Substrate processing unit
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Cross-reference to related applications:
Application Ser. No. 29/606,718, filed herewith and entitled “Substrate Processing Unit”; and
Application Ser. No. 29/606,724, filed herewith and entitled “Substrate Processing Unit”.
The broken lines are for illustrative purposes only and form no part of the claimed design.
Claims
The ornamental design for a substrate processing unit, as shown and described.
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Type: Grant
Filed: Jun 7, 2017
Date of Patent: Apr 30, 2019
Assignee: Hitachi High-Technologies Corporation (Tokyo)
Inventors: Yusaku Sakka (Tokyo), Hiromichi Kawasaki (Tokyo)
Primary Examiner: Khawaja Anwar
Application Number: 29/606,730