Patents Issued in May 25, 2017
  • Publication number: 20170148790
    Abstract: A process for etching a bulk integrated circuit substrate to form features on the substrate, such as fins, having substantially vertical walls comprises forming an etch stop layer beneath the surface of the substrate by ion implantation, e.g., carbon, oxygen, or boron ions or combinations thereof, masking the surface with a patterned etching mask that defines the features by openings in the mask to produce a masked substrate and etching the masked substrate to a level of the etch stop layer to form the features. In silicon substrates, ion implantation takes place along a silicon crystalline lattice beneath the surface of the substrate. The etchant comprises a halogen material that etches undoped silicon faster than the implants-rich silicon layer. This produces a circuit where the fins do not taper away from the vertical where they meet the substrate, and corresponding products and articles of manufacture having these features.
    Type: Application
    Filed: January 27, 2017
    Publication date: May 25, 2017
    Applicant: International Business Machines Corporation
    Inventors: Hong HE, Siva Kanakasabapathy, Yunpeng Yin, Chiahsun Tseng, Junli Wang
  • Publication number: 20170148791
    Abstract: Macro-transistor structures are disclosed. In some cases, the macro-transistor structures have the same number of terminals and properties similar to long-channel transistors, but are suitable for analog circuits in deep-submicron technologies at deep-submicron process nodes. The macro-transistor structures can be implemented, for instance, with a plurality of transistors constructed and arranged in series, and with their gates tied together, generally referred to herein as a transistor stack. One or more of the serial transistors within the stack can be implemented with a plurality of parallel transistors and/or can have a threshold voltage that is different from the threshold voltages of other transistors in the stack. Alternatively, or in addition, one or more of the serial transistors within the macro-transistor can be statically or dynamically controlled to tune the performance characteristics of the macro-transistor.
    Type: Application
    Filed: February 6, 2017
    Publication date: May 25, 2017
    Applicant: INTEL CORPORATION
    Inventors: SAMI HYVONEN, JAD B. RIZK, FRANK O'MAHONY
  • Publication number: 20170148792
    Abstract: A semiconductor device includes: a semiconductor substrate including an active region and a gate structure on the active region. The gate structure includes a gate insulating film; a work function adjusting film on the first gate insulating film; a separation film on the work function adjusting film; and an oxygen capturing film on the separation film and configured to capture oxygen introduced from the outside of the first gate structure. The oxygen capturing film is spaced apart from a top surface of the first gate insulating film by about 70 ? to about 80 ?.
    Type: Application
    Filed: November 18, 2016
    Publication date: May 25, 2017
    Inventors: Ju-youn Kim, Hyun-jo KIM
  • Publication number: 20170148793
    Abstract: Silicon fins are formed in a bulk silicon substrate and thereafter trench isolation regions are formed between each silicon fin. The silicon fins in nFET and pFET device regions are then recessed. A relaxed silicon germanium alloy fin portion is formed on a topmost surface of each recessed silicon fin portion or on exposed surface of the substrate. A compressively strained silicon germanium alloy fin portion is formed on each relaxed silicon germanium alloy fin portion within the pFET device region, and a strained silicon-containing fin portion is formed on each relaxed silicon germanium alloy fin portion within the nFET device region. Sidewall surfaces of each compressively strained silicon-containing germanium alloy fin portion and each tensile strained silicon-containing fin portion are then exposed. A functional gate structure is provided on the exposed sidewall surfaces of each compressively strained silicon-containing germanium alloy fin portion and each tensile strained silicon-containing fin portion.
    Type: Application
    Filed: February 3, 2017
    Publication date: May 25, 2017
    Inventors: Kangguo CHENG, Bruce B. DORIS, Pouya HASHEMI, Ali KHAKIFIROOZ, Alexander REZNICEK
  • Publication number: 20170148794
    Abstract: Multi-time programmable (MTP) memory cells, integrated circuits including MTP memory cells, and methods for fabricating MTP memory cells are provided. In an embodiment, an MTP memory cell includes a semiconductor substrate, a p-well formed in the semiconductor substrate, and an n-well formed in the semiconductor substrate and isolated from the p-well. The MTP memory cell further includes a p-channel transistor disposed over the n-well and including a transistor gate. Also, the MTP memory cell includes a p-channel capacitor disposed over the p-well and including a capacitor gate. The capacitor gate is coupled to the transistor gate.
    Type: Application
    Filed: November 25, 2015
    Publication date: May 25, 2017
    Inventors: Pengfei Guo, Shyue Seng Tan
  • Publication number: 20170148795
    Abstract: A two-transistor memory cell based upon a thyristor for an SRAM integrated circuit is described together with a process for fabricating it. The memory cell can be implemented in different combinations of MOS and bipolar select transistors, or without select transistors, with thyristors in a semiconductor substrate with shallow trench isolation. Standard CMOS process technology can be used to manufacture the SRAM.
    Type: Application
    Filed: February 7, 2017
    Publication date: May 25, 2017
    Inventors: Harry Luan, Bruce L. Bateman, Valery Axelrad, Charlie Cheng, Christophe J. Chevallier
  • Publication number: 20170148796
    Abstract: A method for forming a semiconductor device includes depositing spacer material on a first sidewall and a second sidewall of a fin formed on a substrate. The spacer material is removed from the first sidewall. A selective epitaxy process is performed on the first sidewall of the fin.
    Type: Application
    Filed: November 24, 2015
    Publication date: May 25, 2017
    Inventors: Veeraraghavan S. Basker, Kangguo Cheng, Ali Khakifirooz
  • Publication number: 20170148797
    Abstract: A semiconductor device may include a first active fin, a plurality of second active fins, a first source/drain layer structure, and a second source/drain layer structure. The first active fin may be on a first region of a substrate. The second active fins may be on a second region of the substrate. The first and second gate structures may be on the first and second active fins, respectively. The first source/drain layer structure may be on a portion of the first active fin that is adjacent to the first gate structure. The second source/drain layer structure may commonly contact upper surfaces of the second active fins adjacent to the second gate structure. A top surface of the second source/drain layer structure may be further from the surface of the substrate than a top surface of the first source/drain layer structure is to the surface of the substrate.
    Type: Application
    Filed: November 15, 2016
    Publication date: May 25, 2017
    Inventors: Jin-Bum KIM, Myung-Gil KANG, Kang-Hun MOON, Cho-Eun LEE, Su-Jin JUNG, Min-Hee CHOI, Yang XU, Dong-Suk SHIN, Kwan-Heum LEE, Hoi-Sung CHUNG
  • Publication number: 20170148798
    Abstract: A method for forming a semiconductor device includes depositing spacer material on a first sidewall and a second sidewall of a fin formed on a substrate. An angled ion implantation process is performed at a predetermined angle on a first sidewall of a fin to cause damage to the first sidewall of the fin. The damage caused to the first sidewall of the fin is removed.
    Type: Application
    Filed: January 24, 2017
    Publication date: May 25, 2017
    Inventors: Veeraraghavan S. Basker, Kangguo Cheng, Ali Khakifirooz
  • Publication number: 20170148799
    Abstract: The method includes forming a first opening in a dielectric layer exposing a source drain region of an SRAM device and forming a second opening in the dielectric layer exposing a source drain region of a logic device, forming a third opening in the dielectric layer exposing a gate of the SRAM device and forming a fourth opening in the dielectric layer exposing a gate of the logic device, forming a first sidewall spacer in the third opening and forming a second sidewall spacer in the fourth opening, recessing a portion of the first sidewall spacer without recessing the second sidewall spacer, forming a strapped contact in the first and third openings, the strapped contact creates an electrical connection between the source drain region of the SRAM device and the gate of the SRAM device, the electrical connection is directly above a remaining portion of the first sidewall spacer.
    Type: Application
    Filed: December 1, 2016
    Publication date: May 25, 2017
    Inventors: Veeraraghavan S. Basker, Kangguo Cheng, Ali Khakifirooz
  • Publication number: 20170148800
    Abstract: A three-dimensional memory device includes an alternating stack of electrically conductive layers and insulating layers located over a substrate, an array of memory stack structures, each memory stack structure extending through the alternating stack and including a memory film and a semiconductor channel laterally surrounded by the memory film, and an array of dielectric pillars located between the alternating stack and the substrate.
    Type: Application
    Filed: February 8, 2016
    Publication date: May 25, 2017
    Inventors: Masatoshi NISHIKAWA, Jin LIU, Chun GE, Yanli ZHANG
  • Publication number: 20170148801
    Abstract: An antifuse-type one time programming memory cell, comprising: a first select transistor, wherein a first drain/source terminal of the first select transistor is connected with a bit line, and a gate terminal of the first select transistor is connected with a word line; an antifuse transistor, wherein a first drain/source terminal of the antifuse transistor is connected with a second drain/source terminal of the first select transistor, and a gate terminal of the antifuse transistor is connected with an antifuse control line; and a second select transistor, wherein a first drain/source terminal of the second select transistor is connected with a second drain/source terminal of the antifuse transistor, a gate terminal of the second select transistor is connected with the word line, and a second drain/source terminal of the second select transistor is connected with the bit line.
    Type: Application
    Filed: February 3, 2017
    Publication date: May 25, 2017
    Inventors: Wei-Zhe Wong, Meng-Yi Wu, Ping-Lung Ho
  • Publication number: 20170148802
    Abstract: Some embodiments include an integrated assembly with a semiconductor channel material having a boundary region where a more-heavily-doped region interfaces with a less-heavily-doped region. The more-heavily-doped region and the less-heavily-doped region have the same majority carriers. The integrated assembly includes a gating structure adjacent the semiconductor channel material and having a gating region and an interconnecting region of a common and continuous material. The gating region has a length extending along a segment of the more-heavily-doped region, a segment of the less-heavily-doped region, and the boundary region. The interconnecting region extends laterally outward from the gating region on a side opposite the semiconductor channel region, and is narrower than the length of the gating region. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: November 23, 2015
    Publication date: May 25, 2017
    Inventors: Justin B. Dorhout, Kunal R. Parekh, Martin C. Roberts, Mohd Kamran Akhtar, Chet E. Carter, David Daycock
  • Publication number: 20170148803
    Abstract: Methods for forming semiconductor structures are provided. The method for forming the semiconductor structure includes forming a word line cell over a substrate and forming a dielectric layer over the word line cell. The method further includes forming a conductive layer over the dielectric layer and polishing the conductive layer until the dielectric layer is exposed. The method further includes forming an oxide layer on a top surface of the conductive layer and removing portions of the conductive layer not covered by the oxide layer to form a memory gate.
    Type: Application
    Filed: February 6, 2017
    Publication date: May 25, 2017
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Fu-Ting SUNG, Chung-Chiang MIN, Wei-Hang HUANG, Shih-Chang LIU, Chia-Shiung TSAI
  • Publication number: 20170148804
    Abstract: A vertically integrated circuit device can include a substrate having a first region reserved for first functional circuits of the vertically integrated circuit device, where the first functional circuits has a substantially constant top surface level across the first region and having a second region reserved for second functional circuits of the vertically integrated circuit device and spaced apart from the first region. The second functional circuits can have a varied top surface level across the second region. A doped oxidation suppressing material can be included in the substrate and can extend from the first region to the second region at an interface of the substrate with the first functional circuits and the second functional circuits, respectively.
    Type: Application
    Filed: February 7, 2017
    Publication date: May 25, 2017
    Inventors: Dong-Sik Lee, Youngwoo Kim, Jinhyun Shin, Jung Hoon Lee
  • Publication number: 20170148805
    Abstract: A vertical memory device including dual memory cells per level in each memory opening can have dielectric separator dielectric structures that protrude into a facing pair of sidewalls of the memory stack structure within the memory opening. A pair of inactive sections of a vertical semiconductor channel facing the dielectric separator dielectric structures is laterally recessed from control gate electrodes. Control of the threshold voltage of such a vertical memory device can be enhanced because of the dielectric separator dielectric structures. The fringe field from the control gate electrodes is weaker due to an increased distance between the control gate electrodes and the inactive sections of the vertical semiconductor channel. The memory stack structure can have concave sidewalls that contact the dielectric separator dielectric structures and convex sidewalls that protrude toward the control gate electrodes.
    Type: Application
    Filed: January 28, 2016
    Publication date: May 25, 2017
    Inventors: Masatoshi NISHIKAWA, Hiroaki IUCHI, Masafumi MIYAMOTO
  • Publication number: 20170148806
    Abstract: According to one embodiment, a semiconductor memory device includes a substrate, a stacked body, and a columnar part. The stacked body is provided on the substrate. The stacked body includes a plurality of first insulating films and a plurality of electrode films alternately stacked one layer by one layer. The columnar part includes a semiconductor pillar provided in the stacked body and extending in a stacking direction of the stacked body, and a memory film provided between the semiconductor pillar and the stacked body. The electrode films include a first portion provided on a side part of the columnar part, a second part contacting the first portion and provided further outside the columnar part, and a first conductive layer covering an upper surface and a lower surface of the first portion.
    Type: Application
    Filed: February 19, 2016
    Publication date: May 25, 2017
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Kotaro NODA, Natsuki KIKUCHI, Masaru KITO
  • Publication number: 20170148807
    Abstract: According to one embodiment, a semiconductor device includes a substrate; a stacked body; a columnar portion; a plate portion; and a sidewall insulating film. The thermal expansion coefficient of the substrate is ?1. The stacked body includes a plurality of electrode layers and a memory cell array. The columnar portion includes a semiconductor body and a charge storage film. The plate portion includes a first layer and a second layer. The thermal expansion coefficient of the first layer is the ?2 being different from the ?1. The thermal expansion coefficient of the second layer is the ?3 being different from the ?2. The value of the ?3 is in a direction from the value of the ?2 toward the value of the ?1. The second layer faces the major surface of the substrate continuously in the memory cell array.
    Type: Application
    Filed: March 10, 2016
    Publication date: May 25, 2017
    Applicant: Kabushiki Kaisha Toshiba
    Inventor: Yasuhiro SHIMURA
  • Publication number: 20170148808
    Abstract: An alternating stack of sacrificial material layers and insulating layers is formed over a substrate. Replacement of sacrificial material layers with electrically conductive layers can be performed employing a subset of openings. A predominant subset of the openings is employed to form memory stack structures therein. A minor subset of the openings is employed as access openings for introducing an etchant to remove the sacrificial material layers to form lateral recesses and to provide a reactant for depositing electrically conductive layers in the lateral recesses. By distributing the access openings across the entirety of the openings and eliminating the need to employ backside trenches for replacement of the sacrificial material layers, the size and lateral extent of backside trenches can be reduced to a level sufficient to accommodate only backside contact via structures.
    Type: Application
    Filed: July 26, 2016
    Publication date: May 25, 2017
    Inventors: Masatoshi NISHIKAWA, Masafumi MIYAMOTO, James KAI
  • Publication number: 20170148809
    Abstract: Split memory cells can be provided within an alternating stack of insulating layers and word lines. At least one lower-select-gate-level electrically conductive layers and/or at least one upper-select-level electrically conductive layers without a split memory cell configuration can be provided by limiting the levels of separator insulator structures within the levels of the word lines. At least one etch stop layer can be formed above at least one lower-select-gate-level spacer material layer. An alternating stack of insulating layers and spacer material layers is formed over the at least one etch stop layer. Separator insulator structures are formed through the alternating stack employing the etch stop layer as a stopping structure. Upper-select-level spacer material layers can be subsequently formed. The spacer material layers and the select level material layers are formed as, or replaced with, electrically conductive layers.
    Type: Application
    Filed: July 26, 2016
    Publication date: May 25, 2017
    Inventors: Masatoshi NISHIKAWA, Masafumi MIYAMOTO, Hiroyuki OGAWA
  • Publication number: 20170148810
    Abstract: A three-dimensional memory device includes an alternating stack of electrically conductive layers and insulating layers located over a substrate, an array of memory stack structures. An alternating sequence of support pedestal structures and conductive rail structures extending along a same horizontal direction are provided between the substrate and the alternating stack. Each memory stack structure straddles a vertical interface between a conductive rail structure and a support pedestal structure. A semiconductor channel in each memory stack structure contacts a respective conductive rail structure, and is electrically isolated from an adjacent support pedestal structure by a portion of a memory film. The conductive rail structures can function as source regions of memory device.
    Type: Application
    Filed: August 1, 2016
    Publication date: May 25, 2017
    Inventors: James Kai, Johann Alsmeier, Jin Liu, Yanli Zhang
  • Publication number: 20170148811
    Abstract: A three-dimensional memory device includes an alternating stack of electrically conductive layers and insulating layers located over a substrate, an array of memory stack structures. A source conductive line structure is provided between the substrate and the alternating stack. The source conductive line structure includes a plurality of parallel conductive rail structures extending along a same horizontal direction and adjoined to a common conductive straddling structure. Each memory stack structure straddles a vertical interface between a conductive rail structure and a support matrix. A semiconductor channel in each memory stack structure contacts a respective conductive rail structure and the support matrix.
    Type: Application
    Filed: November 17, 2016
    Publication date: May 25, 2017
    Inventors: Tong ZHANG, Johann ALSMEIER, James KAI, Jin LIU, Yanli ZHANG
  • Publication number: 20170148812
    Abstract: A 3D array inside a substrate trench. In one aspect, an apparatus includes a substrate, a trench region in the substrate that is defined by a trench wall, and a 3D array having stacked word line layers formed in the trench region that follow a contour of the trench wall. In one aspect, a method includes forming a trench region in a substrate that has a top surface, the trench region is defined by a trench wall, and forming a 3D array having stacked word line layers in the trench region so that the stacked word line layers follow a contour of the trench wall and have exposed ends substantially at a level of the top surface.
    Type: Application
    Filed: November 18, 2016
    Publication date: May 25, 2017
    Inventor: Fu-Chang Hsu
  • Publication number: 20170148813
    Abstract: A semiconductor device according to an embodiment of the invention includes a pipe channel layer including a first portion and a second portion protruding from the first portion, first channel pillars protruding from the second portion of the pipe channel layer, and second channel pillars protruding from the first portion of the pipe channel layer.
    Type: Application
    Filed: February 1, 2017
    Publication date: May 25, 2017
    Applicant: SK hynix Inc.
    Inventors: Hyun Ho LEE, Ji Hye SHIN
  • Publication number: 20170148814
    Abstract: A flash device comprising a well and a U-shaped flash cell string, the U-shaped flash cell string built directly on a substrate adjacent the well. The U-shaped flash cell string comprises one portion parallel to a surface of the substrate, comprising a junctionless bottom pass transistor, and two portions perpendicular to the surface of the substrate that comprise a string select transistor at a first top of the cell string, a ground select transistor at a second top of the cell string, a string select transistor drain, and a ground select transistor source.
    Type: Application
    Filed: February 2, 2017
    Publication date: May 25, 2017
    Applicant: Conversant Intellectual Property Management Inc.
    Inventor: Hyoung Seub RHIE
  • Publication number: 20170148815
    Abstract: A nonvolatile semiconductor memory device, includes: a stacked structural unit including a plurality of insulating films alternately stacked with a plurality of electrode films in a first direction; a selection gate electrode stacked on the stacked structural unit in the first direction; an insulating layer stacked on the selection gate electrode in the first direction; a first semiconductor pillar piercing the stacked structural unit, the selection gate electrode, and the insulating layer in the first direction, a first cross section of the first semiconductor pillar having an annular configuration, the first cross section being cut in a plane orthogonal to the first direction; a first core unit buried in an inner side of the first semiconductor pillar, the first core unit being recessed from an upper face of the insulating layer; and a first conducting layer of the first semiconductor pillar provided on the first core unit to contact the first core unit.
    Type: Application
    Filed: February 3, 2017
    Publication date: May 25, 2017
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Yoshiaki FUKUZUMI, Ryota KATSUMATA, Masaru KITO, Masaru KIDOH, Hiroyasu TANAKA, Yosuke KOMORI, Megumi ISHIDUKI, Junya MATSUNAMI, Tomoko FUJIWARA, Hideaki AOCHI, Ryouhei KlRISAWA, Yoshimasa MIKAJIRI, Shigeta OOTA
  • Publication number: 20170148816
    Abstract: According to one embodiment, the stacked body includes a plurality of stacked units and a first intermediate layer. Each of the stacked units includes a plurality of electrode layers and a plurality of insulating layers. Each of the insulating layers is provided between the electrode layers. The first intermediate layer is provided between the stacked units. The first intermediate layer is made of a material different from the electrode layers and the insulating layers. The plurality of columnar portions includes a channel body extending in a stacking direction of the stacked body to pierce the stacked body, and a charge storage film provided between the channel body and the electrode layers.
    Type: Application
    Filed: February 8, 2017
    Publication date: May 25, 2017
    Inventor: Toshiyuki SASAKI
  • Publication number: 20170148817
    Abstract: The present invention provides a method for manufacturing a TFT substrate and a structure thereof. The method for manufacturing the TFT substrate arranges a connection electrode (83) that connects two dual gate TFTs in a third metal layer to prevent the design rules of a connection electrode and a second metal layer of the prior art techniques from being narrowed due to the connection electrode being collectively present on the second metal layer with signal lines of a data line and a voltage supply line so as to facilitate increase of an aperture ratio and definition of a display panel. The present invention provides a TFT substrate structure, which has a simple structure and possesses a high aperture ratio and high definition.
    Type: Application
    Filed: May 27, 2015
    Publication date: May 25, 2017
    Inventors: Longqiang SHI, Baixiang HAN
  • Publication number: 20170148818
    Abstract: A pixel structure, a display panel and a manufacturing method of the pixel structure are disclosed. The pixel structure includes: gate lines extending in parallel in a first direction; data lines extending in parallel in a second direction; and a plurality of pixel units defined by the gate lines and the data lines. One of the data lines is disposed between two pixel units which are adjacent to each other in the first direction, and two of the gate lines are disposed between two pixel units which are adjacent to each other in the second direction. Each of the pixel units comprises two pixel regions which are arranged side by side in the first direction, each of the pixel regions comprises a pixel electrode, and each of the pixel units comprises a unitary common electrode which covers the two pixel regions.
    Type: Application
    Filed: October 16, 2015
    Publication date: May 25, 2017
    Applicants: BOE Technology Group Co., Ltd., Hefei Xinsheng Optoelectronics Technology Co., Ltd.
    Inventors: Weihua Jia, Haipeng Yang, Jaikwang Kim, Yongjun Yoon
  • Publication number: 20170148819
    Abstract: A preparation method of a conductive via hole structure, a preparation method of an array substrate and a preparation method of a display device, the preparation method of the array substrate includes: forming a first metal layer (01) including the first metal structure (01a), forming a non-metallic film including a first part corresponding to the first metal structure (01a) and an organic insulating film (40?) in sequence; patterning the organic insulating film (40?) to form a first organic insulating layer via hole (41) corresponding to the first part; then baking to form an organic insulating layer (40); and then, removing the first part of the non-metallic film to form a non-metallic layer and expose the part of the surface (011) of the first metal structure (01a). This method can avoid the metal structure from being seriously oxidized.
    Type: Application
    Filed: January 21, 2016
    Publication date: May 25, 2017
    Applicants: BOE TECHNOLOGY GROUP CO., LTD., HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD .
    Inventors: Zhiyuan LIN, Yinhu HUANG, Zhixiang ZOU, Binbin CAO
  • Publication number: 20170148820
    Abstract: The present disclosure provides an array substrate and a method of manufacturing the same and a display apparatus in which the array substrate is applied. In one embodiment, the method of manufacturing an array substrate at least includes the steps of: forming a first electrode layer, a metal gate layer and a first layer of non-oxide insulation material, the first layer of non-oxide insulation material being formed on an upper surface of the metal gate layer; forming, by using one patterning process, a pattern including a first electrode and a gate such that, after completion of the patterning process, a first non-oxide insulation layer is further formed on the gate and a first sub-electrode belonging to the first electrode layer is further formed below the gate. This method of manufacturing the array substrate is simple, which facilitates mass production of the array substrate as well as the display apparatus.
    Type: Application
    Filed: October 13, 2015
    Publication date: May 25, 2017
    Inventors: Ce Ning, Fangzhen Zhang
  • Publication number: 20170148821
    Abstract: In accordance with some embodiments of the disclosed subject matter, a TFT, a related TFT array substrate, fabricating methods thereof, a display panel and a display device containing the same are provided. A method for fabricating a TFT is provided, the method comprising: forming an initial conductive layer on a base substrate; performing an oxidization process to partially oxidize the initial conductive layer to form an oxidized insulating sub-layer and a non-oxidized conductive sub-layer; and forming an active layer, a source electrode and a drain electrode over the oxidized insulating sub-layer.
    Type: Application
    Filed: December 10, 2015
    Publication date: May 25, 2017
    Inventors: GUANGCAI YUAN, LIANGCHEN YAN, XIAOGUANG XU, LEI WANG, JUNBIAO PENG, LINFENG LAN
  • Publication number: 20170148822
    Abstract: The present invention provides a thin-film-transistor (TFT) array panel and manufacturing method of the same. The TFT array panel comprises a flexible baseplate, a buffer layer, and a display-element layer. The buffer layer is disposed on the flexible baseplate, a stress-elimination portion is disposed on the buffer layer, the stress-elimination portion is used to eliminate a stress of the flexible baseplate; the display-element layer is disposed on the buffer layer. The present invention is able to decrease the stress of the flexible baseplate, to prevent too large of a stress of the flexible baseplate.
    Type: Application
    Filed: November 24, 2015
    Publication date: May 25, 2017
    Inventor: Guoren HU
  • Publication number: 20170148823
    Abstract: A wire grid polarizer includes a substrate, and a plurality of wire grid patterns arranged on the substrate at regular intervals, each of the wire grid patterns including a plurality of metal patterns in a stack on the substrate with an intermediate pattern interleaved between adjacent metal patterns in the stack.
    Type: Application
    Filed: November 22, 2016
    Publication date: May 25, 2017
    Inventors: Jung Gun NAM, Kyung Seop KIM, Dae Young LEE, Gug Rae JO
  • Publication number: 20170148824
    Abstract: It is an object to manufacture and provide a highly reliable display device including a thin film transistor with a high aperture ratio which has stable electric characteristics. In a manufacturing method of a semiconductor device having a thin film transistor in which a semiconductor layer including a channel formation region is formed using an oxide semiconductor film, a heat treatment for reducing moisture and the like which are impurities and for improving the purity of the oxide semiconductor film (a heat treatment for dehydration or dehydrogenation) is performed. Further, an aperture ratio is improved by forming a gate electrode layer, a source electrode layer, and a drain electrode layer using conductive films having light transmitting properties.
    Type: Application
    Filed: November 3, 2016
    Publication date: May 25, 2017
    Inventors: Shunpei YAMAZAKI, Masayuki SAKAKURA
  • Publication number: 20170148825
    Abstract: A method for manufacturing an array substrate, and an array substrate, a display panel and a display device are provided. The method may include: forming, on one side of a substrate, a gate electrode layer, a gate insulation layer and a semiconductor layer, wherein the gate electrode layer has a same pattern as the semiconductor layer; forming an etching stop layer on the semiconductor layer; forming a first, second hole and third through holes by patterning the etching stop layer; forming a source electrode layer and a drain electrode layer on the etching stop layer, wherein the source electrode layer is electrically connected with the semiconductor layer via the first through hole, and the drain electrode layer is electrically connected with the semiconductor layer via the second through hole; forming an active layer by etching the semiconductor layer at the location corresponding to the third through hole.
    Type: Application
    Filed: January 10, 2017
    Publication date: May 25, 2017
    Applicants: SHANGHAI TIANMA MICRO-ELECTRONICS CO., LTD., TIANMA MICRO-ELECTRONICS CO., LTD.
    Inventors: Chuanzhi Xu, Zhengfang Xie, Xiongping Li, Xiaoyang Tong
  • Publication number: 20170148826
    Abstract: The present disclosure provides, for realization of a flexible display apparatus capable of implementing a slim bezel and a method of manufacturing the same, a flexible display apparatus including: a flexible substrate including a first area having a first hole, a second area having a second hole and arranged corresponding to the first area, and a third area between the first area and the second area; a first wiring covering the first hole and arranged in the first area; and a second wiring covering the second hole, arranged in the second area, and electrically connected to the first wiring via the first hole and the second hole.
    Type: Application
    Filed: November 3, 2016
    Publication date: May 25, 2017
    Inventor: Kwanghyuk CHOI
  • Publication number: 20170148827
    Abstract: It is an object of the present invention to provide a method for preventing a breaking and poor contact, without increasing the number of steps, thereby forming an integrated circuit with high driving performance and reliability. The present invention applies a photo mask or a reticle each of which is provided with a diffraction grating pattern or with an auxiliary pattern formed of a semi-translucent film having a light intensity reducing function to a photolithography step for forming wires in an overlapping portion of wires. And a conductive film to serve as a lower wire of a two-layer structure is formed, and then, a resist pattern is formed so that a first layer of the lower wire and a second layer narrower than the first layer are formed for relieving a steep step.
    Type: Application
    Filed: February 8, 2017
    Publication date: May 25, 2017
    Inventors: Masayuki SAKAKURA, Hideto OHNUMA, Hideaki KUWABARA
  • Publication number: 20170148828
    Abstract: Provided is a solid-state image pickup apparatus including a crosstalk suppression mechanism included in each pixel arranged in a pixel array, the crosstalk suppression mechanism of a part of the pixels differing from that of other pixels in an effective area of the pixel array.
    Type: Application
    Filed: February 1, 2017
    Publication date: May 25, 2017
    Inventor: Kyosuke Ito
  • Publication number: 20170148829
    Abstract: There is provided a solid-state imaging apparatus including a plurality of photoelectric conversion regions which photoelectrically convert light incident from a rear surface side of a semiconductor substrate, element isolation regions formed between the plurality of photoelectric conversion regions arranged in a matrix shape, and shielding members formed on upper surfaces of the element isolation regions. The element isolation regions have high impurity concentration regions of a high impurity concentration connected to at least a part of the shielding members.
    Type: Application
    Filed: February 7, 2017
    Publication date: May 25, 2017
    Inventor: Yusuke Tanaka
  • Publication number: 20170148830
    Abstract: A CMOS detector with pairs of interdigitated elongated finger-like collection gates includes p+ implanted regions that create charge barrier regions that can intentionally be overcome. These regions steer charge to a desired collection gate pair for collection. The p+ implanted regions may be formed before and/or after formation of the collection gates. These regions form charge barrier regions when an associated collection gate is biased low. The barriers are overcome when an associated collection gate is high. These barrier regions steer substantially all charge to collection gates that are biased high, enhancing modulation contrast. Advantageously, the resultant structure has reduced power requirements in that inter-gate capacitance is reduced in that inter-gate spacing can be increased over prior art gate spacing and lower swing voltages may be used. Also higher modulation contrast is achieved in that the charge collection area of the low gate(s) is significantly reduced.
    Type: Application
    Filed: February 1, 2017
    Publication date: May 25, 2017
    Inventor: Cyrus Bamji
  • Publication number: 20170148831
    Abstract: Provided is an image sensor having a hybrid pixel structure in which pixels that sense visible light and pixels that sense ultraviolet light or infrared light are arranged together. For example, the image sensor includes a plurality of first pixels and a plurality of second pixels that are different in size. A width of each of the plurality of second pixels in a horizontal direction is a first integer multiple of a width of each of the plurality of first pixels in the horizontal direction, and a width of each of the plurality of second pixels in a vertical direction is a second integer multiple of a width of each of the plurality of first pixels in the vertical direction. The image sensor enables the pixels sensing ultraviolet light or infrared light, which have different sizes from the pixels sensing visible light, to be efficiently arranged together with the pixels sensing visible light, on the same substrate.
    Type: Application
    Filed: May 19, 2014
    Publication date: May 25, 2017
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Hyuk-soon CHOI, Jung-woo KIM, Myoung-hoon JUNG
  • Publication number: 20170148832
    Abstract: Imaging sensors, imaging apparatuses, and methods of driving an image sensor are provided. An image sensor can include a semiconductor substrate with a photoelectric conversion element and a charge-conversion element. The sensor can further include a capacitance switch. A charge accumulation element is located adjacent the photoelectric conversion element. At least a portion of the charge accumulation element overlaps a charge accumulation region of the photoelectric conversion element. The charge accumulation element is selectively connected to the charge-voltage conversion element by the capacitance switch.
    Type: Application
    Filed: February 3, 2017
    Publication date: May 25, 2017
    Inventor: KAZUYOSHI YAMASHITA
  • Publication number: 20170148833
    Abstract: A solid-state imaging device includes: a first photodiode made up of a first first-electroconductive-type semiconductor region formed on a first principal face side of a semiconductor substrate, and a first second-electroconductive-type semiconductor region formed within the semiconductor substrate adjacent to the first first-electroconductive-type semiconductor region; a second photodiode made up of a second first-electroconductive-type semiconductor region formed on a second principal face side of the semiconductor substrate, and a second second-electroconductive-type semiconductor region formed within the semiconductor substrate adjacent to the second first-electroconductive-type semiconductor region; and a gate electrode formed on the first principal face side of the semiconductor substrate; with impurity concentration of a connection face between the second first-electroconductive-type semiconductor region and the second second-electroconductive-type semiconductor region being equal to or greater than im
    Type: Application
    Filed: February 7, 2017
    Publication date: May 25, 2017
    Inventors: Hideo KIDO, Takayuki ENOMOTO, Hideaki TOGASHI
  • Publication number: 20170148834
    Abstract: The present invention has an object of improving the operation stability of a semiconductor device that detects radiations without decreasing the yield thereof. A semiconductor device includes an active matrix substrate (50) including a plurality of TFTs (10) and a plurality of pixel electrode (20); a photoelectric conversion substrate (62) located to face the active matrix substrate (50); an upper electrode (64) provided on a surface of the photoelectric conversion substrate (62) opposite to the active matrix substrate (50); and a plurality of connection electrodes (72) provided between the active matrix substrate (50) and the photoelectric conversion substrate(62), the plurality of connection electrodes (72) being formed of metal material.
    Type: Application
    Filed: June 1, 2015
    Publication date: May 25, 2017
    Applicant: Sharp Kabushiki Kaisha
    Inventor: Atsushi TOMYO
  • Publication number: 20170148835
    Abstract: A solid-state imaging device includes a semiconductor substrate; and a pixel unit having a plurality of pixels on the semiconductor substrate, wherein the pixel unit includes first pixel groups having two or more pixels and second pixel groups being different from the first pixel groups, wherein a portion of the pixels in the first pixel groups and a portion of the pixels in the second pixel groups share a floating diffusion element.
    Type: Application
    Filed: February 3, 2017
    Publication date: May 25, 2017
    Applicant: Sony Semiconductor Solutions Corporation
    Inventors: Hiroaki Ishiwata, Sanghoon Ha
  • Publication number: 20170148836
    Abstract: A solid-state imaging device includes a semiconductor substrate; and a pixel unit having a plurality of pixels on the semiconductor substrate, wherein the pixel unit includes first pixel groups having two or more pixels and second pixel groups being different from the first pixel groups, wherein a portion of the pixels in the first pixel groups and a portion of the pixels in the second pixel groups share a floating diffusion element.
    Type: Application
    Filed: February 6, 2017
    Publication date: May 25, 2017
    Applicant: Sony Semiconductor Solutions Corporation
    Inventors: Hiroaki Ishiwata, Sanghoon Ha
  • Publication number: 20170148837
    Abstract: A solid state imaging device including a semiconductor layer comprising a plurality of photodiodes, a first antireflection film located over a first surface of the semiconductor layer, a second antireflection film located over the first antireflection film, a light shielding layer having side surfaces which are adjacent to at least one of first and the second antireflection film.
    Type: Application
    Filed: February 7, 2017
    Publication date: May 25, 2017
    Inventors: Susumu Hiyama, Kazufumi Watanabe
  • Publication number: 20170148838
    Abstract: The present disclosure relates to a solid-state image capturing element capable of suppressing a dark current, a manufacturing method thereof, and an electronic device. Provided is a solid-state image capturing element including: a photoelectric conversion unit formed outside a semiconductor substrate; and a charge retention section that is formed in the semiconductor substrate and retains charges generated in the photoelectric conversion unit. Among surfaces of the charge retention section, a bottom surface on a side opposite to a surface of a gate side of a transistor formed in the semiconductor substrate is covered by an insulation film. The present disclosure can be applied to, for example, solid-state image capturing elements and the like.
    Type: Application
    Filed: June 11, 2015
    Publication date: May 25, 2017
    Inventor: HIDEAKI TOGASHI
  • Publication number: 20170148839
    Abstract: A semiconductor device including a first semiconductor section including a first wiring layer at one side thereof, the first semiconductor section further including a photodiode, a second semiconductor section including a second wiring layer at one side thereof, the first and second semiconductor sections being secured together, a third semiconductor section including a third wiring layer at one side thereof, the second and the third semiconductor sections being secured together such the first semiconductor section, second semiconductor section, and the third semiconductor section are stacked together, and a first conductive material electrically connecting at least two of (i) the first wiring layer, (ii) the second wiring layer, and (iii) the third wiring layer such that the electrically connected wiring layers are in electrical communication.
    Type: Application
    Filed: January 10, 2017
    Publication date: May 25, 2017
    Inventors: Taku UMEBAYASHI, Keiji TATANI, Hajime INOUE, Ryuichi KANAMURA