Patents Issued in April 18, 2023
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Patent number: 11631654Abstract: A method includes bonding a first and a second package component on a top surface of a third package component, and dispensing a polymer. The polymer includes a first portion in a space between the first and the third package components, a second portion in a space between the second and the third package components, and a third portion in a gap between the first and the second package components. A curing step is then performed on the polymer. After the curing step, the third portion of the polymer is sawed to form a trench between the first and the second package components.Type: GrantFiled: November 10, 2020Date of Patent: April 18, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Szu-Wei Lu, Ying-Da Wang, Li-Chung Kuo, Jing-Cheng Lin
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Patent number: 11631655Abstract: The present application discloses a method for fabricating a semiconductor device with a connection structure. The method includes providing a first semiconductor structure comprising a plurality of first conductive features adjacent to a top surface of the first semiconductor structure; forming a connection structure comprising a connection insulating layer on the top surface of the first semiconductor structure, a connection layer in the connection insulating layer, and a plurality of first porous interlayers on the plurality of first conductive features and in the connection insulating layer; and forming a second semiconductor structure comprising a plurality of second conductive features on the plurality of first porous interlayers.Type: GrantFiled: November 18, 2021Date of Patent: April 18, 2023Assignee: NANYA TECHNOLOGY CORPORATIONInventor: Tse-Yao Huang
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Patent number: 11631656Abstract: A semiconductor structure includes a first die, a second die, and a first conductive via. The first die includes a first dielectric layer and a first landing pad embedded in the first dielectric layer. The second die includes a second dielectric layer and a second landing pad embedded in the second dielectric layer. The first die is disposed on the second die. The second landing pad has a through-hole. The first conductive via extends from the first landing pad toward the second landing pad and penetrates through the through-hole of the second landing pad.Type: GrantFiled: December 7, 2021Date of Patent: April 18, 2023Assignee: NANYA TECHNOLOGY CORPORATIONInventors: Hsih-Yang Chiu, Yi-Jen Lo
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Patent number: 11631657Abstract: An electronic device including a driving circuit substrate, a plurality of light emitting units, and a first passivation layer is provided. The driving circuit substrate includes a plurality of active elements. The light emitting units are disposed on the driving circuit substrate and electrically connected to the driving circuit substrate, and each of the plurality of light emitting units is five surfaces light emitting type. The first passivation layer covers the light emitting units and the driving circuit substrate for protecting the light emitting units. One of the active elements provides a current to a corresponding one of the light emitting units, such that lighting efficiency of the corresponding one of the light emitting units is ranged from 70% to 100%. The current includes a plurality of pulse currents spaced apart from each other, and time widths of the pulse currents are the same.Type: GrantFiled: September 16, 2021Date of Patent: April 18, 2023Assignee: InnoLux CorporationInventors: Shu-Ming Kuo, Tsau-Hua Hsieh, Shun-Yuan Hu
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Patent number: 11631658Abstract: A semiconductor package includes an integrated passive device (IPD) including one or more passive devices over a first substrate; and metallization layers over and electrically coupled to the one or more passive devices, where a topmost metallization layer of the metallization layers includes a first plurality of conductive patterns; and a second plurality of conductive patterns interleaved with the first plurality of conductive patterns. The IPD also includes a first under bump metallization (UBM) structure over the topmost metallization layer, where the first UBM structure includes a first plurality of conductive strips, each of the first plurality of conductive strips electrically coupled to a respective one of the first plurality of conductive patterns; and a second plurality of conductive strips interleaved with the first plurality of conductive strips, each of the second plurality of conductive strips electrically coupled to a respective one of the second plurality of conductive patterns.Type: GrantFiled: November 16, 2020Date of Patent: April 18, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Yu-Chih Huang, Chi-Hui Lai, Ban-Li Wu, Ying-Cheng Tseng, Ting-Ting Kuo, Chih-Hsuan Tai, Hao-Yi Tsai, Chuei-Tang Wang, Chung-Shi Liu, Chen-Hua Yu, Chiahung Liu
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Patent number: 11631659Abstract: A high-frequency module includes a mounting substrate having main surfaces 30a and 30b, a first circuit component mounted on the main surface 30a, a second circuit component mounted on the main surface 30b, an external connection terminal arranged on the main surface 30b side relative to the main surface 30a with respect to the mounting substrate, a long via conductor connected to the first circuit component, passing through the mounting substrate, and having a substantially long shape when the mounting substrate is viewed in a plan view, and a metal block arranged on the main surface 30b side relative to the main surface 30a with respect to the mounting substrate and connecting the long via conductor and the external connection terminal. When the mounting substrate is viewed in a plan view, the first circuit component overlaps the long via conductor and the metal block overlaps the long via conductor.Type: GrantFiled: February 3, 2020Date of Patent: April 18, 2023Assignee: MURATA MANUFACTURING CO., LTD.Inventors: Motoji Tsuda, Takanori Uejima, Yuji Takematsu, Katsunari Nakazawa, Masahide Takebe, Shou Matsumoto, Naoya Matsumoto, Yutaka Sasaki, Yuuki Fukuda
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Patent number: 11631660Abstract: A semiconductor package according to the inventive concept includes a first semiconductor chip configured to include a first semiconductor device, a first semiconductor substrate, a plurality of through electrodes penetrating the first semiconductor substrate, and a plurality of first chip connection pads arranged on an upper surface of the first semiconductor substrate; a plurality of second semiconductor chips sequentially stacked on an upper surface of the first semiconductor chip and configured to each include a second semiconductor substrate, a second semiconductor device controlled by the first semiconductor chip, and a plurality of second chip connection pads arranged on an upper surface of the second semiconductor substrate; a plurality of bonding wires configured to connect the plurality of first chip connection pads to the plurality of second chip connection pads; and a plurality of external connection terminals arranged on a lower surface of the first semiconductor chip.Type: GrantFiled: April 28, 2021Date of Patent: April 18, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Manho Lee, Eunseok Song, Kyungsuk Oh, Seonghwan Jeon
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Patent number: 11631661Abstract: An integrated circuit includes a first gate electrode structure extending in a first direction and having a first portion and a second portion separated from each other. The integrated circuit further includes a second gate electrode structure extending in the first direction and separated in a second direction from the first gate electrode structure. The integrated circuit further includes a conductive feature. The conductive feature includes a first section electrically connected to the second portion, wherein the first section extends in the second direction. The conductive feature further includes a second section electrically connected to the second gate electrode structure, wherein the second section extends in the second direction. The conductive feature further includes a third section electrically connecting the first section and the second section, wherein the third section extends in a third direction angled with respect to both the first direction and the second direction.Type: GrantFiled: May 11, 2021Date of Patent: April 18, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Tung-Heng Hsieh, Ting-Wei Chiang, Chung-Te Lin, Hui-Zhong Zhuang, Li-Chun Tien, Sheng-Hsiung Wang
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Patent number: 11631662Abstract: The present invention discloses a System on Chip, which includes a power supply pin, a ground pin, an anti-static unit and an anti-reverse connection unit, wherein the anti-static unit is connected between the power supply pin and the ground pin through the anti-reverse connection unit, the power supply pin and the ground pin of the System on Chip are connected to an external power supply; wherein, when the System on Chip is in normal operation, the anti-static unit performs ESD protection of the power supply pin through the conducted anti-static unit; whereas when the external power supply is reversely connected between the power supply pin and the ground pin of the System on Chip, the anti-reverse connection unit is cut off to prevent the reversely connected external power supply from directly connecting anode with cathode of the external power supply through the anti-static unit.Type: GrantFiled: August 28, 2020Date of Patent: April 18, 2023Assignee: SHENZHEN WINSEMI MICROELECTRONICS CO., LTDInventors: Lijun Song, Pengliang Song, Yaya Mu, Xi Dang
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Patent number: 11631663Abstract: A control circuit applied in a specific element and including a first transistor and an electrostatic discharge (ESD) protection circuit is provided. The specific element has a III-V semiconductor material and includes a control electrode, a first electrode and a second electrode. The first transistor is coupled between the first electrode and the second electrode and has the III-V semiconductor material. The ESD protection circuit is coupled to the control electrode, the first transistor and the second electrode. In response to an ESD event, the ESD protection circuit provides a discharge path to release the ESD current from the control electrode to the second electrode.Type: GrantFiled: April 23, 2020Date of Patent: April 18, 2023Assignee: Vanguard International Semiconductor CorporationInventors: Jian-Hsing Lee, Yeh-Jen Huang, Wen-Hsin Lin, Chun-Jung Chiu, Hwa-Chyi Chiou
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Patent number: 11631664Abstract: A resistor-transistor-logic (RTL) circuit with GaN structure, including a GaN layer, a AlGaN barrier layer on the GaN layer, multiple p-type doped GaN capping layers on the AlGaN barrier layer, wherein parts of the p-type doped GaN capping layers in a high-voltage region and in a low-voltage region convert the underlying GaN layer into gate depletion areas, the GaN layer not covered by the p-type doped GaN capping layers in a resistor region becomes a 2DEG resistor.Type: GrantFiled: October 21, 2020Date of Patent: April 18, 2023Assignee: UNITED MICROELECTRONICS CORP.Inventors: Kuo-Hsing Lee, Sheng-Yuan Hsueh, Chien-Liang Wu, Te-Wei Yeh, Yi-Chun Chen
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Patent number: 11631665Abstract: Provided is a semiconductor device comprising a semiconductor substrate that includes a transistor region; an emitter electrode that is provided on the semiconductor substrate; a first dummy trench portion that is provided on the transistor region of the semiconductor substrate and includes a dummy conducting portion that is electrically connected to the emitter electrode; and a first contact portion that is a partial region of the transistor region, provided between an end portion of a long portion of the first dummy trench portion and an end portion of the semiconductor substrate, and electrically connects the emitter electrode and a semiconductor region with a first conductivity type provided in the transistor region.Type: GrantFiled: October 25, 2021Date of Patent: April 18, 2023Assignee: FUJI ELECTRIC CO., LTD.Inventor: Yuichi Harada
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Patent number: 11631666Abstract: There is provided a semiconductor device including: an emitter region of a first conductivity type, a contact region of a second conductivity type, provided on the front surface side of the semiconductor substrate; one or more first trench portions which are electrically connected to a gate electrode and are in contact with emitter regions; a second trench portion which is adjacent to one of the one or more first trench portions, is electrically connected to the gate electrode, is in contact with the contact region of the second conductivity type, and is not in contact with the emitter region; and a dummy trench portion which is adjacent to one of the one or more first trench portions and is electrically connected to an emitter electrode, in which the contact region in contact with the second trench portion is in contact with the emitter electrode.Type: GrantFiled: March 1, 2022Date of Patent: April 18, 2023Assignee: FUJI ELECTRIC CO., LTD.Inventor: Kosuke Yoshida
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Patent number: 11631667Abstract: A semiconductor device, the device including: a first silicon layer including a first single crystal silicon layer and a plurality of first transistors; a first metal layer disposed over the first single crystal silicon layer; a second metal layer disposed over the first metal layer; a third metal layer disposed over the second metal layer; a second level including a plurality of second transistors, the second level disposed over the third metal layer; a fourth metal layer disposed over the second level; a fifth metal layer disposed over the fourth metal layer; and a via disposed through the second level, where the via has a diameter of less than 450 nm, where the via includes tungsten, and where a typical thickness of the fifth metal layer is greater than a typical thickness of the second metal layer by at least 50%.Type: GrantFiled: August 31, 2022Date of Patent: April 18, 2023Assignee: MONOLITHIC 3D INC.Inventors: Zvi Or-Bach, Brian Cronquist
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Patent number: 11631668Abstract: An electronic circuit having a first terminal and a second terminal. The electronic circuit includes a plurality of diodes connected in parallel, the plurality of diodes including a first diode and a second diode that respectively have applied thereto a first forward voltage and a second forward voltage, the second forward voltage being higher than the first forward voltage. A first path and a second path are formed from the first terminal, respectively via the first diode and the second diode, to the second terminal. An inductance of the first path is larger than an inductance of the second path.Type: GrantFiled: October 30, 2020Date of Patent: April 18, 2023Assignee: FUJI ELECTRIC CO., LTD.Inventor: Keiji Okumura
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Patent number: 11631669Abstract: A parallel structure comprising source/drain and channel layers alternately stacked on a substrate, and gate stacks formed around peripheries of the channel layers. Each of the channel layers, the source/drain layers on upper and lower sides of the channel layer, and the gate stack formed around the channel layer, form a semiconductor device. In each semiconductor device, one of the source/drain layers is in contact with a first electrically-conductive channel disposed on an outer periphery of the active region, the other is in contact with a second electrically-conductive channel on the outer periphery of the active region, and the gate stack is in contact with a third electrically-conductive channel disposed on the outer periphery of the active region. The first electrically-conductive channel is common to the semiconductor devices, the second electrically-conductive channel is common to the semiconductor devices, and the third electronically-conductive channel is common to the semiconductor devices.Type: GrantFiled: October 31, 2018Date of Patent: April 18, 2023Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCESInventor: Huilong Zhu
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Patent number: 11631670Abstract: A semiconductor device including a substrate; a first active pattern on the substrate and extending in a first direction, an upper portion of the first active pattern including a first channel pattern; first source/drain patterns in recesses in an upper portion of the first channel pattern; and a gate electrode on the first active pattern and extending in a second direction crossing the first direction, the gate electrode being on a top surface and on a side surface of the at least one first channel pattern, wherein each of the first source/drain patterns includes a first, second, and third semiconductor layer, which are sequentially provided in the recesses, each of the first channel pattern and the third semiconductor layers includes silicon-germanium (SiGe), and the first semiconductor layer has a germanium concentration higher than those of the first channel pattern and the second semiconductor layer.Type: GrantFiled: October 25, 2021Date of Patent: April 18, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Hyojin Kim, Jihye Lee, Sangmoon Lee, Seung Hun Lee
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Patent number: 11631671Abstract: A method of fabricating a semiconductor device is provided. An initial stack of layers is formed over a substrate. The initial stack alternates between a first material layer and a second material layer that has a different composition from the first material layer. The initial stack is divided into a first stack and a second stack. First GAA transistors are formed in the first stack by using the first material layers as respective channel regions for the first GAA transistors and using the second material layers as respective replacement gates for the first GAA transistors. Second GAA transistors are formed in the second stack by using the second material layers as respective channel regions for the second GAA transistors and using the first material layers as respective replacement gates for the second GAA transistors. The second GAA transistors are vertically offset from the first GAA transistors.Type: GrantFiled: December 29, 2020Date of Patent: April 18, 2023Assignee: Tokyo Electron LimitedInventors: H. Jim Fulford, Anton J. Devilliers, Mark I. Gardner, Daniel Chanemougame, Jeffrey Smith, Lars Liebmann, Subhadeep Kal
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Patent number: 11631672Abstract: A semiconductor integrated circuit includes a substrate, and a standard cell on the substrate. The standard cell includes a first wiring structure electrically connecting a first gate pattern to a fourth gate pattern, and a second wiring structure electrically connecting a second gate pattern to a third gate pattern. The first wiring structure includes a first lower wiring layer, a second lower wiring layer, first and second intermediate wiring layers, and a first upper wiring layer. The second wiring structure includes a third lower wiring layer, a fourth lower wiring layer, third and fourth intermediate wiring layers, and a second upper wiring layer.Type: GrantFiled: August 19, 2020Date of Patent: April 18, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Jinwoo Jeong, Raheel Azmat
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Patent number: 11631673Abstract: Non-planar semiconductor devices having doped sub-fin regions and methods of fabricating non-planar semiconductor devices having doped sub-fin regions are described. For example, a method of fabricating a semiconductor structure involves forming a plurality of semiconductor fins above a semiconductor substrate. A solid state dopant source layer is formed above the semiconductor substrate, conformal with the plurality of semiconductor fins. A dielectric layer is formed above the solid state dopant source layer. The dielectric layer and the solid state dopant source layer are recessed to approximately a same level below a top surface of the plurality of semiconductor fins, exposing protruding portions of each of the plurality of semiconductor fins above sub-fin regions of each of the plurality of semiconductor fins. The method also involves driving dopants from the solid state dopant source layer into the sub-fin regions of each of the plurality of semiconductor fins.Type: GrantFiled: February 23, 2021Date of Patent: April 18, 2023Assignee: Tahoe Research, Ltd.Inventors: Tahir Ghani, Salman Latif, Chanaka D. Munasinghe
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Patent number: 11631674Abstract: An integrated circuit device includes a fin-type active area along a first horizontal direction on a substrate, a device isolation layer on opposite sidewalls of the fin-type active area, a gate structure along a second horizontal direction crossing the first horizontal direction, the gate structure being on the fin-type active area and on the device isolation layer, and a source/drain area on the fin-type active area, the source/drain area being adjacent to the gate structure, and including an outer blocking layer, an inner blocking layer, and a main body layer sequentially stacked on the fin-type active area, and each of the outer blocking layer and the main body layer including a Si1-xGex layer, where x?0, and the inner blocking layer including a Si layer.Type: GrantFiled: April 15, 2021Date of Patent: April 18, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Minhee Choi, Keunhwi Cho, Myunggil Kang, Seokhoon Kim, Dongwon Kim, Pankwi Park, Dongsuk Shin
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Patent number: 11631675Abstract: A semiconductor memory structure includes a semiconductor substrate including an active region and a chop region. The semiconductor memory structure also includes an isolation structure disposed in the chop region, a first gate structure extending at least through the isolation structure in the chop region, and a second gate structure extending at least through the active region. The semiconductor memory structure also includes a doped region disposed in the active region. A first distance between the doped region and the first gate structure is shorter than a second distance between the doped region and the second gate structure.Type: GrantFiled: January 28, 2021Date of Patent: April 18, 2023Assignee: WINBOND ELECTRONICS CORP.Inventors: Yu-Po Wang, Yi-Hao Chien, Hsiang-Po Liu
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Patent number: 11631676Abstract: The present disclosure technology provides memory cells and a semiconductor device including the same. According to the present technology, a semiconductor device comprises a plurality of active layers vertically stacked along a first direction over a substrate and horizontally extending along a second direction crossing the first direction; a plurality of bit lines coupled to respective first sides of the active layers and horizontally extending in a third direction crossing the first direction and the second direction; a plurality of capacitors coupled to respective second sides of the active layers; a word line vertically extending through the active layers along the first direction; an upper-level interconnection coupled to an upper end of the word line; and a lower-level interconnection coupled to a lower end of the word line.Type: GrantFiled: March 18, 2021Date of Patent: April 18, 2023Assignee: SK hynix Inc.Inventor: Sang Hyon Kwak
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Patent number: 11631677Abstract: A semiconductor memory device includes a device isolation pattern on a substrate to define an active region, a word line in the substrate, to intersect the active region, a first dopant region in the active region as at a first side of the word line, a second dopant region in the active region at a second side of the word line, a bit line connected to the first dopant region and intersecting the word line, a bit line contact connecting the bit line to the first dopant region, a landing pad on the second dopant region, and a storage node contact connecting the landing pad to the second dopant region, the storage node contact including a first portion in contact with the second dopant region, the first portion including a single-crystal silicon, and a second portion on the first portion and including a poly-silicon.Type: GrantFiled: June 25, 2021Date of Patent: April 18, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Daeyoung Moon, Jamin Koo, Kyuwan Kim, Kisoo Park
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Patent number: 11631678Abstract: Some embodiments include a memory array having vertically-stacked memory cells. Each of the memory cells includes a transistor coupled with a charge-storage device, and each of the transistors has channel material with a bandgap greater than 2 electron-volts. Some embodiments include a memory array having digit lines extending along a vertical direction and wordlines extending along a horizontal direction. The memory array includes memory cells, with each of the memory cells being uniquely addressed by combination of one of the digit lines and one of the wordlines. Each of the memory cells includes a transistor which has GaP channel material. Each of the transistors has first and second source/drain regions spaced from one another by the GaP channel material. The first source/drain regions are coupled with the digit lines, and each of the memory cells includes a capacitor coupled with the second source/drain region of the associated transistor. Other embodiments are disclosed.Type: GrantFiled: May 24, 2021Date of Patent: April 18, 2023Assignee: Micron Technology, Inc.Inventors: Sanh D. Tang, Martin C. Roberts, Gurtej S. Sandhu
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Patent number: 11631679Abstract: A method of forming a semiconductor device includes the following steps. First of all, a substrate is provided, and a dielectric layer is formed on the substrate. Then, at least one trench is formed in the dielectric layer, to partially expose a top surface of the substrate. The trench includes a discontinuous sidewall having a turning portion. Next, a first deposition process is performed, to deposit a first semiconductor layer to fill up the trench and to further cover on the top surface of the dielectric layer. Following these, the first semiconductor layer is laterally etched, to partially remove the first semiconductor layer till exposing the turning portion of the trench. Finally, a second deposition is performed, to deposit a second semiconductor layer to fill up the trench.Type: GrantFiled: May 10, 2022Date of Patent: April 18, 2023Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.Inventors: Luo-Hsin Lee, Ting-Pang Chung, Shih-Han Hung, Po-Han Wu, Shu-Yen Chan, Shih-Fang Tzou
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Patent number: 11631680Abstract: A process of smoothing a top surface of a bit line metal of a memory structure to decrease resistance of a bit line stack. The process includes depositing titanium layer of approximately 30 angstroms to 50 angstroms on polysilicon layer on a substrate, depositing first titanium nitride layer of approximately 15 angstroms to approximately 40 angstroms on titanium layer, annealing substrate at a temperature of approximately 700 degrees Celsius to approximately 850 degrees Celsius, depositing second titanium nitride layer of approximately 15 angstroms to approximately 40 angstroms on first titanium nitride layer after annealing, depositing a bit line metal layer of ruthenium on second titanium nitride layer, annealing bit line metal layer at temperature of approximately 550 degrees Celsius to approximately 650 degrees Celsius, and soaking bit line metal layer in hydrogen-based ambient for approximately 3 minutes to approximately 6 minutes during annealing.Type: GrantFiled: November 12, 2020Date of Patent: April 18, 2023Assignee: APPLIED MATERIALS, INC.Inventors: Priyadarshi Panda, In Seok Hwang
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Patent number: 11631681Abstract: Embodiments herein relate to vertical contacts for semiconductor devices. For instance, a memory device having vertical contacts can comprise a substrate including circuitry components, a vertical stack of layers formed from repeating iterations of a group of layers disposed on the substrate, the group of layers comprising a first dielectric material layer, a semiconductor material layer, and a second dielectric material layer including horizontal conductive lines formed along a horizontal plane in the second dielectric material layer, and vertical contacts coupled to the horizontal conductive lines, the vertical contacts extending along a vertical plane within the vertical stack of layers to directly electrically couple the horizontal conductive lines to the circuitry components.Type: GrantFiled: March 2, 2021Date of Patent: April 18, 2023Assignee: Micron Technology, Inc.Inventors: Byung Yoon Kim, Sangmin Hwang, Kyuseok Lee
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Patent number: 11631682Abstract: In the present disclosure, it has been appreciated that memory structures, such as static random access memory (SRAM) structures, have feature densities that are extremely high. While this is beneficial in allowing the memory structures to store large amounts of data in a small chip footprint, it is potentially detrimental in that it makes the memory structures more susceptible to leakage current than the other areas of the chip. Accordingly, the present disclosure provides pseudo memory structures which are similar in terms of layout spacing to actual memory structures. However, rather than being used as actual memory structures that store data during operation, these pseudo memory structures are used to characterize leakage current in the design of the IC and/or to characterize the fabrication process used to manufacture the IC.Type: GrantFiled: April 28, 2020Date of Patent: April 18, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Te-Hsin Chiu, Meng-Han Lin, Wei Cheng Wu
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Patent number: 11631683Abstract: A semiconductor storage device includes first conductive layers stacked in a first direction and extend in a second direction; second conductive layers stacked in the first direction and extend in the second direction; third conductive layers that are electrically connected to the first conductive layers and the second conductive layers and stacked in the first direction; a first insulating layer and a second insulating layer sandwich the first conductive layer; a third insulating layer and a fourth insulating layer sandwich the second conductive layer; first pillars arranged in the second direction in the first insulating layer with a first distance; and second pillars arranged in the second direction in the second insulating layer with the first distance. Each of the second pillars is displaced from a corresponding one of the first pillars by a second distance that is shorter than a half of the first distance in the second direction.Type: GrantFiled: September 3, 2020Date of Patent: April 18, 2023Assignee: KIOXIA CORPORATIONInventors: Naoya Yoshimura, Keisuke Nakatsuka
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Patent number: 11631684Abstract: Some embodiments include an integrated assembly with a semiconductor channel material having a boundary region where a more-heavily-doped region interfaces with a less-heavily-doped region. The more-heavily-doped region and the less-heavily-doped region have the same majority carriers. The integrated assembly includes a gating structure adjacent the semiconductor channel material and having a gating region and an interconnecting region of a common and continuous material. The gating region has a length extending along a segment of the more-heavily-doped region, a segment of the less-heavily-doped region, and the boundary region. The interconnecting region extends laterally outward from the gating region on a side opposite the semiconductor channel region, and is narrower than the length of the gating region. Some embodiments include methods of forming integrated assemblies.Type: GrantFiled: April 13, 2021Date of Patent: April 18, 2023Assignee: Micron Technology, Inc.Inventors: Justin B. Dorhout, Kunal R. Parekh, Martin C. Roberts, Mohd Kamran Akhtar, Chet E. Carter, David Daycock
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Patent number: 11631685Abstract: Provided is a memory device including a substrate, a plurality of first stack structures, and a plurality of second stack structures. The substrate includes an array region and a periphery region. The first stack structures are disposed on the substrate in the array region. Each first stack structure sequentially includes: a first tunneling dielectric layer, a first floating gate, a first inter-gate dielectric layer, a first control gate, a first metal layer, a first cap layer, and the first stop layer. The second stack structures are disposed on the substrate in the periphery region. Each second stack structure sequentially includes: a second tunneling dielectric layer, a second floating gate, a second inter-gate dielectric layer, a second control gate, a second metal layer, a second cap layer, and the second stop layer. The first stack structures have a pattern density greater than a pattern density of the second stack structures.Type: GrantFiled: August 26, 2021Date of Patent: April 18, 2023Assignee: Winbond Electronics Corp.Inventor: Chung-Hsuan Wang
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Patent number: 11631686Abstract: A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers, memory opening fill structures extending through the alternating stack, where each of the memory opening fill structures includes a vertical semiconductor channel, a tunneling dielectric layer, and a vertical stack of memory elements located at levels of the electrically conductive layers between a respective vertically neighboring pair of the insulating layers. Each of the memory elements is located at a level of a respective one of the electrically conductive layers between the respective vertically neighboring pair of the insulating layers. Each of the memory elements includes a first memory material portion, and a second memory material portion that is vertically spaced from the first memory material portion. The second memory material portion has a different material composition from the first memory material portion.Type: GrantFiled: June 18, 2021Date of Patent: April 18, 2023Assignee: SANDISK TECHNOLOGIES LLCInventors: Ramy Nashed Bassely Said, Yanli Zhang, Jiahui Yuan, Raghuveer S. Makala, Senaka Kanakamedala
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Patent number: 11631687Abstract: A semiconductor memory device according to an embodiment includes a base, a first conductor, a second conductor, a first pillar, a first insulating member, and a first contact. The first conductor is provided in a first layer above the base. The second conductor is provided above the first conductor. The first pillar includes a first portion and a second portion formed by different bodies. The first portion of the first pillar is provided to penetrate the first conductor. The second portion of the first pillar is provided to penetrate the second conductor. The first insulating member is provided at least in the first layer. The first contact is contacting the second conductor above the first insulating member.Type: GrantFiled: February 21, 2020Date of Patent: April 18, 2023Assignee: Kioxia CorporationInventors: Yusaku Suzuki, Kazuhiro Nojima, Atsuko Aiba
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Patent number: 11631688Abstract: Embodiments of bonded unified semiconductor chips and fabrication and operation methods thereof are disclosed. In an example, a method for forming a unified semiconductor chip is disclosed. A first semiconductor structure is formed. The first semiconductor structure includes one or more processors, an array of embedded DRAM cells, and a first bonding layer including a plurality of first bonding contacts. A second semiconductor structure is formed. The second semiconductor structure includes an array of NAND memory cells and a second bonding layer including a plurality of second bonding contacts. The first semiconductor structure and the second semiconductor structure are bonded in a face-to-face manner, such that the first bonding contacts are in contact with the second bonding contacts at a bonding interface.Type: GrantFiled: December 1, 2021Date of Patent: April 18, 2023Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.Inventors: Jun Liu, Weihua Cheng
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Patent number: 11631690Abstract: A three-dimensional memory device includes a first three-dimensional memory plane including first alternating stacks of first insulating layers and first word lines, and first bit lines electrically connected first vertical semiconductor channels, and a second three-dimensional memory plane including second alternating stacks of second insulating layers and second word lines and second bit lines electrically connected to second vertical channels. An inter-array backside trench laterally extend between the first three-dimensional memory plane and the second three-dimensional memory plane, and filled with an inter-array backside insulating material portion that provides electrical isolation between the three-dimensional memory planes.Type: GrantFiled: December 15, 2020Date of Patent: April 18, 2023Assignee: SANDISK TECHNOLOGIES LLCInventor: Teruo Okina
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Patent number: 11631691Abstract: A three-dimensional memory device includes alternating stacks of insulating strips and electrically conductive strips located over a substrate and laterally spaced apart among one another by line trenches which laterally extend along a first horizontal direction and are spaced apart along a second horizontal direction, and memory stack structures arranged in rows extending along the first horizontal direction. Each row of memory stack structures is located on a respective sidewall of the line trenches. Each of the memory stack structures includes a vertical semiconductor channel, a tunneling dielectric contacting the vertical semiconductor channel, a charge storage layer contacting the tunneling dielectric, and a composite blocking dielectric. The composite blocking dielectric includes a first dipole-containing blocking dielectric layer stack, a homogeneous blocking dielectric layer, and a second dipole-containing blocking dielectric layer stack.Type: GrantFiled: May 18, 2020Date of Patent: April 18, 2023Assignee: SANDISK TECHNOLOGIES LLCInventors: Masatoshi Nishikawa, Kiyohiko Sakakibara
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Patent number: 11631692Abstract: A semiconductor memory device includes a peripheral logic structure including peripheral circuits on a substrate, a horizontal semiconductor layer extending along a top surface of the peripheral logic structure, a plurality of stack structures arranged on the horizontal semiconductor layer along a first direction, and a plurality of electrode separation regions in each of the plurality of stack structures to extend in a second direction, which is different from the first direction, wherein each of the plurality of stack structures includes a first electrode pad and a second electrode pad on the first electrode pad, the first electrode pad protruding in the first direction beyond the second electrode pad by a first width, and the first electrode pad protrudes in the second direction beyond the second electrode pad by a second width, which is different from the first width.Type: GrantFiled: July 22, 2020Date of Patent: April 18, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Hae Min Lee, Shin Hwan Kang, Jee Hoon Han
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Patent number: 11631693Abstract: According to one embodiment, a semiconductor memory device includes a substrate, insulating members, first conductive layers, first pillars, and second pillars. The substrate includes a first area, a second area, block regions, and a first dummy block region. The insulating members are arranged at respective boundary portions of the block regions and the first dummy block region. The first conductive layers are partitioned by the insulating members. The first pillars penetrates the first conductive layers in a region where the first area and the block regions overlap. The second pillars penetrates at least one of the first conductive layers in a region where the first area and the first dummy block region overlap.Type: GrantFiled: August 14, 2020Date of Patent: April 18, 2023Assignee: Kioxia CorporationInventors: Takahito Nishimura, Genki Kawaguchi, Yusuke Okumura
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Patent number: 11631694Abstract: According to one or more embodiments, a method for manufacturing a semiconductor device comprises forming a stacked film that comprises alternating first insulating layers and second insulating layers. A first insulating film, an electric charge storage layer, a second insulating film, and a first semiconductor layer are then formed in a hole in the stacked film. The method further includes forming a first recess in the stacked film, then supplying a first gas and a deuterium gas to the first recess. The first gas comprises hydrogen and oxygen.Type: GrantFiled: August 26, 2020Date of Patent: April 18, 2023Assignee: Kioxia CorporationInventors: Masaki Noguchi, Tatsunori Isogai
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Patent number: 11631695Abstract: A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers located over a substrate. Each electrically conductive layer within a subset of the electrically conductive layers includes a respective first metal layer containing an elemental metal and a respective first metal silicide layer containing a metal silicide of the elemental metal. Memory openings vertically extend through the alternating stack. Memory opening fill structures located within the memory openings can include a respective memory film and a respective vertical semiconductor channel.Type: GrantFiled: October 30, 2020Date of Patent: April 18, 2023Assignee: SANDISK TECHNOLOGIES LLCInventors: Rahul Sharangpani, Raghuveer S. Makala, Fei Zhou, Adarsh Rajashekhar
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Patent number: 11631696Abstract: An alternating stack of disposable material layers and silicon nitride layers is formed over a substrate. Memory openings are formed through the alternating stack, and memory opening fill structures are formed in the memory openings, wherein each of the memory opening fill structures comprises a charge storage material layer, a tunneling dielectric layer, and a vertical semiconductor channel Laterally-extending cavities are formed by removing the disposable material layers selective to the silicon nitride layers and the memory opening fill structures. Insulating layers comprising silicon oxide are formed by oxidizing surface portions of the silicon nitride layers and portions of the charge storage material layers that are proximal to the laterally-extending cavities. Remaining portions of the charge storage material layers form vertical stacks of discrete charge storage elements. Remaining portions of the silicon nitride layers are replaced with electrically conductive layers.Type: GrantFiled: November 5, 2020Date of Patent: April 18, 2023Assignee: SANDISK TECHNOLOGIES LLCInventors: Yuki Kasai, Shigehisa Inoue, Tomohiro Asano, Raghuveer S. Makala
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Patent number: 11631697Abstract: Some embodiments include a memory array which has a vertical stack of alternating insulative levels and wordline levels. A channel material extends vertically along the stack. The channel material includes a semiconductor composition and has first segments alternating with second segments. The first segments are adjacent the wordline levels and the second segments are adjacent the insulative levels. The first segments have a first dopant distribution and the second segments have a second dopant distribution which is different from the first dopant distribution. Some embodiments include methods of forming integrated assemblies.Type: GrantFiled: February 15, 2022Date of Patent: April 18, 2023Assignee: Micron Technology, Inc.Inventors: Shyam Surthi, Byeung Chul Kim, Richard J. Hill, Francois H. Fabreguette, Gurtej S. Sandhu
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Patent number: 11631698Abstract: A method of forming a memory device includes: forming a first layer stack and a second layer stack successively over a substrate, the first layer stack and the second layer stack having a same layered structure that includes a dielectric material, a channel material over the dielectric material, and a source/drain material over the channel material; forming openings that extend through the first layer stack and the second layer stack; forming inner spacers by replacing portions of the source/drain material exposed by the openings with a first dielectric material; lining sidewalls of the openings with a ferroelectric material; forming gate electrodes by filling the openings with an electrically conductive material; forming a recess through the first layer stack and the second layer stack, the recess extending from a sidewall of the second layer stack toward the gate electrodes; and filling the recess with a second dielectric material.Type: GrantFiled: October 14, 2020Date of Patent: April 18, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chun-Chieh Lu, Sai-Hooi Yeong, Bo-Feng Young, Yu-Ming Lin, Chi On Chui, Han-Jong Chia, Chenchen Jacob Wang
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Patent number: 11631700Abstract: A display apparatus is disclosed, which may endure deformation by an external force. The display apparatus includes a flexible substrate (110) including a plurality of pores (115); and a pixel array layer (PL) provided on a first surface of the flexible substrate (110), wherein the plurality of pores are (115) provided to be concave from a second surface opposite to the first surface of the flexible substrate (110).Type: GrantFiled: December 20, 2018Date of Patent: April 18, 2023Assignee: LG Display Co., Ltd.Inventors: MinSeok Kim, SeYeoul Kwon, YounYeol Yu
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Patent number: 11631701Abstract: A display device includes a display medium layer, an active component array layer, a support layer, and a first adhesive layer. The display medium layer has a light-emitting surface. The active component array layer is disposed on a side of the display medium layer away from the light-emitting surface. The support layer is disposed on a side of the active component array layer away from the display medium layer. The first adhesive layer is connected between the active component array layer and the support layer, in which the active component array layer is directly connected to the first adhesive layer. The first adhesive layer has a Young's modulus greater than 10 GPa.Type: GrantFiled: August 13, 2021Date of Patent: April 18, 2023Assignee: AU OPTRONICS CORPORATIONInventor: Tsung-Ying Ke
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Patent number: 11631702Abstract: A lightweight flexible light-emitting device which is able to possess a curved display portion and display a full color image with high resolution and the manufacturing process thereof are disclosed. The light-emitting device comprises: a plastic substrate; an insulating layer with an adhesive interposed therebetween; a thin film transistor over the insulating layer; a protective insulating film over the thin film transistor; a color filter over the protective insulating film; an interlayer insulating film over the color filter; and a white-emissive light-emitting element formed over the interlayer insulating film and being electrically connected to the thin film transistor.Type: GrantFiled: February 3, 2021Date of Patent: April 18, 2023Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Satoshi Seo, Kaoru Hatano
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Patent number: 11631703Abstract: A display panel and a method for manufacturing a display panel that includes a front side and a back side, the display panel including a substrate having a plurality of electrical components provided on a front side of the substrate and integrated circuits connected to the plurality of electrical components, the integrated circuits being embedded in the substrate. A plurality of edge contacts is also provided along edges of the substrate, where the plurality of edge contacts is electrically connected with the integrated circuits. An electrically conductive layer covers at least a part of the front side of the substrate and surrounds the plurality of electrical components, where the electrically conductive layer does not physically contact the embedded integrated circuits and provides electromagnetic interference (EMI) shielding to different components of the display panel.Type: GrantFiled: June 18, 2020Date of Patent: April 18, 2023Assignee: BARCO NVInventors: Wim Van Eessen, Patrick Albin Willem, Bart Van Den Bossche, Peter Leon Jean-Marie Gerets
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Patent number: 11631704Abstract: An active matrix substrate includes a plurality of source bus lines and a plurality of gate bus lines and a plurality of oxide semiconductor TFTs that have a plurality of pixel TFTs, each of which is associated with one of the plurality of pixel regions, and a plurality of circuit TFTs constituting a peripheral circuit, in which each of oxide semiconductor TFTs has an oxide semiconductor layer and a gate electrode disposed on a channel region of the oxide semiconductor layer via a gate insulating layer, the plurality of oxide semiconductor TFTs have a plurality of first TFTs, a plurality of second TFTs, and/or a plurality of third TFTs, and the plurality of first TFTs have the plurality of pixel TFTs, and the plurality of second TFTs and/or the plurality of third TFTs have at least a portion of the plurality of circuit TFTs.Type: GrantFiled: April 7, 2021Date of Patent: April 18, 2023Assignee: SHARP KABUSHIKI KAISHAInventors: Kengo Hara, Tohru Daitoh, Tetsuo Kikuchi, Masahiko Suzuki, Setsuji Nishimiya, Hitoshi Takahata
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Patent number: 11631705Abstract: A method of manufacturing a display substrate, a display substrate and a display panel are provided. The method of manufacturing a display substrate includes: infiltrating an etching point of a film group with an etching solution, to form an infiltration groove at the etching point of a film group; and patterning a remaining part of the film group at the infiltration groove, to obtain a via hole penetrating the remaining part of the film group.Type: GrantFiled: September 22, 2020Date of Patent: April 18, 2023Assignee: BOE TECHNOLOGY GROUP CO., LTD.Inventors: Hongda Sun, Wenjun Hou