Substrate supporting arm for semiconductor manufacturing apparatus
Latest ASM IP Holding B.V. Patents:
Description
Claims
The ornamental design for a substrate supporting arm for a semiconductor manufacturing apparatus, as shown and described.
Referenced Cited
U.S. Patent Documents
Foreign Patent Documents
Other references
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Patent History
Patent number: D785578
Type: Grant
Filed: Mar 22, 2016
Date of Patent: May 2, 2017
Assignee: ASM IP Holding B.V. (Almere)
Inventors: Woo Chan Kim (Daejeon), Jeong Ho Lee (Seoul), Hyun Soo Jang (Daejeon), Jong Su Kim (Cheonan-si)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/558,827
Type: Grant
Filed: Mar 22, 2016
Date of Patent: May 2, 2017
Assignee: ASM IP Holding B.V. (Almere)
Inventors: Woo Chan Kim (Daejeon), Jeong Ho Lee (Seoul), Hyun Soo Jang (Daejeon), Jong Su Kim (Cheonan-si)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/558,827
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)