Patents by Inventor Wen Su

Wen Su has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9159666
    Abstract: A structure for an integrated circuit includes a substrate, a cap layer deposited on the substrate, a dielectric layer deposited on the cap layer, and a trench embedded in the dielectric layer. The trench includes a TaN layer deposited on a side wall of the trench wherein the TaN layer has a greater concentration of nitrogen than tantalum, a Ta layer deposited on the TaN layer, and a Cu deposited on the Ta layer. The structure further includes a via integrated into the trench at bottom of the filled trench. In an embodiment, both the TaN layer and the Ta layer are formed with physical vapor deposition (PVD) wherein the TaN layer is formed with plasma sputtering a Ta target with an N2 flow at least 20 sccm.
    Type: Grant
    Filed: May 23, 2014
    Date of Patent: October 13, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ya-Lien Lee, Hung-Wen Su, Yu-Hung Lin, Kuei-Pin Lee, Yu-Min Chang
  • Patent number: 9123781
    Abstract: Semiconductor devices and methods for forming the same in which damages to a low-k dielectric layer therein can be reduced or even prevented are provided. A semiconductor device is provided, comprising a substrate. A dielectric layer with at least one conductive feature therein overlies the substrate. An insulating cap layer overlies the top surface of the low-k dielectric layer adjacent to the conductive feature, wherein the insulating cap layer comprises metal ions.
    Type: Grant
    Filed: May 26, 2010
    Date of Patent: September 1, 2015
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
    Inventors: Hung-Wen Su, Shih-Wei Chou, Ming-Hsing Tsai
  • Patent number: 9117904
    Abstract: A semiconductor structure includes a substrate, a gate electrode disposed on the substrate, wherein the gate electrode has a first top surface. Agate dielectric layer is disposed between the substrate and the gate electrode. A silicon carbon nitride spacer surrounds the gate electrode, wherein the silicon carbon nitride spacer has a second top surface not higher than the first top surface. A silicon oxide spacer surrounds the silicon carbon nitride spacer.
    Type: Grant
    Filed: January 28, 2015
    Date of Patent: August 25, 2015
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Shyan-Liang Chou, Tsung-Min Kuo, Po-Wen Su, Chun-Mao Chiou, Feng-Mou Chen
  • Patent number: 9117909
    Abstract: A method of forming a fin structure is provided. First, a substrate is provided, wherein a first region, a second region encompassing the first region, and a third region encompassing the second region are defined on the substrate. Then, a plurality of first trenches having a first depth are formed in the first region and the second region, wherein each two first trenches defines a first fin structure. The first fin structure in the second region is removed. Lastly, the first trenches are deepened to form a plurality of second trenches having a second depth, wherein each two second trenches define a second fin structure. The present invention further provides a structure of a non-planar transistor.
    Type: Grant
    Filed: August 28, 2014
    Date of Patent: August 25, 2015
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Lung-En Kuo, Po-Wen Su, Chen-Yi Weng, Hsuan-Hsu Chen
  • Publication number: 20150235963
    Abstract: The present disclosure provides a method of fabricating a semiconductor device. The method includes forming a patterned dielectric layer having a plurality of first openings. The method includes forming a conductive liner layer over the patterned dielectric layer, the conductive liner layer partially filling the first openings. The method includes forming a trench mask layer over portions of the conductive liner layer outside the first openings, thereby forming a plurality of second openings, a subset of which are formed over the first openings. The method includes depositing a conductive material in the first openings to form a plurality of vias and in the second openings to form a plurality of metal lines. The method includes removing the trench mask layer.
    Type: Application
    Filed: May 7, 2015
    Publication date: August 20, 2015
    Inventors: Chun-Chieh Lin, Hung-Wen Su, Ming-Hsing Tsai, Syun-Ming Jang
  • Publication number: 20150228605
    Abstract: An interconnect structure and a method of forming an interconnect structure are disclosed. The interconnect structure includes a conductive plug over a substrate; a conductive feature over the conductive plug, wherein the conductive feature has a first sidewall, a second sidewall facing the first sidewall, and a bottom surface; and a carbon-containing barrier layer having a first portion along the first sidewall of the conductive feature, a second portion along the second sidewall of the conductive feature, and a third portion along the bottom surface of the conductive feature.
    Type: Application
    Filed: February 7, 2014
    Publication date: August 13, 2015
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Rueijer Lin, Ya-Lien Lee, Chun-Chieh Lin, Hung-Wen Su
  • Patent number: 9081036
    Abstract: An adjustable measurement device includes a case, a positive contact portion, a negative contact portion, a test probe, a first wire, and a second wire. The positive contact portion is positioned on an end of the case and electrically connected to the first wire. The negative contact portion is movably received in the case and electrically connected to the second wire. A receiving hole is defined in the negative contact portion for the test probe. The test probe includes a main body electrically connected to the negative contact portion, a tip portion electrically connected to the positive contact portion, and an insulating portion positioned between the main body and the tip portion. A distance between the positive contact portion and the negative contact portion is adjustable by moving the negative contact portion. The negative contact portion and the positive contact portion are isolated from each other.
    Type: Grant
    Filed: July 24, 2013
    Date of Patent: July 14, 2015
    Assignee: HON HAI PRECISION INDUSTRY CO., LTD.
    Inventor: Yun-Wen Su
  • Publication number: 20150187579
    Abstract: A method to form a titanium nitride (TiN) hard mask in the Damascene process of forming interconnects during the fabrication of a semiconductor device, while the type and magnitude of stress carried by the TiN hard mask is controlled. The TiN hard mask is formed in a multi-layered structure where each sub-layer is formed successively by repeating a cycle of processes comprising TiN and chlorine PECVD deposition, and N2/H2 plasma gas treatment. During its formation, the stress to be carried by the TiN hard mask is controlled by controlling the number of TiN sub-layers and the plasma gas treatment duration such that the stress may counter-balance predetermined external stress anticipated on a conventionally made TiN hard mask, which causes trench sidewall distortion, trench opening shrinkage, and gap filling problem.
    Type: Application
    Filed: March 10, 2015
    Publication date: July 2, 2015
    Inventors: Rueijer LIN, Chun-Chieh Lin, Hung-Wen Su, Ming-Hsing Tsai
  • Patent number: 9051942
    Abstract: A fan with a fluid diversion mechanism includes a fan frame structure and a vane wheel, and the fan frame structure has a containing space, an air inlet and an air outlet, and the fan frame structure includes a coaming plate having a plurality of diversion components, and an opening formed at any one of the diversion components and arranged in a direction towards the air inlet, and the vane wheel is installed in the containing space of the fan frame structure, so that when the vane wheel is operated, air current produced by vanes of the fan guides the air current entered from the diversion component to an external side of a retaining platform which is a leeward side, and the air current has an effective coverage for blowing a desired heat source and improves the overall airflow and air pressure of the fan.
    Type: Grant
    Filed: October 25, 2012
    Date of Patent: June 9, 2015
    Assignee: ENERMAX TECHNOLOGY CORPORATION
    Inventor: Yen-Wen Su
  • Patent number: 9043711
    Abstract: A file managing software program for managing a list of elements in a specific sequence in a first file of a computer program, including the steps of copying the first file to form a second file having an identical list of elements as the first file. The user is then permitted to rearrange the sequence of the elements of the second file independently of the sequence of the first file. A display of both the first and the second file list elements is provided to the user. Further embodiments allow the user to categorize, prioritize, and order according to users specified rules of how the second file element list is organized and displayed to provide a more convenient and flexible presentation of the file contents.
    Type: Grant
    Filed: January 31, 2007
    Date of Patent: May 26, 2015
    Assignee: International Business Machines Corporation
    Inventors: Yen-Fu Chen, Ta-Wei Lin, Chih-Wen Su, Shan Su, Meng Li Wong
  • Publication number: 20150137197
    Abstract: A semiconductor structure includes a substrate, a gate electrode disposed on the substrate, wherein the gate electrode has a first top surface. Agate dielectric layer is disposed between the substrate and the gate electrode. A silicon carbon nitride spacer surrounds the gate electrode, wherein the silicon carbon nitride spacer has a second top surface not higher than the first top surface. A silicon oxide spacer surrounds the silicon carbon nitride spacer.
    Type: Application
    Filed: January 28, 2015
    Publication date: May 21, 2015
    Inventors: Shyan-Liang Chou, Tsung-Min Kuo, Po-Wen Su, Chun-Mao Chiou, Feng-Mou Chen
  • Patent number: 9029260
    Abstract: The present disclosure provides a method of fabricating a semiconductor device. The method includes forming a patterned dielectric layer having a plurality of first openings. The method includes forming a conductive liner layer over the patterned dielectric layer, the conductive liner layer partially filling the first openings. The method includes forming a trench mask layer over portions of the conductive liner layer outside the first openings, thereby forming a plurality of second openings, a subset of which are formed over the first openings. The method includes depositing a conductive material in the first openings to form a plurality of vias and in the second openings to form a plurality of metal lines. The method includes removing the trench mask layer.
    Type: Grant
    Filed: June 16, 2011
    Date of Patent: May 12, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun Chieh Lin, Hung-Wen Su, Minghsing Tsai, Syun-Ming Jang
  • Publication number: 20150108649
    Abstract: In a method of fabricating a semiconductor device, an opening is formed inside a dielectric layer above a semiconductor substrate. The opening has a wall. At least one diffusion barrier material is then formed over the wall of the opening by at least two alternating steps, which are selected from the group consisting of a process of physical vapor deposition (PVD) and a process of atomic layer deposition (ALD). A liner layer is formed over the at least one diffusion barrier material.
    Type: Application
    Filed: December 31, 2014
    Publication date: April 23, 2015
    Inventors: Kai-Shiang KUO, Ken-Yu CHANG, Ya-Lien LEE, Hung-Wen SU
  • Publication number: 20150091764
    Abstract: A wearable electronic device includes a body and a wearing element. The body includes a conductive frame. The conductive frame includes a feeding point and at least one grounding point to form a first current path and a second current path. Furthermore, the conductive frame forms a loop antenna via the first current path and the second current path, respectively, so as to operate in a first band and a second band. The wearing element is connected to the body.
    Type: Application
    Filed: October 1, 2014
    Publication date: April 2, 2015
    Applicant: ASUSTEK COMPUTER INC.
    Inventors: Yi-Ting Hsieh, Saou-Wen Su, Chih-Chung Lin
  • Patent number: 8975187
    Abstract: Disclosed is a method to form a titanium nitride (TiN) hard mask in the Damascene process of forming interconnects during the fabrication of a semiconductor device, while the type and magnitude of stress carried by the TiN hard mask is controlled. The TiN hard mask is formed in a multi-layered structure where each sub-layer is formed successively by repeating a cycle of processes comprising TiN and chlorine PECVD deposition, and N2/H2 plasma gas treatment. During its formation, the stress to be carried by the TiN hard mask is controlled by controlling the number of TiN sub-layers and the plasma gas treatment duration such that the stress may counter-balance predetermined external stress anticipated on a conventionally made TiN hard mask, which causes trench sidewall distortion, trench opening shrinkage, and gap filling problem.
    Type: Grant
    Filed: June 24, 2013
    Date of Patent: March 10, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Rueijer Lin, Chun-Chieh Lin, Hung-Wen Su, Minghsing Tsai
  • Patent number: 8975673
    Abstract: A method of trimming spacers includes etching a silicon oxide spacer when forming an outmost spacer, so that a silicon carbon nitride spacer contacting the gate electrode exposes an area. The exposure area of the silicon carbon nitride spacer can then be partly removed by phosphate acid. At the end of the semiconductor process, at least part of the top surface of the silicon carbon nitride spacer will be lower than the top surface of a gate electrode.
    Type: Grant
    Filed: April 16, 2012
    Date of Patent: March 10, 2015
    Assignee: United Microelectronics Corp.
    Inventors: Shyan-Liang Chou, Tsung-Min Kuo, Po-Wen Su, Chun-Mao Chiou, Feng-Mou Chen
  • Patent number: 8962473
    Abstract: In a method of fabricating a semiconductor device, an opening is formed inside a dielectric layer above a semiconductor substrate. The opening has a wall. At least one diffusion barrier material is then formed over the wall of the opening by at least two alternating steps, which are selected from the group consisting of a process of physical vapor deposition (PVD) and a process of atomic layer deposition (ALD). A liner layer is formed over the at least one diffusion barrier material.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: February 24, 2015
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Kai-Shiang Kuo, Ken-Yu Chang, Ya-Lien Lee, Hung-Wen Su
  • Patent number: 8951909
    Abstract: One or more integrated circuit structures and techniques for forming such integrated circuit structures are provided. The integrated circuit structures comprise a conductive structure that is formed within a trench in a dielectric layer on a substrate. The conductive structure is formed over a barrier layer formed within the trench, or the conductive structure is formed over a liner formed over the barrier layer. At least some of the dielectric layer, the barrier layer, the liner and the conductive structure are removed, for example, by chemical mechanical polishing, such that a step height exists between a top surface of the substrate and a top surface of the dielectric layer. Removing these layers in this manner removes areas where undesired interlayer peeling is likely to occur. A conductive cap is formed on the conductive structure.
    Type: Grant
    Filed: March 13, 2013
    Date of Patent: February 10, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Cheng-Hui Weng, Chun-Chieh Lin, Hung-Wen Su
  • Patent number: 8945876
    Abstract: Embodiments herein include methods and constructs that can be used to co-express two or more polypeptides of interest from a single polynucleotide encoding a precursor polypeptide. Within this precursor polypeptide can reside at least one autonomous processing unit, which can mediate release of flanking polypeptides of interest in cis. The processing unit can include an N-terminal autocatalytic cleavage domain and a C-terminal cleavage domain. Some embodiments include constructs and methods for co-expressing polypeptides without N- or C-terminal overhangs, in any cellular or extracellular location, and/or in stoichiometric ratios.
    Type: Grant
    Filed: November 21, 2012
    Date of Patent: February 3, 2015
    Assignee: University of Hawaii
    Inventors: Wei Wen Su, Bei Zhang
  • Publication number: 20150026274
    Abstract: Routing a message to a recipient based on a topic associated with the message may include: receiving a message lacking a recipient address; searching for at least one recipient address based on a topic associated with the message; and sending the message to the at least one recipient address.
    Type: Application
    Filed: April 10, 2013
    Publication date: January 22, 2015
    Inventors: Li-Ju Chen, Yi-Hsin Cheng, Jeff HC Kuo, Ming Tung Lau, Wai Man Lee, Chih-Wen Su, Ying-Chen Yu