Abstract: A coil component includes a magnetic core, a coil-wire portion wound on the magnetic core, and a case made of a resin covering the magnetic core and the coil-wire portion. The magnetic core is made of a pressed magnetic material powder and forms a closed magnetic circuit. The magnetic core has a lower surface configured to contact a mounting surface. The case has a lower surface configured to contact the mounting surface. The lower surface of the magnetic core includes an exposed-core portion exposed from the case. The exposed-core portion is flush with the lower surface of the case. This coil component enhances the efficiency of heat dissipation.

Abstract: A distribution transformer having a coil assembly mounted to a ferromagnetic core. The coil assembly includes a resin-encapsulated low voltage coil mounted to the core, a resin-encapsulated first high voltage coil disposed around the low voltage coil, and a resin encapsulated second high voltage coil disposed around the first high voltage coil. The first high voltage coil is separated from the low voltage coil by an annular first space, and the second high voltage coil is separated from the first high voltage coil by an annular second space. The low voltage coil and the first and second high voltage coils are arranged concentrically. The low voltage coil and the first and second high voltage coils have different axial lengths.

Abstract: Methods and apparatuses, wherein the method forms a first plurality of vias in a substrate, further comprising forming the first plurality of vias to be substantially the same height. The method forms a plurality of conductive traces external to the substrate and couples the plurality of conductive traces to the first plurality of vias: wherein the plurality of conductive traces and the first plurality of vias comprise a plurality of conductive turns and wherein the plurality of conductive turns are in a spiral configuration substantially within a first plane.

Abstract: Line conductors are provided on one principal surface of a magnetic layer, and line conductors are provided on the other principal surface of the magnetic layer. In addition, side conductors are provided on side surfaces of the magnetic layer to connect the line conductors in a coil shape. A non-magnetic layer is stacked at the one principal surface side of the magnetic layer, and a non-magnetic layer is stacked at the other principal surface side of the magnetic layer. Line conductors are provided within the non-magnetic layer, and line conductors are provided within the non-magnetic layer. Via-hole conductors are provided within the non-magnetic layer to connect the line conductors in parallel with the line conductors. In addition, via-hole conductors are provided within the non-magnetic layer to connect the line conductors in parallel with the line conductors.

Abstract: A high-voltage transformer and method of manufacturing are disclosed. The high-voltage transformer can include a transformer core having at least two core limbs, which are axially parallel and on which in each case a hollow-cylindrical coil having in each case at least one electrical winding is arranged. At least in partial regions of mutually facing surfaces of adjacently arranged coils, the respective surface regions of the coils can have a respective electrically isolating barrier structure, which can be integrated radially on an outside of the coil.

Abstract: An isolated DC-to-DC switching power supply includes an isolation transformer having a magnetic core, a first winding around the magnetic core, a first winding-shield around the magnetic core, a second winding-shield within the first winding-shield, and a second winding within the second winding-shield. There is no direct coupling between the first winding and the second winding since the second winding is enclosed within the second winding-shield and the second winding-shield is enclosed within the first winding-shield.

Abstract: An electronic apparatus includes a first power receiving unit that wirelessly receives power from a power supply apparatus, and a control unit that supplies, to the power supply apparatus, data for controlling supply of power from the power supply apparatus according to a mode of the electronic apparatus.

Abstract: A symmetric-type UPS power system based on a nine-phase phase-shifting autotransformer includes a three-phase AC power input terminal, a three-phase AC power output terminal, a nine-phase phase-shift autotransformer, a synchronized control device for controlling output of a three-phase inverter, a power-frequency isolation transformer and three circuits of output devices; wherein the three-phase AC input terminal of the nine-phase phase-shifting autotransformer is connected to the three-phase AC power input terminal, each circuit of the output devices includes a zero-sequence suppression commutating inductor, a three-phase six-pulse rectifier, a three-phase inverter and a filter inductor which are connected with each other in sequence, each circuit of the zero-sequence suppression commutating inductor is connected to the three-phase AC output terminal of the phase-shifting autotransformer, each circuit of the filter inductor is connected to the input terminal of the power-frequency isolation transformer.

Abstract: An inductor manufacturing method includes a first step of press bonding a Cu foil onto a non-magnetic resin sheet, a second step of forming a conductor pattern by performing etching on the Cu foil, a third step of press bonding another non-magnetic resin sheet onto the conductor pattern, and a via conductor formation step of forming a via conductor that penetrates through the other resin sheet and leads to the conductor pattern. The method further includes a step of forming a body in which resin having magnetism is provided outside of a coil, by press bonding magnetic-powder-containing resin sheets onto a multilayer body, obtained by a manufacturing method including the first to third steps and the via conductor formation step, and then thermally curing the magnetic-powder-containing resin sheets.

Abstract: A method is described for forming a confining current path (CCP) spacer in a CPP-GMR sensor. A first Cu spacer, an amorphous metal/alloy layer such as Hf, a second Cu spacer, and an oxidizable layer such as Al, Mg, or AlCu are sequentially deposited on a ferromagnetic layer. A pre-ion treatment (PIT) and ion assisted oxidation (IAO) transform the amorphous layer into a first metal oxide template and the oxidizable layer into a second metal oxide template both having Cu metal paths therein. A third Cu layer is deposited on the second metal oxide template. The amorphous layer promotes smoothness and smaller grain size in the oxidizable layer to minimize variations in the metal paths and thereby improves dR/R, R, and dR uniformity by 50% or more.

Abstract: Provided is a surface-coated barium titanate particulate for us in multilayer ceramic capacitors and for which the grain growth during high-temperature firing has been suppressed. Also provided is a production method for same. Barium titanate particulate obtained by means of a hydrothermal reaction, wherein the coated barium titanate particulate has an average particle diameter of at least 10 nm but less than 1000 nm, a Ba/Ti ratio of 0.80-1.20 inclusive, a c/a ratio of 1.001-1.010 inclusive, and a coating layer comprising at least one kind of metal compound selected from the group consisting of Mg, Ca, Ba, Mn and rare earth elements is included on the surface thereof. The coated barium titanate particulate according to the present invention is produced by means of a method including: (1) a step for obtaining barium titanate particulate by mixing an aqueous solution containing barium hydroxide and an aqueous solution containing titanium hydroxide at a Ba/Ti ratio of 0.80-1.

Abstract: A multilayer ceramic electronic component that has a multilayer portion having an outer layer portion adjacent region including an area in contact with an outer layer portion that forms a thermal-shock absorbing portion that includes curved ceramic layers and inner electrode layers smoothly varying in thickness from point to point. A region to an inside of the thermal-shock absorbing portion forms a normal multilayer portion that includes ceramic layers with less curvature than the ceramic layers in the thermal-shock absorbing portion and inner electrode layers with less variation in thickness from point to point in a direction along a principal surface of the outer layer portion than the inner electrode layers in the thermal-shock absorbing portion.

Abstract: A multilayer ceramic capacitor that includes dielectric layers made mainly of a perovskite compound containing Ba and Ti and optionally Zr and Hf, and inner electrodes having an average thickness of approximately 0.5 ?m or less. The Mg content of the dielectric layers is approximately in the range of 0?Mg?0.4 (parts by mole) based on a total of 100 parts by mole of Ti, Zr, and Hf. The proportion of Mg-containing defects in the inner electrodes is approximately 20% or more.

Abstract: A phase corrector for laser trimming a component, the phase corrector comprising: a first correction structure located to a first side of the component, the first correction structure comprising first and second correction regions at first and second distances from the component; and a second correction structure located to a second side the component, the second correction structure comprising third and fourth correction regions at third and fourth distances from the component.

Abstract: A capacitor anode including a tungsten sintered body having an average pore diameter of 0.3 ?m or less; and a method for producing the anode. The method includes forming tungsten powder into a molded body having a density (Dg) of 8 g/cm3 or more and then sintering the molded body to a density (Ds) of at least 1.15 times the density (Dg) to form a tungsten sintered body having an average pore diameter of 0.3 ?m or less.

Abstract: Self-assembled monolayer hybrid materials having a modified carboxylic acid deposited from the gas-phase onto a metal oxide substrate, methods of using targeted ?-carbon modified carboxylic acids to rapidly deposit activated organic molecules into a self-assembled monolayer on metal oxide substrates, and the self-assembled monolayer hybrid materials capable of being used in various industries, such as optoelectronics and separation science.

Abstract: A plurality of electrical storage elements (11) are electrically connected to each other, and parts of the peripheral surfaces of the electrical storage elements (11) contained in concave surfaces (29) are joined to the concave surfaces (29) with double-sided adhesive tape (35), so that the electrical storage elements (11) can be firmly fixed to a holder (27), and heat can be efficiently transferred from the electrical storage elements (11) to the holder (27) through the double-sided adhesive tape (35).

Abstract: Flexible electrical devices are provided that include a coated inner carbon nanotube electrode that has an exterior surface, an outer carbon nanotube electrode disposed on the exterior surface of the coated inner carbon nanotube electrode, and an overlap region in which the coated inner carbon nanotube electrode and the outer carbon nanotube electrode overlap one another, in which the device has a fiber-like geometry and first and second electrode ends. Methods are provided for fabricating an electrical component that includes a flexible electrical component having a fiber-like geometry and includes carbon nanotube electrodes.

Abstract: Carbon-based electrodes such as for incorporation into ultracapacitors or other high power density energy storage devices, include activated carbon, carbon black, binder and at least one molecular sieve material. The molecular sieve component can adsorb and trap water, which can facilitate the use of the device at higher voltage, such as greater than 3V. The molecular sieve material may be incorporated into the carbon-based electrodes or formed as a layer over a carbon-based electrode surface.

Abstract: There is disclosed a combined hydrothermal and activation process that uses hemp bast fiber as the precursor to achieve graphene-like carbon nanosheets, a carbon nanosheet comprising carbonized crystalline cellulose, a carbon nanosheet formed by carbonizing crystalline cellulose, a capacitative structure comprises interconnected carbon nanosheets of carbonized crystalline cellulose, a method of forming a nanosheet comprising carbonizing crystalline cellulose to create carbonized crystalline cellulose. The interconnected two-dimensional carbon nanosheets also contain very high levels of mesoporosity.

Abstract: An electricity storage device including at least one electrode having one metal tab lead and plural electrode plates. The electrode plate includes a metal foil, an undercoat layer formed on one surface or both surfaces of the metal foil, and an active material layer formed on a surface of the undercoat layer. The undercoat layer includes a carbon material and the undercoat layer has a coating weight per unit area of one surface of 0.01 to 3 g/m2. A sum total thickness of the metal foils in the electrode plates is 0.2 to 2 mm. The electrode plates are welded to each other in a portion where the undercoat layer is formed and no active material layer is formed. Further, at least one of the electrode plates is welded to the metal tab lead in a portion where the undercoat layer is formed and no active material layer is formed.

Abstract: The invention concerns a positioning spacer for positioning electrical energy storage elements, such as supercapacitors or ultracapacitors connected in series, in an electrical energy storage module, wherein the spacer comprises a first support part and a second part forming a rim relative to the first part, the positioning spacer comprising, at the free end of the second part thereof, at least one housing recess, the spacer being made from an electrically insulating material.

Abstract: One object is to provide a power storage device including an electrolyte using a room-temperature ionic liquid which includes a univalent anion and a cyclic quaternary ammonium cation having excellent reduction resistance. Another object is to provide a high-performance power storage device. A room-temperature ionic liquid which includes a cyclic quaternary ammonium cation represented by a general formula (G1) below is used for an electrolyte of a power storage device. In the general formula (G1), one or two of R1 to R5 are any of an alkyl group having 1 to 20 carbon atoms, a methoxy group, a methoxymethyl group, and a methoxyethyl group. The other three or four of R1 to R5 are hydrogen atoms. A? is a univalent imide anion, a univalent methide anion, a perfluoroalkyl sulfonic acid anion, tetrafluoroborate (BF4?), or hexafluorophosphate (PF6?).

Abstract: In an aligning device, in plan view, a first recess of a first transfer jig allows an entire region of a second recess of the first transfer jig to be situated within the first recess of the first transfer jig by a predetermined interval. A first recess of a second transfer jig allows an entire region of a second recess of the second transfer jig to be situated within the first recess of the second transfer jig by a predetermined interval. When the first transfer jig and the second transfer jig overlap each other, the first recess of the second transfer jig allows the entire region of the second recess of the first transfer jig to be situated within the first recess of the second transfer jig by a predetermined interval. The alignment object is transferred from the cavity of said first jig to a cavity of said second jig.

Abstract: An electrical switch for mounting into a surface of a component, has at least one shoulder region to be brought closer to this surface and which has at least one seal, which is assigned to an opening in the surface. The shoulder region has at least one region with at least one assigned indicator component, wherein this assignment is changed in terms of position in the case of complete sealing action of the seal compared to an incomplete sealing action of the seal.

Abstract: An electrical switch and a flashlight employing the switch may comprise a base having three electrical conductors thereon and an electrically conductive flexible dome adjacent the base. The flexible dome has plural longer legs extending from its dome and in electrical contact with a first conductor, has a shorter leg extending from its dome and overlying a second conductor, and has its dome overlying a third conductor. A spring may extend from the base of the switch. A pushbutton may be moved to apply sufficient force to cause the shorter leg to contact the second conductor and the dome to contact the third conductor. A spring may be between the pushbutton and the flexible dome to couple force to the flexible dome.

Abstract: A normally-open switch comprises: a housing; a push button that is mounted for movement with respect to the housing; a stationary terminal; a moveable terminal that, when in contact with the stationary terminal, completes a circuit; and one or more positive stops that engage the stationary terminal. When a force is applied to the push button, the moveable terminal makes contact with the stationary terminal, thus closing the circuit. When the force is removed, the moveable terminal breaks contact with the stationary terminal, thus opening the circuit. The one or more positive stops apply pressure to and maintain a predetermined position of the stationary terminal, but do not interfere with or impede the moveable terminal.

Abstract: A rotary switch housing (100), comprising a bottom wall (102) for mounting of the switch housing (100) to a mounting base, and side walls (104, 106) extending from the bottom wall (102), the switch housing further comprising an arc chamber (120) for extinguishing an electric arc, and a gas exhaust channel (130) for exhausting gas developed in the arc chamber (120) out of the housing (100). The gas exhaust channel (130) comprises a guiding portion (130A), which is substantially parallel to a side wall (106) of the housing (100) for leading the gases to a direction away from the bottom wall (102) of the housing (100).

Abstract: A portable load-breaking and pickup apparatus for handling a load associated with a power distribution system is disclosed. The apparatus includes first and second spaced-apart connectors electrically connected by a load break assembly. The load break assembly includes first and second outer contacts configured for mating engagement and configured to provide a low-resistance path between the first and second connectors, and first and second inner contacts configured for mating engagement and configured to provide a high-resistance path between the first and second connectors. The load break assembly transitions from an open position to a closed position in two stages. The two stages include closing the high-resistance path prior to closing the low-resistance path, and closing the low-resistance path after the high-resistance path has been closed.

Abstract: A stationary contact for a rotary switch is provided. The stationary contact includes a connection portion for connecting to a conductor and a first portion being a contact portion for connecting the stationary contact to a rotary contact. The stationary contact also includes a second portion being a support portion for supporting the stationary contact to a switch body. The contact portion and support portion extend in the same angle from the connection portion. A method of mounting a rotary switch is also provided.

Abstract: A vacuum interrupter includes a vacuum vessel configured with an insulator, a fixed end plate and a movable end plate fixed to both ends of the insulator. A fixed contact and a movable contact face each other inside the vacuum vessel. A movable conductor has one end fixed to the movable contact and the other end is extracted outside the vacuum vessel. A bellows has an accordion portion expanding and contracting with linear movement of the movable conductor. A bellows support member having a cylindrical shape is fixed to the vacuum vessel so that the accordion portion of the bellows contacts the inside of the bellows support member.

Abstract: A current interruption device is provided with a first conducting member that is fixed to a casing, a second conducting member that is disposed at a position opposed to the first conducting member, a first deforming member, and a second deforming member. The first deforming member makes contact with the second conducting member when pressure in the casing is equal to or less than a predetermined value, and is configured not to make contact with the second conducting member when the pressure in the casing exceeds the predetermined value. The second deforming member is provided with a projection in a shape projecting toward a center portion of the second conducting member. A restricting structure that restricts a movement of the first deforming member is provided on the first conducting member. A restricting structure that restricts a movement of the second deforming member is provided on the second conducting member.

Abstract: The present disclosure provides apparatus, systems, and methods for preventing out-of-synchronism closing between power systems. An intelligent electronic device (IED) apparatus may include a control component and a delay component. The control component is configured to selectively control opening and closing of a breaker. The control component selectively outputs a close signal to cause the breaker to connect a first portion of a power delivery system to another portion of the power delivery system. The delay component is configured to delay output of the close signal to the breaker. The delay component includes circuitry independent from control by the control component and the delay component is inconfigurable from a remote location.

Abstract: A polarized electromagnetic relay including an electromagnet; a pair of magnetic pole pieces driven by the electromagnet; a permanent magnet attached to the magnetic pole pieces; a contact section including a first fixed contact member with a normally open fixed contact, a first movable contact member with a normally open movable contact, a second fixed contact member with a normally closed fixed contact, and a second movable contact member with a normally closed movable contact; and a transmission member to which the magnetic pole pieces is attached. In accordance with a rectilinear movement of the magnetic pole pieces in parallel to a coil center axis, the transmission member rectilinearly moves in parallel to the center axis and thereby causes the normally open and closed movable contacts to perform an opening or closing operation in a mutually interlocked manner.

Abstract: Embodiments disclose a circuit breaker shock absorber apparatus configured to absorb impact due to blow-off of one or more circuit breaker contact arms. The circuit breaker shock absorber apparatus has a base directly or indirectly coupled to a circuit breaker housing and an absorber body comprising a damping material having a tangent delta at 10% strain and 10 Hz and at room temperature of greater than about 0.45, and a durometer of less than about 60 per ASTM D2240 Type A. Circuit breaker shock absorber assemblies and methods of operating the breaker shock absorber assemblies are provided, as are other aspects.

Abstract: A modular electrical switch device including: a cut-off unit including unitary cut-off units; an actuating unit including an actuating module of the unitary cut-off units; a removable electrical control module including an adaptive connection mechanism configured to interconnect with an actuating coil of an electromagnetic actuator when the removable module is positioned on the actuating module; a quick attachment mechanism allowing the removable attachment of the actuating unit onto the cut-off unit and including a coupling hook configured to attach and hold the cut-off unit to the actuating unit, and to engage with an actuating device of a unitary cut-off unit.

Abstract: A circuit interrupting safety device (CISD) interrupts the flow of current through a pair of lines extending between a source of power and a load. The CISD includes a column reset assembly functioning as a circuit breaker and latching device, a relay circuit including a solenoid, and a fault detecting circuit packaged in a circuit assembly.

Abstract: The fast switch includes: a housing; a vacuum interrupter installed in the housing, connected to a main circuit, and configured to open and close the main circuit; a contact spring coupled to a mover of the vacuum interrupter, and configured to provide a contact force; an insulating rod connected to the contact spring; a permanent magnet actuator connected to a lower end of the insulating rod, and configured to provide a switching driving force; a first capacitor configured to provide a discharge current to a coil of the permanent magnet actuator; a driving coil connected to a lower end of the permanent magnet actuator; and a second capacitor configured to provide a discharge current to the driving coil.

Abstract: A RF electrode for generating, plasma in a plasma chamber comprising an optical feedthrough. A plasma chamber comprising an RF electrode and a counter-electrode with a substrate support for holding a substrate, wherein a high-frequency alternating field for generating the plasma can be formed between the RF electrode and the counter-electrode. The chamber comprising an RF electrode with an optical feedthrough. A method, for in situ analysis or in situ processing of a layer or plasma in a plasma chamber, wherein the layer is disposed on counter-electrode and an RF electrode is disposed on the side lacing the layer. Selection of an RF electrode having an optical feedthrough, and at least one step in which electromagnetic radiation is supplied through the optical feedthrough for purposes of analysis or processing of the layer or the plasma, and by at least one other step in which the scattered or emitted or reflected radiation is supplied to an analysis unit.

Abstract: Provided are a field emission device and a method of manufacturing the same. The field emission device includes an anode electrode and a cathode electrode which are opposite to each other, a counter layer provided on the anode electrode, and a field emitter provided on the cathode electrode and facing the counter layer. Herein, the field emitter includes a carbon nanotube emitting cold electrons and a photoelectric material emitting photo electrons.

Abstract: Provided is an integrated gas discharge tube. In the integrated gas discharge tube, the structure of the gas discharge tube is regulated into an upper cover and an insulative base, and the internal side surface and the external side surface of the bottom surface of the insulative base are respectively subject to electrode integration, so that the discharge effect of the gas discharge tube is effectively increased and the preparation process and the preparation flow of a multi-terminal-to-ground gas discharge tube are greatly simplified so as to greatly simplify the preparation process and to realize batch production and high integration of the gas discharge tube. Also provided is a preparation method for an integrated gas discharge tube.

Abstract: A plasma processing apparatus capable of optimizing a plasma process is provided. The plasma processing apparatus includes a control unit for controlling a minimum energy and a maximum energy of ions incident onto a substrate independently of each other such that ion energy of the ions are concentrated at a first energy band and a second energy band respectively. In the plasma processing apparatus, the oxide film is etched to form a hole within the oxide film, the first energy band is lower than a first energy value at which the oxide film is etched while the organic film is not etched, and the second energy band is higher than a second energy value at which an etching yield at an inclined surface of the hole is higher than an etching yield of an upper surface of the organic film.

Abstract: A method of processing one or more surfaces is provided, comprising: providing a switchable ion gun which is switchable between a cluster mode setting for producing an ion beam substantially comprising ionized gas clusters for irradiating a surface and an atomic mode setting for producing an ion beam substantially comprising ionized gas atoms for irradiating a surface; and selectively operating the ion gun in the cluster mode by mass selecting ionized gas clusters using a variable mass selector thereby irradiating a surface substantially with ionized gas clusters or the atomic mode by mass selecting ionized gas atoms using a variable mass selector thereby irradiating a surface substantially with ionized gas atoms.

Abstract: The present invention provides a composite charged particle beam device which is provided with two or more charged particle beam columns and enables high-resolution observation while a sample is placed at the position of a cross point. The present invention has the following configuration. A composite charged particle beam device is provided with a plurality of charged particle beam columns (101a, 102a), and is characterized in that a sample (103) is disposed at the position of an intersection point (171) where the optical axes of the plurality of columns intersect, a component (408a, 408b) that forms the tip of an objective lens of the charged particle beam column (102a) is detachable, and by replacing the component (408a, 408b), the distance between the intersection point (171) and the tip of the charge particle beam column can be changed.

Abstract: A method and apparatus for directing light or gas or both to a specimen positioned within about 2 mm from the lower end of a charged particle beam column. The charged particle beam column assembly includes a platform defining a specimen holding position and has a set of electrostatic lenses each including a set of electrodes. The assembly includes a final electrostatic lens that includes a final electrode that is closest to the specimen holding position. This final electrode defines at least one internal passageway having a terminus that is proximal to and directed toward the specimen holding position.

Abstract: A charged particle beam writing apparatus includes plural conversion processing units to perform data conversion processing in parallel for writing data of each processing region obtained by virtually dividing the writing region of a target object into plural processing regions, a transmission unit to input a part of processing data of one of the plural processing regions for which data conversion processing has been performed, one part at a time, totally as n divided processing data, and sequentially transmit the n divided processing data such that the (n?1) th divided processing data is transmitted while the n-th divided processing data is being input, a deflection control circuit to control a deflection amount for deflecting a charged particle beam, based on one of the n divided processing data transmitted sequentially, and a writing unit to write a pattern by deflecting the charged particle beam based on the deflection amount.

Abstract: There is provided a charged particle beam apparatus radiating a charged particle beam to a specimen so as to acquire an image of the specimen, the charged particle beam apparatus including: a charged particle gun that generates the charged particle beam; an electron optical system that radiates the charged particle beam emitted from the charged particle gun onto a surface of the specimen so as to scan the surface of the specimen; a detecting unit that detects secondary electrons or reflection electrons emitted from the specimen, and converts the electrons into pulse signals; a pulse signal detecting circuit that detects time detecting information regarding time of the pulse signals converted by the detecting unit, and peak value detecting information regarding each peak value of the pulse signals; and an image processing unit that generates luminance gradation of the acquired image based on a time detecting signal and a peak value detecting signal of the pulse signals detected by the pulse signal detecting ci

Abstract: A method of imaging a specimen comprises directing a beam to irradiate a specimen; detecting radiation emanating from the specimen; scanning the beam along a path; for each sample point in said path, recording a measurement set M={(Dn, Pn)}, where Dn is the detector output as a function of value Pn of measurement parameter P; deconvolving M and spatially resolving it into a set representing depth-resolved imagery of the specimen, whereby, at point pi within the specimen, in a first probing session, irradiating, in a first beam configuration, pi with Point Spread Function F1, whereby said beam configuration is different to P; in at least a second probing session, irradiating, in a second beam configuration, pi with Point Spread Function F2 which overlaps partially with F1 in a zone Oi in which pi is located; sing an Independent Component Analysis algorithm to perform spatial resolution in Oi.

Abstract: In a sputter deposition tool (100) of the type in which an ion source (101) generates a beam directed at a sputtering target, the sputtering target comprises an elongated exterior skirt (102) and a generally circular insert (103) positioned within the skirt, the surfaces of the skirt and insert being relatively coplanar and forming the surface of the target, with the elongated dimension of the skirt being axially oriented toward the ion source. The insert is rotated within the skirt to one of several positions during use of the target by the sputter deposition tool, to distribute wear of the target around the rotating insert and thus increase the utilization and useful life of the overall target assembly.

Abstract: The present application discloses methods, systems and devices for using charged particle beam tools to pattern and inspect a substrate. The inventors have discovered that it is highly advantageous to use patterns generated using the Hadamard transform as alignment and registration marks (Hadamard targets) for multiple-column charged particle beam lithography and inspection tools. Further, superior substrate alignment and layer-to-layer pattern registration accuracy can be achieved using Hadamard targets patterned in edge-proximal portions of the substrate that are typically stripped bare of resist prior to lithography, in addition to Hadamard targets patterned in inner substrate portions. High-order Hadamard targets can also be patterned and imaged to obtain superior column performance metrics for applications such as super-rapid beam calibration DOE, column matching, and column performance tracking. Superior alignment and registration, and column parameter optimization, allow significant yield gains.