Calibrator for wafer handling robots
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Description
Claims
We claim the ornamental design for a calibrator for wafer handling robots, as shown and described.
Referenced Cited
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Patent History
Patent number: D944661
Type: Grant
Filed: Dec 10, 2019
Date of Patent: Mar 1, 2022
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Makoto Sambu (Toyama), Norihito Shitaka (Toyama)
Primary Examiner: Katherine Glennon
Application Number: 29/716,452
Type: Grant
Filed: Dec 10, 2019
Date of Patent: Mar 1, 2022
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Makoto Sambu (Toyama), Norihito Shitaka (Toyama)
Primary Examiner: Katherine Glennon
Application Number: 29/716,452
Classifications