Using Heat (e.g., Strain Annealing) Patents (Class 117/7)
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Publication number: 20110045352Abstract: Each of: (1) a nanoparticle comprising a substantially single crystalline mesoporous Co3O4 material; (2) a battery electrode comprising a plurality of nanoparticles comprising the substantially single crystalline mesoporous Co3O4 material; (3) a battery comprising the battery electrode comprising the plurality of nanoparticles comprising the substantially single crystalline mesoporous Co3O4 material; and (4) a plurality of methods for preparing the nanoparticle comprising the substantially single crystalline mesoporous Co3O4 material, may be employed within the context of a lithium containing battery, such as a lithium ion battery. When the substantially single crystalline mesoporous Co3O4 material has a pore size of about 3 to about 8 nanometers enhanced lithium containing battery electrical performance properties are observed.Type: ApplicationFiled: August 18, 2010Publication date: February 24, 2011Applicant: CORNELL UNIVERSITYInventors: Lynden A. Archer, Xiong Wen Lou
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Publication number: 20100293910Abstract: Single-crystal silicon carbide nanowires and a method for producing the nanowires are provided. The single-crystal silicon carbide nanowires have a very high aspect ratio and can be used for the fabrication of nanoelectronic devices, including electron gun emitters and MEMS probe tips, for use in a variety of displays and analyzers. Further provided is a filter comprising the nanowires. The filter is applied to systems for filtering vehicle engine exhaust gases to achieve improved filtering performance and increased lifetime.Type: ApplicationFiled: August 16, 2007Publication date: November 25, 2010Inventors: Sung Churl Choi, Sang-Hoon Lee, Jin-Seok Lee, Yun-Ki Byeun
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Patent number: 7828894Abstract: A crystallization method, includes: forming an amorphous silicon layer on a substrate; forming a first crystallization region by irradiating the amorphous silicon layer with a laser beam having a ramp shaped cross sectional profile that decreases in a scanning direction; and performing a second crystallization by moving a predetermined length in a scanning direction so as to be partially overlapped with the first crystallization region formed by the first crystallization.Type: GrantFiled: November 2, 2005Date of Patent: November 9, 2010Assignee: LG Display Co., Ltd.Inventor: JaeSung You
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Patent number: 7799158Abstract: A method for producing a crystallographically-oriented ceramic includes the steps of forming a first sheet with a thickness of 10 ?m or less containing a first inorganic material in which grain growth occurs at a first temperature or higher and a second sheet containing a second inorganic material in which grain growth occurs at a second temperature higher than the first temperature, laminating one or more each of the first and second sheets to form a laminated body, firing the laminated body at a temperature equal to or higher than the first temperature and lower than the second temperature to cause grain growth in the first inorganic material, and then firing the laminated body at a temperature equal to or higher than the second temperature to cause grain growth in the second inorganic material in the direction of a crystal plane of the first inorganic material.Type: GrantFiled: January 14, 2008Date of Patent: September 21, 2010Assignee: NGK Insulators, Ltd.Inventors: Shohei Yokoyama, Nobuyuki Kobayashi, Tsutomu Nanataki
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Patent number: 7785659Abstract: A method of manufacturing an orientation film which method is suitable for manufacturing an orientation film containing a ceramic at low cost. The method includes the steps of: (a) forming a ceramic film on a seed substrate in which crystal orientation is controlled at least on a surface thereof by using an aerosol deposition method of injecting powder toward a substrate and depositing the powder on the substrate; and (b) heat-treating the ceramic film formed at step (a) to form an orientation film in which crystal grains contained in the ceramic film is oriented.Type: GrantFiled: March 20, 2006Date of Patent: August 31, 2010Assignee: FUJIFILM CorporationInventor: Yasukazu Nihei
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Patent number: 7759228Abstract: A method of manufacturing a semiconductor device. In the method, a substrate is prepared, which includes a buried oxide film and a SiGe layer formed on the buried oxide film. Then, heat treatment is performed on the substrate at a temperature equal to or lower than a first temperature, to form a protective oxide film on a surface of the SiGe layer. Next, the substrate having the protective oxide film is heated in a non-oxidizing atmosphere to a second temperature higher than the first temperature. Further, heat treatment is performed on the substrate thus heated, in an oxidizing atmosphere at a temperature equal to or higher than the second temperature, to form oxide the SiGe layer, make the SiGe layer thinner and increasing Ge concentration in the SiGe layer, thus forming a SiGe layer having the increased Ge concentration.Type: GrantFiled: June 9, 2006Date of Patent: July 20, 2010Assignees: Kabushiki Kaisha Toshiba, Oki Electric Industry Co., Ltd.Inventors: Naoharu Sugiyama, Norio Hirashita, Tsutomu Tezuka
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Patent number: 7754008Abstract: A method of forming a stressed thin film on a substrate includes forming a plurality of islands on a viscous layer that is present on a surface of a substrate. Adjacent islands are bridged with a stressor layer. The structure is annealed at an elevated temperature above the glass flow temperature of the viscous layer to transfer at least a portion of the stress from the stressor layer to the underlying islands. The bridges are then removed to expose the stressed islands of thin film on the substrate.Type: GrantFiled: July 19, 2006Date of Patent: July 13, 2010Assignee: The Regents of the University of CaliforniaInventors: Ya-Hong Xie, Jeehwan Kim
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Publication number: 20090297395Abstract: A method for treating semiconducting materials is disclosed. In the disclosed method, a semiconducting material having a crystalline structure is provided, at least a portion of the semiconducting material is exposed to a heat source to create a melt pool, and the semiconducting material is then cooled. Semiconducting materials treated by the method are also disclosed.Type: ApplicationFiled: June 2, 2008Publication date: December 3, 2009Inventors: Prantik Mazumder, Kamal Kishore Soni, Christopher Scott Thomas, Natesan Venkataraman, Glen Bennett Cook
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Patent number: 7615471Abstract: The invention relates to a method for producing a tensioned layer on a substrate involving the following steps: producing a defect area in a layer adjacent to the layer to be tensioned, and; relaxing at least one layer adjacent to the layer to be tensioned. Additional layers can be epitaxially deposited. Layer structures formed in this manner are advantageously suited for components of all types.Type: GrantFiled: April 8, 2004Date of Patent: November 10, 2009Assignee: Forschungszentrum Julich GmbHInventor: Siegfried Mantl
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Publication number: 20090211514Abstract: A solid state method for converting polycrystalline alumina components to single crystal or sapphire. The single crystal conversion method includes sintering a pre-fired polycrystalline alumina component doped with a magnesia sintering aid in an atmosphere containing a gas mixture of hydrogen and an inert gas, such as nitrogen in one embodiment. A sintering temperature is selected that preferably depends on the percentage of hydrogen selected. The component is held at the sintering temperature for a time sufficient to convert the polycrystalline component into a component formed of a single crystal. In one embodiment, the sintering temperature may be between at least about 1600° C. and less than 2050° C., and the amount of hydrogen in the sintering atmosphere may be between about 4% to about 10%. The method forms a wetting type intergranular film associated with the nucleation and growth of a single abnormal grain in the polycrystalline alumina component.Type: ApplicationFiled: February 26, 2008Publication date: August 27, 2009Inventors: Shen J. Dillon, Martin P. Harmer
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Publication number: 20090211515Abstract: By controlling the average size of matrix grains of polycrystalline bodies to more than a critical size at which an abnormal, exaggerated or discontinuous grain growth ends, and less than twice the critical size, large single crystals enough for practical use may be made even without occurring abnormal grain growth in polycrystalline bodies only through a heat treatment process without using a melting process and a special apparatus, thereby allowing the mass production of the large single crystals at low costs with high reproduction possibility.Type: ApplicationFiled: February 19, 2009Publication date: August 27, 2009Applicant: CERACOMP CO., LTD.Inventors: Ho-Yong LEE, Jong-Bong LEE, Tae-Moo HUR, Dong-Ho KIM
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Patent number: 7544244Abstract: A method of manufacturing a ceramic film by using an AD method, by which a film having good crystallinity can be fabricated without using a high-temperature process. The method of manufacturing a ceramic film by using an aerosol including the steps of: (a) dispersing ceramic raw material powder containing an amorphous component in a gas to generate an aerosol; and (b) supplying the aerosol generated at step (a) into a chamber in which a substrate is placed and depositing the ceramic raw material powder on the substrate to form a ceramic film.Type: GrantFiled: December 6, 2005Date of Patent: June 9, 2009Assignee: FUJIFILM CorporationInventors: Yukio Sakashita, Takamichi Fujii
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Publication number: 20090120351Abstract: A method for growing large single crystals of metals is disclosed. A polycrystalline form of a metal specimen is initially heated in a non-oxidizing environment. A minimum plastic strain is then applied to the heated metal specimen to initiate the growth of a selected grain within the heated metal specimen. Additional plastic strain is subsequently applied to the heated metal specimen to propagate the growth of the selected grain to become a large single crystal.Type: ApplicationFiled: November 8, 2007Publication date: May 14, 2009Inventors: James R. Ciulik, Eric M. Taleff
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Patent number: 7520930Abstract: A bulk silicon carbide single crystal of good crystalline quality which includes a minimized number of structural defects and is free from micropipe defects can be produced by crystal growth in a melt of an alloy comprising Si, C, and M (wherein M is either Mn or Ti) and having an atomic ratio between Si and M in which the value of x, when express as Si1-xMx, is 0.1?x?0.7 in the case where M is Mn or 0.1?x?0.25 in the case where M is Ti at a temperature of the melt which is below 2000° C. The C component is preferably supplied into the melt by dissolution of a graphite crucible which contains the melt such that the melt is free from undissolved C. One method of crystal growth is performed by cooling the melt after a seed substrate is immersed in the melt.Type: GrantFiled: October 15, 2004Date of Patent: April 21, 2009Assignee: Sumitomo Metal Industries, Ltd.Inventors: Kazuhiko Kusunoki, Shinji Munetoh, Kazuhito Kamei
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Publication number: 20090090886Abstract: The present invention relates to nanostructures, in particular to hematite rhombohedra and iron/magnetite nanocomposites, and methods of making same.Type: ApplicationFiled: October 9, 2007Publication date: April 9, 2009Inventors: Stanislaus S. Wong, Tae-Jin Park
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Patent number: 7507289Abstract: In a solid solution system of Al2O3 and CAO or SrO, it has been difficult to obtain a material having a high electrical conductivity (>10?4 S·cm?) at room temperature. A compound is provided in which electrons at a high concentration are introduced into a 12CaO.7Al2O3 compound, a 12SrO.7Al2O3 compound, or a mixed crystal compound containing 12CaO.7Al2O3 and 12SrO.7Al2O3. The compound formed by substituting all the free oxygen ions with electrons is regarded as an electride compound in which [Ca24Al28O64]4+(4e?) or [Sr24Al28O64]4+(4e?) serves as a cation and electrons serve as anions. When a single crystal or a hydrostatic pressure press molded material of a fine powder thereof is held at approximately 700° C. in an alkaline metal vapor or an alkaline earth metal vapor, melt of a hydrostatic pressure press molded material of a powder is held at approximately 1,600° C. in a carbon crucible, followed by slow cooling for solidification, or a thin film of the compound held at approximately 600° C.Type: GrantFiled: February 12, 2004Date of Patent: March 24, 2009Assignee: Japan Science and Technology AgencyInventors: Hideo Hosono, Masahiro Hirano, Katsuro Hayashi, Masashi Miyakawa, Isao Tanaka
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Patent number: 7503975Abstract: In a crystalline silicon film fabricated by a related art method, the orientation planes of its crystal randomly exist and the orientation rate relative to a particular crystal orientation is low. A semiconductor material which contains silicon as its main component and 0.1-10 atomic % of germanium is used as a first layer, and an amorphous silicon film is used as a second layer. Laser light is irradiated to crystallize the amorphous semiconductor films, whereby a good semiconductor film is obtained. In addition, TFTs are fabricated by using such a semiconductor film.Type: GrantFiled: June 25, 2001Date of Patent: March 17, 2009Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Toru Mitsuki, Kenji Kasahara, Taketomi Asami, Tamae Takano, Takeshi Shichi, Chiho Kokubo
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Publication number: 20090038536Abstract: A first optical modulation element irradiates a non-single-crystal substance with a light beam which is to have a first light intensity distribution on the non-single crystal substance by modulating an intensity of an incident first light beam, thereby melting the substance. A second optical modulation element irradiates the substance with a light beam which is to have a second light intensity distribution on the substance by modulating an intensity of an incident second light beam, thereby melting the substance. An illumination system causes the light beam having the second light intensity distribution to enter the molten part of the substance in a period that the substance is partially molten by irradiation of the light beam having the first light intensity distribution.Type: ApplicationFiled: October 1, 2008Publication date: February 12, 2009Applicant: Advanced LCD Technologies Dev. Ctr. Co., Ltd.Inventors: Yukio Taniguchi, Masayuki Jyumonji, Hiroyuki Ogawa
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Patent number: 7488384Abstract: Colloidal nanocrystals or “quantum dots” of GaN are directly produced by heating amidogallium dimer, i.e., (Ga2[N(CH3)2]6), in the presence of a functional amine. The GaN quantum dots obtained, which comprise isolated particles 2-3 nm in diameter with a relative broad size distribution (e.g., 20% standard deviation) exhibit strong exciton confinement.Type: GrantFiled: May 3, 2006Date of Patent: February 10, 2009Assignee: Ohio UniversityInventors: Paul Gregory Van Patten, Guiquan Pan
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Patent number: 7452792Abstract: The invention relates to a method of forming a layer of elastically unstrained crystalline material intended for electronics, optics, or optronics applications, wherein the method is carried out using a structure that includes a first crystalline layer which is elastically strained under tension (or respectively in compression) and a second crystalline layer which is elastically strained in compression (or respectively under tension), with the second layer being adjacent to the first layer.Type: GrantFiled: January 19, 2006Date of Patent: November 18, 2008Assignee: S.O.I.Tec Silicon on Insulator TechnologiesInventors: Nicolas Daval, Zohra Chahra, Romain Larderet
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Patent number: 7422630Abstract: Concentration of metal element which promotes crystallization of silicon and which exists within a crystal silicon film obtained by utilizing the metal element is reduced. A first heat treatment for crystallization is implemented after introducing nickel to an amorphous silicon film 103. Then, laser light is irradiated to diffuse the nickel element concentrated locally. After that, another heat treatment is implemented within an oxidizing atmosphere at a temperature higher than that of the previous heat treatment. A thermal oxide film 106 is formed in this step. At this time, the nickel element is gettered to the thermal oxide film 106. Then, the thermal oxide film 106 is removed. Thereby, a crystal silicon film 107 having low concentration of the metal element and a high crystallinity can be obtained.Type: GrantFiled: June 5, 2006Date of Patent: September 9, 2008Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Satoshi Teramoto, Jun Koyama, Yasushi Ogata, Masahiko Hayakawa, Mitsuaki Osame
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Publication number: 20080213603Abstract: Various embodiments of the present invention are directed to methods of forming nanostructures on non-single crystal substrates, and resulting nanostructures and nanoscale functional devices. In one embodiment of the present invention, a method of forming nanostructures includes forming a multi-layer structure comprising a metallic layer and a silicon layer. The multi-layer structure is subjected to a thermal process to form metal-silicide crystallites. The nanostructures are grown on the metal-silicide crystallites. In another embodiment of the present invention, a structure includes a non-single-crystal substrate and a layer formed over the non-single-crystal substrate. The layer includes metal-silicide crystallites. A number of nanostructures may be formed on the metal-silicide crystallites. The disclosed structures may be used to form a number of different types of functional devices for use in electronics and/or optoelectronics devices.Type: ApplicationFiled: March 1, 2007Publication date: September 4, 2008Inventors: Nobuhiko Kobayashi, Shih-Yuan Wang
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Publication number: 20080200327Abstract: The present invention provides a method of producing the barium titanate solid solution single crystals. The crystalline phase of the single crystal is hexagonal. The method of the present invention, a small quantity of metal oxide is added and dissolved into the barium titanate to form a solid solution. The metal oxides are used as single crystal growth aid; and the barium titanate single crystal can be prepared by using a pressureless sintering process composing of one or two stages of heat treatments that require no special expensive equipments, and thus the method can be used for the mass production of the single crystals.Type: ApplicationFiled: August 2, 2007Publication date: August 21, 2008Inventors: Wei-Hsing Tuan, Yung-Ching Huang
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Patent number: 7374613Abstract: Disclosed is a ceramic or metal single-crystal material having high-density dislocations arranged one-dimensionally on respective straight lines. The single-crystal material is produced by compressing a ceramic or metal single-crystal blank at a high temperature from a direction allowing the activation of a single slip to induce plastic deformation therein, and then subjecting the resulting product to a heat treatment. The single-crystal material can be used in a device for high-speed dislocation-pipe diffusion of ions or electrons. The single-crystal material can further be subjected to a diffusion treatment so as to diffuse a metal element from its surface along the dislocations to provide a single-crystal device with a specific electrical conductivity or a quantum wire device.Type: GrantFiled: April 21, 2003Date of Patent: May 20, 2008Assignee: Japan Science and Technology AgencyInventors: Yuichi Ikuhara, Takahisa Yamamoto
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Patent number: 7361217Abstract: Method for crystallizing a melamine melt to form melamine particles with a D90 of at most 2 mm by cooling a melamine melt to below the crystallization temperature of the melamine, comprising the formation of a suspension of melamine particles in the cooling medium by spraying the melamine melt with at most 10 wt % of CO2 relative to the sprayed quantity of melamine melt in a space in which a layer of a liquid cooling medium is present that has a temperature below the crystallization temperature of the melamine and under cooling conditions at which at least 50 wt % of the sprayed melamine melt directly turns into suspended melamine particles. Method for the production of melamine from urea in a preferably continuous, high-pressure process, with application of the present method for the crystallization.Type: GrantFiled: January 28, 2004Date of Patent: April 22, 2008Assignee: DSM IP Assets B.V.Inventor: Tjay Tjien M. Tjioe
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Patent number: 7341628Abstract: Gallium Nitride layers grown as single crystals by epitaxy such as Hydride Vapor Phase Epitaxy (HVPE) contain large numbers of crystal defects such as hexagonal pits, which limit the yield and performance of opto- and electronic devices. In this method, the Gallium Nitride layer is first coated with an Aluminum layer of approximate thickness of 0.1 microns. Next, Nitrogen is ion implanted through the Aluminum layer so as to occupy mostly the top 0.1 to 0.5 microns of the Gallium Nitride layer. Finally, through a pulsed directed energy beam such as electron or photons, with a fluence of approximately 1 Joule/cm2 the top approximately 0.5 microns are converted to a single crystal with reduced defect density.Type: GrantFiled: December 16, 2004Date of Patent: March 11, 2008Inventor: Andreas A. Melas
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Publication number: 20080047482Abstract: A method of making a rare earth halide single crystal material is provided. The method includes providing a polycrystalline material having a plurality of grains. The method further includes adding a seed crystal to the polycrystalline material to define a plane of growth for the polycrystalline material. Further, the polycrystalline material having the seed crystal may be subjected to heat-treating, where the heat-treating does not include melting the polycrystalline material.Type: ApplicationFiled: August 23, 2006Publication date: February 28, 2008Inventor: Venkat Subramaniam Venkataramani
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Publication number: 20080047483Abstract: A method of making a single crystal material is provided. The method includes providing a polycrystalline material having a plurality of grains. The method further includes adding a seed crystal to the polycrystalline material to define a plane of growth for the polycrystalline material. Further, the polycrystalline material having the seed crystal may be subjected to heat-treating, where the heat-treating does not include melting the polycrystalline material.Type: ApplicationFiled: August 23, 2006Publication date: February 28, 2008Inventors: Venkat Subramaniam Venkataramani, Wesley Hackenberger, Seongtae Kwon, Paul William Rehrig
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Patent number: 7300516Abstract: When a laser beam is radiated on a semiconductor film under appropriate conditions, the semiconductor film can be crystallized into single crystal-like grains connected in a scanning direction of the laser beam (laser annealing). The most efficient laser annealing condition is studied. When a length of one side of a rectangular substrate on which a semiconductor film is formed is b, a scanning speed is V, and acceleration necessary to attain the scanning speed V of the laser beam relative to the substrate is g, and when V=(gb/5.477)1/2 is satisfied, a time necessary for the laser annealing is made shortest. The acceleration g is made constant, however, when it is a function of time, a time-averaged value thereof can be used in place of the constant.Type: GrantFiled: October 13, 2004Date of Patent: November 27, 2007Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Koichiro Tanaka
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Patent number: 7250081Abstract: Methods for repair of single crystal superalloys by laser welding and products thereof have been disclosed. The laser welding process may be hand held or automated. Laser types include: CO2, Nd:YAG, diode and fiber lasers. Parameters for operating the laser process are disclosed. Filler materials, which may be either wire or powder superalloys are used to weld at least one portion of a single crystal superalloy substrate.Type: GrantFiled: December 4, 2003Date of Patent: July 31, 2007Assignee: Honeywell International, Inc.Inventors: Yiping Hu, William F. Hehmann, Murali Madhava
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Publication number: 20070151505Abstract: In a method for producing a high quality silicon single crystal by the Czochralski method, a lower portion of a solid-liquid interface of a single crystal growth is divided into a central part and a circumferential part, and the temperature gradient of the central part and the temperature gradient of the circumferential part are separately controlled. When a silicon melt located at a lower portion of a solid-liquid interface of a single crystal growth is divided into a central part melt and a circumferential part melt, the method controls the temperature gradient of the central part melt by directly controlling the temperature distribution of a melt and indirectly controls the temperature gradient of the circumferential part melt by controlling the temperature gradient of the single crystal, thereby effectively controlling the overall temperature distribution of the melt, thus producing a high quality single crystal ingot free of defects with a high growth velocity.Type: ApplicationFiled: December 21, 2006Publication date: July 5, 2007Inventor: Hyon-Jong Cho
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Patent number: 7223306Abstract: It is an object to provide a laser apparatus, a laser irradiating method and a manufacturing method of a semiconductor device that can perform uniform a process with a laser beam to an object uniformly. The present invention provides a laser apparatus comprising an optical system for sampling a part of a laser beam emitted from an oscillator, a sensor for generating an electric signal including fluctuation in energy of the laser beam as a data from the part of the laser beam, a means for performing signal processing to the electrical signal to grasp a state of the fluctuation in energy of the laser beam, and controlling a relative speed of an beam spot of the laser beam to an object in order to change in phase with the fluctuation in energy of the laser beam.Type: GrantFiled: September 17, 2003Date of Patent: May 29, 2007Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Hidekazu Miyairi, Akihisa Shimomura, Tamae Takano, Masaki Koyama
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Patent number: 7208041Abstract: An effective, simple and low-cost a method for growing single crystals of perovskite oxideshaving primary and secondary abnormal grain growths according to temperature condition higher than a determined temperature or an atmosphere of heat treatment, involves a perovskite seed single crystal being adjoined to a polycrystal of perovskite oxides and heating the adjoined combination whereby the seed single crystal grows into the polycrystal at the interface therebetween repressing secondary abnormal grain growths inside the polycrystal. 1) The composition ratio of the polycrystal is controlled and/or the specific component(s) of the polycrystal is(are) added in an excess amount compared to the amount of the component(s) of the original composition of the polycrystal, 2) the heating is performed in the temperature range which is over primary abnormal grain growths completion temperature and below secondary abnormal grain growths activation temperature, whereby the seed single crystal grows continuously.Type: GrantFiled: May 14, 2004Date of Patent: April 24, 2007Assignee: Ceracomp Co., Ltd.Inventors: Ho-Yong Lee, Jong-Bong Lee, Tae-Moo Hur
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Patent number: 7186570Abstract: A lower electrode is formed over a substrate, and a raw material including a complex oxide is heated in an atmosphere pressurized to two atmospheres or more and containing oxygen at a volume ratio of 10% or less at a temperature raising rate of 100° C./min or less, thereby forming a lower alloy film of a compound of a first metal which makes up the complex oxide, and a second metal, which makes up the lower electrode, over the lower electrode. A ceramic film in which the raw material is crystallized is formed over the lower alloy film, and an upper electrode is formed over the ceramic film.Type: GrantFiled: November 28, 2003Date of Patent: March 6, 2007Assignee: Seiko Epson CorporationInventors: Takeshi Kijima, Eiji Natori
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Patent number: 7147709Abstract: The present invention provides a method of forming a strained semiconductor layer. The method comprises growing a strained first semiconductor layer, having a graded dopant profile, on a wafer, having a first lattice constant. The dopant imparts a second lattice constant to the first semiconductor layer. The method further comprises growing a strained boxed second semiconductor layer having the second lattice constant on the first semiconductor layer and growing a sacrificial third semiconductor layer having the first lattice constant on the second semiconductor layer. The method further comprises etch annealing the third and second semiconductor layer, wherein the third semiconductor layer is removed and the second semiconductor layer is relaxed.Type: GrantFiled: November 4, 2003Date of Patent: December 12, 2006Assignee: Silicon Genesis CorporationInventors: Philip Ong, Francois Henley, Igor Malik
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Patent number: 7067006Abstract: A method of forming a single crystalline structure having a substantially linear response at least over the wave lengths of 1,200 to 1,700 nanometers, the resulting structure and its use as an optical media or a barrier coating. Thus, maximum obtainable optical transmission with zero attenuation is provided. There is no intrinsic material absorption.Type: GrantFiled: October 5, 2002Date of Patent: June 27, 2006Assignee: CZT Inc.Inventor: Susana Curatolo
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Patent number: 7001461Abstract: A crystallization apparatus includes an illumination system which applies illumination light for crystallization to a non-single-crystal semiconductor film, and a phase shifter which includes first and second regions disposed to form a straight boundary and transmitting the illumination light from the illumination system by a first phase retardation therebetween, and phase-modulates the illumination light to provide a light intensity distribution having an inverse peak pattern that light intensity falls in a zone of the non-single-crystal semiconductor film containing an axis corresponding to the boundary. The phase shifter further includes a small region which extends into at least one of the first and second regions from the boundary and transmits the illumination light by a second phase retardation with respect to the at least one of the first and second regions.Type: GrantFiled: September 8, 2003Date of Patent: February 21, 2006Assignee: Advanced LCD Technologies Development Center Co., Ltd.Inventors: Yukio Taniguchi, Masakiyo Matsumura, Hirotaka Yamaguchi, Mikihiko Nishitani, Susumu Tsujikawa, Yoshinobu Kimura, Masayuki Jyumonji
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Patent number: 6969425Abstract: Layers of boron-doped silicon having reduced out-of-plane curvature are disclosed. The layers have substantially equal concentrations of boron near the top and bottom surfaces. Since the opposing concentrations are substantially equal, the compressive stresses on the layers are substantially balanced, thereby resulting in layers with reduced out-of-plane curvature.Type: GrantFiled: January 17, 2003Date of Patent: November 29, 2005Assignee: Honeywell International Inc.Inventors: Cleopatra Cabuz, Max C. Glenn, Francis M. Erdmann, Robert D. Horning
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Patent number: 6902616Abstract: A liquid crystal display device is manufactured by first forming a crystalline semiconductor film 2103, of silicon for example, over an insulating substrate 2101, such as glass. The substrate is warped in the process. The warpage is corrected by suction against a stage 2201. The film crystallinity is enhanced by scanning with a linear laser beam.Type: GrantFiled: May 4, 1999Date of Patent: June 7, 2005Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Koichiro Tanaka
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Patent number: 6887311Abstract: There is provided a method of forming an ohmic electrode, including the steps of: forming a hafnium layer on a surface of an n type nitride-based compound semiconductor layer to have a thickness of 1 to 15 nm; forming an aluminum layer on the hafnium layer; and annealing the hafnium layer and the aluminum layer to form a layer formed of hafnium and aluminum mixed together.Type: GrantFiled: October 30, 2002Date of Patent: May 3, 2005Assignee: Sharp Kabushiki KaishaInventors: Mayuko Fudeta, Toshio Hata
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Patent number: 6860938Abstract: The present invention provides a method by which an oxide material having excellent thermoelectric conversion performance can be produced by a simple process. Specifically, the present invention provides a method for producing a composite oxide single crystal in which a mixture of raw substances including a Bi-containing substance, a Sr-containing substance, a Ca-containing substance, a Co-containing substance and a Te-containing substance, or a mixture of raw substances also including a Pb-containing substance in addition to the above-mentioned substances, is heated in an oxygen-containing atmosphere at a temperature below the melting point of any of the raw substances. The composite oxide single crystal produced by the method of the present invention is a ribbon-shaped fibrous single crystal that is about 10 to 10,000 ?m long, about 20 to 200 ?m wide, and about 1 to 5 ?m thick.Type: GrantFiled: May 27, 2002Date of Patent: March 1, 2005Assignee: National Institute of Advanced TechnologyInventors: Ryoji Funahashi, Ichiro Matsubara, Masahiro Shikano
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Patent number: 6830616Abstract: The nickel element is provided selectively, i.e., adjacent to part of the surface of an amorphous silicon film in a long and narrow opening. The amorphous silicon film is irradiated with linear infrared light beams emitted from respective linear infrared lamps while scanned with the linear beams perpendicularly to the longitudinal direction of the opening. The longitudinal direction of the linear beams are set coincident with that of the opening. The infrared light beams are absorbed by the silicon film mainly as thermal energy, whereby a negative temperature gradient is formed in the silicon film. The temperature gradient moves as the lamps are moved for the scanning. The direction of the negative temperature gradient is set coincident with the lamp movement direction and an intended crystal growth direction, which enables crystal growth to proceed parallel with a substrate uniformly over a long distance.Type: GrantFiled: June 15, 2000Date of Patent: December 14, 2004Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Hisashi Ohtani
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Publication number: 20040245099Abstract: Provided is a sputtering target manufactured by die forging, characterized in that an average crystal grain size D at a portion where an average crystal grain size is the largest and an average crystal grain size d at a portion where an average crystal grain size is the smallest are related as 1.0<D/d<2.0. Further provided is a method capable of constantly manufacturing a sputtering target excellent in characteristics by improving and elaborating forging and heat treatment processes to render a crystal size fine and uniform, and a sputtering target excellent in quality obtained by this method.Type: ApplicationFiled: April 12, 2004Publication date: December 9, 2004Inventor: Atsushi Hukushima
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Patent number: 6821338Abstract: The invention provides a method of increasing the extent of a desired biaxial orientation of a previously formed non-single-crystal structure by contacting said structure with an oblique particle beam thereby forming in the structure a nucleating surface having increased desired biaxial orientation. The method can further include a step of epitaxially growing the crystalline formation using the nucleating surface to promote the epitaxial growth. The invention also provides a crystalline structure containing a nucleating surface formed by contacting a previously formed non-single-crystal structure with an oblique particle beam, from 0 to 10 adjacent orientation-transmitting layers, and a crystalline active layer. In this structure, the active layer is oriented in registry with the nucleating surface.Type: GrantFiled: December 15, 2000Date of Patent: November 23, 2004Assignee: The Regents of the University of CaliforniaInventors: Ronald P. Reade, Paul H. Berdahl, Richard E. Russo
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Patent number: 6818059Abstract: The present invention is related to a method of crystallizing an amorphous silicon layer and a crystallizing apparatus thereof which crystallize an amorphous silicon layer using plasma. The present invention includes the steps of depositing an inducing substance for silicon crystallization on an amorphous silicon layer by plasma exposure, and carrying out annealing on the amorphous silicon layer to the amorphous silicon layer. The present invention includes a chamber having an inner space, a substrate support in the chamber wherein the substrate support supports a substrate, a plasma generating means in the chamber wherein the plasma generating means produces plasma inside the chamber, and a heater at the substrate support wherein the heater supplies the substrate with heat.Type: GrantFiled: July 9, 1999Date of Patent: November 16, 2004Assignees: LG. Philips LCD Co., Ltd.Inventors: Jin Jang, Soo-Young Yoon, Jae-Young Oh, Woo-Sung Shon, Seong-Jin Park
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Patent number: 6786967Abstract: A method for fabricating ion exchange waveguides, such as lithium niobate or lithium tantalate waveguides in optical modulators and other optical waveguide devices, utilizes pressurized annealing to further diffuse and limit exchange of the ions and includes ion exchanging the crystalline substrate with a source of ions and annealing the substrate by pressurizing a gas atmosphere containing the lithium niobate or lithium tantalate substrate above normal atmospheric pressure, heating the substrate to a temperature ranging from about 150 degrees Celsius to about 1000 degrees Celsius, maintaining pressure and temperature to effect greater ion diffusion and limit exchange, and cooling the structure to an ambient temperature at an appropriate ramp down rate. In another aspect of the invention a powder of the same chemical composition as the crystalline substrate is introduced into the anneal process chamber to limit the crystalline substrate from outgassing alkaline earth metal oxide during the anneal period.Type: GrantFiled: October 15, 1999Date of Patent: September 7, 2004Assignee: California Institute of TechnologyInventor: Lee J. Burrows
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Patent number: 6773503Abstract: The method of heat-treating a fluoride crystal according to the present invention comprises introducing an inert gas and/or a fluorine-based gas into a heat-treating furnace in which a fluoride crystal is placed through a gas-feeding port, and heating the fluoride crystal in the atmosphere of the gas having a pressure not lower than atmospheric pressure, thereby making it possible to prevent turbidity and coloration generated in the fluoride crystal due to oxygen and metal impurities adsorbed by the surface of the fluoride crystal.Type: GrantFiled: March 24, 2000Date of Patent: August 10, 2004Assignee: Canon Kabushiki KaishaInventor: Takao Chiba
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Patent number: 6770132Abstract: In one aspect of the invention, a method for pressurized annealing of lithium niobate or lithium tantalate structures, such as optical modulators and optical wave guides, comprises pressurizing an oxygen atmosphere containing a lithium niobate or lithium tantalate structure above normal atmospheric pressure, heating the structure to a temperature ranging from about 150 degrees Celsius to about 1000 degrees Celsius, maintaining pressure and temperature to effect ion exchange or to relieve stress, and cooling the structure to an ambient temperature at an appropriate ramp down rate.Type: GrantFiled: May 11, 1999Date of Patent: August 3, 2004Assignee: California Institute of TechnologyInventor: Lee J. Burrows
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Patent number: RE39778Abstract: A method is provided for preparing, with high reproducibility, a carbon-doped group III-V compound semiconductor crystal having favorable electrical characteristics and having impurities removed therefrom, and in which the amount of doped carbon can be adjusted easily during crystal growth. This method includes the steps of: filling a crucible with compound raw material, solid carbon, and boron oxide; sealing the filled crucible within an airtight vessel formed of a gas impermeable material; heating and melting the compound raw material under the sealed state in the airtight vessel; and solidifying the melted compound raw material to grow a carbon-doped compound semiconductor crystal.Type: GrantFiled: April 3, 2001Date of Patent: August 21, 2007Assignee: Sumitomo Electric Industries, Ltd.Inventors: Tomohiro Kawase, Masami Tatsumi
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Patent number: RE41551Abstract: A method is provided for preparing, with high reproducibility, a carbon-doped group III-V compound semiconductor crystal having favorable electrical characteristics and having impurities removed therefrom, and in which the amount of doped carbon can be adjusted easily during crystal growth. This method includes the steps of: filling a crucible with compound raw material, solid carbon, and boron oxide; sealing the filled crucible gas impermeable material; heating and melting the compound raw material under the sealed state in the airtight vessel; and solidifying the melted compound raw material to grow a carbon-doped compound semiconductor crystal.Type: GrantFiled: July 20, 2005Date of Patent: August 24, 2010Assignee: Sumitomo Electric Industries, Ltd.Inventors: Tomohiro Kawase, Masami Tatsumi