Patents by Inventor Yin Chen

Yin Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11276578
    Abstract: A first semiconductor fin and a second semiconductor fin are disposed over a substrate. The second semiconductor fin and the first semiconductor fin are aligned substantially along a same line and spaced apart from each other. The first semiconductor fin has a first end portion, the second semiconductor fin has a second end portion, and an end sidewall of the first end portion and is spaced apart from an end sidewall of the second end portion. The gate structure extends substantially perpendicularly to the first semiconductor fin. When viewed from above, the gate structure overlaps with the first end portion of the first semiconductor fin. When viewed from above, the end sidewall of the first end portion of the first semiconductor fin facing the end sidewall of the second end portion of the second semiconductor fin has a re-entrant profile.
    Type: Grant
    Filed: September 11, 2020
    Date of Patent: March 15, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chang-Yin Chen, Che-Cheng Chang, Chih-Han Lin
  • Publication number: 20220059405
    Abstract: A method includes forming a metallic feature, forming an etch stop layer over the metallic feature, implanting the metallic feature with a dopant, forming a dielectric layer over the etch stop layer, performing a first etching process to etch the dielectric layer and the etch stop layer to form a first opening, performing a second etching process to etch the metallic feature and to form a second opening in the metallic feature, wherein the second opening is joined with the first opening, and filling the first opening and the second opening with a metallic material to form a contact plug.
    Type: Application
    Filed: August 24, 2020
    Publication date: February 24, 2022
    Inventors: Meng-Han Chou, Su-Hao Liu, Kuo-Ju Chen, Liang-Yin Chen, Huicheng Chang, Yee-Chia Yeo
  • Publication number: 20220059679
    Abstract: The present disclosure describes a semiconductor structure and a method for forming the same. The semiconductor structure can include a substrate, a first fin structure with a first height and a first width formed over the substrate, a second fin structure with a second height and a second width formed over the substrate, and an insulating stack formed over lower portions of the first and second fin structures. The second height can be substantially equal to the first height and the second width can be greater than the first width. A top surface of the insulating stack can be below top surfaces of the first and second fin structures.
    Type: Application
    Filed: August 18, 2020
    Publication date: February 24, 2022
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Su-Hao LIU, Huicheng CHANG, Chien-Tai CHAN, Liang-Yin CHEN, Yee-Chia YEO, Szu-Ying CHEN
  • Publication number: 20220059700
    Abstract: In accordance with some embodiments, a source/drain contact is formed by exposing a source/drain region through a first dielectric layer and a second dielectric layer. The second dielectric layer is recessed under the first dielectric layer, and a silicide region is formed on the source/drain region, wherein the silicide region has an expanded width.
    Type: Application
    Filed: April 6, 2021
    Publication date: February 24, 2022
    Inventors: Wei-Ting Chien, Su-Hao Liu, Liang-Yin Chen, Huicheng Chang, Yee-Chia Yeo
  • Patent number: 11257911
    Abstract: A method of forming a semiconductor device includes forming a source/drain region and a gate electrode adjacent the source/drain region, forming a hard mask over the gate electrode, forming a bottom mask over the source/drain region, wherein the gate electrode is exposed, and performing a nitridation process on the hard mask over the gate electrode. The bottom mask remains over the source/drain region during the nitridation process and is removed after the nitridation. The method further includes forming a silicide over the source/drain region after removing the bottom mask.
    Type: Grant
    Filed: April 1, 2020
    Date of Patent: February 22, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tsan-Chun Wang, Su-Hao Liu, Liang-Yin Chen, Huicheng Chang, Yee-Chia Yeo
  • Patent number: 11257952
    Abstract: Embodiments disclosed herein relate to using an implantation process and a melting anneal process performed on a nanosecond scale to achieve a high surface concentration (surface pile up) dopant profile and a retrograde dopant profile simultaneously. In an embodiment, a method includes forming a source/drain structure in an active area on a substrate, the source/drain structure including a first region comprising germanium, implanting a first dopant into the first region of the source/drain structure to form an amorphous region in at least the first region of the source/drain structure, implanting a second dopant into the amorphous region containing the first dopant, and heating the source/drain structure to liquidize and convert at least the amorphous region into a crystalline region, the crystalline region containing the first dopant and the second dopant.
    Type: Grant
    Filed: May 18, 2020
    Date of Patent: February 22, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Su-Hao Liu, Kuo-Ju Chen, Wen-Yen Chen, Ying-Lang Wang, Liang-Yin Chen, Li-Ting Wang, Huicheng Chang
  • Patent number: 11257931
    Abstract: In some embodiments, a field effect transistor structure includes a first semiconductor structure and a gate structure. The first semiconductor structure includes a channel region, and a source region and a drain region. The source region and the drain region are formed on opposite ends of the channel region, respectively. The gate structure includes a central region and footing regions. The central region is formed over the first semiconductor structure. The footing regions are formed on opposite sides of the central region and along where the central region is adjacent to the first semiconductor structure.
    Type: Grant
    Filed: January 10, 2020
    Date of Patent: February 22, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Che-Cheng Chang, Chang-Yin Chen, Jr-Jung Lin, Chih-Han Lin, Yung Jung Chang
  • Patent number: 11257906
    Abstract: Embodiments disclosed herein relate generally to forming a source/drain region with a high surface dopant concentration at an upper surface of the source/drain region, to which a conductive feature may be formed. In an embodiment, a structure includes an active area on a substrate, a dielectric layer over the active area, and a conductive feature through the dielectric layer to the active area. The active area includes a source/drain region. The source/drain region includes a surface dopant region at an upper surface of the source/drain region, and includes a remainder portion of the source/drain region having a source/drain dopant concentration. The surface dopant region includes a peak dopant concentration proximate the upper surface of the source/drain region. The peak dopant concentration is at least an order of magnitude greater than the source/drain dopant concentration. The conductive feature contacts the source/drain region at the upper surface of the source/drain region.
    Type: Grant
    Filed: June 1, 2020
    Date of Patent: February 22, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chia-Cheng Chen, Liang-Yin Chen
  • Publication number: 20220028997
    Abstract: A semiconductor device and methods of fabricating the same are disclosed. The semiconductor device includes a substrate, a fin structure with a fin top surface disposed on the substrate, a source/drain (S/D) region disposed on the fin structure, a gate structure disposed on the fin top surface, and a gate spacer with first and second spacer portions disposed between the gate structure and the S/D region. The first spacer portion extends above the fin top surface and is disposed along a sidewall of the gate structure. The second spacer portion extends below the fin top surface and is disposed along a sidewall of the S/D region.
    Type: Application
    Filed: April 29, 2021
    Publication date: January 27, 2022
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wei-Liang Lu, Chang-Yin Chen, Chih-Han Lin, Chia-Yang Liao
  • Publication number: 20220029035
    Abstract: A method for forming semiconductor devices includes providing a substrate with a conductive pad formed thereon; forming a transparent structure over the substrate, wherein the transparent structure includes a plurality of collimating pillars adjacent to the conductive pad; forming a light-shielding structure over the plurality of collimating pillars and the conductive pad; performing a cutting process to remove one or more materials directly above the conductive pad, while leaving remaining material to cover the conductive pad, wherein the material includes a portion of the light-shielding structure; and performing an etching process to remove the remaining material to expose the conductive pad.
    Type: Application
    Filed: October 8, 2021
    Publication date: January 27, 2022
    Applicant: Vanguard International Semiconductor Corporation
    Inventors: Hsin-Hui LEE, Han-Liang TSENG, Jiunn-Liang YU, Kwang-Ming LIN, Yin CHEN, Si-Twan CHEN, Hsueh-Jung LIN, Wen-Chih LU, Chih-Hsien CHEN
  • Publication number: 20220022795
    Abstract: Provided are a physiological signal sensing system and a physiological signal sensing method. The physiological signal sensing system includes a physiological signal sensing apparatus, a variation sensing apparatus, and a signal processing apparatus. The physiological signal sensing apparatus is disposed on a fabric to sense and provide physiological signals of an organism. The physiological signal sensing apparatus includes capacitive coupling devices. The variation sensing apparatus is disposed on the fabric and includes a distance sensing device to sense a distance between the physiological signal sensing apparatus and the organism, and provide a first capacitance variation signal according to the distance.
    Type: Application
    Filed: April 1, 2021
    Publication date: January 27, 2022
    Applicant: Industrial Technology Research Institute
    Inventors: Kuang-Ching Fan, Heng-Yin Chen, Yun-Yi Huang, Yi-Cheng Lu, Tzu-Hao Yu
  • Patent number: 11227918
    Abstract: A method includes forming a gate stack on a first portion of a semiconductor substrate, removing a second portion of the semiconductor substrate on a side of the gate stack to form a recess, growing a semiconductor region starting from the recess, implanting the semiconductor region with an impurity, and performing a melt anneal on the semiconductor region. At least a portion of the semiconductor region is molten during the melt anneal.
    Type: Grant
    Filed: May 24, 2019
    Date of Patent: January 18, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Su-Hao Liu, Wen-Yen Chen, Li-Heng Chen, Li-Ting Wang, Liang-Yin Chen, Huicheng Chang, Yee-Chia Yeo, Ying-Lang Wang
  • Publication number: 20210407808
    Abstract: The present disclosure provides a method to enlarge the process window for forming a source/drain contact. The method may include receiving a workpiece that includes a source/drain feature exposed in a source/drain opening defined between two gate structures, conformally depositing a dielectric layer over sidewalls of the source/drain opening and a top surface of the source/drain feature, anisotropically etching the dielectric layer to expose the source/drain feature, performing an implantation process to the dielectric layer, and after the performing of the implantation process, performing a pre-clean process to the workpiece. The implantation process includes a non-zero tilt angle.
    Type: Application
    Filed: April 15, 2021
    Publication date: December 30, 2021
    Inventors: Meng-Han Chou, Kuan-Yu Yeh, Wei-Yip Loh, Hung-Hsu Chen, Su-Hao Liu, Liang-Yin Chen, Huicheng Chang, Yee-Chia Yeo
  • Publication number: 20210408267
    Abstract: A method for preparing a semiconductor device includes forming a ring structure over a semiconductor substrate, and etching the semiconductor substrate by using the ring structure as a mask to form an annular semiconductor fin. The method also includes epitaxially growing a first bottom source/drain structure within the annular semiconductor fin and a second bottom source/drain structure surrounding the annular semiconductor fin. The method further includes forming a first silicide layer over the first bottom source/drain structure and a second silicide layer over the second bottom source/drain structure. In addition, the method includes forming a first gate structure over the first silicide layer and a second gate structure over the second silicide layer, and epitaxially growing a top source/drain structure over the annular semiconductor fin.
    Type: Application
    Filed: June 24, 2020
    Publication date: December 30, 2021
    Inventor: Te-Yin Chen
  • Publication number: 20210408005
    Abstract: The present application provides a method for preparing a memory device.
    Type: Application
    Filed: June 25, 2020
    Publication date: December 30, 2021
    Inventor: TE-YIN CHEN
  • Patent number: 11211289
    Abstract: The present disclosure provides methods for forming conductive features in a dielectric layer without using adhesion layers or barrier layers and devices formed thereby. In some embodiments, a structure comprising a dielectric layer over a substrate, and a conductive feature disposed through the dielectric layer. The dielectric layer has a lower surface near the substrate and a top surface distal from the substrate. The conductive feature is in direct contact with the dielectric layer, and the dielectric layer comprises an implant species. A concentration of the implant species in the dielectric layer has a peak concentration proximate the top surface of the dielectric layer, and the concentration of the implant species decreases from the peak concentration in a direction towards the lower surface of the dielectric layer.
    Type: Grant
    Filed: August 30, 2019
    Date of Patent: December 28, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Li-Chieh Wu, Tang-Kuei Chang, Kuo-Hsiu Wei, Kei-Wei Chen, Ying-Lang Wang, Su-Hao Liu, Kuo-Ju Chen, Liang-Yin Chen, Huicheng Chang, Ting-Kui Chang, Chia Hsuan Lee
  • Publication number: 20210393449
    Abstract: An absorbent article comprising a topsheet, a backsheet, and a layer of absorbent material interposed between the topsheet and the backsheet is provided. The layer of absorbent material comprises superabsorbent polymer. The absorbent article comprises a lower acquisition and distribution system with at least one nonwoven or woven layer. The lower acquisition and distribution system is interposed between the layer of absorbent material and the backsheet. The absorbent article comprises a wetness indicator composition.
    Type: Application
    Filed: June 1, 2021
    Publication date: December 23, 2021
    Inventors: Adrien Grenier, Abhishek Prakash Surushe, Yin Chen, Aniruddha Chatterjee, Susanne Osbahr, Behzad Mohebbi, Sascha KREISEL
  • Patent number: 11206735
    Abstract: A flexible circuit board includes a flexible light-permeable carrier, a circuit layer, a mark and a stiffener. The circuit layer and the mark are located on a top surface of the flexible light-permeable carrier. A predetermined area and a stiffener mounting area corresponding to each other are defined on the top surface and a bottom surface of the flexible light-permeable carrier, respectively. The mark is opaque to create a shadow mark having a longitudinal reference side and a lateral reference side on the bottom surface. The stiffener is adhered to the stiffener mounting area defined on the bottom surface by aligning with the longitudinal reference side and the lateral reference side of the shadow mark.
    Type: Grant
    Filed: January 28, 2021
    Date of Patent: December 21, 2021
    Assignee: CHIPBOND TECHNOLOGY CORPORATION
    Inventors: Yin-Chen Lin, Hui-Yu Huang, Chih-Ming Peng, Chun-Te Lee
  • Patent number: 11191718
    Abstract: The present invention provides an ophthalmic gel and a preparation method thereof. The ophthalmic gel comprises: an antibiotic; a nanocarrier, wherein the nanocarrier is used to load the antibiotic; and a biodegradable matrix, wherein the biodegradable matrix is compatible with the nanocarrier to carry the nanocarrier. When the ophthalmic gel of the present invention is applied to the surface of the cornea and conjunctiva of the eyes, the biodegradable matrix is automatically degraded and the nanocarrier carried by the biodegradable matrix will slowly release the antibiotic, loaded in the nanocarrier, at an appropriate rate to overcome the high-frequency use of general ophthalmic drugs and easily caused blurred vision; the present invention further comprises an ophthalmic gel preparation method.
    Type: Grant
    Filed: August 13, 2019
    Date of Patent: December 7, 2021
    Assignee: INSTITUTE OF NUCLEAR ENERGY RESEARCH, ATOMIC ENERGY COUNCIL, EXECUTIVE YUAN, R.O.C
    Inventors: Ming-Cheng Chang, Tsai-Yueh Luo, Cheng-Liang Peng, Kuan-Yin Chen
  • Patent number: 11189728
    Abstract: A semiconductor device includes an isolation insulating layer disposed over a substrate, a semiconductor fin disposed over the substrate, an upper portion of the semiconductor fin protruding from the isolation insulating layer and a lower portion of the semiconductor fin being embedded in the isolation insulating layer, a gate structure disposed over the upper portion of the semiconductor fin and including a gate dielectric layer and a gate electrode layer, gate sidewall spacers disposed over opposing side faces of the gate structure, and a source/drain epitaxial layer. The upper portion of the semiconductor fin includes a first epitaxial growth enhancement layer made of a semiconductor material different from a remaining part of the semiconductor fin. The first epitaxial growth enhancement layer is in contact with the source/drain epitaxial layer. The gate dielectric layer covers the upper portion of the semiconductor fin including the first epitaxial growth enhancement layer.
    Type: Grant
    Filed: September 5, 2019
    Date of Patent: November 30, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chang-Yin Chen, Che-Cheng Chang, Chih-Han Lin