Using Heat (e.g., Strain Annealing) Patents (Class 117/7)
  • Publication number: 20110045352
    Abstract: Each of: (1) a nanoparticle comprising a substantially single crystalline mesoporous Co3O4 material; (2) a battery electrode comprising a plurality of nanoparticles comprising the substantially single crystalline mesoporous Co3O4 material; (3) a battery comprising the battery electrode comprising the plurality of nanoparticles comprising the substantially single crystalline mesoporous Co3O4 material; and (4) a plurality of methods for preparing the nanoparticle comprising the substantially single crystalline mesoporous Co3O4 material, may be employed within the context of a lithium containing battery, such as a lithium ion battery. When the substantially single crystalline mesoporous Co3O4 material has a pore size of about 3 to about 8 nanometers enhanced lithium containing battery electrical performance properties are observed.
    Type: Application
    Filed: August 18, 2010
    Publication date: February 24, 2011
    Applicant: CORNELL UNIVERSITY
    Inventors: Lynden A. Archer, Xiong Wen Lou
  • Publication number: 20100293910
    Abstract: Single-crystal silicon carbide nanowires and a method for producing the nanowires are provided. The single-crystal silicon carbide nanowires have a very high aspect ratio and can be used for the fabrication of nanoelectronic devices, including electron gun emitters and MEMS probe tips, for use in a variety of displays and analyzers. Further provided is a filter comprising the nanowires. The filter is applied to systems for filtering vehicle engine exhaust gases to achieve improved filtering performance and increased lifetime.
    Type: Application
    Filed: August 16, 2007
    Publication date: November 25, 2010
    Inventors: Sung Churl Choi, Sang-Hoon Lee, Jin-Seok Lee, Yun-Ki Byeun
  • Patent number: 7828894
    Abstract: A crystallization method, includes: forming an amorphous silicon layer on a substrate; forming a first crystallization region by irradiating the amorphous silicon layer with a laser beam having a ramp shaped cross sectional profile that decreases in a scanning direction; and performing a second crystallization by moving a predetermined length in a scanning direction so as to be partially overlapped with the first crystallization region formed by the first crystallization.
    Type: Grant
    Filed: November 2, 2005
    Date of Patent: November 9, 2010
    Assignee: LG Display Co., Ltd.
    Inventor: JaeSung You
  • Patent number: 7799158
    Abstract: A method for producing a crystallographically-oriented ceramic includes the steps of forming a first sheet with a thickness of 10 ?m or less containing a first inorganic material in which grain growth occurs at a first temperature or higher and a second sheet containing a second inorganic material in which grain growth occurs at a second temperature higher than the first temperature, laminating one or more each of the first and second sheets to form a laminated body, firing the laminated body at a temperature equal to or higher than the first temperature and lower than the second temperature to cause grain growth in the first inorganic material, and then firing the laminated body at a temperature equal to or higher than the second temperature to cause grain growth in the second inorganic material in the direction of a crystal plane of the first inorganic material.
    Type: Grant
    Filed: January 14, 2008
    Date of Patent: September 21, 2010
    Assignee: NGK Insulators, Ltd.
    Inventors: Shohei Yokoyama, Nobuyuki Kobayashi, Tsutomu Nanataki
  • Patent number: 7785659
    Abstract: A method of manufacturing an orientation film which method is suitable for manufacturing an orientation film containing a ceramic at low cost. The method includes the steps of: (a) forming a ceramic film on a seed substrate in which crystal orientation is controlled at least on a surface thereof by using an aerosol deposition method of injecting powder toward a substrate and depositing the powder on the substrate; and (b) heat-treating the ceramic film formed at step (a) to form an orientation film in which crystal grains contained in the ceramic film is oriented.
    Type: Grant
    Filed: March 20, 2006
    Date of Patent: August 31, 2010
    Assignee: FUJIFILM Corporation
    Inventor: Yasukazu Nihei
  • Patent number: 7759228
    Abstract: A method of manufacturing a semiconductor device. In the method, a substrate is prepared, which includes a buried oxide film and a SiGe layer formed on the buried oxide film. Then, heat treatment is performed on the substrate at a temperature equal to or lower than a first temperature, to form a protective oxide film on a surface of the SiGe layer. Next, the substrate having the protective oxide film is heated in a non-oxidizing atmosphere to a second temperature higher than the first temperature. Further, heat treatment is performed on the substrate thus heated, in an oxidizing atmosphere at a temperature equal to or higher than the second temperature, to form oxide the SiGe layer, make the SiGe layer thinner and increasing Ge concentration in the SiGe layer, thus forming a SiGe layer having the increased Ge concentration.
    Type: Grant
    Filed: June 9, 2006
    Date of Patent: July 20, 2010
    Assignees: Kabushiki Kaisha Toshiba, Oki Electric Industry Co., Ltd.
    Inventors: Naoharu Sugiyama, Norio Hirashita, Tsutomu Tezuka
  • Patent number: 7754008
    Abstract: A method of forming a stressed thin film on a substrate includes forming a plurality of islands on a viscous layer that is present on a surface of a substrate. Adjacent islands are bridged with a stressor layer. The structure is annealed at an elevated temperature above the glass flow temperature of the viscous layer to transfer at least a portion of the stress from the stressor layer to the underlying islands. The bridges are then removed to expose the stressed islands of thin film on the substrate.
    Type: Grant
    Filed: July 19, 2006
    Date of Patent: July 13, 2010
    Assignee: The Regents of the University of California
    Inventors: Ya-Hong Xie, Jeehwan Kim
  • Publication number: 20090297395
    Abstract: A method for treating semiconducting materials is disclosed. In the disclosed method, a semiconducting material having a crystalline structure is provided, at least a portion of the semiconducting material is exposed to a heat source to create a melt pool, and the semiconducting material is then cooled. Semiconducting materials treated by the method are also disclosed.
    Type: Application
    Filed: June 2, 2008
    Publication date: December 3, 2009
    Inventors: Prantik Mazumder, Kamal Kishore Soni, Christopher Scott Thomas, Natesan Venkataraman, Glen Bennett Cook
  • Patent number: 7615471
    Abstract: The invention relates to a method for producing a tensioned layer on a substrate involving the following steps: producing a defect area in a layer adjacent to the layer to be tensioned, and; relaxing at least one layer adjacent to the layer to be tensioned. Additional layers can be epitaxially deposited. Layer structures formed in this manner are advantageously suited for components of all types.
    Type: Grant
    Filed: April 8, 2004
    Date of Patent: November 10, 2009
    Assignee: Forschungszentrum Julich GmbH
    Inventor: Siegfried Mantl
  • Publication number: 20090211514
    Abstract: A solid state method for converting polycrystalline alumina components to single crystal or sapphire. The single crystal conversion method includes sintering a pre-fired polycrystalline alumina component doped with a magnesia sintering aid in an atmosphere containing a gas mixture of hydrogen and an inert gas, such as nitrogen in one embodiment. A sintering temperature is selected that preferably depends on the percentage of hydrogen selected. The component is held at the sintering temperature for a time sufficient to convert the polycrystalline component into a component formed of a single crystal. In one embodiment, the sintering temperature may be between at least about 1600° C. and less than 2050° C., and the amount of hydrogen in the sintering atmosphere may be between about 4% to about 10%. The method forms a wetting type intergranular film associated with the nucleation and growth of a single abnormal grain in the polycrystalline alumina component.
    Type: Application
    Filed: February 26, 2008
    Publication date: August 27, 2009
    Inventors: Shen J. Dillon, Martin P. Harmer
  • Publication number: 20090211515
    Abstract: By controlling the average size of matrix grains of polycrystalline bodies to more than a critical size at which an abnormal, exaggerated or discontinuous grain growth ends, and less than twice the critical size, large single crystals enough for practical use may be made even without occurring abnormal grain growth in polycrystalline bodies only through a heat treatment process without using a melting process and a special apparatus, thereby allowing the mass production of the large single crystals at low costs with high reproduction possibility.
    Type: Application
    Filed: February 19, 2009
    Publication date: August 27, 2009
    Applicant: CERACOMP CO., LTD.
    Inventors: Ho-Yong LEE, Jong-Bong LEE, Tae-Moo HUR, Dong-Ho KIM
  • Patent number: 7544244
    Abstract: A method of manufacturing a ceramic film by using an AD method, by which a film having good crystallinity can be fabricated without using a high-temperature process. The method of manufacturing a ceramic film by using an aerosol including the steps of: (a) dispersing ceramic raw material powder containing an amorphous component in a gas to generate an aerosol; and (b) supplying the aerosol generated at step (a) into a chamber in which a substrate is placed and depositing the ceramic raw material powder on the substrate to form a ceramic film.
    Type: Grant
    Filed: December 6, 2005
    Date of Patent: June 9, 2009
    Assignee: FUJIFILM Corporation
    Inventors: Yukio Sakashita, Takamichi Fujii
  • Publication number: 20090120351
    Abstract: A method for growing large single crystals of metals is disclosed. A polycrystalline form of a metal specimen is initially heated in a non-oxidizing environment. A minimum plastic strain is then applied to the heated metal specimen to initiate the growth of a selected grain within the heated metal specimen. Additional plastic strain is subsequently applied to the heated metal specimen to propagate the growth of the selected grain to become a large single crystal.
    Type: Application
    Filed: November 8, 2007
    Publication date: May 14, 2009
    Inventors: James R. Ciulik, Eric M. Taleff
  • Patent number: 7520930
    Abstract: A bulk silicon carbide single crystal of good crystalline quality which includes a minimized number of structural defects and is free from micropipe defects can be produced by crystal growth in a melt of an alloy comprising Si, C, and M (wherein M is either Mn or Ti) and having an atomic ratio between Si and M in which the value of x, when express as Si1-xMx, is 0.1?x?0.7 in the case where M is Mn or 0.1?x?0.25 in the case where M is Ti at a temperature of the melt which is below 2000° C. The C component is preferably supplied into the melt by dissolution of a graphite crucible which contains the melt such that the melt is free from undissolved C. One method of crystal growth is performed by cooling the melt after a seed substrate is immersed in the melt.
    Type: Grant
    Filed: October 15, 2004
    Date of Patent: April 21, 2009
    Assignee: Sumitomo Metal Industries, Ltd.
    Inventors: Kazuhiko Kusunoki, Shinji Munetoh, Kazuhito Kamei
  • Publication number: 20090090886
    Abstract: The present invention relates to nanostructures, in particular to hematite rhombohedra and iron/magnetite nanocomposites, and methods of making same.
    Type: Application
    Filed: October 9, 2007
    Publication date: April 9, 2009
    Inventors: Stanislaus S. Wong, Tae-Jin Park
  • Patent number: 7507289
    Abstract: In a solid solution system of Al2O3 and CAO or SrO, it has been difficult to obtain a material having a high electrical conductivity (>10?4 S·cm?) at room temperature. A compound is provided in which electrons at a high concentration are introduced into a 12CaO.7Al2O3 compound, a 12SrO.7Al2O3 compound, or a mixed crystal compound containing 12CaO.7Al2O3 and 12SrO.7Al2O3. The compound formed by substituting all the free oxygen ions with electrons is regarded as an electride compound in which [Ca24Al28O64]4+(4e?) or [Sr24Al28O64]4+(4e?) serves as a cation and electrons serve as anions. When a single crystal or a hydrostatic pressure press molded material of a fine powder thereof is held at approximately 700° C. in an alkaline metal vapor or an alkaline earth metal vapor, melt of a hydrostatic pressure press molded material of a powder is held at approximately 1,600° C. in a carbon crucible, followed by slow cooling for solidification, or a thin film of the compound held at approximately 600° C.
    Type: Grant
    Filed: February 12, 2004
    Date of Patent: March 24, 2009
    Assignee: Japan Science and Technology Agency
    Inventors: Hideo Hosono, Masahiro Hirano, Katsuro Hayashi, Masashi Miyakawa, Isao Tanaka
  • Patent number: 7503975
    Abstract: In a crystalline silicon film fabricated by a related art method, the orientation planes of its crystal randomly exist and the orientation rate relative to a particular crystal orientation is low. A semiconductor material which contains silicon as its main component and 0.1-10 atomic % of germanium is used as a first layer, and an amorphous silicon film is used as a second layer. Laser light is irradiated to crystallize the amorphous semiconductor films, whereby a good semiconductor film is obtained. In addition, TFTs are fabricated by using such a semiconductor film.
    Type: Grant
    Filed: June 25, 2001
    Date of Patent: March 17, 2009
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Toru Mitsuki, Kenji Kasahara, Taketomi Asami, Tamae Takano, Takeshi Shichi, Chiho Kokubo
  • Publication number: 20090038536
    Abstract: A first optical modulation element irradiates a non-single-crystal substance with a light beam which is to have a first light intensity distribution on the non-single crystal substance by modulating an intensity of an incident first light beam, thereby melting the substance. A second optical modulation element irradiates the substance with a light beam which is to have a second light intensity distribution on the substance by modulating an intensity of an incident second light beam, thereby melting the substance. An illumination system causes the light beam having the second light intensity distribution to enter the molten part of the substance in a period that the substance is partially molten by irradiation of the light beam having the first light intensity distribution.
    Type: Application
    Filed: October 1, 2008
    Publication date: February 12, 2009
    Applicant: Advanced LCD Technologies Dev. Ctr. Co., Ltd.
    Inventors: Yukio Taniguchi, Masayuki Jyumonji, Hiroyuki Ogawa
  • Patent number: 7488384
    Abstract: Colloidal nanocrystals or “quantum dots” of GaN are directly produced by heating amidogallium dimer, i.e., (Ga2[N(CH3)2]6), in the presence of a functional amine. The GaN quantum dots obtained, which comprise isolated particles 2-3 nm in diameter with a relative broad size distribution (e.g., 20% standard deviation) exhibit strong exciton confinement.
    Type: Grant
    Filed: May 3, 2006
    Date of Patent: February 10, 2009
    Assignee: Ohio University
    Inventors: Paul Gregory Van Patten, Guiquan Pan
  • Patent number: 7452792
    Abstract: The invention relates to a method of forming a layer of elastically unstrained crystalline material intended for electronics, optics, or optronics applications, wherein the method is carried out using a structure that includes a first crystalline layer which is elastically strained under tension (or respectively in compression) and a second crystalline layer which is elastically strained in compression (or respectively under tension), with the second layer being adjacent to the first layer.
    Type: Grant
    Filed: January 19, 2006
    Date of Patent: November 18, 2008
    Assignee: S.O.I.Tec Silicon on Insulator Technologies
    Inventors: Nicolas Daval, Zohra Chahra, Romain Larderet
  • Patent number: 7422630
    Abstract: Concentration of metal element which promotes crystallization of silicon and which exists within a crystal silicon film obtained by utilizing the metal element is reduced. A first heat treatment for crystallization is implemented after introducing nickel to an amorphous silicon film 103. Then, laser light is irradiated to diffuse the nickel element concentrated locally. After that, another heat treatment is implemented within an oxidizing atmosphere at a temperature higher than that of the previous heat treatment. A thermal oxide film 106 is formed in this step. At this time, the nickel element is gettered to the thermal oxide film 106. Then, the thermal oxide film 106 is removed. Thereby, a crystal silicon film 107 having low concentration of the metal element and a high crystallinity can be obtained.
    Type: Grant
    Filed: June 5, 2006
    Date of Patent: September 9, 2008
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Satoshi Teramoto, Jun Koyama, Yasushi Ogata, Masahiko Hayakawa, Mitsuaki Osame
  • Publication number: 20080213603
    Abstract: Various embodiments of the present invention are directed to methods of forming nanostructures on non-single crystal substrates, and resulting nanostructures and nanoscale functional devices. In one embodiment of the present invention, a method of forming nanostructures includes forming a multi-layer structure comprising a metallic layer and a silicon layer. The multi-layer structure is subjected to a thermal process to form metal-silicide crystallites. The nanostructures are grown on the metal-silicide crystallites. In another embodiment of the present invention, a structure includes a non-single-crystal substrate and a layer formed over the non-single-crystal substrate. The layer includes metal-silicide crystallites. A number of nanostructures may be formed on the metal-silicide crystallites. The disclosed structures may be used to form a number of different types of functional devices for use in electronics and/or optoelectronics devices.
    Type: Application
    Filed: March 1, 2007
    Publication date: September 4, 2008
    Inventors: Nobuhiko Kobayashi, Shih-Yuan Wang
  • Publication number: 20080200327
    Abstract: The present invention provides a method of producing the barium titanate solid solution single crystals. The crystalline phase of the single crystal is hexagonal. The method of the present invention, a small quantity of metal oxide is added and dissolved into the barium titanate to form a solid solution. The metal oxides are used as single crystal growth aid; and the barium titanate single crystal can be prepared by using a pressureless sintering process composing of one or two stages of heat treatments that require no special expensive equipments, and thus the method can be used for the mass production of the single crystals.
    Type: Application
    Filed: August 2, 2007
    Publication date: August 21, 2008
    Inventors: Wei-Hsing Tuan, Yung-Ching Huang
  • Patent number: 7374613
    Abstract: Disclosed is a ceramic or metal single-crystal material having high-density dislocations arranged one-dimensionally on respective straight lines. The single-crystal material is produced by compressing a ceramic or metal single-crystal blank at a high temperature from a direction allowing the activation of a single slip to induce plastic deformation therein, and then subjecting the resulting product to a heat treatment. The single-crystal material can be used in a device for high-speed dislocation-pipe diffusion of ions or electrons. The single-crystal material can further be subjected to a diffusion treatment so as to diffuse a metal element from its surface along the dislocations to provide a single-crystal device with a specific electrical conductivity or a quantum wire device.
    Type: Grant
    Filed: April 21, 2003
    Date of Patent: May 20, 2008
    Assignee: Japan Science and Technology Agency
    Inventors: Yuichi Ikuhara, Takahisa Yamamoto
  • Patent number: 7361217
    Abstract: Method for crystallizing a melamine melt to form melamine particles with a D90 of at most 2 mm by cooling a melamine melt to below the crystallization temperature of the melamine, comprising the formation of a suspension of melamine particles in the cooling medium by spraying the melamine melt with at most 10 wt % of CO2 relative to the sprayed quantity of melamine melt in a space in which a layer of a liquid cooling medium is present that has a temperature below the crystallization temperature of the melamine and under cooling conditions at which at least 50 wt % of the sprayed melamine melt directly turns into suspended melamine particles. Method for the production of melamine from urea in a preferably continuous, high-pressure process, with application of the present method for the crystallization.
    Type: Grant
    Filed: January 28, 2004
    Date of Patent: April 22, 2008
    Assignee: DSM IP Assets B.V.
    Inventor: Tjay Tjien M. Tjioe
  • Patent number: 7341628
    Abstract: Gallium Nitride layers grown as single crystals by epitaxy such as Hydride Vapor Phase Epitaxy (HVPE) contain large numbers of crystal defects such as hexagonal pits, which limit the yield and performance of opto- and electronic devices. In this method, the Gallium Nitride layer is first coated with an Aluminum layer of approximate thickness of 0.1 microns. Next, Nitrogen is ion implanted through the Aluminum layer so as to occupy mostly the top 0.1 to 0.5 microns of the Gallium Nitride layer. Finally, through a pulsed directed energy beam such as electron or photons, with a fluence of approximately 1 Joule/cm2 the top approximately 0.5 microns are converted to a single crystal with reduced defect density.
    Type: Grant
    Filed: December 16, 2004
    Date of Patent: March 11, 2008
    Inventor: Andreas A. Melas
  • Publication number: 20080047482
    Abstract: A method of making a rare earth halide single crystal material is provided. The method includes providing a polycrystalline material having a plurality of grains. The method further includes adding a seed crystal to the polycrystalline material to define a plane of growth for the polycrystalline material. Further, the polycrystalline material having the seed crystal may be subjected to heat-treating, where the heat-treating does not include melting the polycrystalline material.
    Type: Application
    Filed: August 23, 2006
    Publication date: February 28, 2008
    Inventor: Venkat Subramaniam Venkataramani
  • Publication number: 20080047483
    Abstract: A method of making a single crystal material is provided. The method includes providing a polycrystalline material having a plurality of grains. The method further includes adding a seed crystal to the polycrystalline material to define a plane of growth for the polycrystalline material. Further, the polycrystalline material having the seed crystal may be subjected to heat-treating, where the heat-treating does not include melting the polycrystalline material.
    Type: Application
    Filed: August 23, 2006
    Publication date: February 28, 2008
    Inventors: Venkat Subramaniam Venkataramani, Wesley Hackenberger, Seongtae Kwon, Paul William Rehrig
  • Patent number: 7300516
    Abstract: When a laser beam is radiated on a semiconductor film under appropriate conditions, the semiconductor film can be crystallized into single crystal-like grains connected in a scanning direction of the laser beam (laser annealing). The most efficient laser annealing condition is studied. When a length of one side of a rectangular substrate on which a semiconductor film is formed is b, a scanning speed is V, and acceleration necessary to attain the scanning speed V of the laser beam relative to the substrate is g, and when V=(gb/5.477)1/2 is satisfied, a time necessary for the laser annealing is made shortest. The acceleration g is made constant, however, when it is a function of time, a time-averaged value thereof can be used in place of the constant.
    Type: Grant
    Filed: October 13, 2004
    Date of Patent: November 27, 2007
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Koichiro Tanaka
  • Patent number: 7250081
    Abstract: Methods for repair of single crystal superalloys by laser welding and products thereof have been disclosed. The laser welding process may be hand held or automated. Laser types include: CO2, Nd:YAG, diode and fiber lasers. Parameters for operating the laser process are disclosed. Filler materials, which may be either wire or powder superalloys are used to weld at least one portion of a single crystal superalloy substrate.
    Type: Grant
    Filed: December 4, 2003
    Date of Patent: July 31, 2007
    Assignee: Honeywell International, Inc.
    Inventors: Yiping Hu, William F. Hehmann, Murali Madhava
  • Publication number: 20070151505
    Abstract: In a method for producing a high quality silicon single crystal by the Czochralski method, a lower portion of a solid-liquid interface of a single crystal growth is divided into a central part and a circumferential part, and the temperature gradient of the central part and the temperature gradient of the circumferential part are separately controlled. When a silicon melt located at a lower portion of a solid-liquid interface of a single crystal growth is divided into a central part melt and a circumferential part melt, the method controls the temperature gradient of the central part melt by directly controlling the temperature distribution of a melt and indirectly controls the temperature gradient of the circumferential part melt by controlling the temperature gradient of the single crystal, thereby effectively controlling the overall temperature distribution of the melt, thus producing a high quality single crystal ingot free of defects with a high growth velocity.
    Type: Application
    Filed: December 21, 2006
    Publication date: July 5, 2007
    Inventor: Hyon-Jong Cho
  • Patent number: 7223306
    Abstract: It is an object to provide a laser apparatus, a laser irradiating method and a manufacturing method of a semiconductor device that can perform uniform a process with a laser beam to an object uniformly. The present invention provides a laser apparatus comprising an optical system for sampling a part of a laser beam emitted from an oscillator, a sensor for generating an electric signal including fluctuation in energy of the laser beam as a data from the part of the laser beam, a means for performing signal processing to the electrical signal to grasp a state of the fluctuation in energy of the laser beam, and controlling a relative speed of an beam spot of the laser beam to an object in order to change in phase with the fluctuation in energy of the laser beam.
    Type: Grant
    Filed: September 17, 2003
    Date of Patent: May 29, 2007
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Hidekazu Miyairi, Akihisa Shimomura, Tamae Takano, Masaki Koyama
  • Patent number: 7208041
    Abstract: An effective, simple and low-cost a method for growing single crystals of perovskite oxideshaving primary and secondary abnormal grain growths according to temperature condition higher than a determined temperature or an atmosphere of heat treatment, involves a perovskite seed single crystal being adjoined to a polycrystal of perovskite oxides and heating the adjoined combination whereby the seed single crystal grows into the polycrystal at the interface therebetween repressing secondary abnormal grain growths inside the polycrystal. 1) The composition ratio of the polycrystal is controlled and/or the specific component(s) of the polycrystal is(are) added in an excess amount compared to the amount of the component(s) of the original composition of the polycrystal, 2) the heating is performed in the temperature range which is over primary abnormal grain growths completion temperature and below secondary abnormal grain growths activation temperature, whereby the seed single crystal grows continuously.
    Type: Grant
    Filed: May 14, 2004
    Date of Patent: April 24, 2007
    Assignee: Ceracomp Co., Ltd.
    Inventors: Ho-Yong Lee, Jong-Bong Lee, Tae-Moo Hur
  • Patent number: 7186570
    Abstract: A lower electrode is formed over a substrate, and a raw material including a complex oxide is heated in an atmosphere pressurized to two atmospheres or more and containing oxygen at a volume ratio of 10% or less at a temperature raising rate of 100° C./min or less, thereby forming a lower alloy film of a compound of a first metal which makes up the complex oxide, and a second metal, which makes up the lower electrode, over the lower electrode. A ceramic film in which the raw material is crystallized is formed over the lower alloy film, and an upper electrode is formed over the ceramic film.
    Type: Grant
    Filed: November 28, 2003
    Date of Patent: March 6, 2007
    Assignee: Seiko Epson Corporation
    Inventors: Takeshi Kijima, Eiji Natori
  • Patent number: 7147709
    Abstract: The present invention provides a method of forming a strained semiconductor layer. The method comprises growing a strained first semiconductor layer, having a graded dopant profile, on a wafer, having a first lattice constant. The dopant imparts a second lattice constant to the first semiconductor layer. The method further comprises growing a strained boxed second semiconductor layer having the second lattice constant on the first semiconductor layer and growing a sacrificial third semiconductor layer having the first lattice constant on the second semiconductor layer. The method further comprises etch annealing the third and second semiconductor layer, wherein the third semiconductor layer is removed and the second semiconductor layer is relaxed.
    Type: Grant
    Filed: November 4, 2003
    Date of Patent: December 12, 2006
    Assignee: Silicon Genesis Corporation
    Inventors: Philip Ong, Francois Henley, Igor Malik
  • Patent number: 7067006
    Abstract: A method of forming a single crystalline structure having a substantially linear response at least over the wave lengths of 1,200 to 1,700 nanometers, the resulting structure and its use as an optical media or a barrier coating. Thus, maximum obtainable optical transmission with zero attenuation is provided. There is no intrinsic material absorption.
    Type: Grant
    Filed: October 5, 2002
    Date of Patent: June 27, 2006
    Assignee: CZT Inc.
    Inventor: Susana Curatolo
  • Patent number: 7001461
    Abstract: A crystallization apparatus includes an illumination system which applies illumination light for crystallization to a non-single-crystal semiconductor film, and a phase shifter which includes first and second regions disposed to form a straight boundary and transmitting the illumination light from the illumination system by a first phase retardation therebetween, and phase-modulates the illumination light to provide a light intensity distribution having an inverse peak pattern that light intensity falls in a zone of the non-single-crystal semiconductor film containing an axis corresponding to the boundary. The phase shifter further includes a small region which extends into at least one of the first and second regions from the boundary and transmits the illumination light by a second phase retardation with respect to the at least one of the first and second regions.
    Type: Grant
    Filed: September 8, 2003
    Date of Patent: February 21, 2006
    Assignee: Advanced LCD Technologies Development Center Co., Ltd.
    Inventors: Yukio Taniguchi, Masakiyo Matsumura, Hirotaka Yamaguchi, Mikihiko Nishitani, Susumu Tsujikawa, Yoshinobu Kimura, Masayuki Jyumonji
  • Patent number: 6969425
    Abstract: Layers of boron-doped silicon having reduced out-of-plane curvature are disclosed. The layers have substantially equal concentrations of boron near the top and bottom surfaces. Since the opposing concentrations are substantially equal, the compressive stresses on the layers are substantially balanced, thereby resulting in layers with reduced out-of-plane curvature.
    Type: Grant
    Filed: January 17, 2003
    Date of Patent: November 29, 2005
    Assignee: Honeywell International Inc.
    Inventors: Cleopatra Cabuz, Max C. Glenn, Francis M. Erdmann, Robert D. Horning
  • Patent number: 6902616
    Abstract: A liquid crystal display device is manufactured by first forming a crystalline semiconductor film 2103, of silicon for example, over an insulating substrate 2101, such as glass. The substrate is warped in the process. The warpage is corrected by suction against a stage 2201. The film crystallinity is enhanced by scanning with a linear laser beam.
    Type: Grant
    Filed: May 4, 1999
    Date of Patent: June 7, 2005
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Koichiro Tanaka
  • Patent number: 6887311
    Abstract: There is provided a method of forming an ohmic electrode, including the steps of: forming a hafnium layer on a surface of an n type nitride-based compound semiconductor layer to have a thickness of 1 to 15 nm; forming an aluminum layer on the hafnium layer; and annealing the hafnium layer and the aluminum layer to form a layer formed of hafnium and aluminum mixed together.
    Type: Grant
    Filed: October 30, 2002
    Date of Patent: May 3, 2005
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Mayuko Fudeta, Toshio Hata
  • Patent number: 6860938
    Abstract: The present invention provides a method by which an oxide material having excellent thermoelectric conversion performance can be produced by a simple process. Specifically, the present invention provides a method for producing a composite oxide single crystal in which a mixture of raw substances including a Bi-containing substance, a Sr-containing substance, a Ca-containing substance, a Co-containing substance and a Te-containing substance, or a mixture of raw substances also including a Pb-containing substance in addition to the above-mentioned substances, is heated in an oxygen-containing atmosphere at a temperature below the melting point of any of the raw substances. The composite oxide single crystal produced by the method of the present invention is a ribbon-shaped fibrous single crystal that is about 10 to 10,000 ?m long, about 20 to 200 ?m wide, and about 1 to 5 ?m thick.
    Type: Grant
    Filed: May 27, 2002
    Date of Patent: March 1, 2005
    Assignee: National Institute of Advanced Technology
    Inventors: Ryoji Funahashi, Ichiro Matsubara, Masahiro Shikano
  • Patent number: 6830616
    Abstract: The nickel element is provided selectively, i.e., adjacent to part of the surface of an amorphous silicon film in a long and narrow opening. The amorphous silicon film is irradiated with linear infrared light beams emitted from respective linear infrared lamps while scanned with the linear beams perpendicularly to the longitudinal direction of the opening. The longitudinal direction of the linear beams are set coincident with that of the opening. The infrared light beams are absorbed by the silicon film mainly as thermal energy, whereby a negative temperature gradient is formed in the silicon film. The temperature gradient moves as the lamps are moved for the scanning. The direction of the negative temperature gradient is set coincident with the lamp movement direction and an intended crystal growth direction, which enables crystal growth to proceed parallel with a substrate uniformly over a long distance.
    Type: Grant
    Filed: June 15, 2000
    Date of Patent: December 14, 2004
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Hisashi Ohtani
  • Publication number: 20040245099
    Abstract: Provided is a sputtering target manufactured by die forging, characterized in that an average crystal grain size D at a portion where an average crystal grain size is the largest and an average crystal grain size d at a portion where an average crystal grain size is the smallest are related as 1.0<D/d<2.0. Further provided is a method capable of constantly manufacturing a sputtering target excellent in characteristics by improving and elaborating forging and heat treatment processes to render a crystal size fine and uniform, and a sputtering target excellent in quality obtained by this method.
    Type: Application
    Filed: April 12, 2004
    Publication date: December 9, 2004
    Inventor: Atsushi Hukushima
  • Patent number: 6821338
    Abstract: The invention provides a method of increasing the extent of a desired biaxial orientation of a previously formed non-single-crystal structure by contacting said structure with an oblique particle beam thereby forming in the structure a nucleating surface having increased desired biaxial orientation. The method can further include a step of epitaxially growing the crystalline formation using the nucleating surface to promote the epitaxial growth. The invention also provides a crystalline structure containing a nucleating surface formed by contacting a previously formed non-single-crystal structure with an oblique particle beam, from 0 to 10 adjacent orientation-transmitting layers, and a crystalline active layer. In this structure, the active layer is oriented in registry with the nucleating surface.
    Type: Grant
    Filed: December 15, 2000
    Date of Patent: November 23, 2004
    Assignee: The Regents of the University of California
    Inventors: Ronald P. Reade, Paul H. Berdahl, Richard E. Russo
  • Patent number: 6818059
    Abstract: The present invention is related to a method of crystallizing an amorphous silicon layer and a crystallizing apparatus thereof which crystallize an amorphous silicon layer using plasma. The present invention includes the steps of depositing an inducing substance for silicon crystallization on an amorphous silicon layer by plasma exposure, and carrying out annealing on the amorphous silicon layer to the amorphous silicon layer. The present invention includes a chamber having an inner space, a substrate support in the chamber wherein the substrate support supports a substrate, a plasma generating means in the chamber wherein the plasma generating means produces plasma inside the chamber, and a heater at the substrate support wherein the heater supplies the substrate with heat.
    Type: Grant
    Filed: July 9, 1999
    Date of Patent: November 16, 2004
    Assignees: LG. Philips LCD Co., Ltd.
    Inventors: Jin Jang, Soo-Young Yoon, Jae-Young Oh, Woo-Sung Shon, Seong-Jin Park
  • Patent number: 6786967
    Abstract: A method for fabricating ion exchange waveguides, such as lithium niobate or lithium tantalate waveguides in optical modulators and other optical waveguide devices, utilizes pressurized annealing to further diffuse and limit exchange of the ions and includes ion exchanging the crystalline substrate with a source of ions and annealing the substrate by pressurizing a gas atmosphere containing the lithium niobate or lithium tantalate substrate above normal atmospheric pressure, heating the substrate to a temperature ranging from about 150 degrees Celsius to about 1000 degrees Celsius, maintaining pressure and temperature to effect greater ion diffusion and limit exchange, and cooling the structure to an ambient temperature at an appropriate ramp down rate. In another aspect of the invention a powder of the same chemical composition as the crystalline substrate is introduced into the anneal process chamber to limit the crystalline substrate from outgassing alkaline earth metal oxide during the anneal period.
    Type: Grant
    Filed: October 15, 1999
    Date of Patent: September 7, 2004
    Assignee: California Institute of Technology
    Inventor: Lee J. Burrows
  • Patent number: 6773503
    Abstract: The method of heat-treating a fluoride crystal according to the present invention comprises introducing an inert gas and/or a fluorine-based gas into a heat-treating furnace in which a fluoride crystal is placed through a gas-feeding port, and heating the fluoride crystal in the atmosphere of the gas having a pressure not lower than atmospheric pressure, thereby making it possible to prevent turbidity and coloration generated in the fluoride crystal due to oxygen and metal impurities adsorbed by the surface of the fluoride crystal.
    Type: Grant
    Filed: March 24, 2000
    Date of Patent: August 10, 2004
    Assignee: Canon Kabushiki Kaisha
    Inventor: Takao Chiba
  • Patent number: 6770132
    Abstract: In one aspect of the invention, a method for pressurized annealing of lithium niobate or lithium tantalate structures, such as optical modulators and optical wave guides, comprises pressurizing an oxygen atmosphere containing a lithium niobate or lithium tantalate structure above normal atmospheric pressure, heating the structure to a temperature ranging from about 150 degrees Celsius to about 1000 degrees Celsius, maintaining pressure and temperature to effect ion exchange or to relieve stress, and cooling the structure to an ambient temperature at an appropriate ramp down rate.
    Type: Grant
    Filed: May 11, 1999
    Date of Patent: August 3, 2004
    Assignee: California Institute of Technology
    Inventor: Lee J. Burrows
  • Patent number: RE39778
    Abstract: A method is provided for preparing, with high reproducibility, a carbon-doped group III-V compound semiconductor crystal having favorable electrical characteristics and having impurities removed therefrom, and in which the amount of doped carbon can be adjusted easily during crystal growth. This method includes the steps of: filling a crucible with compound raw material, solid carbon, and boron oxide; sealing the filled crucible within an airtight vessel formed of a gas impermeable material; heating and melting the compound raw material under the sealed state in the airtight vessel; and solidifying the melted compound raw material to grow a carbon-doped compound semiconductor crystal.
    Type: Grant
    Filed: April 3, 2001
    Date of Patent: August 21, 2007
    Assignee: Sumitomo Electric Industries, Ltd.
    Inventors: Tomohiro Kawase, Masami Tatsumi
  • Patent number: RE41551
    Abstract: A method is provided for preparing, with high reproducibility, a carbon-doped group III-V compound semiconductor crystal having favorable electrical characteristics and having impurities removed therefrom, and in which the amount of doped carbon can be adjusted easily during crystal growth. This method includes the steps of: filling a crucible with compound raw material, solid carbon, and boron oxide; sealing the filled crucible gas impermeable material; heating and melting the compound raw material under the sealed state in the airtight vessel; and solidifying the melted compound raw material to grow a carbon-doped compound semiconductor crystal.
    Type: Grant
    Filed: July 20, 2005
    Date of Patent: August 24, 2010
    Assignee: Sumitomo Electric Industries, Ltd.
    Inventors: Tomohiro Kawase, Masami Tatsumi