Cover of seal cap for reaction chamber of semiconductor
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Description
Claims
The ornamental design for a cover of seal cap for reaction chamber of semiconductor, as shown and described.
Referenced Cited
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| D720309 | December 30, 2014 | Kaneko |
| D742339 | November 3, 2015 | Takagi |
| D748594 | February 2, 2016 | Takagi |
| D796458 | September 5, 2017 | Jang |
| D797067 | September 12, 2017 | Zhang |
| 20110018160 | January 27, 2011 | Ziberna |
| 20160157359 | June 2, 2016 | Arvelo |
| 20170170030 | June 15, 2017 | Iruvanti |
| 20170221790 | August 3, 2017 | Tomie |
| 20170229360 | August 10, 2017 | Kothandapani |
Patent History
Patent number: D813181
Type: Grant
Filed: Jan 25, 2017
Date of Patent: Mar 20, 2018
Assignee: HITACHI KOKUSAI ELECTRIC INC. (Tokyo)
Inventors: Yusaku Okajima (Toyama), Shuhei Saido (Toyama), Mika Urushihara (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/591,907
Type: Grant
Filed: Jan 25, 2017
Date of Patent: Mar 20, 2018
Assignee: HITACHI KOKUSAI ELECTRIC INC. (Tokyo)
Inventors: Yusaku Okajima (Toyama), Shuhei Saido (Toyama), Mika Urushihara (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/591,907
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)