Abstract: There is disclosed a coupling arrangement for coupling a motor to a hoist machine. The coupling arrangement comprises a first drum flange comprising an outer body having a first end and a second end, and an inner wall surface defining a cavity of substantially circular cross section. The cavity has a given diameter along a first length of the body, and of reducing diameter along a second length of the body. The flange is adapted to receive at the first end a tapered bushing of increasing diameter and dimensioned such that, upon insertion of the bushing within the body a given length, the bushing frictionally engages with the inner wall surface of reducing diameter for retention therein. The bushing has a central cavity for receiving the shaft of the motor and capable of securing onto the shaft.

Abstract: A torque motor type elevator comprises a torque motor, a ball screw, a sliding nut and an elevator car. The torque motor serves to drive the load screw of the ball screw directly, so the elevator car fixed to the load nut is moved up and down. The ball screw of the present invention is provided for reducing the loss of energy of the elevator driving system, and the sliding nut is disposed on the ball screw to improve its safety. The torque motor can be added with a resolver or an encoder to control the position precisely. Such arrangements can prevent the problem of energy consumption and can simplify the structure.

Abstract: A method for carrying out maintenance and inspection operations at an elevator installation with an elevator car having a lowerable car roof that serves as maintenance platform, comprises at least the following steps: positioning the elevator car at a selected floor and opening the elevator doors; lowering the car roof into the elevator car to work level; climbing of the maintenance person with the help of climbing equipment from the selected floor through the elevator doors onto the lowered car roof, closing the elevator doors; and moving the elevator car to maintenance positions.

Abstract: Rubber vibration isolators are held between a base frame supporting a driving device and an upper deflecting sheave, and a support connected to car guide rails and a counterweight guide rail. The rubber vibration isolators are held between a horizontal member and vertical members of a support frame supporting lower deflecting sheaves. Transmission of vibrations generated by the driving device, the upper deflecting sheave, and the lower deflecting sheaves to the side walls of an elevator shaft can be intercepted.

Abstract: Brake equipment for holding and braking an elevator car in an elevator installation, which is arranged to be movable along a brake track in two directions of travel, includes a mount with a brake lining which automatically adjusts under friction couple with the brake track on movement of the elevator car relative to the rail and in that case tightens a first tightening means, which can be released by an actuator. The first tightening means tightens the mount together with the brake lining against the brake track by a biasing force. The brake equipment produces, with unmoved brake equipment and an unreleased state of the actuator, a holding force acting in both directions of travel. The holding force is determined substantially by the biasing force acting on the mount.

Abstract: An elevator system includes guide rail mounted machine (16) and a sheave assembly (32) that accommodates a guide rail (38) within a hoistway. The inventive sheave assembly includes individual sheave portions (54) rotatable along a common axis. At least two of the sheave portions are spaced apart along a shaft (50) and a portion of the guide rail extends toward the axis beyond a plane formed tangent to the outside diameter of the sheave portions.

Abstract: An access tower comprises a movable wheeled base (10) to which is mounted one end of a scissor lift mechanism (12), the other end of which supports a working platform (14). The scissor lift (12) can be actuated to displace the working platform (14) between a fully retracted or stowed condition and a fully extended or deployed condition.

Abstract: The present invention is about a traction sheave elevator, without the machine room, comprising an elevator car that runs on guide rails placed in the shaft and connected to at least one hoisting rope un-coiling on a diverting pulley driven by a traction sheave. The invention's characteristic consists in comprising a space, outside the elevator shaft, which houses, at least partially, the traction sheave and is equipped with an opening near a floor's door for the access to the drive machine and to the traction sheave, from outside the shaft. The invention also provides for arranging the two diverting pulleys on the counterweight and on the elevator car in a way that one or the other can be tilted with respect to the vertical or arranging them on the same axis and on the same body of the pulley with the grooves of the alternating hoisting ropes.

Abstract: A guide device for an elevator car has a guide shoe that is displaceable by a linear guide that is arranged on the elevator car. Should the elevator car in an extreme situation travel beyond the uppermost floor, the guide shoe is arrested by a projecting console, and the elevator car travels past the console. The linear guide permits the guide shoe to execute a movement relative to the elevator car. Thus, the elevator car, or parts thereof, utilizes the hoistway headroom that is provided for the drive unit or other hoistway equipment. The counterweight can be provided with the displaceable guide shoe for utilizing the hoistway pit in a similar manner.

Abstract: An elevator drive unit includes an engine, an engine stand, a bearing block, a traction sheave and an engine frame with a counter-roller base. The stator of the electric drive is bolted, by means of a flange, to the engine stand. The rotor of the electric drive sits on a free end of a shaft bearing the traction sheave. The shaft is mounted to the bearing block and the engine stand. The traction sheave is mounted to the engine stand bearing block by means of the shaft. A brake is located within the engine stand and is protected by the casing.

Abstract: An elevator for moving a person between two levels. The system includes at least one carriage in a hoist way extending between two floors. A lever arm lifting system moves the carriage. The lever arm may be an articulated lever arm having a primary arm having a first end rotating on a primary shaft supported on the building structure and a primary sprocket wheel fixed to the primary shaft. A secondary arm has a first end rotating on a secondary shaft carried on a second end of the primary arm. A secondary sprocket wheel is also carried on the secondary shaft and is fixed to the secondary arm. The primary and secondary sprocket wheels are coupled by a chain belt. A second end of the secondary arm is coupled to the carriage. An electric motor is coupled to the primary arm to rotate it around the primary shaft, and to thereby move the carriage between the two levels.

Abstract: There is provided an machineroom-less elevator which can reduce the pit depth in a bottom part of an elevator shaft, mostly perform maintenance work on an upper space of a cage, and reduce a top clearance. A pair of right and left cage-side sheaves are disposed in the upper space of the cage, and the rotational axes of the traction sheave and the cage-side sheaves are extended in the longitudinal direction. A sheave supporting beam to rotatably support cage-side sheaves is disposed in a space between and upper beam of the cage frame and a ceiling of the cage, and disposed below rotary shafts of the cage-side sheaves.

Abstract: There is disclosed a coupling arrangement for coupling a motor to a hoist machine. The coupling arrangement comprises a first drum flange comprising an outer body having a first end and a second end, and an inner wall surface defining a cavity of substantially circular cross section. The cavity has a given diameter along a first length of the body, and of reducing diameter along a second length of the body. The flange is adapted to receive at the first end a tapered bushing of increasing diameter and dimensioned such that, upon insertion of the bushing within the body a given length, the bushing frictionally engages with the inner wall surface of reducing diameter for retention therein. The bushing has a central cavity for receiving the shaft of the motor and capable of securing onto the shaft.

Abstract: An assembly arrangement for a lift construction supports the lift drive at the upper end of both a support column and lift cage and counterweight guide rails, allowing the lift drive load to be transferred to the floor of the lift by each of the supporting members. The support of the lift drive upon the rails may be accomplished through setting screws that allow the load applied to the rails to be adjusted.

Abstract: The present invention provides a carrying apparatus that prevents an elevating motor and the like from projecting from a stacker crane to hinder the stacker crane from interfering with walls of an automatic warehouse. A traveling vehicle 2 of a stacker crane comprises traveling driving means 20, 20 for wheels 9, and elevation driving means 35 for elevating and lowering a platform 4. Both driving means 20, 35 are arranged so that a longitudinal direction of both driving means 20, 35 is almost parallel with a direction in which the traveling vehicle 2 runs. The traveling vehicle 2 comprises a pair of frames 17, 17 spaced at a predetermined distance from each other and a plurality of connecting members that connect both frames 17, 17 together. Both driving means 20, 35 are arranged outside the respective frames 17. Wheels 9, 9 are arranged in the front and rear, respectively, of the traveling vehicle 2. The traveling driving means 20 is connected to each wheel 9.

Abstract: A hoisting machine is interposed between a wall of a hoistway and a car when viewed in a horizontally-projected perspective, and a drive sheave is located opposite the wall of the hoistway. Vibration prevention members are located between the hoisting machine and a mount member attached to fixing members in the hoistway. The vibration prevention members are located at surfaces of upper and lower portions of the mount member facing the hoisting machine, supporting the hoisting machine on the mount member from underside. As a result, vibration control of the hoisting machine can be readily achieved, and the torque acting on the hoisting machine is supported by horizontal rigidity of the vibration prevention member. Consequently, the hoisting machine can be attached to the mount member without failure. Vibration and noise, which would arise during operation of an elevator in a hoistway of a building, is reduced, thereby making the environment of the elevator silent.

Abstract: The invention provides an elevator apparatus comprising a cage 1 disposed inside a path of upward or downward movement vertically movably, a counterweight 2 vertically movable with the upward or downward movement of the cage 1, and a lift drive mechanism for driving the cage 1 upward or downward. The drive mechanism comprises a sheave 42 disposed inside the path, ropes 3 extending along a route around the sheave 42, and a drive device 5 in engagement with the ropes 3. The drive device 5 comprises a belt transmission provided alongside the ropes 3 and revolvingly movable along the rope extension route, a mechanism for pressing a belt surface of the belt transmission into contact with the ropes 3, and a drive motor for driving the belt transmission. The cage can be driven upward or downward without using any traction sheave, while the cage can be reduced in weight.

Abstract: A flexible construction for an elevator gearless traction drive machine having a frame that is easily adaptable to traction sheaves of differing widths and diameters while providing the necessary stability for the drive components without an additional structure. The frame is comprised of a pair of frame members joined by a plurality connecting rods. The connecting rods can be mounted in various positions based on the diameter of the sheave to avoid interference between the drive mount and suspension means. Longer or shorter connecting rods may be used based on the width of the sheave.

Abstract: An elevator installation includes an elevator car located in a hoistway and having a floor, and a rear wall extending upward from the floor. A counterweight is located in the hoistway adjacent to the rear wall of the elevator car. An underslung sheave assembly is located generally below the floor and preferably forms a V-shaped configuration that operatively engages the elevator car. A drive machine is mounted in the upper portion of the hoistway, and a drive sheave operatively engages the drive machine and is located above the counterweight, with the drive sheave having a front edge. A deflector sheave is also mounted in the upper part of the hoistway generally below the drive sheave and has a rear edge that vertically overlaps with the front edge of the drive sheave.

Abstract: An elevator drive belt, while applying a friction force thereto, drives an elevator rope which links an elevator cage and a counterweight together. A rubber hardness of the belt ranges from about 50 to 90 degrees of JIS-A hardness so as to suppress creep slip due to a shearing strain while the elevator is in operation. Even if the elevator cage and the counterweight are reduced in weight and the friction force to be applied to the elevator rope decreases due to the weight reduction, a friction force onto the elevator rope from the elevator drive belt compensates and guarantees a drive force of the elevator.

Abstract: A lifting mechanism includes a plurality of lift pins which may be driven separately and independently upward to engage an alignment surface of the chamber using ambient atmospheric pressure as the chamber is evacuated by a pump. In the illustrated embodiment, each lift pin includes a piston which is exposed to the internal chamber pressure on one side of the piston, and is exposed to the external ambient pressure on the other side of the piston. As the pump evacuates the chamber, the internal chamber pressure decreases, causing each lift pin piston to drive the associated lift pin upward. Once all the lift pins have securely engaged the alignment surface, the lift pins may be clamped to a linking mechanism to permit a motor to actuate the lift pins during processing operations.

Abstract: An elevator car (1) includes, a support frame (8) of a cable-driven elevator system without a machine room, with a compact driving pulley driving machine (7), combine with a brake, integrated in this car (1) and/or its support frame (8). This is to provide an elevator car which can be preassembled outside of an elevator shaft as a unit ready to be installed, with as many functional parts as possible. To this end, the elevator car (1) has the following feathers: the driving machine (7) is equipped with a permanent magnet-excited synchronous motor as the driving source; the operating electronics of the driving machine and the control electronics required for the operation of the entire elevator system from a common, interactive functional unit in the form of an electronic central unit (10); and the electronic central unit (10) is permanently connected to the elevator car and/or its support frame.

Abstract: Embodiments of the present invention provide an apparatus for constraining and supporting the lift pins to prevent or minimize lateral movement of the lift pins that causes substrate hand-off problems and associated degradation in substrate processing characteristics and results. In one embodiment, a lift pin assembly for manipulating a substrate above a support surface of a substrate support comprises a plurality of lift pins movable between an up position and a down position. The lift pins include top ends and bottom ends. The top ends are configured to be lifted above the support surface of the substrate support to contact a bottom surface of the substrate in the up position. The top ends are configured to be positioned at or below the support surface of the substrate support in the down position.

Abstract: A steering angle of an elevator sheave on a shaft is adjusted at installation and subsequently during maintenance by one of several embodiments. In one embodiment, a bolt with a jam nut is adjusted to position the shaft precisely. In another embodiment, a tee bracket is anchored to a hoistway wall, and a jack bolt with shims is used to adjust the vertical placement of the long beams that support the elevator car frame and therefore the shaft.

Abstract: A hoisting machine is interposed between a wall of a hoistway and a car when viewed in a horizontally-projected perspective, and a drive sheave is placed so as to oppose the wall of the hoistway. Vibration prevention members are provided between the hoisting machine and a mount member attached to the fixing members provided in the hoistway. The vibration prevention members are provided at surface of upper and lower portions of the mount member facing the hoisting machine, thereby supporting the hoisting machine onto the mount member from underside. As a result, required vibration control of the hoisting machine can be readily achieved, and the torque acting on the hoisting machine is supported by horizontal rigidity of the vibration prevention member. Consequently, the hoisting machine can be attached to the mount member without a failure. Vibration and noise, which would arise during operation of an elevator in a hoistway of a building, is reduced, thereby making an environment silent.

Abstract: A spiral propeller provides a better secure and a more reliable spiral comprising spiral-lifting wheels, interlocking wheel interlocked with the spiral-lifting wheel, and fixed track supporting the interlocking wheel; the spiral lifting wheel is a rotating wheel with spiral external teeth, which is fixed at the top of the compartment, so as to drive the compartment for upward and downward movements, and interlock with the interlocking wheel; a interlocking rotating wheel of truncated cone shape, which can rotate along the axial direction of the wheel itself; a fixing track is set up between the guide brackets of the elevator, i.e., between the vertical supporting brackets of the guide bracket, in the appropriate locations are set with interlocking wheels.

Abstract: The invention provides an elevator apparatus comprising a cage 1 disposed inside a path of upward or downward movement vertically movably, a counterweight 2 vertically movable with the upward or downward movement of the cage 1, and a lift drive mechanism for driving the cage 1 upward or downward. The drive mechanism comprises a sheave 42 disposed inside the path, ropes 3 extending along a route around the sheave 42, and a drive device 5 in engagement with the ropes 3. The drive device 5 comprises a belt transmission provided alongside the ropes 3 and revolvingly movable along the rope extension route, a mechanism for pressing a belt surface of the belt transmission into contact with the ropes 3, and a drive motor for driving the belt transmission. The cage can be driven upward or downward without using any traction sheave, while the cage can be reduced in weight.

Abstract: A coupling arrangement for coupling a motor to a hoist machine comprises a first drum flange having an inner surface and an outer surface opposite the inner surface for coupling to a hoist machine to reduce vibrations. The drum flange has a central cavity for receiving a motor shaft. A second flange member has a bushing sized to the motor shaft, the second flange member having an inner surface and an outer surface opposite the inner surface for coupling to the motor. A coupling plate is positioned between the first and second flange members, wherein each of the first and second flange members has pins protruding from the respective inner surfaces and wherein the coupling plate has hole portions radially positioned and in alignment with the respective pins to receive the pins for securing thereto. The first flange member further includes hole portions, each for accommodating a connecting rod to securely fasten at the outer surface to a hoist machine.

Abstract: A steering angle of an elevator sheave on a shaft is adjusted at installation and subsequently during maintenance by one of several embodiments. In one embodiment, a bolt with a jam nut is adjusted to position the shaft precisely. In another embodiment, a tee bracket is anchored to a hoistway wall, and a jack bolt with shims is used to adjust the vertical placement of the long beams that support the elevator car frame and therefore the shaft.

Abstract: In relation with this mechanism for stopping an elevator car is, for the monitoring of the speed of the elevator car, an overspeed governor provided which works based on the swing lever principle, whereby the movement of the elevator car will be transferred by means of a governor rope to the overspeed governor. The governor rope extends itself over the entire shaft height and will be returned at the lower shaft end by means of a deflection sheave and stretched by means of counterweight as well as guided at the upper shaft end over a pulley of the overspeed governor. The ends of the governor rope are fastened on a release mechanics arranged on the elevator car and such release mechanics operates in an emergency a safety gear arranged on the elevator car. With the overspeed of the elevator car a rope brake is released upwards.

Abstract: A cable transport apparatus (1) has a first rotational axis (20a, 20c) and a second rotational axis (20b, 20d) that are not in parallel but cross each other with a predetermined angle therebetween. In this way, a V-shaped space is formed between transport belts (40a, 40b). The cable transport apparatus (1) can thus transport a thin cable (100) being in contact with the lower part of the V-shaped space and transport a thick cable (200) being in contact with the upper part thereof. Even if cables to be transported have respective successively increasing diameters, such cables can be transported using the same apparatus. Further, the cables never escape from the cable transport apparatus and can be transported without lowering the transport speed of the cables.

Abstract: An elevator drive unit includes an engine, an engine stand, a bearing block, a traction sheave and an engine frame with a counter-roller base. The stator of the electric drive is bolted, by means of a flange, to the engine stand. The rotor of the electric drive sits on a free end of a shaft bearing the traction sheave. The shaft is mounted to the bearing block and the engine stand. The traction sheave is mounted to the engine stand bearing block by means of the shaft. A brake is located within the engine stand and is protected by the casing.

Abstract: A driving apparatus includes a roller screw that includes a main shaft, a plurality of roller shafts projecting radially outwardly and upwardly at an angle from the radial direction of the main shaft and arranged along a helical line there around, and a plurality of rollers rotatably mounted on the roller shafts. The rollers are tapered to the same angle inwardly toward the main shaft. A rail member, adjacent to and axially oriented with the main shaft, includes a plurality of spaced projections adapted for radial engagement with the tapered rollers. The angle of the tapering is pre-determined to provide a sliding free engagement between the rollers and the projections with the interface there between being oriented to intersect the rotation axis of their respective roller shaft on the rotation axis of the main shaft. The rotation of the main shaft axially moves the roller screw relative to the rail member.

Abstract: A steering angle of an elevator sheave on a shaft is adjusted at installation and subsequently during maintenance by one of several embodiments. In one embodiment, a bolt with a jam nut is adjusted to position the shaft precisely. In another embodiment, a tee bracket is anchored to a hoistway wall, and a jack bolt with shims is used to adjust the vertical placement of the long beams that support the elevator car frame and therefore the shaft.

Abstract: A bracket assembly and method for coupling a motor to a hoist machine comprising an adapter plate for coupling to a motor face and sized to cover the face of the motor and accommodate an existing motor register on the hoist machine, a drum flange member coupled to the hoist machine to reduce vibrations, the drum flange member having a central cavity for receiving the motor shaft, a second flange member having a bushing sized to the motor shaft, and a coupling plate positioned between the first and second flange members, the coupling plate made of a resilient material such as a plastic. Each of the first and second flange members and coupling plates have hole portions radially positioned and in alignment with one another, the drum flange having holes formed therein for accommodating a connecting rod such as a bolt to securely fasten the drum flange to the drum brake of the hoist machine.

Abstract: A lifting apparatus for high-place work which includes a moving supporting leg having a guiding case with opposite open ends and plural walls, guiding grooves attached to said walls, plural elastic strips, a plurality of connecting pieces transversely attached to said elastic strips with the connecting pieces having a proportional number composed of shorter and longer lengths with the longer connecting pieces having fitting grooves on ends thereof, which matingly engage the ends of the shorter connecting pieces. The elastic strips are rotatably wound about respective winding drums disposed on the loading box of a vehicle and driven a driving force originating from the power source of the vehicle such that by unwinding the respective elastic strips an integrated column is formed at a desired elevated high location.

Abstract: A wafer loading device having improved lift-pin structure is provided to solve the particle clogging problems. The wafer loading device includes a pedestal with a plurality of holes for allowing the lift pins to move in vertical direction. The structure of the lift pins includes a neck portion connecting a head portion and a support portion. The neck portion is narrower than the support portion for leaving a gap in the hole. The lift ring is driven by a lift driver and disposed beneath the pedestal for controlling the movement of the lift pins.

Abstract: In a lift truck of a type that, using a brake controller 20, a traveling motor 3 can be braked by an electromagnetic brake 17, the brake controller 20, when it detects the brake operation of a brake operation device, not only actuates the electromagnetic brake 17 but also detects the truck body weight and traveling speed of the lift truck, thereby electrically braking the traveling motor 3 in such a manner that the electric brake force can be increased or decreased in correspondence to whether the thus-detected truck body weight is heavy or light as well as the electric brake force can be increased or decreased in correspondence to whether the thus-detected traveling speed is high or low.

Abstract: A set of lift pins defines a storage location for a substrate in a substrate processing chamber. Each lift pin has an actuating mechanism including a translating mechanism that translates vertical actuation into horizontal motion. The actuating mechanism may include a base, a mechanism adapted to raise and lower the base, and a lever pivotally mounted on the base. The lift pin may be fixedly mounted on the lever. A stop may be adjacent the base and adapted to engage the lever to pivot the lever as the base is lowered.

Abstract: A spiral propeller provides a better secure and a more reliable spiral comprising spiral-lifting wheels, interlocking wheel interlocked with the spiral-lifting wheel, and fixed track supporting the interlocking wheel; the spiral lifting wheel is a rotating wheel with spiral external teeth, which is fixed at the top of the compartment, so as to drive the compartment for upward and downward movements, and interlock with the interlocking wheel; a interlocking rotating wheel of truncated cone shape, which can rotate along the axial direction of the wheel itself; a fixing track is set up between the guide brackets of the elevator, i.e., between the vertical supporting brackets of the guide bracket, in the appropriate locations are set with interlocking wheels.

Abstract: A lift assembly for raising and lowering a load includes a first member, which is adapted for resting on a reference surface, and a second member, which defines a support surface for supporting a load. The lift assembly also includes a drive assembly, which selectively moves the second member relative to the first member from an initial position to a final position to raise or lower the second member relative to the first member. The drive assembly is adapted to move the second member from the initial position at a progressively increasing speed to an intermediate position and after which at a progressively decreasing speed until the second member is moved to the final position.

Abstract: An elevator control system which is installed in a pit of an elevator shaft in an elevator system is protected from flooding in the pit with the provision of an immersion proof structure for the control system. The elevator control system has a control device which can be installed in the pit of the elevator shaft so as to enhance the maintainability thereof since the necessity of a machine room can be eliminated from the elevator system. The immersion proof structure has a bag-like member which covers the control device and which has a top part opened for heat radiation from the elevator control device, the top part being located above the level of the floor of a lowermost one of stories of a building in which the elevator system is installed.

Abstract: A drive unit has a traction sheave mounted on an end of a drive shaft supported by a bearing that is mounted on an extension of a bearing plate that is part of the motor casing. The traction sheave has an extension that serves as a brake drum. Mounted between the traction sheave and the casing, the brake drum together with first brake arms, second brake arms, first electromagnets, second electromagnets, first compression springs and second compression springs form the braking device of the drive unit. On a top of the bearing plate is a first arm linkage and at the bottom of the bearing plate is a second arm linkage. The force of the first compression spring is transmitted to the brake drum by the first brake arm, the required friction force on the brake drum being generated by a first brake lining mounted on a first brake shoe. The friction force on the second half of the brake is generated analogously.

Abstract: An auxiliary safety lift device for an elevator includes a main elevator power system, a spare electric power system, a secondary motor, a secondary speed reducer, and an electromagnetic clutch. The electromagnetic clutch includes an electromagnetic disk, a transmission disk for rotating the main shaft of the main motor of the main elevator power system, a drive disk rotated by the secondary speed reducer, and a spring sheet secured on the drive disk. When the electromagnetic disk is energized by the spare electric system, the spring sheet is attracted by the electromagnetic disk to engage the transmission disk so that the transmission disk is rotated with the drive disk to rotate the main shaft of the main motor.

Abstract: A drive system for an elevator includes a drive machine by means of which the for moving and supporting an elevator car. The primary circuit of a linear motor is permanently fitted to a wall of a building while its secondary circuit is fitted in conjunction with the elevator car and moves with the elevator car. Pressurized air is supplied between the primary and secondary circuits of the reluctance-type linear motor to maintain an air gap between them.

Abstract: A driving apparatus comprising a roller screw member that includes a main shaft, a plurality of roller shafts projecting radially outwardly and upwardly at an angle from the radial direction of the main shaft and arranged at equally spaced intervals along a helical line around the main shaft, and a plurality of rollers rotatably mounted on the roller shafts. The rollers tapered to the angle are mounted on the roller shafts and oriented with the tapering inwardly to the main shaft thereby providing each roller with a bottom region of its tapered surface being perpendicularly oriented with the axis of the main shaft. The driving apparatus also includes a rail member adjacent and axially oriented with the main shaft of the roller screw member.

Abstract: An apparatus for processing substrates includes a chamber, a substrate transfer element for transferring a substrate to and from the chamber, and a substrate support for receiving and holding a substrate within the chamber. The apparatus also includes multiple pins positioned and configured to be received by respective holes in the chamber bottom and moveable between a retracted position and an extended position. A pin actuation system is provided for moving the pins between the retracted position and the extended position. The pin actuation system controls the velocity at which the pins move and varies the speed of the pins by accelerating or decelerating at particular points during the pin cycle. A reduction in the cycle time is facilitated by accelerating the lift pins to relatively high speeds and then slowing the pins down prior to their arrival at locations where the substrate or wafer may be damaged.

Abstract: A rope climbing elevator (10) includes prime movers (40,42) and drive sheaves (32,34) secured to the car (10) and engaging stationary ropes (12-26).

Abstract: An elevator system includes a counterweight-drive assembly (26) having a motor (32) and drive pulley (36) mounted internally to engage a drive belt (42) for climbing or descending with respect thereto, resulting in raising or lowering of an elevator car (12) coupled to said counterweight-drive assembly (26).

Abstract: To eliminate the use of a bellows for sealing a slit of a carrying apparatus. A toothed belt 8 for elevating an elevator 6 is used as a seal of a slit 7, and a total of four idle pulleys (2 each) are provided at the upper and lower parts of a driving pulley, so that a flat face of a toothed belt 8 appears on the slit 7.