Abstract: A sample processing apparatus includes a stage for supporting a sample, a first temperature controller for controlling a temperature of the sample, an ion beam generator for irradiating the sample with an ion beam, and a detector for detecting a signal emitted from the sample in response to the irradiation of the ion beam. Also provided is a probe for obtaining a part of the sample processed by the irradiation of the ion beam and conveying it to a sample table, a second temperature controller for controlling a temperature of the probe, and a third temperature controller for controlling a temperature of the sample table.

Abstract: [Problem] An ion implanting apparatus is provided in which the homogenization of the ion beam current density distribution in the longitudinal direction (Y direction) in an implanting position on a substrate can be improved. [Means for Resolution] The ion implanting apparatus has: an ion source 100 which generates an ion beam 50; electron beam sources Gn which emit an electron beam to be scanned in the Y direction in the ion source 100; a power source 114 for the sources; an ion beam monitor 80 which, in the vicinity of an implanting position, measures a Y-direction ion beam current density distribution of the ion beam 50; and a controlling device 90.

Abstract: A charged-particle beam system capable of reliably detecting defects in an interconnect pattern, which is formed, for example, on a semiconductor device. The system uses an electron source for producing an electron beam. A specimen on which the interconnect pattern is formed is scanned with the electron beam in two dimensions. An image of the specimen is created based on a signal obtained from the specimen in response to the scanning, and the image is displayed on a display portion. Two probes are brought into contact with arbitrary locations on the interconnect pattern. Absorption currents obtained via the probes are applied to a differential current-voltage converter. Thus, the difference between the absorption currents is converted into a voltage signal. An absorption current image is created based on the voltage signal and displayed on the display portion.

Abstract: The present invention was made in view of a problem of an electron microscope in which a reduction in detection efficiency of electrons detected by a detector should be prevented by eliminating any influence of a leakage magnetic field through a gap in an objective lens onto the electrons emitted from a specimen. To solve the problem, the present invention provides an electron microscope having a configuration with: a pole piece electrode for accelerating primary electrons emitted at an electrons source; and an objective lens including the pole piece electrode. In the objective lens, an electrically and magnetically insulated gap is formed between the pole piece electrode and other pole piece, and an auxiliary coil is concentrically disposed with the objective lens at a middle position between the gap and a detection surface of the electron detector, with an electric current flowing through the auxiliary coil in the opposite direction from that of an electric current flowing through the objective lens coil.

Abstract: The present invention provides a highly reliable charged beam gun designed in consideration for environmental protection, which prevents faulty insulation in a high-voltage connection. An insulating liquid is present in a gap formed between a connecting bushing and a receiving-side flange placed in a vacuum container, and the connecting bushing includes first piping and valve that provide communication between the gap and atmospheric air, and second piping and valve that provide communication between the gap and the atmospheric air, whereby the gap is cut off from the atmospheric air.

Abstract: An infrared radiation (“IR”) focal plane array (“FPA”) imager includes a detector array chip containing pixels having substantially one-hundred percent operability. Each of the pixels contains a plurality of interdigitated sub-detectors, where the sub-detectors are selectively operable to provide for collection of photogenerated minority charges representative of all or substantially all of the IR radiation absorbed by the detector array chip of the FPA imager.

Abstract: Provided are a bolometer and a method of manufacturing the bolometer. The bolometer includes: a semiconductor substrate comprising a detection circuit; a reflective layer disposed in an area of a surface of the semiconductor substrate; metal pads disposed on the surface of the semiconductor substrate beside both sides of the reflective layer to keep predetermined distances from the both sides of the reflective layer; and a sensor structure forming a space corresponding to quarter of an infrared wavelength (?/4) from a surface of the reflective layer and positioned above the semiconductor substrate, wherein the sensor structure includes: a body including a polycrystalline resistive layer formed of one of doped Si and Si1-xGex (where x=0.2˜0.5) to be positioned above the reflective layer; and support arms positioned outside the body to be electrically connected to the metal pads.

Abstract: An image sensor includes a housing which receives heat of a circuit board, and a light source which is supported in the housing and radiates light toward a document. The light source is an EL light-emitting element including a light emission section which emits light by organic electroluminescence. The EL light-emitting element extends in a line shape along a scanning direction. A thermal diffusion layer is interposed between the EL light-emitting element and the housing.

Abstract: The amount of water vapor in natural gas at different levels, including at levels below 10 ppmv, is measured by directing a light from a quantum cascade laser at a frequency in the 5.01 to 5.03 micron or the 5.07 to 50.9 micron wavelength range through natural gas containing water vapor. A detector is configured to detect the intensity of light transmitted through the natural gas from the laser; and an analyzer is coupled to the detector for determining the level of water vapor in the natural gas.

Abstract: Methods and apparatus for measuring a phase fraction of a flow stream are disclosed. An infrared phase fraction meter includes a light source for emitting into a flow stream infrared radiation that includes first and second wavelength bands. The first wavelength band substantially transmits through first and second phases of the flow stream and is substantially absorbed by a third phase. In contrast, the second wavelength band is substantially absorbed by the second phase relative to the first and third phases. One or more detectors simultaneously detect attenuation of the first and second wavelength bands upon the infrared radiation passing through at least a portion of the flow stream, and a phase fraction of the second phase is determined based on the attenuation. As an example, the first, second and third phases are gas, water and oil, respectively, produced from a well.

Abstract: A passive, remote sensor including an optical subsystem for receiving electromagnetic radiation scattered off a surface. A detector is responsive to electromagnetic radiation received by the optical subsystem and generates a composite signal comprising a DC current component and an AC current component. A filter extracts the DC current component from the composite signal. A light emitting device is driven by the DC current component. A detector is responsive to the light emitting device and is connected to the first detector to subtract at least a portion of the DC component from the composite signal producing a modified signal. An amplifier is responsive to the modified signal detects vibrations of the surface to be detected.

Abstract: An infrared imaging microscope, particularly of the type used to carry out FT-IR measurement, has a detector in the form of a small detector array of individual detector elements. The outputs of the detector elements are fed in parallel to processing means which process the output signals. The use of a small array means that the outputs can be processed without the need for complex multiplexing or perhaps no multiplexing at all thus avoiding the reduction in signal to noise ratio which is associated with large scale multiplexing. The small detector array will generally have between 3 and 100 detector elements. Typically the upper limit will be 64 and a preferred arrangement has 16 detector elements.

Abstract: A device for locally resolved control of a radiation dose (?(?,e+)({right arrow over (r)})) applied with a pulsed particle beam (6) in particle beam therapy, with a processing unit (24), which is set up to detect continuously a count rate of x-ray quanta (14) measured with a positron emission tomograph (2) and to determine the applied radiation dose (??(?,e+)({right arrow over (r)})) from the pattern of the measured count rate, by determining by computation from the measured pattern of the count rate the time intervals (In), in which an interaction of the particle beam (6) takes place at the application site and by rejecting these time intervals (In) for the determination of the applied radiation dose (?(?,e+)({right arrow over (r)})).

Abstract: A radiation detection/imaging system includes a first set of radiation detectors spaced from each other in a first direction and a second set of radiation detectors spaced from each other in the first direction. The second set of radiation detectors is positioned laterally adjacent the first set of radiation detectors and the radiation detectors of the first and second sets of radiation detectors are arranged in an alternating or staggered pattern in the first direction. A composite image can be formed of the passage of radiation through an object acquired by the first and second sets of radiation detectors as the object is translated by the first and second sets of radiation detectors.

Abstract: Disclosed is a digital X-ray image detector using an FED, including an upper substrate and a lower substrate disposed to face each other; an anode formed beneath the upper substrate; a photoconductive layer formed beneath the anode for forming electron-hole pairs using X-rays; a cathode formed on the lower substrate; an emitter formed on the cathode for emitting electrons of the cathode; a gate electrode formed on an insulating layer provided around the emitter on the cathode; and a data processing part for converting information about the electron-hole pairs formed in the photoconductive layer by the X-rays, transferred from the anode, to digital data through signal processing including filtering, amplification, storage, or A/D conversion. The high performance digital X-ray image detector of this invention has a high image resolution and a large area, is easy to manufacture and process compared to conventional processes, and has excellent detection efficiency of electrical signals.

Abstract: This device is a gamma imagery device including: a gamma camera (1) with an observation field (5), a gamma spectrometry detector (7) collimated with a collimator (6) with an observation field (8) extending around an axis (x2) and that is included in the observation field (5) of the gamma camera (1) beyond a given distance (d) from it; a laser pointer (9) with a line of sight (x3), this laser pointer being located close to the gamma spectrometry collimator (6), such that the line of sight (x3) is substantially parallel to the axis (x2) of the observation field (8) of the collimator (6) and intersects the observation field (8) of the collimator (9), means (1, 10) of localising a zone (12) pointed at by the laser pointer (9).

Abstract: A single photon emission computed tomography (SPECT) system for cardiac imaging including an open arc-shaped frame. A collimator subsystem is shaped to approximately match the thoracic contour to optimize the geometric efficiency for detecting photons emitted from the heart of patients having different sizes and weights and shaped to surround and position the collimator subsystem closely proximate a heart of a patient of the patients encompassed by at least one predetermined image volume for optimizing collimation of radiation photons emitted from the heart. The collimator subsystem is facilitated by a tracking system that is capable of quickly bringing up the collimator component, which meets a specific set of collimation requirements, into place for imaging.

Abstract: A method for correcting attenuation in a positron emission tomography (PET) image includes acquiring images of tissue using a magnetic resonance imaging (MRI) system. The images of tissue are acquired by the MRI system at substantially the same time that sinogram data are acquired from the PET scanner. An attenuation correction sinogram is produced from the MR images and employed to correct the acquired sinogram data. PET images are then reconstructed from the corrected sinogram data.

Abstract: Method and system are provided for calibrating a nuclear medical imaging apparatus for DC shift caused by gamma event afterglow pulses. Detector responses to weak and to high count rate radiation sources are compared with each other, and a zero correction value is incremented until the detector response is the same for the weak source and the high count rate source. The zero correction value is then stored as a static zero correction value, which multiplies a dynamic zero correction value obtained just prior to the occurrence of a gamma event, in order to remove the effects of DC shifts from the output energy signal Esum.

Abstract: A radiation detection system is operative for converting (1, 2) a radiation event into an electrical signal having an amplitude related to the energy of said radiation event, converting (3, 6) at least a portion of the electrical signal into a count value related to the amplitude of the electrical signal and determining (5) the energy of the radiation event from the count value.

Abstract: A method of analyzing a container for presence of special nuclear materials (SNM) is disclosed. The method includes obtaining information regarding at least one of the container and contents therein, automatically selecting an operational parameter in response to the information; and, performing a screening of the container according to the selected operational parameter. The screening includes irradiating the container with an energetic beam comprising at least one of fast neutrons and high-energy photons; detecting energy emitted in response to the irradiating; and analyzing the detected energy for a presence of SNM.

Abstract: A method for processing transmission data from neutron and gamma-ray radiation to form an image, the neutron and gamma-ray radiation having traversed through an object and representing a measure of neutron attenuation and gamma-ray attenuation introduced by the object, comprising forming a neutron mass attenuation matrix ‘n’ and gamma-ray mass attenuation matrix ‘g’ from the measure of neutron attenuation and gamma-ray attenuation respectively; calculating a composition matrix R whose elements Rij are defined as a function of elements nij from ‘n’ and the corresponding elements gij from ‘g’, R representing an average composition of material between a source which generated the radiation and a point (i,j); calculating a density matrix X whose elements Xij are defined as a function of the elements nij from ‘n’ and the corresponding elements gij from ‘g’, X representing an approximate amount of material between the radiation source and the point (i,j); calculating a quality matrix Q as a function of the elements

Abstract: To detect whether a substrate is in a focal plane of a scatterometer, a cross-sectional area of radiation above a certain intensity value is detected both in front of and behind a back focal plane of the optical system of the scatterometer. The detection positions in front of and behind the back focal plane should desirably be equidistant from the back focal plane along the path of the radiation redirected from the substrate so that a simple comparison may determine whether the substrate is in the focal plane of the scatterometer.

Abstract: Techniques for confining electrons in an ion implanter are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for confining electrons in an ion implanter. The apparatus may comprise a first array of magnets and a second array of magnets positioned along at least a portion of a beam path, the first array being on a first side of the beam path and the second array being on a second side of the beam path, the first side opposing the second side. At least one magnet in the first array may have a pole facing an opposite pole of a corresponding magnet in the second array.

Abstract: This disclosure provides an approach for magnetic monitoring of a Faraday cup for an ion implanter. In this disclosure, there is a vacuum chamber and a Faraday cup located within the vacuum chamber. The Faraday cup is configured to move within the path of an ion beam entering the vacuum chamber. A magnetic monitor located about the vacuum chamber, is configured to distinguish a magnetic field associated with the Faraday cup from stray magnetic fields.

Abstract: The projection distances of connecting portions of a coil are reduced, thereby enabling the size and power consumption of an analyzing electromagnet to be reduced, and therefore the size and power consumption of an ion implanting apparatus are enabled to be reduced. [Means for Resolution] An analyzing electromagnet 200 constituting an ion implanting apparatus has a first inner coil 206, a second inner coil 212, three first outer coils 218, three second outer coils 224, and a yoke 230. The inner coils 206, 212 are saddle-shaped coils cooperating with each other to generate a main magnetic field which bends an ion beam in the X direction. Each of the outer coils 218, 224 is a saddle-shaped coil which generates a sub-magnetic field correcting the main magnetic field.

Abstract: A specimen kit for enclosing a specimen is described, including a first substrate, a second substrate and a sealant. The first substrate has a first observation window at which a thickness thereof is smaller than that of the other parts thereof. The second substrate has a second observation window at which a thickness thereof is smaller than that of the other parts thereof, and is disposed on the first substrate such that the second observation window is aligned to the first observation window and an interval is present between the first and the second substrates. The sealant is disposed between the first and the second substrates and surrounds the first and the second observation windows to seal a space between fringes of the first and the second substrate, thus defining a specimen cell between the first and the second substrates.

Abstract: An ion beam system includes a sample stage which holds a sample, an irradiation optical system which irradiates a sample held on the sample stage by an ion beam, and a charged particle beam observation system for observing a cross-section of the sample which is machined by the ion beam. The charged particle beam observation system includes a structure in which an axis along with an ion beam is extracted from the ion source and an axis along which the sample is irradiated are arranged so as to be at least transverse to one another.

Abstract: The invention relates to a method and apparatus (1) for checking luminescent value documents (BN), in particular bank notes, with a luminescence sensor (12), wherein the value document to be checked is irradiated to excite luminescence radiation and the luminescence radiation emanating from the value document is detected with spectral resolution. Since the value document (BN) to be checked transported past the luminescence sensor (12) in the transport direction (T) is illuminated with an illumination area (35) which extends in the transport direction (T), an effective measurement is possible even of value documents that emit very little luminescence radiation.

Abstract: A substrate for mass spectrometry for effectively performing ionization has been demanded. The substrate for mass spectrometry includes a base, a porous film formed on the base, and an inorganic material film formed on the porous film. The inorganic material film has a plurality of concaves formed vertically to the base, and the diameter of the concaves is not less than 1 nm and less than 1 ?m.

Abstract: An apparatus for the irradiation of a radiation sensitive material. The apparatus includes at least one thermally conductive tank for containing a heat transfer medium therein, said at least one thermally conductive tank having a first wall and a second wall in a parallel spaced relationship, said second wall having an outer surface for placing a radiation sensitive material thereon. Also disclosed is a system and method of irradiating a radiation sensitive material.

Abstract: An ion accelerating device includes a series of bushing units and a series of resistor circuit units. Each resistor circuit unit is coupled to one bushing unit. A bushing unit includes three integrated conductors to establish connections to the coupled resistor circuit unit and to an immediately adjacent bushing unit such that a voltage to the bushing unit may be degraded by the resistor circuit unit before reaching the lens and that two bushing units may contact one another directly.

Abstract: Electromagnetic radiation sensitive mask materials are provided. The mask materials are chosen such a first percentage of electromagnetic radiation at a first wavelength is transmitted through the mask material prior to the exposure of the mask material to electromagnetic radiation at a second wavelength and a second percentage of electromagnetic radiation at the first wavelength is transmitted through at least a portion of the mask material after the at least a portion of the mask material is exposed to electromagnetic radiation at the second wavelength. Methods of patterning substrates using electromagnetic radiation sensitive mask materials are also provided. Compositions for producing masks are provided, and systems are provided.

Abstract: A method of manufacturing a semiconductor thin film includes (A) forming an amorphous semiconductor film on a substrate, (B) irradiating a beam to a surface of the amorphous semiconductor film such that a predetermined region of the amorphous semiconductor film is melted and solidified to form a crystallized semiconductor film, and (C) scanning the beam in a first direction. A second direction is a direction on the surface of the amorphous semiconductor film perpendicular to the first direction. A length along the second direction of a cross section of the beam is substantially equal to or less than two times a width along the second direction of the crystallized semiconductor film.

Abstract: A charged particle beam device is provided. The device includes an emitter for emitting a charged particle beam in a propagation direction essentially along an optical axis of the charged particle beam device, an aperture arrangement within the charged particle beam device.

Abstract: Vertical Cavity Surface Emitting Laser (VCSEL) on silicon substrate. One embodiment described herein includes an apparatus with functionality for communicating optical signals on a silicon integrated circuit chip. The apparatus includes a silicon based integrated circuit chip die. An optical waveguide is formed at the silicon based integrated circuit chip die. A vertical cavity surface emitting laser (VCSEL) is mechanically coupled to the silicon base integrated circuit chip die and optically coupled to the optical waveguide.

Abstract: A number of wafer center finding methods and systems are disclosed herein that improve upon existing techniques used in semiconductor manufacturing.

Abstract: A diagnostic imaging system in an example comprises a high frequency electromagnetic energy source, a detector, a data acquisition system (DAS), and a computer. The high frequency electromagnetic energy source emits a beam of high frequency electromagnetic energy toward an object to be imaged. The detector receives high frequency electromagnetic energy emitted by the high frequency electromagnetic energy source. The DAS is operably connected to the detector. The computer is operably connected to the DAS and programmed to employ a threshold to trigger a filter operation on a pixel, in a basis material decomposition (BMD) image of a plurality of BMD images, through comparison of an actual noise ratio between a pair of BMD images, of the plurality of BMD images, to a theoretical BMD noise ratio value. The computer operably connected to the DAS is programmed to employ a correlation in noise distribution of the plurality of BMD images to reduce image noise in the plurality of BMD images.

Abstract: A microscope produces a high magnification stereoscopic image of a specimen by generating in the specimen two needle shaped illuminated regions tilted in optical axis of the microscope using a plurality of pinholes, moveable mirrors, and beamsplitters (37, 70). Light emitted from the needle shaped regions is detected using separate detectors (56, 57). The needle shaped regions are scanned with respect to the specimen using scanner (3). Alternately, a hologram may be used to generate the needle shaped illuminated regions.

Abstract: A ram-type blowout preventer and method of actuating thereof. The ram-type blowout preventer includes a seal carrier disposed about a vertical bore between the body and adjacent to the horizontal bore. The seal carrier is configured to be thrust into sealing engagement with at least one of a pair of ram blocks of the ram-type blowout preventer by fluid pressure above the ram blocks and a sealing device forms a seal between the body and the seal carrier.

Abstract: The invention relates to a hydraulic slide valve for controlling flow-rate or pressure comprising at least one movable valve moving from a closed position by contacting a seat and an open position remote therefrom, the displacement of said valve being controlled by a piezoelectric washer.

Abstract: A fuel can (20) is disclosed as having a hollow container body (22), a detachable pouring spout (32), and a fill/vent assembly (36, 132) which is integrally secured to the body (22). In one form, the fill/vent assembly (36) has a primary segment (60) defining a fill opening (66). The segment (66) supports a first, inner, spring-biased pivotal door (42) as well as a second, outer, spring-biased door (50). A flexible check valve (44) is also supported on the inner door (42). In another embodiment, second door is threadably attached to a neck (136) as opposed to being spring-biased into the closed position. In yet another embodiment, the can (20) has only a venting assembly (148) including a flexible check valve (156) supported on a primary segment (154). The segment (154) has venting slots (170) as well as a cap (158) designed to permit venting of the can (20) through the slots (170) and valve (156).

Abstract: A rotary valve having a fluid inlet and a fluid outlet, the rotary valve including a housing for mounting in a fluid line controlling an hydraulic or pneumatic system, and a ball assembly mounted in the housing, the ball assembly including: at least two intersecting fluid flow passageways; and a check valve mounted in an inlet of one of the passageways; the ball assembly and the housing being configured and adapted to permit fluid flow through the housing from the inlet to the outlet in all positions of the ball assembly, and to permit fluid flow through the housing from the outlet to the inlet in all except one position of the ball assembly, in which one position the check valve maintains pressure in the fluid line for locking the hydraulic or pneumatic system.

Abstract: A gas-controlling valve for a sputum extracting device includes a valve stage, an axial rod set, a resilient body and a lid. The valve stage includes an axial sleeve, and the axial sleeve includes an air inlet pipe and an air outlet pipe extended therefrom and communicated to each other. One end of the axial rod set is inserted into the axial sleeve and has operational movement. The axial rod set includes a movable rod and the movable rod includes a through hole radially through the center thereof. The resilient body is arranged in the axial sleeve and both ends of the resilient body abut against corresponding end faces of the valve stage and the axial rod set. The lid covers the valve stage and is corresponding to the axial rod set such that another end of the axial rod set extends out of the lid.

Abstract: Apparatus and methods for hydraulic valve actuation of engine valves are disclosed. An exemplary embodiment of the present invention may include a plurality of slave piston assemblies that impart motion to the engine valves, wherein the motion is operable to open and close the engine valves. A dual diameter master piston assembly may be used to drive the plurality of slave pistons. The dual diameter master piston assembly may be divided into two or more elements with, for example, a spring bias or a button and T-slot assembly to hold the two elements together.

Abstract: A processing agent for synthetic fibers contains a lubricant, a functional improvement agent and an emulsifier, each containing a specified kinds of components by a specified amount and also by a specified total amount so as to have improved characteristics of preventing occurrence of fluffs, yard breaking and uneven dyeing when applied to synthetic fibers at a specified rate.

Abstract: A nano-size lead-free piezoceramic powder and a method of mechanochemically synthesizing the same are provided. The nano-size lead-free piezoceramic powder can have a basic component of (KxNa1-x)NbO3, where x ranges from 0 to 1. A weight ratio of a milling ball to a raw powder can be set, and then the milling ball and the raw powder can be provided into a milling container at the set ratio. Nano-size lead-free piezoceramic powder can be mechanochemically synthesized using a high-energy ball mill device.

Abstract: Rubber compound containing at least one nanoscale, magnetic filler and at least one non-magnetic filler. Vulcanisable mixture containing the rubber compound and at least one crosslinking agent and/or vulcanisation accelerator. Moulding obtainable from the vulcanisable mixture by heat treatment or action of an electrical, magnetic or electromagnetic alternating field.

Abstract: Various uses of fluoroalkenes, including tetrafluoropropenes, particularly (HFO-1234) in a variety of applications, including as blowing agents are disclosed.

Abstract: A silicon monoxide powder for secondary battery of the present invention is characterized in that the silicon monoxide powder for secondary battery is used in a negative-electrode material of a lithium secondary battery and a hydrogen gas content is not less than 80 ppm. In the silicon monoxide powder for secondary battery, a discharge capacity and a cycle capacity durability rate can dramatically be improved, and miniaturization and cost reduction of the lithium secondary battery can be achieved. In a method for producing the silicon monoxide powder for secondary battery of the present invention, a silicon dioxide powder and a silicon powder with a hydrogen gas content of not less than 30 ppm are mixed together, heated to temperatures of 1250° C. to 1350° C. to vaporize a silicon monoxide, wherein the silicon monoxide thus vaporized is deposited on a deposition substrate to be subsequently crushed.