Microwave Gas Energizing Means (e.g., 2.45 Gigahertz, Microwave Plasma, Etc.) Patents (Class 118/723MW)
  • Patent number: 6165274
    Abstract: A plasma processing apparatus for plasma-processing a substrate arranged in a reaction chamber using a high frequency power supplied by a high frequency power introduction means, wherein said high frequency power introduction means comprises a cathode electrode and a conductor portion capable of transmitting a high frequency power to said cathode electrode, said conductor portion being penetrated a wall of said reaction chamber while said conductor portion being electrically isolated from said wall of said reaction chamber by means of an insulating material, at least a part of said insulating material comprising a porous ceramic material, wherein a fluid is introduced through said porous ceramic material to control the temperature of said cathode electrode and/or that of said conductor portion.
    Type: Grant
    Filed: November 2, 1998
    Date of Patent: December 26, 2000
    Assignee: Canon Kabushiki Kaisha
    Inventors: Kazuyoshi Akiyama, Tatsuyuki Aoike, Toshiyasu Shirasuna, Kazuhiko Takada, Ryuji Okamura, Hitoshi Murayama
  • Patent number: 6161501
    Abstract: In a device for generating plasma in a vacuum chamber (9) with the aid of alternating electromagnetic fields, at least one rod-shaped conductor (7) is guided inside of a tube (16) made of insulating material through the vacuum chamber (9), the insulating tube (16) is held at its ends in one or in the opposing walls (6;17,17a) of the vacuum chamber (9) and is sealed off, wherein one or both ends of the rod-shaped conductor (7) are connected to a generator (18,19), wherein one or both ends of the rod-shaped conductor (7) are surrounded by outer conductors (20,21), each extending from the generator (18,19) to the respective inside wall surface (22,22a) of the vacuum chamber (9), wherein, in the area of the wall passages, the rod-shaped conductor (7) connected to the sources (18,19) and the outer conductors (20,21) surrounding it are each provided with a branch constituting a bypass (23,24), wherein a second rod-shaped conductor (26) extending into or through the vacuum chamber (9) surrounded by a second insulati
    Type: Grant
    Filed: December 22, 1998
    Date of Patent: December 19, 2000
    Assignee: Leybold Systems GmbH
    Inventor: Michael Liehr
  • Patent number: 6161498
    Abstract: Disclosed is a plasma process apparatus which permits generating microwaves and a magnetic field so as to bring about electron cyclotron resonance and, thus, to generate a plasma which is applied to a semiconductor wafer, comprising microwave generating means for generating said microwaves, microwave transmitting means for transmitting the microwaves, a process chamber having said semiconductor wafer arranged therein, the microwaves being introduced into said process chamber through said microwave transmitting means, process gas supply means for supplying a process gas into said process chamber, and magnetic field generating means for generating a magnetic field within the process chamber. The frequency of the microwave falls within a range between a lower limit of a cutoff frequency determined by the inner diameter of the process chamber and an upper limit of a maximum frequency at which a standing wave of the microwave does not occur on the surface of the object.
    Type: Grant
    Filed: June 30, 1997
    Date of Patent: December 19, 2000
    Assignees: Tokyo Electron Limited, Fuji Electric Co., Ltd.
    Inventors: Makoto Toraguchi, Satoru Kawakami
  • Patent number: 6158382
    Abstract: A film-forming method by a plasma CVD process, comprising introducing a raw material gas into a reaction chamber containing a substrate positioned therein through a plurality of gas ejecting holes provided at a gas feed pipe and introducing a discharging energy into said reaction chamber to excite and decompose said film-forming raw material gas introduced into said reaction chamber whereby causing the formation of a deposited film on said substrate, characterized in that the introduction of said film-forming raw material gas into said reaction chamber is conducted by ejecting the film-forming raw material gas toward a member opposed to the substrate from each of right and left sides of the gas feed pipe through the gas ejecting holes of the gas feed pipe at a gas-ejecting angle (a) of 45.degree..ltoreq.(a)<90.degree. to a line which is passing through between said cylindrical substrate and each of said plurality of gas feed pipes.
    Type: Grant
    Filed: December 12, 1997
    Date of Patent: December 12, 2000
    Assignee: Canon Kabushiki Kaisha
    Inventors: Yoshio Segi, Hiroyuki Katagiri, Yasuyoshi Takai
  • Patent number: 6156152
    Abstract: Provided is a plasma processing apparatus capable of extending an etching parameter to reduce charge-up shape anomalies in dry etching and to enhance etching performance such as selectivity, uniformity, processability or the like. A microwave is controlled to be modulated in frequency and is introduced into a chamber. An ECR face is moved between two positions according to the frequency of the microwave.
    Type: Grant
    Filed: October 28, 1997
    Date of Patent: December 5, 2000
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Satoshi Ogino, Kazumasa Yonekura, Hajime Kimura, Shigenori Sakamori
  • Patent number: 6152071
    Abstract: A high frequency introducing means is provided which comprises a high frequency electrode having a shape of a bar or plate for generating plasma by high frequency power, and an adjustment mechanism for adjusting an absolute value of reactance between an end of the electrode opposite to a high frequency power introducing point of the electrode and a grounded portion. A plasma treatment apparatus and a plasma treatment method are also provided employing the above high frequency introducing means. A deposition film of high quality is formed stably and efficiently in an extremely uniform thickness and an extremely uniform quality at a high speed on a base member of a large area by adjusting the absolute value of the reactance.
    Type: Grant
    Filed: December 10, 1997
    Date of Patent: November 28, 2000
    Assignee: Canon Kabushiki Kaisha
    Inventors: Kazuyoshi Akiyama, Atsushi Yamagami, Satoshi Takaki, Koji Teranishi
  • Patent number: 6152072
    Abstract: Chemical vapor deposition coating is carried out in a cylindrical cavity. The fibers are heated by a microwave source that is uses a TM0N0 mode, where O is an integer, and produces a field that depends substantially only on radius. The fibers are observed to determine their heating, and their position can be adjusted. Once the fibers are uniformly heated, a CVD reagent is added to process the fibers.
    Type: Grant
    Filed: May 26, 1999
    Date of Patent: November 28, 2000
    Assignee: California Institute of Technology
    Inventors: Martin B. Barmatz, Gordon Hoover, Henry W. Jackson
  • Patent number: 6126779
    Abstract: A plasma enhanced gas reactor including a reaction chamber having a pair of field-enhancing electrodes each of which has an axial passage through it by one of which a reactant gas is admitted to the reaction chamber, and by the other of which reaction products are removed from the reaction chamber.
    Type: Grant
    Filed: November 7, 1997
    Date of Patent: October 3, 2000
    Assignee: AEA Technology PLC
    Inventors: Robert Frew Gillespie, Stephen Ivor Hall, David Raybone, Fiona Winterbottom
  • Patent number: 6116187
    Abstract: A thin film forming apparatus has a vacuum chamber as a film forming chamber, a plasma generating unit and an ion source. In the vacuum chamber, a substrate is placed and a thin film is formed on the substrate. The plasma generating unit decomposes a source gas introduced into the vacuum chamber to generate a plasma of the source gas near a film-forming surface of the substrate within the vacuum chamber. The ion source is provided around the vacuum chamber. The ion source produces ion beams that are drawn out to be directed substantially parallel to the film-forming surface of the substrate to irradiate the plasma.
    Type: Grant
    Filed: May 20, 1999
    Date of Patent: September 12, 2000
    Assignee: Nissin Electric Co., Ltd.
    Inventors: Hiroshi Murakami, Takashi Mikami, Kiyoshi Ogata
  • Patent number: 6117243
    Abstract: A CVD device for coating the inside of a hollow body, comprising a coating chamber, a microwave plasma-igniting device, a gas-supply device and an optical detective device, wherein the plasma-igniting device and optical detective device are connected to a control and analysis unit, analyzing the time correlation of ignition pulses and light pulses, and the intensity of at least one emission line of the plasma.
    Type: Grant
    Filed: July 14, 1999
    Date of Patent: September 12, 2000
    Assignee: Schott Glaswerke
    Inventor: Marten Walther
  • Patent number: 6114811
    Abstract: An electromagnetic radio-frequency or microwave device having a treatment chamber (6) with a transmission wall (7, 7', 7"), which is permeable for the electromagnetic waves, to an adjacent chamber (4) and with a design of the transmission wall (7, 7', 7") for influencing the intensity distribution of the transmission of the electromagnetic waves into the treatment chamber (6) allows low-loss control of the intensity of the transmitted waves in that the transmission wall (7, 7', 7") has a large number of antenna elements (10, 10') which are directed at an angle to the wall plane of the adjacent chamber (4), are in the form of rods, and project centrally through through-openings (14, 14') which are bounded by electrically conductive material.
    Type: Grant
    Filed: July 30, 1998
    Date of Patent: September 5, 2000
    Inventor: Jeng-Ming Wu
  • Patent number: 6109208
    Abstract: A plasma generating apparatus capable of improving the uniformity of a plasma processing and coping with a larger diameter of a substrate is obtained. Microwaves are distributed and emitted from a waveguide through the branching portions of a T branch to four rod antennas. The microwaves are introduced through four dielectric tubes into a vacuum vessel. In the vacuum vessel, a multi-cusp magnetic field and an electron cyclotron resonance region are caused by permanent magnets located around the vessel and, by an interaction between a vibrational electric field of the microwaves and a magnetic field, highly uniform plasma is generated in a region where a substrate or the like is subjected to a plasma processing.
    Type: Grant
    Filed: July 27, 1998
    Date of Patent: August 29, 2000
    Assignees: Mitsubishi Denki Kabushiki Kaisha, Mitsubishi Electric Engineering Company Limited
    Inventors: Masaaki Tsuchihashi, Minoru Hanazaki, Toshio Komemura, Mutumi Tuda, Kouichi Ono, Kouji Oku, Shinji Nakaguma
  • Patent number: 6101970
    Abstract: An inductively coupled type dry etching apparatus has an RF antenna disposed on a dielectric wall forming the ceiling of a process chamber. The process chamber is divided into a plasma generating space and a processing space by the partition of an intermediate electrode. A susceptor is arranged in the processing space, for mounting a semiconductor wafer thereon. The partition has openings for the plasma generating space and the processing space to communicate with each other. The partition is formed of a plurality of conductive beams radially arranged. The conductive beams extend in directions perpendicular to the direction of an electric field generated by the RF antenna, and have warps to absorb thermal stress.
    Type: Grant
    Filed: September 29, 1998
    Date of Patent: August 15, 2000
    Assignees: Tokyo Electron Yamanashi Limited, Japan Science and Technology Corporation
    Inventor: Chishio Koshimizu
  • Patent number: 6096389
    Abstract: A method for continuously forming a functional deposited film of large area with a microwave plasma-assisted CVD method, characterized by including:continuously moving a strip member in a longitudinal direction, while forming halfway a columnar film formation space with said moving strip member as a side wall;introducing individually at least two or more kinds of source gases for the formation of deposited film having different compositions via a plurality of respective gas supply means into said film formation space;introducing source gases for the formation of deposited film via said gas supply means into said film formation space;at the same time exciting a microwave plasma within said film formation space by radiating or transmitting said microwave energy with microwave applicator means which allows the microwave energy to be radiated or transmitted directionally in one direction perpendicular to a propagating direction of microwave; andforming the deposited film having its composition controlled on a sur
    Type: Grant
    Filed: April 18, 1997
    Date of Patent: August 1, 2000
    Assignee: Canon Kabushiki Kaisha
    Inventor: Masahiro Kanai
  • Patent number: 6093281
    Abstract: A baffle plate for semiconductor processing apparatus. The baffle plate includes a plurality of slits. A plurality of fins are located between adjacent slits. The fins have varying heights and a supporting portion interconnects the fins.
    Type: Grant
    Filed: February 26, 1998
    Date of Patent: July 25, 2000
    Assignee: International Business Machines Corp.
    Inventors: Richard S. Wise, David M. Dobuzinsky, William C. Wille
  • Patent number: 6092486
    Abstract: The plasma processing apparatus and plasma processing method of the present invention are suitable for the application of plasma processing to etching, ashing, CVD, etc. in the manufacturing of large scale integrated circuits (LSIs) and liquid crystal display panels (LCDs), and useful for the manufacturing of LSIs and LCDs. The apparatus is characterized in that the reaction chamber has its side wall separated into an inner side wall which faces to the interior of the reaction chamber and an outer side wall which faces to the exterior of the reaction chamber, with the inner side wall being isolated electrically from other portions of the reaction chamber and not grounded electrically. This structure improves the repeatability of plasma processing. The apparatus is also characterized in that the inner side wall of reaction chamber is isolated thermally from other portions of the reaction chamber and equipped with temperature control means.
    Type: Grant
    Filed: January 26, 1998
    Date of Patent: July 25, 2000
    Assignee: Sumimoto Metal Indsutries, Ltd.
    Inventors: Hiroshi Mabuchi, Toshihiro Hayami, Shigeki Honda
  • Patent number: 6090167
    Abstract: A method and apparatus for improving film stability of a halogen-doped silicon oxide layer. The method includes the step of introducing helium along with the process gas that includes silicon, oxygen and a halogen element. Helium is introduced at an increased rate to stabilize the deposited layer. In a preferred embodiment, the halogen-doped film is a fluorosilicate glass film and TEOS is employed as a source of silicon in the process gas. In still another preferred embodiment, SiF.sub.4 is employed as the fluorine source for the FSG film.
    Type: Grant
    Filed: October 6, 1999
    Date of Patent: July 18, 2000
    Assignee: Applied Materials, Inc.
    Inventors: Mohan Krishan Bhan, Sudhakar Subrahmanyam, Anand Gupta, Viren V. S. Rana
  • Patent number: 6091045
    Abstract: A plasma processing apparatus and a plasma processing method used in etching, ashing, CVD, etc. in the manufacturing, etc. of large-scale integrated circuits (LSIs) and liquid crystal display panels (LCDs). The plasma processing apparatus includes a dielectric plate used for the passage of a microwave, a microwave window disposed to confront the dielectric plate, and a reaction chamber in which a sample stage is disposed to confront the microwave window. The apparatus is characterized in that the microwave window has a recess in the area confronting the sample stage. The plasma processing method is characterized by implementing a plasma process for a sample with the plasma processing apparatus. The method and apparatus are capable of raising the plasma density in the area confronting the sample, improving the plasma processing rate, improving the etch-through performance for fine hole patterns, and improving the yield of semiconductor devices.
    Type: Grant
    Filed: November 26, 1997
    Date of Patent: July 18, 2000
    Assignee: Sumitomo Metal Industries, Inc.
    Inventors: Hiroshi Mabuchi, Junya Tsuyuguchi, Katsuo Katayama, Toshihiro Hayami, Hideo Ida, Tomomi Murakami, Naohiko Takeda
  • Patent number: 6089185
    Abstract: A thin film forming apparatus is formed of a vacuum chamber, a base plate holder for holding a base plate near a central part of the vacuum chamber, and ECR plasma generating devices respectively connected to both side portions of the vacuum chamber. A magnetic field generating device is situated adjacent to the vacuum chamber for generating a predetermined magnetic field in the vacuum chamber, and a gas introducing system is connected to the vacuum chamber for introducing a reaction gas into the vacuum chamber. Since the base plate holder has a shape corresponding to an external shape of the base plate, a distance between the base plate and the base plate holder is uniform. The films with uniform thicknesses can be formed on both surfaces of the base plate.
    Type: Grant
    Filed: December 14, 1998
    Date of Patent: July 18, 2000
    Assignee: Shimadzu Corporation
    Inventors: Noritaka Akita, Masayasu Suzuki, Yoshihiro Hashimoto
  • Patent number: 6082293
    Abstract: According to the present invention, when power is supplied from a high frequency power supply to an antenna 14, a quasi-electrostatic induced electric field E.sub.PS is generated in a chamber 11, and plasma P of high density is generated over a broad area. Further, an alternating current (frequency: several tens Hz to several tens KHz) flows in polyphase AC magnets 17 by a polyphase AC inverter power supply, whereby a horizontal magnetic field (magnetic flux density B) is generated on a semiconductor wafer 13. The magnetic field thus generated rotates at the rotational number corresponding to the frequency which is set in the polyphase AC inverter power supply, and the rotation of the magnetic field causes a rotating electric field E to occur on the surface of the semiconductor wafer 13. In a surface area of the semiconductor wafer 13, an electric field E.sub.V (plasma sheath electric field E.sub.sheath) is generated in the vertical direction while an electric field E.sub.
    Type: Grant
    Filed: April 17, 1997
    Date of Patent: July 4, 2000
    Assignee: Sony Corporation
    Inventor: Toshitaka Kawashima
  • Patent number: 6076484
    Abstract: The invention provides a microwave plasma process apparatus in which an antenna having a tubular member curved in a C shape or a spiral shape and including a slit is disposed on a sealing member for sealing a chamber, so that a microwave can be emitted through the slit to the sealing member.
    Type: Grant
    Filed: October 13, 1998
    Date of Patent: June 20, 2000
    Assignee: Sumitomo Metal Industries, Limited
    Inventors: Naoki Matsumoto, Toshio Nakanishi
  • Patent number: 6076482
    Abstract: The invention contours the chamber surface overlying semiconductor wafer being processed (i.e., the chamber ceiling) in such a way as to promote or optimize the diffusion of plasma ions from their regions of origin to other regions which would otherwise have a relative paucity of plasma ions. This is accomplished by providing a greater chamber volume over those areas of the wafer otherwise experiencing a shortage of plasma ions and a smaller chamber volume over those areas of the wafer experiencing a plentitude of plasma ions (e.g, due to localized plasma generation occurring over the latter areas). Thus, the ceiling is contoured to promote a plasma ion diffusion which best compensates for localized or non-uniform patterns in plasma ion generation typical of an inductively coupled source (e.g., an overhead inductive antenna).
    Type: Grant
    Filed: September 20, 1997
    Date of Patent: June 20, 2000
    Assignee: Applied Materials, Inc.
    Inventors: Ji Ding, James Carducci, Hongching Shan, Siamak Salimian, Evans Lee, Paul E. Luscher, Mike Welch
  • Patent number: 6059922
    Abstract: A plasma processing apparatus according to the present invention includes a microwave guide for introducing a microwave, an air-tight chamber for internally setting an object to be processed, for generating a plasma by introducing the microwave introduced by the microwave guide and by supplying a reaction gas, and for processing the object by an active species generated by the plasma, a dielectric window provided between the microwave guide and the air-tight chamber, for enclosing the air-tight chamber, a top plate provided with a microwave guide port arranged with a gap maintained from the dielectric window, and cooling means provided for the top plate, for cooling heat caused by generation of the plasma, e.g., a cooling means for causing a cooling gas to flow in the gap between the dielectric window and the top plate.
    Type: Grant
    Filed: November 7, 1997
    Date of Patent: May 9, 2000
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Osamu Yamazaki, Shigeyuki Takagi, Kaoru Taki, Noboru Okamoto, Yutaka Uchida, Naoki Tajima, Masashi Yamage
  • Patent number: 6054063
    Abstract: The high-frequency electric field is subjected to pulse modulation for 10 to 100 .mu.sec; the rise time of pulse is controlled to be not shorter than 2 .mu.sec but not longer than 50 .mu.sec; and the descent time of pulse is controlled to be not shorter than 10 .mu.sec but not longer than .phi..mu.sec. Thereby, the electron temperature in plasma is controlled at 2 eV or lower and the fluctuation of the density of negative ion in plasma is controlled at 20% or smaller.
    Type: Grant
    Filed: June 22, 1998
    Date of Patent: April 25, 2000
    Assignee: NEC Corporation
    Inventors: Hiroto Ohtake, Seiji Samukawa
  • Patent number: 6034346
    Abstract: An electromagnetically coupled plasma processing apparatus is arranged so that a microwave sent through a coaxial waveguide is enlarged by a parallel disk waveguide before being radiated from an enlarged coaxial portion. The electromagnetically coupled plasma processing apparatus has a loop antenna for passing a high-frequency wave, a cavity resonator for surrounding the loop antenna, and a slit in double-layer structure in a position where the cavity resonator faces a plasma. The plasma on the surface of a wafer can be processed uniformly with various desirable effects including: (1) preventing foreign matter from being produced and abnormal discharge because of electrostatic coupling; (2) improving the ignitability and stability of a plasma; (3) lowering the antenna voltage; and (4) effecting uniform processing by providing an opposed grounding electrode.
    Type: Grant
    Filed: May 17, 1996
    Date of Patent: March 7, 2000
    Assignee: Hitachi, Ltd.
    Inventors: Ken Yoshioka, Saburou Kanai, Tetsunori Kaji, Ryoji Nishio, Manabu Edamura
  • Patent number: 6028393
    Abstract: A novel high speed, high quality plasma enhanced surface modification or CVD thin-film deposition method and apparatus. The invention employs both microwave and e-beam energy for creation of a plasma of excited species which modify the surface of substrates or are deposited onto substrates to form the desired thin film. The invention also employs a gas jet system to introduce the reacting species to the plasma. This gas jet system allows for higher deposition speed than conventional PECVD processes while maintaining the desired high quality of the deposited materials.
    Type: Grant
    Filed: January 22, 1998
    Date of Patent: February 22, 2000
    Assignee: Energy Conversion Devices, Inc.
    Inventors: Masatsugu Izu, Joachim Doehler, Scott Jones
  • Patent number: 6026762
    Abstract: An apparatus and methods for an upgraded CVD system providing a remote plasma for efficiently cleaning a chamber, according to a specific embodiment. Etching or depositing a layer onto a substrate also may be achieved using the upgraded CVD system of the present invention. In a specific embodiment, the present invention provides apparatus for an easily removable, conveniently handled, and relatively inexpensive, robust microwave plasma source as a retrofit for or a removable addition to existing CVD apparatus. The present invention provides an improved CVD apparatus or retrofit of existing CVD apparatus capable of producing a remote plasma for efficiently cleaning the chamber.
    Type: Grant
    Filed: April 23, 1997
    Date of Patent: February 22, 2000
    Assignee: Applied Materials, Inc.
    Inventors: Chien-Teh Kao, Kenneth Tsai, Quyen Pham, Ronald L. Rose, Calvin R. Augason, Joseph Yudovsky
  • Patent number: 6016766
    Abstract: Ionizable gas supplied to an electron cyclotron resonance vacuum plasma processor chamber for semiconductor wafers is excited to a plasma state by microwave energy coupled to the chamber. The level of microwave power reflected from the chamber controls the level of microwave power derived from a source driving the ionizable gas in the chamber.
    Type: Grant
    Filed: December 29, 1997
    Date of Patent: January 25, 2000
    Assignee: Lam Research Corporation
    Inventors: David R. Pirkle, John Daugherty, Michael Giarratano, C. Robert Koemtzopoulos, Felix Kozakevich
  • Patent number: 6010755
    Abstract: An apparatus for forming thin films such as protective layers on both surfaces of a substrate of a magnetic memory device has an evacuable reaction chamber sandwiched between two electron cyclotron resonance plasma generators disposed on mutually opposite sides. Each plasma generator includes a wave guide for introducing microwave energy and a magnetic coil for providing a magnetic field for generating a plasma and causing the generated plasma to move to the substrate set inside the reaction chamber with a negative bias voltage applied thereto.
    Type: Grant
    Filed: June 4, 1997
    Date of Patent: January 4, 2000
    Assignee: Shimadzu Corporation
    Inventor: Masayasu Suzuki
  • Patent number: 5997686
    Abstract: A process and apparatus for setting a working rate distribution along a work surface which is being AC plasma-enhanced reactively coated, or reactively or non-reactively etched in an AC plasma, and in which process a plasma volume of given volume is utilized, comprises placing the work surface in the plasma volume, positioning a setting surface of a distribution setting body opposite the work surface, the setting body being surrounded by the plasma volume substantially on all sides of the setting body, and setting the working rate distribution by selecting either the material of the setting surface, the quality of the setting surface, a distance relationship between the setting surface and the work surface, or the shape of the setting surface.
    Type: Grant
    Filed: November 26, 1996
    Date of Patent: December 7, 1999
    Assignee: Tokyo Electron Limited
    Inventors: Marcel Lardon, Rolf Zessack, Paul-Rene Muralt
  • Patent number: 5988104
    Abstract: The present invention provides a plasma treatment system having a reaction chamber in which a plasma is generated to be irradiated onto a sample held on a sample holder in the reaction chamber. The reaction chamber has a top covered by a dielectric plate. The plasma treatment system also has an opposite electrode having a plurality of windows through which microwave is transmitted into the reaction chamber for causing the plasma, wherein the opposite electrode is provided over a top surface of the dielectric plate so that the opposite electrode is separated by the dielectric plate from the plasma generated in the reaction chamber.
    Type: Grant
    Filed: July 29, 1997
    Date of Patent: November 23, 1999
    Assignee: NEC Corporation
    Inventor: Hidetaka Nambu
  • Patent number: 5983829
    Abstract: A plasma process apparatus comprises a plasma process chamber, substrate-to-be-processed supporting means for supporting a substrate to be processed, provided in the process chamber, gas introducing means, gas evacuation means, microwave introducing means using an endless circular waveguide having a plurality of slots arranged around the process chamber, and radio frequency power supplying means for supplying radio frequency power to the substrate supporting means. The above arrangement permits a uniform plasma to be generated in high density and in a large area even under the low-pressure condition of about 1 mTorr without using a magnetic field, thus enabling etching of large-area substrates in super fine patterns and at high speed.
    Type: Grant
    Filed: October 29, 1996
    Date of Patent: November 16, 1999
    Assignee: Canon Kabushiki Kaisha
    Inventor: Nobumasa Suzuki
  • Patent number: 5975014
    Abstract: A method and apparatus employing a microwave applicator for use with an ECR plasma source for applications including etching and chemical vapor deposition is provided. A magnetic field is generated by magnets circumferentially arranged about a chamber that is symmetrical about its longitudinal axis. The microwave applicator, which comprises at least one pair of coaxial resonant multiport microwave antenna arrays, injects and distributes microwave power about a plasma forming portion of the chamber. The antenna arrays include a plurality of radiating stubs for radiating microwave power. The stubs are positioned along the arrays at predetermined intervals and selected orientations relative to a coaxial transmission line, for efficiently distributing microwave power uniformly about the plasma forming portion.
    Type: Grant
    Filed: January 12, 1998
    Date of Patent: November 2, 1999
    Assignee: ASM Japan K.K.
    Inventor: Raphael A. Dandl
  • Patent number: 5976259
    Abstract: An improved semiconductor device manufacturing system and method is shown. In the system, undesirable sputtering effect can be averted by virtue of a combination of an ECR system and a CVD system. Prior to the deposition according to the above combination, a sub-layer can be pre-formed on a substrate in a reaction chamber and transported to another chamber in which deposition is made according to the combination without making contact with air, so that a junction thus formed has good characteristics.
    Type: Grant
    Filed: November 9, 1995
    Date of Patent: November 2, 1999
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Shunpei Yamazaki
  • Patent number: 5975012
    Abstract: A deposition apparatus including a deposition chamber containing therein a holder for holding a substrate and an electrode holding a sputtering target, a device for applying electrical power to the electrode, a gas supplying device for supplying gas to the deposition chamber, a evacuating device for evacuating the deposition chamber, and a microwave supplying device disposed around the deposition chamber. By virtue of such a construction, the deposition apparatus allows the target to be used with high efficiency and the ions to be maintained at a high density and low energy.
    Type: Grant
    Filed: October 25, 1996
    Date of Patent: November 2, 1999
    Assignee: Canon Kabushiki Kaisha
    Inventors: Senichi Hayashi, Nobumasa Suzuki
  • Patent number: 5973289
    Abstract: A microwave-driven plasma spraying apparatus can be utilized for uniform high-powered spraying. The plasma sprayer is constructed without a dielectric discharge tube, so very high microwave powers can be utilized. Moreover, the plasma sprayer is relatively free of contamination caused by deposits of heat-fusible material.
    Type: Grant
    Filed: February 17, 1998
    Date of Patent: October 26, 1999
    Assignee: Physical Sciences, Inc.
    Inventors: Michael E. Read, John F. Davis, III, Michael M. Micci
  • Patent number: 5968274
    Abstract: The present invention aims to provide a continuous forming method and apparatus for functional deposited films having excellent characteristics while preventing any mutual mixture of gases between film forming chambers having different pressures, wherein semiconductor layers of desired conductivity type are deposited on a strip-like substrate within a plurality of film forming chambers, by plasma CVD, while the strip-like substrate is moved continuously in a longitudinal direction thereof through the plurality of film forming chambers connected via gas gates having means for introducing a scavenging gas into a slit-like separation passage, characterized in that at least one of the gas gates connecting the i-type layer film forming chamber for forming the semiconductor junction and the n- or p-type layer film forming chamber having higher pressure than the i-type layer film forming chamber has the scavenging gas introducing position disposed on the n- or p-type layer film forming chamber side off from the cent
    Type: Grant
    Filed: November 20, 1996
    Date of Patent: October 19, 1999
    Assignee: Canon Kabushiki Kaisha
    Inventors: Yasushi Fujioka, Shotaro Okabe, Masahiro Kanai, Takehito Yoshino, Akira Sakai, Tadashi Hori
  • Patent number: 5961776
    Abstract: A surface processing apparatus includes a microwave generator which generates low UHF band microwaves of from 300 MHz to 1 GHz, a cavity resonator in which the microwaves generated in the microwave generator resonate in the TM 010 mode, an airtight process chamber which is connected to the cavity resonator, a radiation plate which is arranged in a part of the cavity resonator which is connected with the process chamber, the radiation plate has a plurality of radiation holes which are established symmetrically with respect to a central axis of the cavity resonator, and cover plates made of a dielectric material which close off the radiation holes in an airtight manner.
    Type: Grant
    Filed: November 19, 1997
    Date of Patent: October 5, 1999
    Assignee: Anelva Corporation
    Inventors: Hisaaki Sato, Yukito Nakagawa, Ken-ichi Takagi, Tomoaki Koide, Tsutomu Tsukada
  • Patent number: 5961726
    Abstract: The deposited film forming apparatus of the present invention capable of forming a deposited film having a small number of structural defects and a light-receiving member for electrophotography for forming a light-receiving member for electrophotography having excellent image characteristics, which comprises means for supplying a source gas into a reaction vessel capable of reducing a pressure in which said substrate is arranged, and high-frequency power supply means for supplying a high-frequency power into said reaction vessel in which said substrate is arranged, the source gas being decomposed by the high-frequency power to be able to form a deposited film on the substrate, wherein a supply portion of said high-frequency power supply means is constituted by a plurality of members.
    Type: Grant
    Filed: December 22, 1995
    Date of Patent: October 5, 1999
    Assignee: Canon Kabushiki Kaisha
    Inventor: Tatsuyuki Aoike
  • Patent number: 5954882
    Abstract: A plasma reactor for generating and maintaining plasma. The plasma reactor has a resonant cavity whose cross-section tapers in summit regions in which the wall of the resonant cavity is closed to such an extent that an excited field mode in the region of the cross-sectional tapered portions displays main peaks whose maximum field intensity is increased relative to the field intensity of adjacent secondary peaks. A reaction unit is provided in the region of a main peak with a substrate which is to be processed and which can be coated in the gas phase of the plasma. As a result of the field intensity distribution brought about by a resonant cavity of the given shape, with main peaks which are greatly increased with respect to secondary peaks, process parameters such as gas pressure and coupled electromagnetic power can be selected very largely independently of one another when the plasma is in a stable situation, without the plasma igniting undesirably in the region of the secondary peaks.
    Type: Grant
    Filed: March 28, 1997
    Date of Patent: September 21, 1999
    Assignee: Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
    Inventors: Christof Wild, Michael Funer, Peter Koidl
  • Patent number: 5951887
    Abstract: A plasma processing apparatus and plasma processing method are provided to be used for etching, ashing, CVD, etc. in the manufacturing, etc. of large-scale integrated circuits (LSIs) and liquid crystal display panels (LCDs). The plasma processing apparatus generates plasma by using a microwave introduced through a microwave window, while controlling the ions in the plasma by varying the RF voltage applied to the sample stage. The apparatus is characterized to include a counter electrode (grounded electrode) which is located at the rim section of the microwave window against the sample stage. The plasma processing method implements a plasma process for a sample with the plasma processing apparatus. The method and apparatus are capable of alleviating the sticking of particles to the sample and metallic contamination, and also capable of improving the yield of semiconductor devices, etc.
    Type: Grant
    Filed: November 26, 1997
    Date of Patent: September 14, 1999
    Assignee: Sumitomo Metal Industries, Ltd.
    Inventors: Hiroshi Mabuchi, Toshihiro Hayami, Hideo Ida, Tomomi Murakami, Naohiko Takeda, Junya Tsuyuguchi, Katsuo Katayama
  • Patent number: 5948168
    Abstract: A plasma reactor has plural dielectric gas injection tubes extending from a gas injection source and through a microwave guide and into the top of the reactor chamber. The semiconductor wafer rests near the bottom of the chamber on a wafer pedestal connected to a bias RF power source which is controlled independently of the microwave source coupled to the microwave guide. The microwaves from the waveguide ignite and maintain a plasma in each of the tubes. Gas flow through the tubes carries the plasmas in all the tubes into the chamber and into contact with the wafer surface.
    Type: Grant
    Filed: October 9, 1997
    Date of Patent: September 7, 1999
    Assignee: Applied Materials, Inc.
    Inventors: Hongching Shan, Harald Herchen, Michael Welch
  • Patent number: 5935334
    Abstract: The present invention provides systems, methods and apparatus for high temperature (at least about 500-800.degree. C.) processing of semiconductor wafers. The systems, methods and apparatus of the present invention allow multiple process steps to be performed in situ in the same chamber to reduce total processing time and to ensure high quality processing for high aspect ratio devices. Performing multiple process steps in the same chamber also increases the control of the process parameters and reduces device damage. In particular, the present invention can provide high temperature deposition, heating and efficient cleaning for forming dielectric films having thickness uniformity, good gap fill capability, high density, low moisture, and other desired characteristics.
    Type: Grant
    Filed: November 13, 1996
    Date of Patent: August 10, 1999
    Assignee: Applied Materials, Inc.
    Inventors: Gary Fong, Irwin Silvestre
  • Patent number: 5919310
    Abstract: A continuous film-forming apparatus includes a plurality of reaction chambers each capable of forming a semiconductor film with a different chemical composition. The reaction chambers are arranged such that a substrate web on which a film is to be formed can be hermetically moved through each of the reaction chambers under a vacuum condition. A gas gate is disposed at a central position between each pair of adjacent reaction chambers, with each gas gate provided with a slit for communication between the adjacent reaction chambers.
    Type: Grant
    Filed: February 29, 1996
    Date of Patent: July 6, 1999
    Assignee: Canon Kabushiki Kaisha
    Inventors: Yasushi Fujioka, Shotaro Okabe, Masahiro Kanai, Takehito Yoshino, Akira Sakai, Tadashi Hori
  • Patent number: 5914051
    Abstract: A microwave plasma processing method and apparatus of the type wherein a waveguide section includes electric discharge means isolated from a waveguide for the propagation of microwaves and having a plasma generation region therein, which method and apparatus are well suited for subjecting samples, such as semiconductor device substrates, to an etching process, a film forming process, etc. The microwaves are introduced into the electric discharge means in correspondence with only the traveling direction thereof, whereby uniformity in a plasma density distribution corresponding to the surface to-be-processed of the sample can be sharply enhanced, so that the sample processed by utilizing such plasma can attain an enhanced processing homogeneity within the surface to-be-processed.
    Type: Grant
    Filed: May 18, 1995
    Date of Patent: June 22, 1999
    Assignee: Hitachi, Ltd.
    Inventors: Saburo Kanai, Yoshinao Kawasaki, Kazuaki Ichihashi, Seiichi Watanabe, Makoto Nawata
  • Patent number: 5911852
    Abstract: A plasma processing apparatus includes a conductive thin film provided on a surface of a microwave introducing member which is exposed to a processing chamber, in which an object to be processed is placed. The conductive thin film is provided at the entire portion excluding a transmission portion, through which microwaves pass into the processing chamber. The conductive thin film is grounded to act as an electrode.
    Type: Grant
    Filed: June 14, 1996
    Date of Patent: June 15, 1999
    Assignee: Sumitomo Metal Industries Limited
    Inventors: Katsuo Katayama, Kyouichi Komachi, Kouichi Iio, Takeshi Akimoto
  • Patent number: 5902404
    Abstract: A remote source of partially ionized plasma gas having ions and excited neutral atom species therein is provided. A chamber having a metallic outer shell and an inner insulative tube, is operated as a microwave resonant cavity, preferably having a diameter of about one quarter of the operating wavelength. A waveguide couples microwave energy from a source to a slot cut into the metallic outer shell of the cavity. Microwave energy passes through the inner energy transparent tube and excites reactant gases supplied from an input tube. Plasma is conducted from the cavity by a plasma output tube coupled into a processing chamber and controlled pressure pumping system.
    Type: Grant
    Filed: March 4, 1997
    Date of Patent: May 11, 1999
    Assignee: Applied Materials, Inc.
    Inventors: Gary Fong, Irwin Silvestre, Quoc Truong
  • Patent number: 5900065
    Abstract: In an apparatus for the deposition of polycrystalline diamond on large, flat substrates (3) by the plasma method, with a vacuum chamber (4); with locks for the inward and outward transfer of the substrates; with a device installed in the chamber (4) for conveying the substrates (3) through at least one, preferably through two treatment stations; with hot-filament sources (5, 5', . . . ) forming a first group, installed above the plane of the substrates; with microwave plasma sources (8, 8', . . . ) forming a second group; with an electrode (11) fed with radio frequency underneath the plane of the substrates for generating a bias voltage; and with gas feed pipes (6, 9) opening into the vacuum chamber (4), the hot-filament arrangements (5, 5', . . . ), designed as linear sources, are arranged transversely to the substrate transport direction (a) and form a first coating zone (Z.sup.1), where the microwave plasma sources (8, 8', . . .
    Type: Grant
    Filed: August 5, 1997
    Date of Patent: May 4, 1999
    Assignee: Leybold Systems GmbH
    Inventors: Michael Liehr, Claus-Peter Klages, Gunter Brauer
  • Patent number: 5885356
    Abstract: The present invention provides a method and apparatus for limiting residue build-up by lining with a ceramic material the exhaust plenun and exhaust manifold of a processing chamber. In another aspect of the invention, the inventors have used an air gap between the ceramic liner and the processing chamber walls to increase the dielectric value of the ceramic liner, and further inhibit the build-up of residues. In another aspect, the ceramic liner has been found to retain sufficient heat to allow the elimination of heaters typically used to heat the aluminum walls during a clean operation, if the clean operation is commenced immediately after a process step so that the ceramic retains the necessary heat from the previous processing step. The provision of an air gap aids in this heating, preventing the ceramic heat from being drawn off by direct contact with the aluminum walls. In a preferred embodiment, the ceramic liners are attached to the chamber walls with TEFLON.RTM. (polytetrafluoroethylene) screws.
    Type: Grant
    Filed: December 22, 1995
    Date of Patent: March 23, 1999
    Assignee: Applied Materials, Inc.
    Inventors: Jun Zhao, Tom Cho, Xin Sheng Guo, Atsushi Tabata, Jianmin Qiao, Alex Schreiber
  • Patent number: RE36224
    Abstract: A microwave plasma processing process and apparatus useful in the fabrication of integrated circuit (IC) or similar semiconductor devices, wherein the object or material to be processed, such as a semiconductor wafer, is processed with plasma generated using microwaves transmitted through a microwave transmission window disposed perpendicular to an electric field of the progressive microwaves in the waveguide.
    Type: Grant
    Filed: November 15, 1996
    Date of Patent: June 8, 1999
    Assignee: Fujitsu Limited
    Inventors: Shuzo Fujimura, Toshimasa Kisa, Yasunari Motoki