Semiconductor wafer heater

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Description

FIG. 1 is a perspective view 1 of a semiconductor wafer heater showing our new design

FIG. 2 is a perspective view 2 thereof,

FIG. 3 is a front elevational view thereof,

FIG. 4 is a rear elevational view thereof,

FIG. 5 is a left side elevational view thereof,

FIG. 6 is a right side elevational view thereof,

FIG. 7 is a top plan view thereof,

FIG. 8 is a bottom plan view thereof; and,

FIG. 9 is an end face view taken along line 9-9 thereof.

Claims

The ornamental design for a semiconductor wafer heater as shown and described.

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Patent History
Patent number: D1094324
Type: Grant
Filed: May 17, 2024
Date of Patent: Sep 23, 2025
Assignee: NuFlare Technology, Inc. (Kanagawa)
Inventors: Kunihiko Suzuki (Shizuoka), Takuto Umetsu (Kamakura)
Primary Examiner: Sandra Snapp
Assistant Examiner: Anehita E. Oribabor
Application Number: 29/942,788