Substrate supporting arm for semiconductor manufacturing apparatus

- ASM IP Holding B.V.
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Description

FIG. 1 is a perspective view of a substrate supporting arm for a semiconductor manufacturing apparatus showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof; and,

FIG. 7 is a bottom plan view thereof.

Claims

The ornamental design for a substrate supporting arm for a semiconductor manufacturing apparatus, as shown and described.

Referenced Cited
U.S. Patent Documents
6132160 October 17, 2000 Iwai
6183183 February 6, 2001 Goodwin
6234738 May 22, 2001 Kimata
6293749 September 25, 2001 Raaijmakers
6614201 September 2, 2003 Saino
6893507 May 17, 2005 Goodman
6991419 January 31, 2006 Kim
7186297 March 6, 2007 Asano
D559805 January 15, 2008 Hosaka
7578649 August 25, 2009 Caveney
D614152 April 20, 2010 Lee
D665759 August 21, 2012 Sato
D666979 September 11, 2012 Teramoto
D695240 December 10, 2013 Iida
D701498 March 25, 2014 Iida
Foreign Patent Documents
30-0554490 March 2010 KR
Other references
  • Office Action dated Jul. 5, 2016 in Korean Design application No. 30-2016-0000963.
Patent History
Patent number: D785578
Type: Grant
Filed: Mar 22, 2016
Date of Patent: May 2, 2017
Assignee: ASM IP Holding B.V. (Almere)
Inventors: Woo Chan Kim (Daejeon), Jeong Ho Lee (Seoul), Hyun Soo Jang (Daejeon), Jong Su Kim (Cheonan-si)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/558,827