Cover of seal cap for reaction chamber of semiconductor
Latest HITACHI KOKUSAI ELECTRIC INC. Patents:
Description
Claims
The ornamental design for a cover of seal cap for reaction chamber of semiconductor, as shown and described.
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Patent History
Patent number: D813181
Type: Grant
Filed: Jan 25, 2017
Date of Patent: Mar 20, 2018
Assignee: HITACHI KOKUSAI ELECTRIC INC. (Tokyo)
Inventors: Yusaku Okajima (Toyama), Shuhei Saido (Toyama), Mika Urushihara (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/591,907
Type: Grant
Filed: Jan 25, 2017
Date of Patent: Mar 20, 2018
Assignee: HITACHI KOKUSAI ELECTRIC INC. (Tokyo)
Inventors: Yusaku Okajima (Toyama), Shuhei Saido (Toyama), Mika Urushihara (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/591,907
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)