Top plate for reactor for manufacturing semiconductor
Latest Tokyo Electron Limited Patents:
Description
The broken lines are shown for illustrative purposes only and form no part of the claimed design.
Claims
The ornamental design for top plate for reactor for manufacturing semiconductor, as shown and described.
Referenced Cited
Patent History
Patent number: D654883
Type: Grant
Filed: Apr 13, 2011
Date of Patent: Feb 28, 2012
Assignee: Tokyo Electron Limited (Minato-Ku)
Inventors: Manabu Honma (Oshu), Katsuyuki Hishiya (Oshu)
Primary Examiner: Selina Sikder
Attorney: Burr & Brown
Application Number: 29/389,558
Type: Grant
Filed: Apr 13, 2011
Date of Patent: Feb 28, 2012
Assignee: Tokyo Electron Limited (Minato-Ku)
Inventors: Manabu Honma (Oshu), Katsuyuki Hishiya (Oshu)
Primary Examiner: Selina Sikder
Attorney: Burr & Brown
Application Number: 29/389,558
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)