Patents by Inventor Yun Shi

Yun Shi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8916440
    Abstract: Semiconductor structures and methods of manufacture are disclosed herein. Specifically, disclosed herein are methods of manufacturing a high-voltage metal-oxide-semiconductor field-effect transistor and respective structures. A method includes forming a field-effect transistor (FET) on a substrate in a FET region, forming a high-voltage FET (HVFET) on a dielectric stack over a over lightly-doped diffusion (LDD) drain in a HVFET region, and forming an NPN on the substrate in an NPN region.
    Type: Grant
    Filed: August 3, 2012
    Date of Patent: December 23, 2014
    Assignee: International Business Machines Corporation
    Inventors: William F. Clark, Jr., Qizhi Liu, John J. Pekarik, Yun Shi, Yanli Zhang
  • Publication number: 20140367778
    Abstract: A lateral diffusion metal oxide semiconductor (LDMOS) comprises a semiconductor substrate having an STI structure in a top surface of the substrate, a drift region below the STI structure, and a source region and a drain region on opposite sides of the STI structure. A gate conductor is on the substrate over a gap between the STI structure and the source region and partially overlaps the drift region. A conformal dielectric layer is on the top surface and forms a mesa above the gate conductor. The conformal dielectric layer has a conformal etch-stop layer embedded therein. Contact studs extend through the dielectric layer and the etch-stop layer, and are connected to the source region, drain region, and gate conductor. A source electrode contacts the source contact stud, a gate electrode contacts the gate contact stud, and a drain electrode contacts the drain contact stud. A drift electrode is over the drift region.
    Type: Application
    Filed: June 18, 2013
    Publication date: December 18, 2014
    Inventors: Santosh Sharma, Yun Shi, Anthony K. Stamper
  • Patent number: 8912597
    Abstract: A semiconductor device is disclosed. The semiconductor device includes a semiconductor substrate including a first source drain region, a second source drain region, and an intrinsic region therebetween; an asymmetric lightly doped drain (LDD) region within the substrate, wherein the asymmetric LDD region extends from the first source drain region into the intrinsic region between the first source drain region and the second source drain region; and a gate positioned atop the semiconductor substrate, wherein an outer edge of the gate overlaps the second source drain region. A related method and design structure are also disclosed.
    Type: Grant
    Filed: July 19, 2013
    Date of Patent: December 16, 2014
    Assignee: International Business Machines Corporation
    Inventors: Alan B. Botula, Robert M. Rassel, Yun Shi, Mark E. Stidham
  • Publication number: 20140346597
    Abstract: High-voltage LDMOS devices with voltage linearizing field plates and methods of manufacture are disclosed. The method includes forming an insulator layer of varying depth over a drift region and a body of a substrate. The method further includes forming a control gate and a split gate region by patterning a layer of material on the insulator layer. The split gate region is formed on a first portion of the insulator layer and the control gate is formed on a second portion of the insulator layer, which is thinner than the first portion.
    Type: Application
    Filed: June 7, 2013
    Publication date: November 27, 2014
    Inventors: Natalie B. Feilchenfeld, Theodore J. Letavic, Richard A. Phelps, Santosh Sharma, Yun Shi, Michael J. Zierak
  • Publication number: 20140346596
    Abstract: High-voltage LDMOS devices with voltage linearizing field plates and methods of manufacture are disclosed. The method includes forming an array of poly islands and a control gate structure by patterning a poly layer formed over a deep well region and a body of a substrate. The method further includes forming a metal shield in contact with the control gate structure and over the array of poly islands.
    Type: Application
    Filed: May 24, 2013
    Publication date: November 27, 2014
    Inventors: John J. Ellis-Monaghan, Theodore J. Letavic, Santosh Sharma, Yun Shi, Michael J. Zierak
  • Patent number: 8890246
    Abstract: Integrated circuits having doped bands in a substrate and beneath high-voltage semiconductor-on-insulator (SOI) devices are provided. In one embodiment, the invention provides an integrated circuit comprising: a semiconductor-on-insulator (SOI) wafer including: a substrate; a buried oxide (BOX) layer atop the substrate; and a semiconductor layer atop the BOX layer; a plurality of high voltage (HV) devices connected in series within the semiconductor layer; a doped band within the substrate and below a first of the plurality of HV devices; and a contact extending from the semiconductor layer and through the BOX layer to the doped band.
    Type: Grant
    Filed: August 28, 2012
    Date of Patent: November 18, 2014
    Assignee: International Business Machines Corporation
    Inventors: Alan B. Botula, Beth Ann Rainey, Yun Shi
  • Publication number: 20140327084
    Abstract: Various embodiments include field effect transistor (FET) structures and methods of forming such structures. In various embodiments, an FET structure includes: a deep n-type well; an shallow n-type well and a p-type well each within the deep n-type well; and a shallow trench isolation (STI) region within the shallow n-type well, the STI region including: a first section having a first depth within the shallow n-type well as measured from an upper surface of the shallow n-type well; and a second section contacting and overlying the first section, the second section having a second depth within the shallow n-type well as measured from the upper surface of the shallow n-type well.
    Type: Application
    Filed: May 1, 2013
    Publication date: November 6, 2014
    Applicant: International Business Machines Corporation
    Inventors: Natalie B. Feilchenfeld, Max G. Levy, Richard A. Phelps, Santosh Sharma, Yun Shi, Michael J. Zierak
  • Patent number: 8866226
    Abstract: At least one conductive via structure is formed from an interconnect-level metal line through a middle-of-line (MOL) dielectric layer, a shallow trench isolation structure in a top semiconductor layer, and a buried insulator layer to a bottom semiconductor layer. The shallow trench isolation structure laterally abuts at least two field effect transistors that function as a radio frequency (RF) switch. The at least one conductive via structure and the at interconnect-level metal line may provide a low resistance electrical path from the induced charge layer in a bottom semiconductor layer to electrical ground, discharging the electrical charge in the induced charge layer. The discharge of the charge in the induced charge layer thus reduces capacitive coupling between the semiconductor devices and the bottom semiconductor layer, and thus secondary coupling between components electrically disconnected by the RF switch is reduced.
    Type: Grant
    Filed: January 9, 2012
    Date of Patent: October 21, 2014
    Assignee: International Business Machines Corporation
    Inventors: Alan B. Botula, Alvin J. Joseph, Edward J. Nowak, Yun Shi, James A. Slinkman
  • Patent number: 8796108
    Abstract: Disclosed is a Zener diode having a scalable reverse-bias breakdown voltage (Vb) as a function of the position of a cathode contact region relative to the interface between adjacent cathode and anode well regions. Specifically, cathode and anode contact regions are positioned adjacent to corresponding cathode and anode well regions and are further separated by an isolation region. However, while the anode contact region is contained entirely within the anode well region, one end of the cathode contact region extends laterally into the anode well region. The length of this end can be predetermined in order to selectively adjust the Vb of the diode (e.g., increasing the length reduces Vb of the diode and vice versa). Also disclosed are an integrated circuit, incorporating multiple instances of the diode with different reverse-bias breakdown voltages, a method of forming the diode and a design structure for the diode.
    Type: Grant
    Filed: July 19, 2013
    Date of Patent: August 5, 2014
    Assignee: International Business Machines Corporation
    Inventors: Frederick G. Anderson, Natalie B. Feilchenfeld, David L. Harmon, Richard A. Phelps, Yun Shi, Michael J. Zierak
  • Patent number: 8748285
    Abstract: A semiconductor structure includes a semiconductor-on-insulator substrate, the semiconductor-on-insulator substrate comprising a handle wafer, a buried oxide (BOX) layer on top of the handle wafer, and a top silicon layer on top of the BOX layer; and an implantation region located in the top silicon layer, the implantation region comprising a noble gas.
    Type: Grant
    Filed: November 28, 2011
    Date of Patent: June 10, 2014
    Assignee: International Business Machines Corporation
    Inventors: Alan B. Botula, William F. Clark, Jr., Richard A. Phelps, BethAnn Rainey, Yun Shi, James A. Slinkman
  • Publication number: 20140035064
    Abstract: Semiconductor structures and methods of manufacture are disclosed herein. Specifically, disclosed herein are methods of manufacturing a high-voltage metal-oxide-semiconductor field-effect transistor and respective structures. A method includes forming a field-effect transistor (FET) on a substrate in a FET region, forming a high-voltage FET (HVFET) on a dielectric stack over a over lightly-doped diffusion (LDD) drain in a HVFET region, and forming an NPN on the substrate in an NPN region.
    Type: Application
    Filed: August 3, 2012
    Publication date: February 6, 2014
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: William F. CLARK, JR., Qizhi LIU, John J. Pekarik, Yun SHI, Yanli ZHANG
  • Publication number: 20140040009
    Abstract: Computer-readable media, computer systems, and computing devices for providing and filtering keyword stacks are provided. In embodiments, the method includes receiving an indication to display a set of keyword stacks. Each of the keyword stacks is associated with a different internet advertising metric. Keyword data associated with each of the internet advertising metrics is referenced. Thereafter, the keyword data associated with each of the internet advertising metrics is utilized to generate each of the keyword stacks. In some cases, each of the keyword stacks includes a set of horizontal bars vertically stacked with each horizontal bar representing a number of keywords falling within a particular metric measurement, or range thereof, corresponding with a vertical axis.
    Type: Application
    Filed: August 1, 2012
    Publication date: February 6, 2014
    Applicant: Microsoft Corporation
    Inventors: Yun SHI, Anand EDWIN, Dong CHEN, Safiya I. BHOJAWALA, Wai CHAN, Sameer ABROL, Haik E. BABAIAN
  • Publication number: 20140030861
    Abstract: A lateral diffused metal-oxide-semiconductor field effect transistor (LDMOS transistor) employs a stress layer that enhances carrier mobility (i.e., on-current) while also maintaining a high breakdown voltage for the device. High breakdown voltage is maintained, because an increase in doping concentration of the drift region is minimized A well region and a drift region are formed in the substrate adjacent to one another. A first shallow trench isolation (STI) region is formed on and adjacent to the well region, and a second STI region is formed on and adjacent to the drift region. A stress layer is deposited over the LDMOS transistor and in the second STI region, which propagates compressive or tensile stress into the drift region, depending on the polarity of the stress layer. A portion of the stress layer can be removed over the gate to change the polarity of stress in the inversion region below the gate.
    Type: Application
    Filed: October 2, 2013
    Publication date: January 30, 2014
    Applicant: International Business Machines Corporation
    Inventors: Renata Camillo-Castillo, Erik M. Dahlstrom, Robert J. Gauthier, JR., Ephrem G. Gebreselasie, Richard A. Phelps, Jed H. Rankin, Yun Shi
  • Publication number: 20140021547
    Abstract: An Integrated Circuit (IC) and a method of making the same. In one embodiment, the IC includes: a substrate; a first semiconductor layer disposed on the substrate; a shallow trench isolation (STI) extending through the first semiconductor layer to within a portion of the substrate, the STI substantially separating a first n+ region and a second n+ region; and a gate disposed on a portion of the first semiconductor layer and connected to the STI, the gate including: a buried metal oxide (BOX) layer disposed on the first semiconductor layer and connected to the STI; a cap layer disposed on the BOX layer; and a p-type well component disposed within the first semiconductor layer and the substrate, the p-type well component connected to the second n+ region.
    Type: Application
    Filed: July 20, 2012
    Publication date: January 23, 2014
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: William F. Clark, JR., Qizhi Liu, Robert M. Rassel, Yun Shi
  • Patent number: 8618583
    Abstract: The disclosure relates generally to junction gate field effect transistor (JFET) structures and methods of forming the same. The JFET structure includes a p-type substrate having a p-region therein; an n-channel thereunder; and n-doped enhancement regions within the n-channel, each n-doped enhancement region separated from the p-region.
    Type: Grant
    Filed: May 16, 2011
    Date of Patent: December 31, 2013
    Assignee: International Business Machines Corporation
    Inventors: Panglijen Candra, Richard A. Phelps, Robert M. Rassel, Yun Shi
  • Patent number: 8598660
    Abstract: A lateral diffused metal-oxide-semiconductor field effect transistor (LDMOS transistor) employs a stress layer that enhances carrier mobility (i.e., on-current) while also maintaining a high breakdown voltage for the device. High breakdown voltage is maintained, because an increase in doping concentration of the drift region is minimized. A well region and a drift region are formed in the substrate adjacent to one another. A first shallow trench isolation (STI) region is formed on and adjacent to the well region, and a second STI region is formed on and adjacent to the drift region. A stress layer is deposited over the LDMOS transistor and in the second STI region, which propagates compressive or tensile stress into the drift region, depending on the polarity of the stress layer. A portion of the stress layer can be removed over the gate to change the polarity of stress in the inversion region below the gate.
    Type: Grant
    Filed: June 1, 2011
    Date of Patent: December 3, 2013
    Assignee: International Business Machines Corporation
    Inventors: Renata Camillo-Castillo, Erik Mattias Dahlstrom, Robert J. Gauthier, Jr., Ephrem G. Gebreselasie, Richard A. Phelps, Jed Hickory Rankin, Yun Shi
  • Publication number: 20130313607
    Abstract: Device structures, fabrication methods, operating methods, and design structures for a silicon controlled rectifier. The method includes applying a mechanical stress to a region of a silicon controlled rectifier (SCR) at a level sufficient to modulate a trigger current of the SCR. The device and design structures include a SCR with an anode, a cathode, a first region, and a second region of opposite conductivity type to the first region. The first and second regions of the SCR are disposed in a current-carrying path between the anode and cathode of the SCR. A layer is positioned on a top surface of a semiconductor substrate relative to the first region and configured to cause a mechanical stress in the first region of the SCR at a level sufficient to modulate a trigger current of the SCR.
    Type: Application
    Filed: August 1, 2013
    Publication date: November 28, 2013
    Applicant: International Business Machines Corporation
    Inventors: Renata Camillo-Castillo, Erik M. Dahlstrom, Robert J. Gauthier, JR., Ephrem G. Gebreselasie, Richard A. Phelps, Yun Shi, Andreas D. Stricker
  • Patent number: 8586423
    Abstract: Device structures, fabrication methods, operating methods, and design structures for a silicon controlled rectifier. The method includes applying a mechanical stress to a region of a silicon controlled rectifier (SCR) at a level sufficient to modulate a trigger current of the SCR. The device and design structures include a SCR with an anode, a cathode, a first region, and a second region of opposite conductivity type to the first region. The first and second regions of the SCR are disposed in a current-carrying path between the anode and cathode of the SCR. A layer is positioned on a top surface of a semiconductor substrate relative to the first region and configured to cause a mechanical stress in the first region of the SCR at a level sufficient to modulate a trigger current of the SCR.
    Type: Grant
    Filed: June 24, 2011
    Date of Patent: November 19, 2013
    Assignee: International Business Machines Corporation
    Inventors: Renata Camillo-Castillo, Erik M. Dahlstrom, Robert J. Gauthier, Jr., Ephrem G. Gebreselasie, Richard A. Phelps, Yun Shi, Andreas Stricker
  • Publication number: 20130299938
    Abstract: Disclosed is a Zener diode having a scalable reverse-bias breakdown voltage (Vb) as a function of the position of a cathode contact region relative to the interface between adjacent cathode and anode well regions. Specifically, cathode and anode contact regions are positioned adjacent to corresponding cathode and anode well regions and are further separated by an isolation region. However, while the anode contact region is contained entirely within the anode well region, one end of the cathode contact region extends laterally into the anode well region. The length of this end can be predetermined in order to selectively adjust the Vb of the diode (e.g., increasing the length reduces Vb of the diode and vice versa). Also disclosed are an integrated circuit, incorporating multiple instances of the diode with different reverse-bias breakdown voltages, a method of forming the diode and a design structure for the diode.
    Type: Application
    Filed: July 19, 2013
    Publication date: November 14, 2013
    Inventors: Frederick G. Anderson, Natalie B. Feilchenfeld, David L. Harmon, Richard A. Phelps, Yun Shi, Michael J. Zierak
  • Publication number: 20130299903
    Abstract: A semiconductor device is disclosed. The semiconductor device includes a semiconductor substrate including a first source drain region, a second source drain region, and an intrinsic region therebetween; an asymmetric lightly doped drain (LDD) region within the substrate, wherein the asymmetric LDD region extends from the first source drain region into the intrinsic region between the first source drain region and the second source drain region; and a gate positioned atop the semiconductor substrate, wherein an outer edge of the gate overlaps the second source drain region. A related method and design structure are also disclosed.
    Type: Application
    Filed: July 19, 2013
    Publication date: November 14, 2013
    Applicant: International Business Machines Corporation
    Inventors: Alan B. Botula, Robert M. Rassel, Yun Shi, Mark E. Stidham