Heat reflector for semiconductor manufacturing equipment
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The dot-dashed lines show the boundary of the enlarged portion view of
The surface members shown in
Claims
The ornamental design for a heat reflector for semiconductor manufacturing equipment as shown and described.
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- 113 Applied Materials Reflector Plate, Inject, 300MM Radiance Plus 0041-12156,https://www.ebay.com/itm/114949674079, 2024. (Year: 2024).
Type: Grant
Filed: Jan 24, 2023
Date of Patent: Dec 3, 2024
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventor: Akihiro Sato (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/883,098