Abstract: Fluid-based switches and a method for producing the same are disclosed. In one embodiment, the switch comprises first and second mated substrates defining therebetween at least portions of a number of cavities, a plurality of electrodes exposed within one or more of the cavities, a switching fluid that serves to open and close at least a pair of electrodes in response to forces applied to the switching fluid, a surface tension modifier coating at least a portion of the switching fluid, and an actuating fluid, held within one or more of the cavities, that applies the forces to the switching fluid.

Abstract: An optical relay is disclosed in which a liquid metal droplet is moved within a switching channel formed in relay housing. An optical path passing through the switching channel is blocked or unblocked by motion of the liquid metal droplet that coalesces with one of two additional liquid metal droplets. Motion of the liquid metal droplets is controlled by heaters that control the pressure of an actuation gas in the switching channel. The liquid metal droplets are held in place by surface tension acting on wettable contact pads within the switching channel. The surface tension of the liquid provides a latching mechanism for the relay. The pressure of the actuation gas is increased by direct heating of the gas or by heating a phase-change liquid to cause it to evaporate.

Abstract: An electrical relay that uses a conducting liquid in the switching mechanism. In the relay, a pair of moveable switching contacts is attached to the free end of a switch bar and positioned between a pair of fixed electrical contact pads. The connections to the switching contacts and the fixed contact pads are shielded by ground traces. A surface of each contact supports a droplet of a conducting liquid, such as a liquid metal. A piezoelectric actuator is energized to push or pull the switch bar and move the pair of switching contacts, closing the gap between one of the fixed contact pads and one of the switching contacts, thereby causing conducting liquid droplets to coalesce and form an electrical circuit. At the same time, the gap between the other fixed contact pad and the other switching contact is increased, causing conducting liquid droplets to separate and break an electrical circuit. The piezoelectric actuator is then de-energized and the switching contacts return to their starting positions.

Abstract: Disclosed herein is a switch having a photoimaged channel plate and a switching fluid. The photoimaged channel plate defines at least a portion of a number of cavities, a first cavity of which is defined by a first channel formed in the photoimaged channel plate. The switching fluid is held within one or more of the cavities, and is movable between at least first and second switch states in response to forces that are applied to the switching fluid.

Abstract: A switch has a channel plate that defines at least a portion of a number of cavities. A switching fluid is held within one or more of the cavities, and is movable between at least first and second switch states in response to forces that are applied to the switching fluid. A plurality of planar signal conductors extend from edges of the switch to within the one or more cavities holding the switching fluid, and are in wetted contact with the switching fluid. Corners in paths of the planar signal conductors may be limited to greater than 90°, about 135°, or equal to or greater than 135°. In one embodiment, signal path corners are so limited, but the planar signal conductors do not extend to the edges of the switch. In another embodiment, the one or more cavities holding the switching fluid are at least partly defined by a bent switching fluid channel.

Abstract: An electrical relay that uses a conducting liquid in the switching mechanism. In the relay, a pair of moveable switching contacts is positioned between a pair of fixed electrical contact pads. A surface of each contact supports a droplet of a conducting liquid, such as a liquid metal. An actuator is energized to move the pair of switching contacts, closing the gap between one of the fixed contact pads and one of the switching contacts, thereby causing conducting liquid droplets to coalesce and form an electrical circuit. At the same time, the gap between the other fixed contact pad and the other switching contact is increased, thereby causing conducting liquid droplets to separate and break an electrical circuit. The actuator is then de-energized and the switching contacts return to their starting positions. The volume of liquid metal is chosen so that liquid metal droplets remain coalesced or separated because of surface tension in the liquid.

Abstract: A substrate, a method for producing a substrate, and a switch incorporating a substrate are disclosed. In one embodiment, the substrate has a first layer, a first electrode deposited on the first layer, and a second layer mated to the first layer. The second layer defines a duct leading from the first electrode to a surface of the second layer opposite the first electrode. A liquid electrode fills at least a portion of the duct.

Abstract: A piezoelectric relay is disclosed in which a liquid metal droplet is moved within a switching channel formed in relay housing. A signal path passing through the switching channel is blocked or unblocked by motion of the liquid metal droplet that coalesces with one of two additional liquid metal droplets. Motion of the liquid metal droplets is controlled by piezoelectric pumps that control the flow of actuation fluid between a fluid reservoir and the switching channel. The liquid metal droplets are held in place by surface tension acting on wettable contact pads within the switching channel. The surface tension of the liquid provides a latching mechanism for the relay.

Abstract: Fluid-based switches and methods for producing the same are disclosed. In one embodiment, a method for producing a switch comprises depositing a first alignment pad on a first substrate, depositing a second alignment pad on a second substrate with a perimeter relief surrounding the second alignment pad, depositing solder on at least one of the alignment pads, depositing a switching fluid on the first substrate, mating the first substrate to the second substrate by aligning the alignment pads and heating the solder, the substrates defining there between a cavity holding the switching fluid, the cavity being sized to allow movement of the switching fluid between first and second states to form a liquid switch, forming a perimeter ring around the liquid switch on at least one of the two substrates, depositing wettable material in the perimeter ring, depositing solder paste containing uncured epoxy on the wettable material in the perimeter ring, and reflowing the solder paste.

Abstract: An electrical relay that uses a conducting liquid in the switching mechanism. In the relay, a pair of moveable switching contacts is attached to the free end of a piezoelectric actuator and positioned between a pair of fixed electrical contact pads. The electrical connections to the switching contacts and the fixed electrical contact pads are ground shielded. A surface of each contact supports a droplet of a conducting liquid, such as a liquid metal. The piezoelectric actuator is energized to deform in a bending mode and move the pair of switching contacts, closing the gap between one of the fixed contact pads and one of the switching contacts, thereby causing conducting liquid droplets to coalesce and form an electrical circuit. At the same time, the gap between the other fixed contact pad and the other switching contact is increased, causing conducting liquid droplets to separate and break an electrical circuit.

Abstract: An electrical relay that uses a conducting liquid in the switching mechanism. In the relay, a pair of moveable electrical contacts is attached to the free end of a piezoelectric actuator and positioned between pair of fixed electrical contacts. The contacts each support a droplet of a conducting liquid, such as a liquid metal. The piezoelectric actuator is energized to deform in a bending mode and move the pair of moveable contacts, closing the gap between one of the fixed contacts and one of the moveable contacts, thereby causing conducting liquid droplets to coalesce and form an electrical circuit. At the same time, the gap between the other fixed contact and the other moveable contact is increased, thereby causing conducting liquid droplets to separate and break an electrical circuit. The piezoelectric actuator is then de-energized and the moveable electrical contacts return to their starting positions.

Abstract: A piezoelectric optical relay is disclosed in which a solid slug moves within a switching channel formed in relay housing. An optical path passing through the switching channel is blocked or unblocked by motion of the solid slug. Motion of the solid slug is controlled by at least two piezoelectric actuators within the switching channel. Motion of the solid slug is resisted by a liquid, such as a liquid metal, that wets between the solid slug and at least one fixed contact pad in the switching channel. The surface tension of the liquid provides a latching mechanism for the relay.

Abstract: A piezoelectric relay is disclosed in which a solid slug moves within a switching channel formed in relay housing. An electrical circuit passing between fixed contact pads in the switching channel is completed or broken by motion of the solid slug. Motion of the solid slug is controlled by at least two piezoelectric actuators within the switching channel. Motion of the solid slug is resisted by an electrically conductive liquid, such as a liquid metal, that wets between the solid slug and the contact pad in the switching channel. The surface tension of the, liquid provides a latching mechanism for the relay.

Abstract: An electrical relay using conducting liquid in the switching mechanism. The relay is amenable to manufacture by micro-machining techniques. In the relay, two electrical contacts are held a small distance apart. The facing surfaces of the contacts each support a droplet of a conducting liquid, such as a liquid metal. An actuator is energized to reduce the gap between the electrical contacts, causing the two liquid metal droplets to coalesce and form an electrical circuit. The actuator is then de-energized and the electrical contacts return to their starting positions. The liquid metal droplets remain coalesced because of surface tension. The electrical circuit is broken by energizing an actuator to increase the gap between the electrical contacts and break the surface tension bond between the liquid metal droplets. The droplets remain separated when the piezoelectric actuator is de-energized because there is insufficient liquid metal to bridge the gap between the contacts.

Abstract: An electrical relay that uses a conducting liquid in the switching mechanism. In the relay, a pair of switching contacts is attached to the free end of a switch bar and positioned between a pair of fixed electrical contact pads. A surface of each contact supports a droplet of a conducting liquid, such as a liquid metal. A piezoelectric actuator is energized to push or pull the switch bar and move the pair of switching contacts, closing the gap between one of the fixed contact pads and one of the switching contacts, thereby causing conducting liquid droplets to coalesce and form an electrical circuit. At the same time, the gap between the other fixed contact pad and the other switching contact is increased, causing conducting liquid droplets to separate and break an electrical circuit. The piezoelectric actuator is then de-energized and the switching contacts return to their starting positions.

Abstract: A method and structure for an electrical switch. A gas-filled chamber is housed within a solid material. Contacts within the gas-filled chamber are coupled to the solid material, while a plurality of piezoelectric elements within the gas-filled chamber are also coupled to the solid material. A slug within the gas-filled chamber is coupled to one or more of the plurality of contacts and further coupled to one or more of the plurality of piezoelectric elements. A liquid metal within the gas-filled chamber is coupled to the slug, and coupled to the plurality of contacts. One or more of the piezoelectric elements are actuated, with the actuation of the one or more piezoelectric elements causing the slug coupled to the one or more piezoelectric elements to move from a first number of contacts to a second number of contacts wherein the first number of contacts and the second number of contacts are wetted by the liquid metal.

Abstract: Fluid-based switches and a method for producing the same are disclosed. In one embodiment, a switch is provided with first and second mated substrates that define therebetween at least portions of a number of cavities. A plurality of wettable pads is exposed within one or more of the cavities. A switching fluid is held within one or more of the cavities, and is wetted to the wettable pads. The switching fluid serves to open and block light paths through one or more of the cavities, in response to forces that are applied to the switching fluid. Forces are applied to the switching fluid by an actuating fluid that is held within one or more of the cavities. At least a portion of the switching fluid is coated with a surface tension modifier.

Abstract: A device and manufacturing method are provided comprising first and second substrates comprising a main channel provided in at least one of the substrates and a first connecting channel provided in at least one of the substrates and in fluid communication with the main channel. The main channel comprising spaced apart electrodes and filling the main channel at least partially with liquid metal. The method further comprising a first heater substrate comprising a first suspended heater element in fluid communication with the first connecting channel with the first suspended heater element operable to cause a fluid non-conductor to separate the liquid metal and selectively interconnect the electrodes and surface joining the first, second, and first heater substrates.

Abstract: A personal care monitoring system is disclosed. In accordance with one embodiment, the monitoring system may include a wetness sensor configured to detect a wetness event occurring within an associated diaper, and a human life sensor configured to detect presence of human life relative to the associated diaper. A monitoring unit having a system controller in communication with the wetness and human life sensors may be utilized in such a manner that the system controller monitors the wetness and human life sensors and generates data associated with detected wetness events and presence of human life relative to the associated diaper.

Abstract: A piezoelectric relay is disclosed in which a liquid metal droplet is moved within a switching channel formed in a relay housing. A signal path passing through the switching channel is blocked or unblocked by motion of the liquid metal droplet that coalesces with one of two additional liquid metal droplets. Motion of the liquid metal droplets is controlled by one or more piezoelectric pumps that control the flow of actuation fluid between a fluid reservoir and the switching channel. The liquid metal droplets are held in place by surface tension acting on wettable contact pads within the switching channel. The surface tension of the liquid provides a latching mechanism for the relay.

Abstract: Disclosed herein is a channel plate for a fluid-based switch. The channel plate is produced by 1) forming a plurality of channel plate layers in ceramic green sheet, 2) forming at least one channel plate feature in at least one of the channel plate layers, and 3) laminating the channel plate layers to form the channel plate. Switches using ceramic channel plates, and a method for making a switch with a ceramic channel plate, are also disclosed.

Abstract: A switch having first and second mated substrates that define therebetween first and second intersecting channels of a bent switching fluid cavity. A switching fluid is held within the bent switching fluid cavity and is movable between first and second switch states in response to forces that are applied to the switching fluid. More of the switching fluid is forced into the first of the intersecting channels in the first switch state, and more of the switching fluid is forced into the second of the intersecting channels in the second switch state.

Abstract: A suspended thin-film resistor and methods for producing the same are disclosed. In one embodiment, a device is produced by depositing a first and second contact on a substrate, depositing a sacrificial material on the substrate at a location between the first and second contacts, depositing a thin-film resistor over the first and second contacts and the sacrificial material, and thermally decomposing the sacrificial material.

Abstract: A suspended thin-film resistor and methods for producing the same are disclosed. In one embodiment, a device is produced by depositing a first and second contact on a substrate, depositing a sacrificial material on the substrate at a location between the first and second contacts, depositing a thin-film resistor over the first and second contacts and the sacrificial material, and thermally decomposing the sacrificial material.

Abstract: An electrical relay that uses a conducting liquid in the switching mechanism. In the relay, a pair of fixed electrical contacts is held a small distance from a pair of moveable electrical contacts. The facing surfaces of the contacts each support a droplet of a conducting liquid, such as a liquid metal. A piezoelectric or magnetorestrictive actuator is energized to move the pair of moveable contacts, closing the gap between one of the fixed contacts and one of the moveable contacts, thereby causing conducting liquid droplets to coalesce and form an electrical circuit. At the same time, the gap between the other fixed contact and the other moveable contact is increased, thereby causing conducting liquid droplets to separate and break an electrical circuit. The actuator is then de-energized and the moveable electrical contacts return to their starting positions. The volume of liquid metal is chosen so that liquid metal droplets remain coalesced or separated because of surface tension in the liquid.

Abstract: A device and manufacturing method are provided comprising first and second substrates comprising a main channel provided in at least one of the substrates and a first connecting channel provided in at least one of the substrates and in fluid communication with the main channel. The main channel comprising spaced apart electrodes and filling the main channel at least partially with liquid metal. The method further comprising a first heater substrate comprising a first suspended heater element in fluid communication with the first connecting channel with the first suspended heater element operable to cause a fluid non-conductor to separate the liquid metal and selectively interconnect the electrodes and surface joining the first, second, and first heater substrates.

Abstract: A switch device and method for manufacturing the switch device in which substrates are provided collectively having defined therein a liquid metal switch and a sub-channel connected to the liquid metal switch. A cavity filled with sacrificial material is formed in a first one of the substrates. A heater element is formed at least in part over the sacrificial material and conductive vias are formed extending through one of the substrates to the heater element. The sacrificial material is removed and the substrates are joined with an adhesive seal.

Abstract: The switch device includes first and second cavities, a passage extending between the cavities, a conductive liquid located in the passage and movable therein, a conductive path that includes the conductive liquid, an actuating liquid enclosed in each of the first and second cavities and covering the inner surfaces thereof and an actuating gas enclosed in each of the first and second cavities and existing as a bubble therein. At least one of the cavities includes a constriction element shaped to constrain the expansion of the actuating gas bubble in the cavity. This limits expulsion of the actuating liquid into the passage and movement of the conductive liquid along the passage.

Abstract: A method and structure for an optical switch. According to the structure of the present invention, a liquid-filled chamber is housed within a solid material. A plurality of seal belts within the liquid-filled chamber are coupled to the solid material, while a plurality of piezoelectric elements are coupled to a plurality of membranes. The plurality of membranes are coupled to the liquid-filled chamber, and a plurality of optical waveguides are coupled to the liquid-filled chamber. The plurality of seal belts are coupled to a plurality of liquid metal globules, wherein one or more of the plurality of liquid metal globules are coupled to a slug. According to the method, one or more piezoelectric elements are actuated, causing one or more corresponding membrane elements to be deflected.

Abstract: A method for depositing material on a channel plate such that the material is registered to one or more channels formed in the channel plate includes filling at least one of the channels with a resist that is not wetted by the material; depositing the material on at least a region of the channel plate that includes at least part of the resist; and then removing the resist. The method may be used, in one embodiment, to apply an adhesive or gasket material that is used in assembling a switch.

Abstract: A micro-relay device is provided including a fluid non-conductor. A first substrate and a second substrate are bonded together. A channel is defined in at least one of the substrates, and has a liquid metal in the channel. Electrodes are spaced along the channel and selectively interconnectable by the liquid metal. An open via is defined in one of the substrates and contains the fluid non-conductor. A heater substrate includes a suspended heater element in fluid communication with the open via. The suspended heater element is operable to cause the fluid non-conductor to separate the liquid metal.

Abstract: A switch having first and second mated substrates that define therebetween first and second intersecting channels of a bent switching fluid cavity. A switching fluid is held within the bent switching fluid cavity and is movable between first and second switch states in response to forces that are applied to the switching fluid. More of the switching fluid is forced into the first of the intersecting channels in the first switch state, and more of the switching fluid is forced into the second of the intersecting channels in the second switch state.

Abstract: A switch has a channel plate that defines at least a portion of a number of cavities. A switching fluid is held within one or more of the cavities, and is movable between at least first and second switch states in response to forces that are applied to the switching fluid. A plurality of planar signal conductors extend from edges of the switch to within the one or more cavities holding the switching fluid, and are in wetted contact with the switching fluid. Corners in paths of the planar signal conductors may be limited to greater than 90°, about 135°, or equal to or greater than 135°. In one embodiment, signal path corners are so limited, but the planar signal conductors do not extend to the edges of the switch. In another embodiment, the one or more cavities holding the switching fluid are at least partly defined by a bent switching fluid channel.

Abstract: An electrical relay that uses a conducting liquid in the switching mechanism. In the relay, a pair of fixed electrical contacts is held a small distance from a pair of moveable electrical contacts. The facing surfaces of the contacts each support a droplet of a conducting liquid, such as a liquid metal. A piezoelectric or magnetorestrictive actuator is energized to move the pair of moveable contacts, closing the gap between one of the fixed contacts and one of the moveable contacts, thereby causing conducting liquid droplets to coalesce and form an electrical circuit. At the same time, the gap between the other fixed contact and the other moveable contact is increased, thereby causing conducting liquid droplets to separate and break an electrical circuit. The actuator is then de-energized and the moveable electrical contacts return to their starting positions. The volume of liquid metal is chosen so that liquid metal droplets remain coalesced or separated because of surface tension in the liquid.

Abstract: A piezoelectric relay is disclosed in which a liquid metal droplet is moved within a switching channel formed in a relay housing. A signal path passing through the switching channel is blocked or unblocked by motion of the liquid metal droplet that coalesces with one of two additional liquid metal droplets. Motion of the liquid metal droplets is controlled by one or more piezoelectric pumps that control the flow of actuation fluid between a fluid reservoir and the switching channel. The liquid metal droplets are held in place by surface tension acting on wettable contact pads within the switching channel. The surface tension of the liquid provides a latching mechanism for the relay.

Abstract: Fluid-based switches and a method for producing the same are disclosed. In one embodiment, the switch comprises first and second mated substrates defining therebetween at least portions of a number of cavities, a plurality of electrodes exposed within one or more of the cavities, a switching fluid that serves to open and close at least a pair of electrodes in response to forces applied to the switching fluid, a surface tension modifier coating at least a portion of the switching fluid, and an actuating fluid, held within one or more of the cavities, that applies the forces to the switching fluid.

Abstract: A substrate, a method for producing a substrate, and a switch incorporating a substrate are disclosed. In one embodiment, the substrate has a first layer, a first electrode deposited on the first layer, and a second layer mated to the first layer. The second layer defines a duct leading from the first electrode to a surface of the second layer opposite the first electrode. A liquid electrode fills at least a portion of the duct.

Abstract: Fluid-based switches are disclosed. In one embodiment, the switch comprises first and second mated substrates defining therebetween at least portions of a number of cavities, the first substrate defining a plurality of indentations defined within a first one of the cavities, a plurality of electrical contacts, each electrical contact deposited within one of the indentations, a switching fluid, held within the first cavity, that serves to open and close at least a pair of the plurality of electrical contacts in response to forces that are applied to the switching fluid, and an actuating fluid, held within one or more of the cavities, that applies the forces to the switching fluid.

Abstract: A switch and method for producing the same. In one embodiment, the switch is produced by depositing a liquid switching element on a substrate, the volume of the liquid switching element being more than needed to fulfill a switching function. A channel plate is moved toward the substrate, the channel plate having a main channel with at least one reservoir fluidically connected thereto, an excess portion of the liquid switching element flowing into the least one reservoir. The channel plate is closed against the substrate.

Abstract: Fluid-based switch and methods for reducing oxides and corrosion products within the switch are disclosed. In one method, oxides are reduced by depositing a gettering agent within the cavity, depositing a switching fluid on a first substrate, and mating the first substrate to a second substrate, the first substrate and the second substrate defining therebetween a cavity holding the switching fluid, the cavity being sized to allow movement of the switching fluid between first and second states.

Abstract: Fluid-based switch and methods for reducing oxides and corrosion products on switching fluid are disclosed. In one method, oxides are reduced by depositing a switching fluid on a first substrate, coating the switching fluid with a corrosion inhibitor, and mating the first substrate to a second substrate, the first substrate and the second substrate defining therebetween a cavity holding the switching fluid, the cavity being sized to allow movement of the switching fluid between first and second states.

Abstract: Liquid metal micro-switches. Liquid metal micro-switches and techniques for fabricating them in integrally shielded microcircuits are disclosed. The liquid metal micro-switches can be integrated directly into the construction of shielded thick film microwave modules. This integration is useful in applications requiring high frequency switching with high levels of electrical isolation.

Abstract: A micro-relay device is provided including a fluid non-conductor. A first substrate and a second substrate are bonded together. A channel is defined in at least one of the substrates, and has a liquid metal in the channel. Electrodes are spaced along the channel and selectively interconnectable by the liquid metal. An open via is defined in one of the substrates and contains the fluid non-conductor. A heater substrate includes a suspended heater element in fluid communication with the open via. The suspended heater element is operable to cause the fluid non-conductor to separate the liquid metal.

Abstract: An efficient way to fabricate the channels and cavities in a LIMMS device is to form them as matching upper and lower portions each created as a patterned layer of thick film dielectric material deposited on a respective upper or lower substrate. The two portions are adhered together by a patterned layer of adhesive, and hermetically sealed around an outer perimeter. The heater resistors are mounted atop the lower layer, thus suspending them away from that substrate and exposing more of their surface area. Vias can be used to route the conductors for the heaters and the switched signal contacts through the lower substrate to cooperate with surface mount techniques using solder balls on an array of contact pads. These vias can be made hermetic by their placement within the patterned layers of dielectric material and by covering their exposed ends with pads of hermetic metal.

Abstract: In a method of producing a plurality of hermetically sealed electronic components, first and second substrates are wafer bonded to enclose a plurality of electronic components therebetween. The first substrate is then cut to expose first seals on the first substrate and second seals on the second substrate. The first and second seals define perimeters around the plurality of electronic components. Solder is dispensed into the cuts in the first substrate, and the solder is then reflowed to join corresponding pairs of first and second seals.

Abstract: A fluid-based switch and method for producing the same are disclosed. In one embodiment, the switch is produced by depositing switching fluid on a first substrate; depositing a reducing material so that the reducing material contacts at least a portion of the switching fluid, the reducing material to react with oxides on the switching fluid, and mating a first substrate to a second substrate, the first substrate and the second substrate defining therebetween a cavity holding the switching fluid, the cavity being sized to allow movement of the switching fluid between first and second states.

Abstract: A switch and production thereof. The switch may be produced by (1) depositing a liquid switching element on a substrate, (2) positioning a channel plate adjacent the substrate, (3) moving the channel plate toward the substrate, the liquid switching element wetting to the channel plate, and a portion of the liquid switching element isolated into at least one waste chamber in the channel plate; and (4) closing the channel plate against the substrate.

Abstract: A channel plate is mated to a substrate to define at least a portion of a number of cavities. The channel plate is provided with a switching fluid channel, and a pair of ground channels adjacent the switching fluid channel. A switching fluid is held within a cavity defined by the switching fluid channel, and is movable between at least first and second switch states in response to forces that are applied to the switching fluid. In one embodiment, the ground channels are replaced with ground traces. The ground traces may be formed on or in the substrate or channel plate. Switching circuits incorporating one or more these switches are also disclosed.

Abstract: Disclosed herein is a switch having a photoimaged channel plate and a switching fluid. The photoimaged channel plate defines at least a portion of a number of cavities, a first cavity of which is defined by a first channel formed in the photoimaged channel plate. The switching fluid is held within one or more of the cavities, and is movable between at least first and second switch states in response to forces that are applied to the switching fluid.

Abstract: A method and structure for an electrical switch. According to the structure of the present invention, a liquid-filled chamber is housed within a solid material. A plurality of switch contacts within the liquid-filled chamber are coupled to the solid material, while a plurality of piezoelectric elements are coupled to a plurality of membranes. The plurality of membranes are coupled to the liquid-filled chamber. The plurality of switch contacts are coupled to a plurality of liquid metal globules, and a slug is coupled to two of the plurality of switch contacts and further coupled to the plurality of liquid metal globules. According to the method, a piezoelectric element is actuated, causing a membrane element to be deflected.