Abstract: On the top surface of a substrate, an atmosphere blocker plate, of which plan size is equal or larger than the substrate size, is disposed opposing to the top surface of the substrate. In the rim portion of the atmosphere blocker plate, a vertical through hole is formed so that a nozzle can be inserted into the hole. Nozzle move mechanism moves the nozzle to insert the nozzle to the through hole and position it to the opposing position that is opposed to the top rim portion of the substrate and to the retract position that is away from the atmosphere blocker plate. Processing liquid is supplied from the nozzle, which is positioned to the opposing position, to the top rim portion of the substrate.

Abstract: A phase shifter includes a first signal path in which a first unit is disposed to advance a phase of a signal; a second signal path in which a second unit with no shunt capacitor is disposed to change the phase of the signal such that the changed phase is delayed than the advanced phase by the first unit; and a switch section configured to switch between the first signal path and said second signal path. The first unit comprises a filter, and the second unit is a transmission line.

Abstract: An imaging apparatus includes an electron emission array having electron sources arranged in matrix form and having a plurality of horizontal scan lines, a photoelectric conversion film opposed to the electron emission array, and a control and drive circuit configured to select one or more of the horizontal scan lines in a given video signal output period and to cause the electron sources included in the selected one or more horizontal scan lines to emit electrons toward the photoelectric conversion film to produce a video signal, wherein the control and drive circuit is configured to control electron emission of the electron emission array in a blanking period in response to a signal level of the video signal produced in the given video signal output period.

Abstract: A solenoid actuator (1) comprises a case (9) made of a magnetic material and housing a coil (12) wound on a bobbin (11), and a pressure tube (17) made of a non-magnetic material and fitted into a hollow portion of the bobbin (11). A base (2) and a sleeve (3) made of a magnetic material are disposed in the pressure tube (17). A plunger (4) provided in an operation chamber (74, 75) formed in the base (2) and the sleeve (3) strokes according to energization of the coil (12) to axially drive a shaft (5) fixed to the plunger (4). The pressure tube (17) ensures that magnetic flux is transferred between the case (9) and the sleeve (3) while preventing pressure variation in the operation chamber (74, 75) from being transmitted to the bobbin (11), thereby achieving a high response and a pressure tightness in the solenoid actuator (1).

Abstract: A phase shifter selectively switches between a low-pass filter 13 and a high-pass filter 12 using single pole double throw switches 10a and 10b provided on the input and output sides, respectively, and operatively linked to each other. The single pole double throw switches 10a and 10b include FETs Q1c and Q1d that connect single pole side junctions and the low-pass filter, respectively, and inductance circuits (L1c and R2c, and L1d and R2d) connected in parallel with FETs Q1c and Q1d, respectively. The inductance circuits are respectively comprised of the inductor L1c and the resistor R2c connected in series and of the inductor L1 d and the resistor R2d connected in series.

Abstract: Provided is a phase shifter that shifts a phase of an input signal based on switching between a low-pass filter and a high-pass filter, the phase shifter including: a first field-effect transistor that is coupled between an input terminal and an output terminal; a resonance circuit that resonates when the first field-effect transistor is in an on-state; an additional line that is coupled between the resonance circuit and a node that is included in a signal line, which is formed between the input and output terminals when the first field-effect transistor is in the on-state; and an inductor that is included in a part of the signal line and forms a low-pass filter together with at least the additional line, when the first field-effect transistor is in the on-state.

Abstract: A plasma etching method for a plasma etching apparatus including: a processing chamber for performing plasma etching on an object to be processed; a first gas supply source; a second gas supply source; a first gas inlet for introducing a processing gas into the processing chamber; a second gas inlet for introducing a processing gas into the processing chamber; a flow rate regulator for regulating the flow rate of the processing gas; and a gas shunt for dividing the first processing gas into a plurality of portions, wherein the second processing gas is merged with at least one part between the gas shunt and the first gas inlet and between the gas shunt and the second gas inlet.

Abstract: A solenoid actuator (1) attached to a hydraulic equipment comprises a shaft (5) connected to the hydraulic equipment, a plunger (4) fixed to the shaft (5), a coil (12) which magnetically drives the plunger (4), and a first bearing (7) and a second bearing (8) supporting the shaft (5) on both sides of the plunger (4). A plunger front chamber (74) is formed between the first bearing (7) and the plunger (4), a plunger rear chamber (75) is formed between the plunger (4) and the second bearing (8), and a second bearing rear chamber (76) is formed on the opposite side of the second bearing (8) to the plunger rear chamber (75). To secure an oil flow between these chambers, a plunger exterior oil passage (63), a second bearing oil passage (64), and a shaft-penetrating oil passage (65) are provided, thereby realizing a preferable balance between oil pressures acting on the second bearing (8).

Abstract: A solenoid actuator (1) attached to hydraulic equipment comprises a shaft (5) connected to the hydraulic equipment, a plunger (4) fixed to the shaft (5), a coil (12) which magnetically drives the plunger (4), and a first bearing (7) and a second bearing (8) supporting the shaft (5) on either sides of the plunger (4). A plunger front chamber (74) is formed between the first bearing (7) and the plunger (4), and a plunger rear chamber (75) is formed between the plunger (4) and the second bearing (8). By providing a plunger exterior oil passage (63) on the outside of the plunger (4) to connect the plunger front chamber (74) to the plunger rear chamber (75), working oil flows through the plunger exterior oil passage (63) every time the plunger (4) strokes, thereby preventing a deposit of contaminant on the plunger (4) without increasing a stroke resistance of the plunger (4).

Abstract: A light shielding structure in an optical apparatus includes first and second relatively-movable members, each having an engaging portion engaged with each other and relatively movable to each other so as to change an amount of mutually overlapping area therebetween; and a light shielding member provided between the engaging portions. The light shielding member is elastically deformed into a light shielding shape in which the light shielding member inwardly bends toward an optical axis of the optical apparatus to protrude from the engaging portions due to the mutually overlapping area between the engaging portions decreasing, and the light shielding member is elastically deformed into a retracted shape in which the light shielding member is housed between opposing surfaces of the engaging portions due to the mutually overlapping area between the engaging portions increasing, in accordance with a relative movement between the engaging portions.

Abstract: A decorative part and a process for producing the decorative part. A first nitride layer containing at least one metal selected among hafnium, titanium, and zirconium is formed on the surface of a decorative part comprising a soft base made of a material selected among stainless steel, titanium and titanium alloys, brass, etc., and a second nitride layer containing at least one metal which is selected among hafnium, titanium, and zirconium and is different from that in the first nitride layer is formed on the first nitride layer to thereby form a primer layer. A multilayered hardened layer including a gold alloy layer is further formed as a finish layer on the primer layer.

Abstract: The coverage characteristics or loading effect of an oxide film can be improved without having to increase the supply amount or time of an oxidant. There is provided method of manufacturing a semiconductor device. The method comprises loading at least one substrate to a processing chamber; forming an oxide film on the substrate by alternately supplying a first reaction material and a second reaction material containing oxygen atoms to the processing chamber while heating the substrate; and unloading the substrate from the processing chamber, wherein the forming of the oxide film is performed by keeping the substrate at a temperature equal to or lower than a self-decomposition temperature of the first reaction material and irradiating ultraviolet light to the second reaction material.

Abstract: A plasma processing apparatus including a processing chamber for subjecting an object to plasma processing, a gas inlet, an evacuation device, a sample stage for the object, a power supply, and at least one induction coil. The at least one induction coil enables generation of the plasma in the processing chamber and is formed by connecting a plurality of identical coil elements in a parallel circuit-like arrangement so that current flows in each of the plurality of identical coil elements in a same direction when viewed from the sample stage.

Abstract: To improve a step coverage and a loading effect, without inviting a deterioration of throughput and an increase of cost, in a method for forming a thin film by alternately flowing a raw material and alcohol to a processing chamber.

Abstract: A personal ornament having an ornament base article made of a metal or the like; an underlayer, preferably nickel-free, formed on the base article; and a coloring layer constituted of an abrasion-resistant layer of 0.2-1.5 ?m thick formed by dry-plating on the surface of the underlayer and an outermost layer of 0.002-0.1 ?m thick formed by dry-plating on the surface of the abrasion-resistant layer. The coloring layer is a white hard coating film of a stainless-steel color which provides superior quality, high resistance to deterioration of appearance by scratching, and a high-quality image like a stainless steel film.

Abstract: An separation method comprising a temperature control process useful for microchip electrophoresis such as microchip DGGE is provided along with a device therefor. The present invention relates to a microchip electrophoresis method for separating double-stranded nucleic acids by means of differences in nucleotide sequence while maintaining a preset temperature, wherein the temperature during separation of double-stranded nucleic acids in an separation region comprising an separation microchannel is controlled to within ±2.5° C. of the preset temperature.

Abstract: A method and a device for obtaining electric energy efficiently from a hydrous organic substance by suppressing the activation overvoltage of an anode low and thereby obtaining a sufficiently low anode potential. The power generating device comprises an anaerobic region (4) including microorganisms which can grow under anaerobic conditions, solution or suspension containing an organic substance, an electron mediator and an anode (1), an aerobic region (5) including molecular oxygen and a cathode (3), and a diaphragm (2) defining the anaerobic region (4) and the aerobic region (5), wherein a closed circuit (6) is formed by connecting the anode (1) and the cathode (3) electrically with a power utilization apparatus, and oxidation reaction of microorganisms using the organic substance in the anaerobic region (4) as electron donor and a reduction reaction using oxygen in the aerobic region (5) as electron acceptor are utilized.

Abstract: A light shielding device of a lens includes a movable barrel; an outer member positioned around the movable barrel; and a light shield ring for preventing ambient light entering the lens through a clearance between the movable barrel and the outer member, the light shield ring having a center opening through which the movable barrel is movably fitted and a self-centering annular portion around the center opening. The self-centering annular portion is in contact with an outer surface of the movable barrel and is bent by, and along, the outer cylindrical surface of the movable barrel. The light shield ring is biased against an annular part of the outer member by a biasing member, so that the light shielding ring is movable in a radial direction when a radial force is applied to the light shielding ring via the movable barrel and the self-centering annular portion.

Abstract: The present invention provides personal ornaments having as an outermost layer a white ornamental coating film having platinum or a platinum alloy formed by dry-plating, including: an ornament base article made of a metal or ceramic, an underlayer formed on the surface on the base article, an abrasion resistant layer formed on the surface of the underlayer by dry-plating, and an ornamental coating layer having platinum or platinum alloy formed on the surface of the abrasion resistant layer by dry-plating. Also, the present invention provides personal ornaments having a coloring layer including an abrasion-resistant layer, a mixture layer and an outermost layer, the outermost layer being a white hard coating film having a noble metal or a noble metal alloy formed by dry-plating on the surface of the mixture layer.

Abstract: Disclosed is a producing method of a semiconductor device comprising a first step of supplying a first reactant to a substrate to cause a ligand-exchange reaction between a ligand of the first reactant and a ligand as a reactive site existing on a surface of the substrate, a second step of removing a surplus of the first reactant, a third step of supplying a second reactant to the substrate to cause a ligand-exchange reaction to change the ligand after the exchange in the first step into a reactive site, a fourth step of removing a surplus of the second reactant, and a fifth step of supplying a plasma-excited third reactant to the substrate to cause a ligand-exchange reaction to exchange a ligand which has not been exchange-reacted into the reactive site in the third step into the reactive site, wherein the first to fifth steps are repeated predetermined times.