Adiabatic plate for substrate processing apparatus
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Description
Claims
We claim the ornamental design for an adiabatic plate for substrate processing apparatus, as shown and described.
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Patent History
Patent number: D924823
Type: Grant
Filed: Dec 4, 2018
Date of Patent: Jul 13, 2021
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Koji Saiki (Toyama), Makoto Tsuri (Toyama)
Primary Examiner: Selina Sikder
Application Number: 29/672,222
Type: Grant
Filed: Dec 4, 2018
Date of Patent: Jul 13, 2021
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Koji Saiki (Toyama), Makoto Tsuri (Toyama)
Primary Examiner: Selina Sikder
Application Number: 29/672,222
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)