Abstract: A dielectric ceramic composition includes a barium titanate (BaTiO3)-based base material main ingredient and an accessory ingredient, the accessory ingredient including dysprosium (Dy) and praseodymium (Pr) as first accessory ingredients. A content of the Pr satisfies 0.233 mol?Pr?0.699 mol, based on 100 mol of the barium titanate base material main ingredient.

Abstract: A multilayer electronic component includes a silicon (Si) organic compound layer having a body cover portion disposed in a region in which an electrode layer and a conductive resin layer are not disposed, of external surfaces of a body, and an extending portion disposed to extend from the body cover portion between a conductive resin layer and a plating layer of an external electrode, and thus, may improve bending strength and moisture resistance reliability.

Abstract: A capacitor includes a first electrode layer, a second electrode layer, and an antiferroelectric layer. The antiferroelectric layer is disposed between the first electrode layer and the second electrode layer in a thickness direction of the first electrode layer. The antiferroelectric layer has a thickness differing from one point to another.

Abstract: An electrolytic capacitor with improved connectivity between a cathode body including a carbon layer and a lead terminal, and a production method thereof are provided. The electrolytic capacitor 1 includes an anode body 2 having a dielectric oxide film 5 on a surface thereof, a cathode body 3 having a cathode foil 31 and a carbon layer 32 formed on the cathode foil 31, electrolytic solution 6 interposed between the anode body 2 and the cathode body 3, and a lead terminal 7 connected to each of the anode body 2 and the cathode body 3 by cold pressure welding. A maximum static friction coefficient of a surface of the carbon layer of the cathode body is 0.6 or more.

Abstract: A dielectric of the present disclosure includes a tantalum compound containing fluorine and oxygen and being amorphous, and is advantageous in terms of achieving a high dielectric constant.

Abstract: A dye-sensitized solar cell, a polymeric solid-state electrolyte film for dye- sensitized solar cells, and a manufacturing method thereof are provided. The manufacturing method comprises the following steps: providing a liquid electrolyte, wherein the liquid electrolyte includes a solvent and an electrolyte material dissolved in the solvent; adding a polymer material into the liquid electrolyte to form a gel electrolyte; applying the gel electrolyte to a carrier to form a colloidal-state film; and evaporating the solvent contained in the colloidal-state film in a vacuum environment, wherein the pressure in the vacuum environment is controlled at 0.01 to 10 torr, the temperature is controlled at 40 to 70° C., and the treatment time is 2 to 100 hours, to form a polymeric solid-state electrolyte film.

Abstract: An electric double layer capacitor that can suppress the generation of gas and achieve long lifetime is provided. A positive electrode and a negative electrode have a polarizable electrode layer including activated carbon, and electrolytic solution includes an aprotic solvent and quaternary ammonium salt. A value of an index D of this electric double layer capacitor calculated by the below formula using an amount W (meq/g) of total acidic surface functional group per a unit weight of activated carbon, initial capacity Z (F/g) per a unit weight of activated carbon, and specific surface area (m2/g) per a unit weight of activated carbon.

Abstract: An intaglio jig for manufacturing an electronic component having an external electrode by applying a conductive paste to an electronic component body includes an elastic body, and a recessed portion that is formed in the elastic body and in which the conductive paste is contained. The recessed portion includes an opening having an opening width that conforms to a width of the external electrode, a bottom surface at a predetermined depth from the opening, and at least one protrusion portion in which a protrusion height locally protruding from the bottom surface is less than the predetermined depth.

Abstract: A remote control device may be configured to be mounted over the toggle actuator of a light switch and to control a load control device via wireless communication. The remote control device may include a base portion and a rotating portion supported by the base portion so as to be rotatable about the base portion. The remote control device may include a control circuit and a wireless communication circuit. The control circuit may be operably coupled to the rotating portion and to the wireless communication circuit. The control circuit may be configured to translate a force applied to the rotating portion of the remote control device into a control signal and to cause the communication circuit to transmit the control signal to the load control device.

Abstract: A bezel assembly for a control panel of a cooking appliance. The bezel assembly comprises a body portion that extends along an axis and includes a body exterior surface and a body interior surface. The body interior surface defines a channel for accommodating components of a control knob assembly. A rim portion extends along the axis and includes a rim exterior surface and a rim interior surface. The rim interior surface defines an opening for accommodating components of the control knob assembly. A plurality of cam fingers are configured to be articulated radially outwardly for interfacing with an interior surface of the control panel.

Abstract: A switch device for a work vehicle comprises a plurality of switches and light-emitting sections. The plurality of switches are used in the operation of a work vehicle. Each light-emitting section corresponds to at least some switches from among the plurality of switches. Each light-emitting section corresponding to some of the switches is configured to be capable of switching between a lighted state and a non-lighted state.

Abstract: A light-emitting keyboard includes a bracket, keycaps, a circuit layer and a composite light-emitting layer. The keycaps are disposed on the bracket and connected to the bracket. The circuit layer is disposed between the keycaps and the bracket. The composite light-emitting layer is disposed under the bracket, and includes a substrate, a conductive layer and light sources. The substrate includes a connection portion and extension portions respectively connected to the connection portion. A gap is positioned between any two adjacent extension portions, and a width of the gap is greater than or substantially equal to a width of any of the two adjacent extension portions. The conductive layer is disposed on the substrate. The light sources are disposed on the extension portions.

Abstract: A keyboard is applied to mounting on a holding baseplate of a computer device and includes a plurality of keyswitches, a membrane circuit board and a baseplate. The membrane circuit board is disposed under the plurality of keyswitches. The baseplate is disposed between the plurality of keyswitches and the membrane circuit board and is connected to the plurality of keyswitches, so as to make the plurality of keyswitches movable relative to the baseplate for triggering the membrane circuit board. The baseplate has a plurality of hooks. The plurality of hooks passes through the membrane circuit board to be engaged with a plurality of engaging hole structures of the holding baseplate respectively, so as to detachably mount the keyboard on the computer device. A number of the plurality of hooks is greater than forty.

Abstract: An illuminated keyboard includes a supporting plate, a bottom circuit membrane disposed on the support plate, an intermediate partition plate disposed above the bottom circuit membrane, and a top circuit membrane disposed above said intermediate partition plate. A light emitter unit is disposed on the bottom circuit membrane. A light diffusion layer is disposed above the top circuit membrane and has a light transmission region for transmitting light rays generated from the light emitter unit. An elastic member is made of an elastic material and disposed on and above the diffusion layer. A bridging unit is disposed above the diffusion layer and aligned with the elastic member. A keycap is disposed above and connected to the bridging unit. The elastic member elastically abuts against the keycap. The keycap is light permeable.

Abstract: A keyboard includes a plurality of keyswitches, a plastic baseplate, and a membrane circuit board. Each keyswitch has a keycap, a lifting mechanism and an elastic member. The lifting mechanism is movably connected to the keycap. The elastic member abuts against the keycap. The plastic baseplate has a first hole formed corresponding to each elastic member and has a connecting structure corresponding to each lifting mechanism. The connecting structure is movably connected to the lifting mechanism to make the keycap movable relative to the plastic baseplate. The membrane circuit board is disposed under the plastic baseplate. Each elastic member passes through the first hole on the plastic baseplate to be disposed on the membrane circuit board. When the keycap is pressed, the elastic member deforms downward to trigger the membrane circuit board. When the keycap is released, the elastic member returns the keycap to its original position.

Abstract: The present disclosure discloses a reinforced rubber dome, including a support portion, an elastic connection portion, and a pressing portion connected in sequence, the support portion being provided with an exhaust groove penetrating inside and outside, and the pressing portion having a columnar triggering portion at an axially inner side thereof. An outer side wall of the elastic connection portion is further provided with elastic reinforcing bars, an inner wall of the elastic reinforcing bar is fitted on the outer side wall of the elastic connection portion, two ends of the elastic reinforcing bar are respectively connected to the support portion and the pressing portion. The reinforced rubber dome provided by the disclosure increases the strength of a pressing and bending area by arranging the elastic reinforcing bars of any number, any shape and any size on the outer side wall of the elastic connection portion.

Abstract: The invention addresses the problem of providing a pushbutton switch which can give a clear operation feeling to a person who performs a push operation, and in which the sharpness, accuracy, and brightness of an image output from a display can be increased as compared with those in the related art. A button accepts a pressing operation. Lenses focus and project an image output from a display on a diffuser plate on the top surface of the button 1. A holding member holds the lenses. Further, the holding member is configured of a combination of a spacer having a rib fitted to a rib receiver of the lens arranged on the top surface side among the lenses 15a to 15d, a spacer having a rib receiver fitted to a part of the lens arranged on the external display side, and an aperture film sandwiched between the spacer and the spacer. As a result, the above problem is resolved.

Abstract: A multi-mode mechanical key switch assembly has a housing and a stem supported in a base of the housing, the stem constrained to move, when depressed during a keystroke, from a resting state and toward the base of the housing. The assembly has a removable contact leaf spring seated in the housing and having a contact portion located in a travel path of the stem for engaging with the stem during the keystroke to provide audible and/or tactile feedback. The contact leaf spring is movable between a first seated position and a second seated position to change the characteristics of the feedback. Removal of the contact leaf spring from the housing enables the stem to travel its maximum keystroke distance without auditory or tactile feedback.

Abstract: A circuit breaker for a low-voltage electric circuit includes a mechanical break contact unit which is connected in series with an electronic interrupting unit. The mechanical break contact unit is switched by breaking contacts to prevent current from flowing or by closing the contacts to allow current to flow in the low-voltage circuit. The electronic interrupting unit switches semiconductor-based switching elements into a high-impedance state to prevent current from flowing or into a low-impedance state to allow current to flow in the low-voltage circuit. The amplitude of the current in the low-voltage circuit is ascertained as instantaneous current values. If the instantaneous current value is exceeded relative to at least one current threshold value, prevention of current flowing in the low-voltage circuit is initiated. The at least one current threshold value is adapted in dependence on the amplitude of the current in the low-voltage circuit.

Abstract: A vacuum interrupter has a cover base formed with an insertion opening for an axially movable moving contact rod carrying a moving contact. The moving contact rod is routed out of the vacuum interrupter in a vacuum-tight manner by way of a bellows. The bellows has a centering appendage which is formed by a tubular end piece of the bellows that runs parallel to the longitudinal axis of the bellows and is inserted into the insertion opening. The bellows moreover has a bellows base which is disposed on the centering appendage, runs substantially transversely to the longitudinal axis of the bellows, and is formed with a through-opening for the moving contact rod.

Abstract: A switch device may include a movable body that is displaced in an axial direction in conjunction with an operation of an operated portion, a magnet provided on the movable body, and a plurality of detection elements arranged facing the magnet. The plurality of detection elements may include a first detection element with a detection surface facing the magnet and a reversed second detection element with a detection surface facing away from the magnet. The total number of the plurality of detection elements may be at least three.

Abstract: An acoustic sensing system for detecting movement of an ultra-fast actuator in a hybrid circuit interrupter is disclosed. The system comprises a number of acoustic sensors structured to perform active or passive position sensing. For active sensing, the sensors emit sound waves toward a number of targeted portions of the actuator moving assembly and detect the positions of the targets based on acoustic signals reflected back to the sensors by the targets. For passive sensing, the sensors detect acoustic wavelets generated as a result of the moving assembly components moving during opening and closing operations. Acoustic signals can propagate through air or solids and thus the sensors can be mounted in a variety of locations within the circuit interrupter. Acoustic sensors are particularly well-suited for the circuit interrupter environment, as they are resilient to the environmental and external factors, such as dust, that can affect the performance of non-acoustic sensors.

Abstract: A circuit breaker and a power supply system are disclosed. The circuit breaker includes a mechanical switch circuit, where the mechanical switch circuit includes a busbar, a power module, and a drive module. The power module includes a movable contact and a stationary contact, where the stationary contact is electrically connected to the busbar, the movable contact is movable, when the movable contact is in contact with the stationary contact, the mechanical switch circuit is conducted, and the drive module includes a movable coil and a stationary coil, where the movable coil and the stationary coil are placed adjacently, so that the movable coil and the stationary coil repel or attract each other based on whether current directions are the same, and the movable coil is configured to drive the movable contact to be in contact with or disconnected from the stationary contact.

Abstract: An electromagnet device includes an electromagnetic coil and a capacitor. The electromagnetic coil includes a first coil and a second coil connected in parallel to the first coil. The capacitor is connected to the second coil and configured to be charged by a voltage applied to the electromagnetic coil. Upon application of the voltage to the electromagnetic coil, the first coil and the second coil are turned from a non-conducting state to a conducting state. Upon completion of a charging of the capacitor by the application of the voltage to the electromagnetic coil, a current flow into the second coil will have ceased, and the second coil will have changed from the conducting state into the non-conducting state.

Abstract: A micromechanical electrically actuable switch. The switch has a first relay with a first operating contact, and a second relay with a second operating contact. The first operating contact and the second operating contact are arranged in series in a common load path. The switch further includes a detection device for detecting a switching state of the first operating contact, and a control circuit for registering the switching state of the first operating contact and for switching on the electrically actuable switch. The control circuit is configured, upon a switch-on signal, to switch on the first relay and the second relay in a first case, in which the switching state of the first operating contact is “open”, and to not switch on at least the second relay in a second case, in which the switching state of the first operating contact is “closed”.

Abstract: A switchgear assembly includes an indicator assembly to indicate whether a movable contact is in an open or a closed position. The indicator assembly includes an indicator body having first and second sections. The indicator body is rotatable to display the first section in the open position and the second section in the closed position. The indicator assembly also includes a drive gear having a first helical spline and coupled to an actuator of the switchgear assembly such that operation of the actuator moves the drive gear, and an elongated driven gear having a second helical spline extending along a length of the driven gear and engaged with the first helical spline of the drive gear such that movement of the drive gear rotates the driven gear. The driven gear is coupled to the indicator body such that rotation of the driven gear causes rotation of the indicator body.

Abstract: A plug-in summation current transformer module for insertion into a module-overlapping installation space of a multi-pole rail-mounted device that is formed of a plurality of housing modules has a summation current transformer and primary conductors routed through the tubular summation current transformer. The primary conductors have primary conductor ends. A primary conductor holder for fixing the primary conductor ends is fastened to the summation current transformer and adopts a fixing position for holding the primary conductor ends in an assembling position for insertion into a module-overlapping installation space and a releasing position where the primary conductor ends move transversely into a releasing position allowing the primary conductor ends to join into their contacts in the modules.

Abstract: A fuse holder is disclosed. The fuse holder includes a housing having a fuse compartment and termination compartments, each termination compartment having a cable termination aperture for receiving a cable and a lock pin slot; a bus assembly disposed including current bars having a first end and a second end extending from the termination compartment to the termination compartment, the first end having fuse contacts extending from the first end, the second end including a barb extending from the second end; and, push-in clamps disposed within the termination compartment, the push-in clamps normally biased against the barbs; wherein insertion of an electrical cable into the cable termination aperture depresses and elastically deforms the push-in clamp such that a gap is formed between the barb and the push-in clamp, wherein the push-in clamp continuously applies a biasing force against the electrical cable non-removably clamping the cable into the termination aperture.

Abstract: An ion guide includes a first arrangement of electrodes on a first surface, a second arrangement of electrodes on a second surface, and an ion containment space in a gap therebetween. The first arrangement includes first electrodes and second electrodes. Each first electrode includes a first main portion and a first edge portion. The first edge portion is wider than the first main portion. The second arrangement includes third electrodes and fourth electrodes. Each fourth electrode includes a fourth main portion and a fourth edge portion. The fourth edge portion is wider than the fourth main portion. The first edge portions are positioned opposite the fourth edge portions. The first electrodes and the third electrodes are configured to receive first RF voltages and the second electrodes and the fourth electrodes are configured to receive second RF voltages that are phase-shifted with respect to the first RF voltages.

Abstract: One or more example embodiments relates to an X-ray source comprising a grid voltage unit including an interface configured to receive a control signal. The grid voltage unit is configured to regulate, via regulation of a first grid voltage at a first grid and via regulation of a second grid voltage at a second grid, a charge quantity available in a capacitor and a generator current as a function of the control signal.

Abstract: In order to achieve effective cooling, an X-ray emitter with a tube housing having a vacuum is provided. At least one anode is arranged in the tube housing, such that the anode is irradiated by an electron beam generated in a cathode and accelerated through an electrical field. The anode is excited, such that an X-ray deceleration radiation is emitted. The X-ray emitter has a thermoelectric converter (e.g., at least one thermophotovoltaic cell) for generating electrical energy. The thermoelectric converter is arranged, such that the thermoelectric converter may be irradiated at least in part by a heat radiation emanating from the anode.

Abstract: An x-ray tube includes a housing containing cooling oil and a vacuum envelope disposed within the housing and including a solid envelope wall. The oil is disposed between the housing and wall. An anode and cathode are arranged in a vacuum environment and surrounded by the wall. A rotor connected to the anode is arranged on bearings within the vacuum environment. Additionally, a stator assembly positioned within the oil surrounds the rotor to define an oil-filled annular gap. The stator assembly includes a stator core, stator teeth spaced apart by intervening stator slots, and stator windings disposed within the stator slots. Each stator tooth includes a tooth tip positioned adjacent to the boundary wall and set a distance apart from the stator windings to form an intra-slot cooling channel in fluid communication with the oil-filled annular gap such that the stator teeth inclusive of its tooth tips are immersed in oil.

Abstract: A multitube X-ray emitter housing according to the invention includes a housing, a high-voltage supply and a cooling device with an electrically insulating cooling medium. The high-voltage supply has a plurality of high-voltage contacts connected in parallel on a single high-voltage supply lead. A first of at least one side surface of the housing has a first electrically conductive housing portion with a temperature-dependent electrical conductivity. The multitube X-ray emitter housing further includes: a control unit having an interface to receive a measured value representing the electrical conductivity of the first electrically conductive housing portion and to compare the measured value with a threshold value; and a switching device to switch off the high voltage based on the comparison.

Abstract: Imaging, processing and/or analyzing an object using a particle beam device includes guiding a first particle beam over the object, processing the object using the first particle beam or detecting first interaction particles and/or a first interaction radiation, where the first interaction particles and/or the first interaction radiation results/result from an interaction of the first particle beam with the object, controlling a second deflection device for guiding the second particle beam over the object even while the first particle beam is being guided over the object, and deflecting the first particle beam from the object. Only when the first particle beam has been deflected, the object is processed using the second particle beam or detecting second interaction particles and/or a second interaction radiation that results/result from an interaction of the second particle beam with the object.

Abstract: The present invention relates to a charged particle beam system comprising a deflection subsystem configured to deflect a charged particle beam in a deflection direction based on a sum of analog signals generated by separate digital to analog conversion of a first digital signal and a second digital signal. The present invention further relates to a method of configuring the charged particle beam system so that each of a plurality of regions of interest can be scanned by varying only the first digital signal while the second digital signal is held constant at a value associated with the respective region of interest. The present invention further relates to a method of recording a ci plurality of images of the regions of interest at the premise of reduced interference due to charge accumulation.

Abstract: The present disclosure relates to a sample support device for charged particle microscopy and related methods. The device comprises a substrate and a heating and/or biasing element integrated in or on the substrate to heat (or apply a bias voltage to) a sample when positioned in an observation region of the device. The device comprises a membrane covering an opening in the heater element and/or substrate in the observation region of the device. The membrane is perforated to form at least one hole covered by a graphene layer to form a sample support to place a sample of interest thereon for study. A cap covers the membrane such that a chamber is formed in which the sample can be isolated in a controllable gaseous environment.

Abstract: Fastening an object to a movable manipulator and/or an object holder in a particle beam apparatus and moving the object in the particle beam apparatus includes fastening a material unit, configured to hold an object, to the manipulator using a particle beam, fastening the object to the material unit using the particle beam, and, using the manipulator and/or an object stage, moving the object fastened to the material unit. A computer program product has program code which can be loaded into a processor and which, when executed, controls a particle beam apparatus to fasten a material unit, configured to hold an object, to the manipulator using a particle beam, fasten the object to the material unit using the particle beam, and, using the manipulator and/or an object stage, move the object fastened to the material unit.

Abstract: Disclosed herein is a charged-particle apparatus configured to inspect a sample with a charged-particle beam. The charged-particle apparatus comprises a detector assembly or an array of multipole elements. The charged-particle apparatus comprises an electronic device, a power source configured to output radiation, and a power converter configured to receive radiation from the power source, to convert the received radiation into electrical energy and to output the electrical energy to the electronic device. The power source is electrically isolated from the power converter.

Abstract: An apparatus for observing a sample using a charged particle beam includes an ion beam column configured to generate and direct an ion beam, an electron beam column configured to generate and direct an electron beam, a vacuum chamber for housing the sample, and a probe positioned in the vacuum chamber. The probe is configured to provide electrical connection between the sample and a power supply.

Abstract: Provided is a liquid cell for an electron microscope according to an embodiment of the inventive concept, including a lower widow layer, an upper widow layer above the lower widow layer, and a separation film disposed between the upper widow layer and the lower widow layer so as to separate the upper widow layer and the lower widow layer from each other. An upper space may be defined by the upper widow layer and the separation film, and a lower space may be defined by the lower widow layer and the separation film. The upper widow layer, the lower widow layer, and the separation film may include the same material.

Abstract: Described herein are techniques for identifying biological structures using a cryogenic electron microscopy (cryo-EM). In some embodiments, first images captured at a first magnification level may be received depicting cryo-EM grid units. Using a first ML model, one or more cryo-EM grid units may be detected based on the first images. Second images of each cryo-EM grid unit captured at a second magnification level may be received and, using a second ML model, one or more apertures within the cryo-EM grid may be detected based on the second images. One or more images captured at a third magnification level of depicting at least one of ice or a biological structure suspended within each aperture may be received and a Fourier transformation may be generated. Using a third ML model, at least one image depicting the biological structure from the images may be identified based on the Fourier transformations.

Abstract: The invention relates to a method for fastening an object to a manipulator in a particle beam apparatus and for moving the object in the particle beam apparatus. The invention further relates to a computer program product and a particle beam apparatus, which are provided to carry out the method according to the invention. The method according to the invention includes the following steps: generating a first surface on the manipulator using a particle beam of the particle beam apparatus; generating a second surface on the object using the particle beam, in such a way that the second surface corresponds to the first surface; arranging the first surface at the second surface such that the manipulator is arranged at the object; fastening the object to the manipulator in a boundary region between the first surface and the second surface using the particle beam; and moving the object fastened to the manipulator using the manipulator and/or a mobile object stage, on which the object is arranged.

Abstract: A cathode apparatus for an ion source has a cathode with a positioning feature and a blind hole. A cathode holder has an aperture defined by a thru-hole and a locating feature defined along an aperture axis. The thru-hole receives the cathode along the aperture axis in first and second alignment positions based on a rotational orientation of the positioning feature with respect to the locating feature. The first alignment position locates the cathode at a first axial position along the aperture axis. The second alignment position locates the cathode at a second axial position along the axial axis. A filament device has a filament clamp, a filament rod defining a filament axis, and a filament coupled to the filament rod. The filament clamp is in selective engagement with the filament rod to selectively position the filament along the filament axis within the blind hole.

Abstract: An ion implantation device (20) is provided comprising an energy filter (25) with at least one filter layer (32) and at least one support element (30) for supporting the energy filter (25), wherein the at least one support element (30) overlaps at least part of the energy filter (25).

Abstract: A substrate supporting apparatus includes a heating plate, a radio frequency (RF) electrode in the heating plate, and an RF delivery structure in contact with a bottom surface of the RF electrode. The heating plate includes a first insertion hole, which is recessed into the heating plate from a bottom surface of the heating plate to expose the bottom surface of the RF electrode. The RF delivery structure includes an RF rod, a portion of which is inserted in the first insertion hole, and through which an RF power is supplied to the RF electrode. The RF rod includes a first material, and a relative permeability of the first material is less than 100, a volume resistivity of the first material is smaller than 70 n?m, and a melting point of the first material is higher than 1400° C.

Abstract: A semiconductor processing apparatus includes an upper electrode and a substrate on a lower electrode disposed inside the process chamber, a first power generator configured to provide a low-frequency signal to the lower electrode, wherein the low-frequency signal varies between a reference voltage and a first voltage at intervals of a first cycle, a second power generator configured to provide a high-frequency signal to the lower electrode, wherein the high-frequency signal has a sinusoidal waveform that oscillates at intervals of a second cycle shorter than the first cycle, and a direct-current (DC) power generator configured to provide a DC bias to the upper electrode. The high-frequency signal is turned off during at least part of a duration for which the low-frequency signal has the first voltage, and the high-frequency signal is turned on and turned off at intervals of a third cycle different from the first and second cycles.

Abstract: An etching method includes: steps a), b), c), and d). Step a) provides a substrate having an underlying layer and an etching target film formed on the underlying layer, on a stage. Step b) generates plasma from a processing gas. Step c) supplies a bias power having a first frequency to the stage to etch the etching target film, thereby forming a recess. Step d) changes a frequency of the bias power to a second frequency different from the first frequency according to an aspect ratio of the recess after step c), to further etch the etching target film. After a generation of the plasma, the etching target film is continuously etched during a time period until the underlying layer is exposed.

Abstract: Systems, devices, and methods are discussed relating to plasma sources using load current switch timing of zero volt switching resonant topology.

Abstract: A radio frequency sensor assembly includes a sensor casing disposed around a central hole, the sensor casing including a first conductive cover and a second conductive cover. The assembly includes a cavity disposed around the central hole and includes a dielectric material, the cavity being bounded by a first major outer surface and a second major outer surface along a radial direction from a center of the central hole, where the first conductive cover is electrically coupled to the second conductive cover through a coupling region beyond the second major outer surface of the cavity, and electrically insulated from the second conductive cover by the cavity and the central hole. The assembly includes a current sensor electrically insulated from the sensor casing and including a current pickup disposed symmetrically around the central hole, the current pickup being disposed within the cavity and being insulated from the sensor casing.

Abstract: A high frequency, high voltage compound helical inductor coil includes a primary coil configured as a helix, a secondary coil configured as a helix and being surrounded by and parallel with the primary coil. A dielectric insulator, configured as a helix, is disposed between and separates the primary coil and the secondary coil. A center conductor may extend axially through the primary and secondary coils and may be attached at a first end to the primary coil and at a second end to the secondary coil.