Wafer carrier having pockets

- Veeco Instruments Inc.
Skip to: Description  ·  Claims  ·  References Cited  · Patent History  ·  Patent History
Description

FIG. 1 is a top perspective view of a wafer carrier having pockets showing our new design;

FIG. 2 is an enlarged view of a portion of FIG. 1;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom perspective view thereof;

FIG. 5 is a bottom plan view thereof;

FIG. 6 is an enlarged view of a portion of FIG. 4; and,

FIG. 7 is a right side view thereof, the left side, front, and rear views being the same as the right side view.

The broken lines in the drawings are for illustrative purposes only and form no part of the claimed design.

The dash-dot broken lines define the area corresponding to the enlarged portion shown in FIGS. 2 and 6 and form no part of the claimed design.

Claims

The ornamental design for a wafer carrier having pockets, as shown and described.

Referenced Cited
U.S. Patent Documents
3731435 May 1973 Boettcher et al.
3845738 November 1974 Berkman et al.
4165584 August 28, 1979 Scherrer
4512113 April 23, 1985 Budinger
4739589 April 26, 1988 Brehm et al.
5191738 March 9, 1993 Nakazato et al.
5193316 March 16, 1993 Olmstead
5377451 January 3, 1995 Leoni et al.
5422316 June 6, 1995 Desai et al.
5573448 November 12, 1996 Nakazima et al.
5647789 July 15, 1997 Kitta et al.
5674107 October 7, 1997 Graebner et al.
5683518 November 4, 1997 Moore et al.
5788777 August 4, 1998 Burk, Jr.
5840124 November 24, 1998 Gurary et al.
5865666 February 2, 1999 Nagahara
6080042 June 27, 2000 McGregor et al.
6241825 June 5, 2001 Wytman
6375749 April 23, 2002 Boydston et al.
6454635 September 24, 2002 Zhang et al.
6500059 December 31, 2002 Chang et al.
6514424 February 4, 2003 Wenski et al.
6666948 December 23, 2003 Nguyen
6709981 March 23, 2004 Grabbe et al.
6733367 May 11, 2004 Nguyen
7008308 March 7, 2006 Bjelopavlic et al.
7169234 January 30, 2007 Weeks et al.
7235139 June 26, 2007 Boguslavskiy et al.
7252737 August 7, 2007 Brown et al.
D633452 March 1, 2011 Namiki et al.
8177993 May 15, 2012 Seah et al.
8182315 May 22, 2012 Nguyen
8328600 December 11, 2012 Duescher
D674759 January 22, 2013 Chang et al.
20020011204 January 31, 2002 Gujer et al.
20030057089 March 27, 2003 Nguyen
20090194026 August 6, 2009 Burrows et al.
Patent History
Patent number: D695241
Type: Grant
Filed: Mar 20, 2012
Date of Patent: Dec 10, 2013
Assignee: Veeco Instruments Inc. (Plainview, NY)
Inventors: Alexander I. Gurary (Bridgewater, NJ), Keng Moy (Basking Ridge, NJ), Chenghung Paul Chang (Easton, PA)
Primary Examiner: Selina Sikder
Application Number: 29/416,240