Shower plate
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Description
Claims
The ornamental design for a shower plate, as shown and described.
Referenced Cited
U.S. Patent Documents
Other references
8083853 | December 27, 2011 | Choi et al. |
D665055 | August 7, 2012 | Yanagisawa |
8402918 | March 26, 2013 | Kadkhodayan |
D720838 | January 6, 2015 | Yamagishi |
D724701 | March 17, 2015 | Yamagishi |
D732145 | June 16, 2015 | Yamagishi |
D732644 | June 23, 2015 | Yamagishi |
D733257 | June 30, 2015 | Schoenherr |
D733261 | June 30, 2015 | Yamagishi |
D733843 | July 7, 2015 | Yamagishi |
D735836 | August 4, 2015 | Yamagishi |
D751176 | March 8, 2016 | Schoenherr |
D785766 | May 2, 2017 | Sato |
D787458 | May 23, 2017 | Kim |
D789888 | June 20, 2017 | Jang |
D793526 | August 1, 2017 | Behdjat |
D794753 | August 15, 2017 | Miller |
20100003829 | January 7, 2010 | Patrick |
20110297759 | December 8, 2011 | Morbio |
20140273528 | September 18, 2014 | Niskanen et al. |
20160040410 | February 11, 2016 | Carpenter-Crawford |
- Korean Office Action dated Jan. 12, 2018 in corresponding Korean Patent Application No. 30-2017-0023146.
Patent History
Patent number: D834686
Type: Grant
Filed: Dec 15, 2016
Date of Patent: Nov 27, 2018
Assignee: ASM IP HOLDING B.V. (Almere)
Inventors: Ryoko Yamada (Odawara), Jun Kawahara (Hachioji), Kazuo Sato (Kawasaki)
Primary Examiner: Eric L Goodman
Assistant Examiner: Amy C Wierenga
Application Number: 29/587,855
Type: Grant
Filed: Dec 15, 2016
Date of Patent: Nov 27, 2018
Assignee: ASM IP HOLDING B.V. (Almere)
Inventors: Ryoko Yamada (Odawara), Jun Kawahara (Hachioji), Kazuo Sato (Kawasaki)
Primary Examiner: Eric L Goodman
Assistant Examiner: Amy C Wierenga
Application Number: 29/587,855
Classifications
Current U.S. Class:
Drain Guard Or Strainer (12) (D23/261)