N+ pocket region encompassing the P+ source/drain region and covering the area directly under the floating gate.
    Type: Application
    Filed: December 6, 2007
    Publication date: January 22, 2009
    Inventors: Wei-Ming Liao, Ming-Cheng Chang, Jer-Chyi Wang
  • Publication number: 20080305593
    Abstract: A memory structure disclosed in the present invention features a control gate and floating gates being positioned in recessed trenches. A method of fabricating the memory structure includes the steps of first providing a substrate having a first recessed trench. Then, a first gate dielectric layer is formed on the first recessed trench. A first conductive layer is formed on the first gate dielectric layer. After that, the first conductive layer is etched to form a spacer which functions as a floating gate on a sidewall of the first recessed trench. A second recessed trench is formed in a bottom of the first recessed trench. An inter-gate dielectric layer is formed on a surface of the spacer, a sidewall and a bottom of the second recessed trench. A second conductive layer formed to fill up the first and the second recessed trench.
    Type: Application
    Filed: December 4, 2007
    Publication date: December 11, 2008
    Inventors: Ching-Nan Hsiao, Pei-Ing Lee, Ming-Cheng Chang, Chung-Lin Huang, Hsi-Hua Chang, Chih-Hsiang Wu
  • Publication number: 20080283904
    Abstract: A two-bit flash memory cell includes a substrate, a gate oxide layer disposed on the substrate, a gate stacked on the gate oxide layer. A charge storage spacer stack is disposed at either side of the gate. The charge storage spacer stack includes a bottom charge storage layer and an upper spacer layer. An insulating layer is disposed between the charge storage spacer stack and the gate. A liner is disposed underneath the bottom charge storage layer. A source/drain region is disposed at one side of the bottom charge storage layer within the substrate.
    Type: Application
    Filed: July 25, 2007
    Publication date: November 20, 2008
    Inventors: Ming-Cheng Chang, Wei-Ming Liao, Jer-Chyi Wang, Chien-Chang Huang
  • Publication number: 20080268590
    Abstract: A method for forming a semiconductor device with a single-sided buried strap is provided.
    Type: Application
    Filed: February 22, 2008
    Publication date: October 30, 2008
    Applicant: NANYA TECHNOLOGY CORP.
    Inventors: Neng-Tai SHIH, Ming-Cheng CHANG
  • Publication number: 20080265342
    Abstract: A two-bit flash memory cell includes a substrate, a gate oxide layer disposed on the substrate, a T-shaped gate on the gate oxide layer. A first charge storage layer is disposed at one side of and under the T-shaped gate. A second charge storage layer, which is separated from the first charge storage layer by a bottom portion of the T-shaped gate and the gate oxide layer, is disposed at the other side of and under the T-shaped gate. An insulating layer is disposed between the T-shaped gate and the gate oxide layer. A first source/drain region is disposed at one side of the T-shaped gate within the substrate. A second source/drain region is disposed at the other side of the T-shaped gate within the substrate.
    Type: Application
    Filed: July 20, 2007
    Publication date: October 30, 2008
    Inventors: Ming-Cheng Chang, Wei-Ming Liao, Jer-Chyi Wang, Chien-Chang Huang
  • Patent number: 7408215
    Abstract: A DRAM structure on a silicon substrate has an active area, gate conductors, deep trench capacitors, and vertical transistors. The deep trench capacitors are formed at intersections of the active area and the gate conductors, and each deep trench capacitor is coupled electrically to the corresponding vertical transistor to form a memory cell. The transistor includes a gate, a source in a lateral side of the gate, and a drain in another lateral side of the gate The depth of the drain is different from the depth of the source.
    Type: Grant
    Filed: April 3, 2007
    Date of Patent: August 5, 2008
    Assignee: Nanya Technology Corp.
    Inventors: Ming-Cheng Chang, Neng-Tai Shih
  • Publication number: 20080029800
    Abstract: A DRAM structure on a silicon substrate has an active area, gate conductors, deep trench capacitors, and vertical transistors. The deep trench capacitors are formed at intersections of the active area and the gate conductors, and each deep trench capacitor is coupled electrically to the corresponding vertical transistor to form a memory cell. The transistor includes a gate, a source in a lateral side of the gate, and a drain in another lateral side of the gate The depth of the drain is different from the depth of the source.
    Type: Application
    Filed: April 3, 2007
    Publication date: February 7, 2008
    Inventors: Ming-Cheng Chang, Neng-Tai Shih
  • Publication number: 20070152263
    Abstract: A dynamic random access memory (DRAM) cell layout for arranging deep trenches and active areas and a fabrication method thereof. An active area comprises two vertical transistors, a common bitline contact and two deep trenches. The first vertical transistor is formed on a region where the first deep trench is partially overlapped with the first gate conductive line. The second vertical transistor is formed on a region where the second deep trench is partially overlapped with the second gate conductive line.
    Type: Application
    Filed: March 16, 2007
    Publication date: July 5, 2007
    Applicant: NANYA TECHNOLOGY CORPORATION
    Inventors: Ming-Cheng Chang, Tieh-Chiang Wu, Yi-Nan Chen, Jeng-Ping Lin
  • Patent number: 7211483
    Abstract: A memory device with vertical transistors and deep trench capacitors. The device includes a substrate containing at least one deep trench and a capacitor deposited in the lower portion of the deep trench. A conducting structure, having a first conductive layer and a second conductive layer, is deposited on the trench capacitor. A ring shaped insulator is deposited on the sidewall and between the substrate and the first conductive layer. The first conductive layer is surrounded by the ring shaped insulator, and the second conductive layer is deposited on the first conductive layer and the ring shaped insulator. A diffusion barrier between the second conductive layer and the substrate of the deep trench is deposited on one side of the sidewall of the deep trench. A TTO is deposited on the conducting structure. A control gate is deposited on the TTO.
    Type: Grant
    Filed: February 28, 2005
    Date of Patent: May 1, 2007
    Assignee: Nanya Technology Corporation
    Inventors: Yi-Nan Chen, Hui-Min Mao, Chih-Yuan Hsiao, Ming-Cheng Chang
  • Publication number: 20060272770
    Abstract: Disclosed is a method for making artificial leather with superficial texture. In the method, a substrate is coated, in a non-overall manner, with a wet polyurethane resin. After curing, there is provided a polyurethane resin coated on releasing paper. Thus, a semi-product is made. Texture of the releasing paper is transferred to a surface of the semi-product. Then, the semi-product with the texture on the surface is coated with a layer of a chemical. A machine is used to heat and flatten the surface of the semi-product. Finally, the semi-product is physically finished by forces so that the surface of the final product is formed with texture like that of real leather.
    Type: Application
    Filed: August 16, 2006
    Publication date: December 7, 2006
    Applicant: SAN FANG CHEMICAL INDUSTRY CO., LTD.
    Inventors: Mao-Kan Lee, Ming-Cheng Chang, Zhing-Hung Chen, Yung-Hsiang Chou
  • Patent number: 7109094
    Abstract: Method for preventing sneakage in shallow trench isolation and STI structure thereof. A semiconductor substrate having a pad layer and a trench formed thereon is provided, followed by the formation of a doped first lining layer on the sidewall of the trench. A second lining layer is then formed on the doped first lining layer. Etching is then performed to remove parts of the first lining layer and the second lining layer so that the height of the first lining layer is lower than the second lining layer. A sacrificial layer is then formed on the pad layer and filling the trench. Diffusion is then carried out so that the doped ions in the first lining layer out-diffuse to the substrate and form diffuse regions outside the two bottom corners of the trench.
    Type: Grant
    Filed: October 25, 2004
    Date of Patent: September 19, 2006
    Assignee: Nanya Technology Corporation
    Inventors: Ming-Cheng Chang, Yi-Nan Chen, Jeng-Ping Lin
  • Patent number: 7078315
    Abstract: The present invention provides a method for eliminating inverse narrow width effects in the fabrication of DRAM devices. A semiconductor substrate is provided having thereon a shallow trench. The shallow trench surrounds an active area. A non-doped silicate glass (NSG) layer is deposited to fill the shallow trench, and is then etched back to a depth of the shallow trench, thereby exposing a portion of the semiconductor substrate at an upper portion of the shallow trench. A doped dielectric layer is deposited over the remaining NSG layer to cover the exposed semiconductor substrate. A thermal process is then carried out to diffuse dopants of the doped dielectric layer into the semiconductor substrate, thereby forming a doped region at the periphery of the active area in a channel width direction.
    Type: Grant
    Filed: July 2, 2003
    Date of Patent: July 18, 2006
    Assignee: Nanya Technology Corp.
    Inventors: Ming-Cheng Chang, Tieh-Chiang Wu, Yinan Chen
  • Patent number: D542957
    Type: Grant
    Filed: August 23, 2004
    Date of Patent: May 15, 2007
    Inventor: Ming-Cheng Chang